[labnetwork] Please recommend a RF sputter system

Jingqi Li jingqi.li at kaust.edu.sa
Tue Jun 13 09:30:18 EDT 2017


Dear All,
We want to order a RF sputter system with at least 4 target sources. Could you please recommend one company to me according to your experience? The system should have less cross contamination and reliable mechanical operation (for example, sample transportation between chamber and load lock, our current system has a lot of problem with this).

Thanks & Regards
Jingqi Li
Nanofabrication Core Lab
King Abdullah University of Science and Technology
Thuwal 23955-6900
Saudi Arabia

Tel: +966 012 808 4589

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