From rc at danchip.dtu.dk Wed Mar 1 06:18:50 2017 From: rc at danchip.dtu.dk (Roy Cork) Date: Wed, 1 Mar 2017 11:18:50 +0000 Subject: [labnetwork] SEKI Diamond MPCVD Info required Message-ID: <7809901EBDB48748B6E15D4C18DD87950C7CFDC7@ait-pex02mbx05.win.dtu.dk> Hi Everyone (greetings from DTU Danchip in Denmark), We have recently taken delivery of a used SEKI microwave plasma enhanced Chemical vapor deposition tool (Model AX5250S). Unfortunately (as can happen), the delivery was missing all the original SEKI manuals. Is there anyone in the group who would be able to help us? The tool is from 2006/7 and we believe was originally installed at SRI international on the east coast of the US. Any information would be appreciated. But we are especially interested in an Install guide, user manual and if possible a contact at SEKI (we would like a service engineer come and visit us for 5 days to do the run-in). We have tried contacting them direct but have yet to receive a reply. Alternatively if anyone has a tool installed already installed and running we would really appreciate some help. Best regards, Roy Cork Chief Equipment Eng. DTU Danchip www.danchip.dtu.dk -------------- next part -------------- An HTML attachment was scrubbed... URL: From ccheney at infinityhps.com Wed Mar 1 09:48:20 2017 From: ccheney at infinityhps.com (Craig Cheney) Date: Wed, 1 Mar 2017 08:48:20 -0600 Subject: [labnetwork] Old RGA in need of software Message-ID: <005101d2929a$df6bab80$9e430280$@infinityhps.com> Hello Everyone, We have obtained an old pfeiffer prisma QMS 200 model PTM28507. The computer that came with it has a failed hard drive and we cannot resurrect it. Does anyone have software for this? Or can you recommend a solution? Thank you, Craig Cheney Description: cid:image001.jpg at 01C7E19F.47FFBAE0 Desk: (608)834-4200 Fax: (608)834-4299 Cell: (608)438-8714 This e-mail transmission and any attachments to it are intended solely for the use of the individual or entity to whom it is addressed and may contain confidential and privileged information. If you are not the intended recipient, your use, forwarding, printing, storing, disseminating, distribution, or copying of this communication is prohibited. If you received this communication in error, please notify the sender immediately by replying to this message and delete it from your computer. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 5517 bytes Desc: not available URL: From James.Vlahakis at tufts.edu Fri Mar 3 13:18:06 2017 From: James.Vlahakis at tufts.edu (Vlahakis, James) Date: Fri, 3 Mar 2017 18:18:06 +0000 Subject: [labnetwork] vanadium oxide sputtering Message-ID: <676C9381B5E6AC4FAE9CD9CFCC40DF1EB72506AB@tabvmexdag1mb03.tufts.ad.tufts.edu> Hi everyone, two of our users are interested in sputtering a material that we are not familiar with, any info or insight you could provide would be very much appreciated Vanadium oxide (VO2) - for deposition in our "clean" sputter tool. Base pressures in the low 10-7 or high 10-8 torr range and a very restricted approved materials list. Currently the instrument is used to reactive sputter high quality AlN films with good piezoelectric properties. We are concerned that flaking oxide may contaminate the reactive process. Also, we have been advised that vanadium oxide targets will be a mixture of oxides (VO, VO2, VO3, V2O5). Despite starting with a pure powder the temperature and pressure of the fabrication process will produce other oxides) Thanks for your help jim -------------- next part -------------- An HTML attachment was scrubbed... URL: From sandrine at umich.edu Fri Mar 3 14:28:51 2017 From: sandrine at umich.edu (Sandrine Martin) Date: Fri, 3 Mar 2017 14:28:51 -0500 Subject: [labnetwork] Gas cabinet for F2 premix for excimer lasers? Message-ID: Hello, There are a few individual labs here at the University of Michigan that have excimer lasers and use F2 premix gases with 0.1 or 0.2% F2. So far, these gases have been installed in gas cabinets. We are now involved in a new installation and are getting some push back about the need for a gas cabinet. The argument is made using the Compressed Gas Assoc Pamphlet P-20 Standard for Classification of Toxic Gas Mixtures (2009) that apparently states that, if the LC50 value is over 5,000ppm, the gas mixture is not considered toxic. Pure F2 is listed with a LC50 (rat, 1h) at 185ppm. At 0.2% F2, the calculated LC50 is then 92,500ppm, well above the 5,000ppm threshold and the premix is no longer considered a toxic gas. (it also has an NFPA rating of "1" in health on the MSDS) Since the mixture is not toxic and the F2 concentration is <1%, EH&S concludes that a gas cabinet is not required. However, considering that the F2 PEL is 0.1ppm and IDLH 25ppm, it still seems that a gas cabinet would be the safest option and the best solution. Has anybody gone through similar discussions? If you have a lab with a fluorine premix gas, is it in a gas cabinet? If not, what type of space is it in, and what kind of ventilation and gas detection are in place? Thanks Sandrine -- Sandrine Martin, Ph.D. University of Michigan LNF Managing Director 1246D EECS, 1301 Beal Ave Ann Arbor, MI 48109 Cell 734-277-2365 Fax 734-647-1781 www.LNF.umich.edu @LurieNanofab -------------- next part -------------- An HTML attachment was scrubbed... URL: From nclay at upenn.edu Fri Mar 3 19:51:30 2017 From: nclay at upenn.edu (Noah Clay) Date: Fri, 3 Mar 2017 19:51:30 -0500 Subject: [labnetwork] Gas cabinet for F2 premix for excimer lasers? In-Reply-To: References: Message-ID: Hi Sandrine, We have a 193nm excimer laser micromachining system in our cleanroom and went through a similar exercise. We concluded that even though OSHA or NIOSH limits would indicate that a gas cabinet is unnecessary, that housing the ArF cylinders in an exhausted enclosure is a safer/better option. Since the laser requires frequent purges/refills, placing the cylinder near the cabinet is a must - therefore, it needed to be placed in an adjacent service chase. And so, we reasoned that: 1. Housing F2 gases directly in the recirc path (no gas cabinet) was not an option. 2. Shutting down the gas with with a TGMS interlock was required since 3. We perceived inherent difficulty in diluting a full cylinder release, as might be the case with a standard gas panel that could not be shut down by our TGMS. 4. Our researchers would be wielding pitchforks if they were exposed to high levels of F2, even if we explained it was permissible. I hope this helps. Best, Noah Noah Clay Director, Quattrone Nanofabrication Facility University of Pennsylvania > On Mar 3, 2017, at 14:28, Sandrine Martin wrote: > > Hello, > > There are a few individual labs here at the University of Michigan that have excimer lasers and use F2 premix gases with 0.1 or 0.2% F2. So far, these gases have been installed in gas cabinets. We are now involved in a new installation and are getting some push back about the need for a gas cabinet. > > The argument is made using the Compressed Gas Assoc Pamphlet P-20 Standard for Classification of Toxic Gas Mixtures (2009) that apparently states that, if the LC50 value is over 5,000ppm, the gas mixture is not considered toxic. > Pure F2 is listed with a LC50 (rat, 1h) at 185ppm. > At 0.2% F2, the calculated LC50 is then 92,500ppm, well above the 5,000ppm threshold and the premix is no longer considered a toxic gas. (it also has an NFPA rating of "1" in health on the MSDS) > > Since the mixture is not toxic and the F2 concentration is <1%, EH&S concludes that a gas cabinet is not required. > > However, considering that the F2 PEL is 0.1ppm and IDLH 25ppm, it still seems that a gas cabinet would be the safest option and the best solution. > > Has anybody gone through similar discussions? > If you have a lab with a fluorine premix gas, is it in a gas cabinet? If not, what type of space is it in, and what kind of ventilation and gas detection are in place? > > Thanks > Sandrine > > > -- > Sandrine Martin, Ph.D. > University of Michigan > LNF Managing Director > 1246D EECS, 1301 Beal Ave > Ann Arbor, MI 48109 > Cell 734-277-2365 > Fax 734-647-1781 > www.LNF.umich.edu > @LurieNanofab > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From dgrimard at mit.edu Sat Mar 4 11:11:47 2017 From: dgrimard at mit.edu (Dennis Grimard) Date: Sat, 4 Mar 2017 16:11:47 +0000 Subject: [labnetwork] Gas cabinet for F2 premix for excimer lasers? In-Reply-To: References: , Message-ID: <0555CE98-DBD9-4EA1-AB5F-65CE40F6DF3E@mit.edu> I could not agree more with Noah. My take on this: 1. Let?s say you have the bottle in a smallish room ? say 10x10x10 or 1,000 CF. 2. Let?s say you leak 1 CF ? that is a dilution of 1,000X 3. 0.2 % F2 in whatever is 2,000 PPM ? 4. Assuming perfect and uniform dissipation throughout the room ? the room concentration would be 2 ppm. 5. That is 20X the PEL which is a legally enforceable exposure limit ? independent of a non-binding CGA recommendation. 6. At 2 ppm you would be right at the odor threshold ? so you would have a poor warning property to the leak Of course my logic could be wrong, my math could be wrong and the amount of the leak could be less ? or more ? you should verify for yourself. Finally, if you did have a leak and the people were not able to detect the leak until they began to experience the effects of F2 exposure ? what do you tell them? The CGA P-20 pamphlet said it was ok? As Noah says ... pitchforks might be the least of your worries. Put it in the gas cabinet ?. Or a vented enclosure with detection. At the very, very, least, place a vent in the room with a detection point in the vent to actively sweep up (constantly sample) a possible leak that could occur. I would smoke the room to make sure that any point in the room eventually ends up in that vent at some point in time. D Dennis S Grimard, Ph.D. Associate Director of Operations MIT.nano School of Engineering Massachusetts Institute of Technology 60 Vassar Street, Bldg 39-559 Cambridge, MA 02149 C: (734) 368-7172 EM: dgrimard at mit.edu On Mar 4, 2017, at 9:04 AM, Noah Clay > wrote: Hi Sandrine, We have a 193nm excimer laser micromachining system in our cleanroom and went through a similar exercise. We concluded that even though OSHA or NIOSH limits would indicate that a gas cabinet is unnecessary, that housing the ArF cylinders in an exhausted enclosure is a safer/better option. Since the laser requires frequent purges/refills, placing the cylinder near the cabinet is a must - therefore, it needed to be placed in an adjacent service chase. And so, we reasoned that: 1. Housing F2 gases directly in the recirc path (no gas cabinet) was not an option. 2. Shutting down the gas with with a TGMS interlock was required since 3. We perceived inherent difficulty in diluting a full cylinder release, as might be the case with a standard gas panel that could not be shut down by our TGMS. 4. Our researchers would be wielding pitchforks if they were exposed to high levels of F2, even if we explained it was permissible. I hope this helps. Best, Noah Noah Clay Director, Quattrone Nanofabrication Facility University of Pennsylvania On Mar 3, 2017, at 14:28, Sandrine Martin > wrote: Hello, There are a few individual labs here at the University of Michigan that have excimer lasers and use F2 premix gases with 0.1 or 0.2% F2. So far, these gases have been installed in gas cabinets. We are now involved in a new installation and are getting some push back about the need for a gas cabinet. The argument is made using the Compressed Gas Assoc Pamphlet P-20 Standard for Classification of Toxic Gas Mixtures (2009) that apparently states that, if the LC50 value is over 5,000ppm, the gas mixture is not considered toxic. Pure F2 is listed with a LC50 (rat, 1h) at 185ppm. At 0.2% F2, the calculated LC50 is then 92,500ppm, well above the 5,000ppm threshold and the premix is no longer considered a toxic gas. (it also has an NFPA rating of "1" in health on the MSDS) Since the mixture is not toxic and the F2 concentration is <1%, EH&S concludes that a gas cabinet is not required. However, considering that the F2 PEL is 0.1ppm and IDLH 25ppm, it still seems that a gas cabinet would be the safest option and the best solution. Has anybody gone through similar discussions? If you have a lab with a fluorine premix gas, is it in a gas cabinet? If not, what type of space is it in, and what kind of ventilation and gas detection are in place? Thanks Sandrine -- Sandrine Martin, Ph.D. University of Michigan LNF Managing Director 1246D EECS, 1301 Beal Ave Ann Arbor, MI 48109 Cell 734-277-2365 Fax 734-647-1781 www.LNF.umich.edu @LurieNanofab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From anthony.b.hmelo at Vanderbilt.Edu Sat Mar 4 16:09:46 2017 From: anthony.b.hmelo at Vanderbilt.Edu (Hmelo, Anthony B) Date: Sat, 4 Mar 2017 21:09:46 +0000 Subject: [labnetwork] Gas cabinet for F2 premix for excimer lasers? In-Reply-To: References: , Message-ID: I agree with Noah. Any potential exposure to HF is bad news. Sent from my iPhone On Mar 4, 2017, at 8:03 AM, Noah Clay > wrote: Hi Sandrine, We have a 193nm excimer laser micromachining system in our cleanroom and went through a similar exercise. We concluded that even though OSHA or NIOSH limits would indicate that a gas cabinet is unnecessary, that housing the ArF cylinders in an exhausted enclosure is a safer/better option. Since the laser requires frequent purges/refills, placing the cylinder near the cabinet is a must - therefore, it needed to be placed in an adjacent service chase. And so, we reasoned that: 1. Housing F2 gases directly in the recirc path (no gas cabinet) was not an option. 2. Shutting down the gas with with a TGMS interlock was required since 3. We perceived inherent difficulty in diluting a full cylinder release, as might be the case with a standard gas panel that could not be shut down by our TGMS. 4. Our researchers would be wielding pitchforks if they were exposed to high levels of F2, even if we explained it was permissible. I hope this helps. Best, Noah Noah Clay Director, Quattrone Nanofabrication Facility University of Pennsylvania On Mar 3, 2017, at 14:28, Sandrine Martin > wrote: Hello, There are a few individual labs here at the University of Michigan that have excimer lasers and use F2 premix gases with 0.1 or 0.2% F2. So far, these gases have been installed in gas cabinets. We are now involved in a new installation and are getting some push back about the need for a gas cabinet. The argument is made using the Compressed Gas Assoc Pamphlet P-20 Standard for Classification of Toxic Gas Mixtures (2009) that apparently states that, if the LC50 value is over 5,000ppm, the gas mixture is not considered toxic. Pure F2 is listed with a LC50 (rat, 1h) at 185ppm. At 0.2% F2, the calculated LC50 is then 92,500ppm, well above the 5,000ppm threshold and the premix is no longer considered a toxic gas. (it also has an NFPA rating of "1" in health on the MSDS) Since the mixture is not toxic and the F2 concentration is <1%, EH&S concludes that a gas cabinet is not required. However, considering that the F2 PEL is 0.1ppm and IDLH 25ppm, it still seems that a gas cabinet would be the safest option and the best solution. Has anybody gone through similar discussions? If you have a lab with a fluorine premix gas, is it in a gas cabinet? If not, what type of space is it in, and what kind of ventilation and gas detection are in place? Thanks Sandrine -- Sandrine Martin, Ph.D. University of Michigan LNF Managing Director 1246D EECS, 1301 Beal Ave Ann Arbor, MI 48109 Cell 734-277-2365 Fax 734-647-1781 www.LNF.umich.edu @LurieNanofab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Mon Mar 6 05:54:46 2017 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Mon, 06 Mar 2017 10:54:46 +0000 Subject: [labnetwork] Gas cabinet for F2 premix for excimer lasers? In-Reply-To: References: Message-ID: Hi All, At Draper we have two Excimer lasers that use the F2 premix gas and both machines have the premix in a gas cabinet. Yes it cost more upfront but better to be safe than sorry. Rick Richard H. Morrison Principal Member of the Technical Staff Draper 555 Technology Square Cambridge, MA 02139-3573 Work 617-258-3420 Cell 508-930-3461 www.draper.com From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Sandrine Martin Sent: Friday, March 03, 2017 2:29 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Gas cabinet for F2 premix for excimer lasers? Hello, There are a few individual labs here at the University of Michigan that have excimer lasers and use F2 premix gases with 0.1 or 0.2% F2. So far, these gases have been installed in gas cabinets. We are now involved in a new installation and are getting some push back about the need for a gas cabinet. The argument is made using the Compressed Gas Assoc Pamphlet P-20 Standard for Classification of Toxic Gas Mixtures (2009) that apparently states that, if the LC50 value is over 5,000ppm, the gas mixture is not considered toxic. Pure F2 is listed with a LC50 (rat, 1h) at 185ppm. At 0.2% F2, the calculated LC50 is then 92,500ppm, well above the 5,000ppm threshold and the premix is no longer considered a toxic gas. (it also has an NFPA rating of "1" in health on the MSDS) Since the mixture is not toxic and the F2 concentration is <1%, EH&S concludes that a gas cabinet is not required. However, considering that the F2 PEL is 0.1ppm and IDLH 25ppm, it still seems that a gas cabinet would be the safest option and the best solution. Has anybody gone through similar discussions? If you have a lab with a fluorine premix gas, is it in a gas cabinet? If not, what type of space is it in, and what kind of ventilation and gas detection are in place? Thanks Sandrine -- Sandrine Martin, Ph.D. University of Michigan LNF Managing Director 1246D EECS, 1301 Beal Ave Ann Arbor, MI 48109 Cell 734-277-2365 Fax 734-647-1781 www.LNF.umich.edu @LurieNanofab ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From daniel.woodie at cornell.edu Mon Mar 6 09:57:07 2017 From: daniel.woodie at cornell.edu (Dan P. Woodie) Date: Mon, 6 Mar 2017 14:57:07 +0000 Subject: [labnetwork] Gas cabinet for F2 premix for excimer lasers? In-Reply-To: References: Message-ID: Sandrine, We have multiple installations across the College of Engineering, ranging from 10% to 0.1% F2 concentration, and have gone with and without gas cabinets based on the situation. I concur with most of the assessments presented so far. That PEL limits and exposure risks are paramount in a decision, and they trump other regulatory allowances. But even with that, I had to admit that at some point, the concentration gets low enough that you can be safe without a gas cabinet. In this case, it was for a 0.2% concentration. The cylinder was going to be kept closed most of the time, with limited staff performing the laser cavity refills every 3 ? 4 months. We ended up going with the smallest Flow Restrictive Orifice (FRO) for the gas cylinder and doing calculations on the peak room concentration based on the air exchange rate in the space. Attached is a graph with my calculations for this. Based on this, the peak concentration ended up being under 5 ppm, which is still above the PEL, but not too far above the STEL (15 minutes) of 2 ppm. The FRO also helped keep the peak level from hitting too quickly, in this case, it would take about 5 minutes to reach that level. Even with those safeguards, we choose to install a single gas detector with a simple visual and audible alarm to inform people to leave the lab if there was a release. We felt that the combination of the RFO, the room ventilation levels, and the alarm were enough to provide proper warning. Other situations where a gas cabinet was easier to install or the concentration was higher we went the full route. In this case, based on cost, this was a reasonable level of precaution that the researchers could afford (<$3k) while an installed gas cabinet would have run 10X or more of that. Happy to discuss further if you want to give me a call or a follow-up email. Dan Daniel Woodie Safety Manager, College of Engineering From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Sandrine Martin Sent: Friday, March 03, 2017 2:29 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Gas cabinet for F2 premix for excimer lasers? Hello, There are a few individual labs here at the University of Michigan that have excimer lasers and use F2 premix gases with 0.1 or 0.2% F2. So far, these gases have been installed in gas cabinets. We are now involved in a new installation and are getting some push back about the need for a gas cabinet. The argument is made using the Compressed Gas Assoc Pamphlet P-20 Standard for Classification of Toxic Gas Mixtures (2009) that apparently states that, if the LC50 value is over 5,000ppm, the gas mixture is not considered toxic. Pure F2 is listed with a LC50 (rat, 1h) at 185ppm. At 0.2% F2, the calculated LC50 is then 92,500ppm, well above the 5,000ppm threshold and the premix is no longer considered a toxic gas. (it also has an NFPA rating of "1" in health on the MSDS) Since the mixture is not toxic and the F2 concentration is <1%, EH&S concludes that a gas cabinet is not required. However, considering that the F2 PEL is 0.1ppm and IDLH 25ppm, it still seems that a gas cabinet would be the safest option and the best solution. Has anybody gone through similar discussions? If you have a lab with a fluorine premix gas, is it in a gas cabinet? If not, what type of space is it in, and what kind of ventilation and gas detection are in place? Thanks Sandrine -- Sandrine Martin, Ph.D. University of Michigan LNF Managing Director 1246D EECS, 1301 Beal Ave Ann Arbor, MI 48109 Cell 734-277-2365 Fax 734-647-1781 www.LNF.umich.edu @LurieNanofab -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Gas Cylinder Release into a Room.pdf Type: application/pdf Size: 79952 bytes Desc: Gas Cylinder Release into a Room.pdf URL: From aju-jugessur at uiowa.edu Tue Mar 7 13:14:58 2017 From: aju-jugessur at uiowa.edu (Jugessur, Aju S) Date: Tue, 7 Mar 2017 18:14:58 +0000 Subject: [labnetwork] Si RIE etch Message-ID: Hi, I have a user who is using the following Si etch recipe on our Oxford NGP80 etcher: RF power: 100 W Pressure: 100 mT CF4 flow rate: 25 sccm O2 flow rate: 3.1 sccm The etch rate from the above parameters is ~ 0.15 microns/min. The selectivity is 1:3. Can anyone suggest what parameters to tweak to increase the etch rate without causing too much substrate damage or roughness? Thanks for your suggestions. Regards Aju Aju Jugessur Ph.D. Director, University of Iowa Microfabrication Facility Professor (Adj.), Physics and Astronomy OSTC, Iowa Advanced Technology Labs University of Iowa 205 N. Madison St Iowa City, IA 52242 319 -353-2342 aju-jugessur at uiowa.edu http://ostc.uiowa.edu/uimf -------------- next part -------------- An HTML attachment was scrubbed... URL: From stuart.pearce at huawei.com Wed Mar 8 03:47:48 2017 From: stuart.pearce at huawei.com (Stuart Pearce) Date: Wed, 8 Mar 2017 08:47:48 +0000 Subject: [labnetwork] Si RIE etch In-Reply-To: References: Message-ID: <12365E1B3369A349B4716C5F18F5365A010E5694@FRAEML521-MBX.china.huawei.com> Hi, I would look at an increase in the O2 flow first without changing any of the other parameters. The Si etch rate would be dependent on the F radical intensity in the CF4/O2 plasma. Give it a go and see what happens. Best Regards, Stuart ________________________________ Dr Stuart Pearce Senior Process Engineer and Cleanroom Manager ???????? Huawei Technologies (UK) Co., Ltd [cid:image001.jpg at 01D1B042.F1D20CA0] Phone: +44 147 366 3153 Email: stuart.pearce at huawei.com Web: http://www.huawei.com Web: http://www.ciphotonics.com CIP Technologies is the trading name of The Centre for Integrated Photonics Ltd., a wholly owned subsidiary of Huawei Technologies (UK) Co., Ltd. Registered Office: - Phoenix House, Adastral Park, Martlesham Heath, Ipswich, Suffolk IP5 3RE. Registered in England no. 4905488 ________________________________ ???????????????????????????????????????? ???????????????????????????????????????? ??????????????????????????????????? This e-mail and its attachments contain confidential information from HUAWEI, which is intended only for the person or entity whose address is listed above. Any use of the information contained herein in any way (including, but not limited to, total or partial disclosure, reproduction, or dissemination) by persons other than the intended recipient(s) is prohibited. If you receive this e-mail in error, please notify the sender by phone or email immediately and delete it! From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jugessur, Aju S Sent: 07 March 2017 18:15 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Si RIE etch Hi, I have a user who is using the following Si etch recipe on our Oxford NGP80 etcher: RF power: 100 W Pressure: 100 mT CF4 flow rate: 25 sccm O2 flow rate: 3.1 sccm The etch rate from the above parameters is ~ 0.15 microns/min. The selectivity is 1:3. Can anyone suggest what parameters to tweak to increase the etch rate without causing too much substrate damage or roughness? Thanks for your suggestions. Regards Aju Aju Jugessur Ph.D. Director, University of Iowa Microfabrication Facility Professor (Adj.), Physics and Astronomy OSTC, Iowa Advanced Technology Labs University of Iowa 205 N. Madison St Iowa City, IA 52242 319 -353-2342 aju-jugessur at uiowa.edu http://ostc.uiowa.edu/uimf -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.jpg Type: image/jpeg Size: 2827 bytes Desc: image002.jpg URL: From bernard at mtl.mit.edu Wed Mar 8 08:38:46 2017 From: bernard at mtl.mit.edu (Bernard Alamariu) Date: Wed, 8 Mar 2017 08:38:46 -0500 Subject: [labnetwork] Si RIE etch In-Reply-To: References: Message-ID: <4aec6439-36ac-782e-f03a-d5cb5bd1c0bf@mtl.mit.edu> Hello, CF4/O2 ratio is too high, I think. I suggest to do a run without O2 first, just to check it. Then try it with no more than 1-2% O2; however I see you are using very very low flow rate for O2 and making it even low you might reach the MFC accuracy limits. I suggest to increase accordingly the CF4 flow rate to allow 1-2% O2 flow, and try to maintain the pressure value. Some comments and suggestions: The CF4 plasma etch was the first one used to etch SiO2, Si3N4 and Si more than 40 years ago. The German LFE barrel reactor machine was one of them. The main problem was its selectivity to Si, which was solved by adding H2 and He for safety reasons. Then was the etch rate which was not stable; it was discovered that the O2 desorbed from the Quartz walls was the culprit. The chamber process history counted. Then it has been established that adding ~ 1-2% of Oxygen increases the etch rate and makes it repeatable, while adding more than 3% quenches the the etch rate. Practically an even higher etch rate was observed by using industrial O2 from a tank, which adds more impurities! The scientific explanation was based on the so named " Second Order Atomic Collision" phenomena. The main etching specie is CF3- molecular ion. Its plasma concentration is increased by adding some Oxygen which enhances its ionization rate, by the second order atomic collision. The O2 is brought by RF plasma in a long lifetime metastable energy state higher than the CF4 ionization energy; by inelastic collision O2 transfer this extra energy to CF4 and increases its ionization rate. The low O2 concentration acts like a ionization catalyzer. More O2 is an inhibitor. There are old papers in the Journal of Physical Chemistry around 1973, etc. Thanks, Bernard On 3/7/17 1:14 PM, Jugessur, Aju S wrote: > Hi, > > I have a user who is using the following Si etch recipe on our Oxford > NGP80 etcher: > > RF power: 100 W > Pressure: 100 mT > CF4 flow rate: 25 sccm > O2 flow rate: 3.1 sccm > > The etch rate from the above parameters is ~ 0.15 microns/min. > The selectivity is 1:3. > Can anyone suggest what parameters to tweak to increase the etch rate > without causing too much substrate damage or roughness? > > Thanks for your suggestions. > > Regards > Aju > > Aju Jugessur /Ph.D./ > Director, University of Iowa Microfabrication Facility > Professor (Adj.), Physics and Astronomy > OSTC, Iowa Advanced Technology Labs > University of Iowa > > 205 N. Madison St > Iowa City, IA 52242 > 319 -353-2342 > aju-jugessur at uiowa.edu > http://ostc.uiowa.edu/uimf > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From rizik at intengr.com Wed Mar 8 10:15:22 2017 From: rizik at intengr.com (Rizik Michael) Date: Wed, 8 Mar 2017 07:15:22 -0800 Subject: [labnetwork] Gas cabinet for F2 premix for excimer lasers? In-Reply-To: <0555CE98-DBD9-4EA1-AB5F-65CE40F6DF3E@mit.edu> References: , <0555CE98-DBD9-4EA1-AB5F-65CE40F6DF3E@mit.edu> Message-ID: <006c01d2981e$cf5ff960$6e1fec20$@intengr.com> I agree with Dennis' logic. A gas cabinet or exhausted enclosure is the preferred installation. However, installing the gas cylinder in, say 10'x10'x10' room could work if we treat the room as an exhausted enclosure with proper safeguards. This includes proper exhaust and make up air distribution to minimize dead zones within the room. Perhaps the cylinder could be installed in 4'Wx3'Lx8'H closet which is closer to a gas cabinet size. Keep in mind that such a closet will have to be designed and built with similar features as a gas cabinet. This includes automatic door closure; air intake louvers at the bottom of the door; proper exhaust flow rate to ensure less than 1/2PEL in the event of a leak since for personnel protection; gas monitoring sensor; and interlocking the access door with the gas monitoring system. The cost of building such a closet will far exceed the cost of a gas cabinet or exhausted enclosure. Regards Rizik Michael, PE Principal Integrated Engineering Services Office: 1-408 261 3500, Ext. 201 Cell: 1-408 718 0927 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dennis Grimard Sent: Saturday, March 4, 2017 8:12 AM To: Noah Clay Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Gas cabinet for F2 premix for excimer lasers? I could not agree more with Noah. My take on this: 1. Let's say you have the bottle in a smallish room . say 10x10x10 or 1,000 CF. 2. Let's say you leak 1 CF . that is a dilution of 1,000X 3. 0.2 % F2 in whatever is 2,000 PPM . 4. Assuming perfect and uniform dissipation throughout the room . the room concentration would be 2 ppm. 5. That is 20X the PEL which is a legally enforceable exposure limit . independent of a non-binding CGA recommendation. 6. At 2 ppm you would be right at the odor threshold . so you would have a poor warning property to the leak Of course my logic could be wrong, my math could be wrong and the amount of the leak could be less . or more . you should verify for yourself. Finally, if you did have a leak and the people were not able to detect the leak until they began to experience the effects of F2 exposure . what do you tell them? The CGA P-20 pamphlet said it was ok? As Noah says ... pitchforks might be the least of your worries. Put it in the gas cabinet .. Or a vented enclosure with detection. At the very, very, least, place a vent in the room with a detection point in the vent to actively sweep up (constantly sample) a possible leak that could occur. I would smoke the room to make sure that any point in the room eventually ends up in that vent at some point in time. D Dennis S Grimard, Ph.D. Associate Director of Operations MIT.nano School of Engineering Massachusetts Institute of Technology 60 Vassar Street, Bldg 39-559 Cambridge, MA 02149 C: (734) 368-7172 EM: dgrimard at mit.edu On Mar 4, 2017, at 9:04 AM, Noah Clay wrote: Hi Sandrine, We have a 193nm excimer laser micromachining system in our cleanroom and went through a similar exercise. We concluded that even though OSHA or NIOSH limits would indicate that a gas cabinet is unnecessary, that housing the ArF cylinders in an exhausted enclosure is a safer/better option. Since the laser requires frequent purges/refills, placing the cylinder near the cabinet is a must - therefore, it needed to be placed in an adjacent service chase. And so, we reasoned that: 1. Housing F2 gases directly in the recirc path (no gas cabinet) was not an option. 2. Shutting down the gas with with a TGMS interlock was required since 3. We perceived inherent difficulty in diluting a full cylinder release, as might be the case with a standard gas panel that could not be shut down by our TGMS. 4. Our researchers would be wielding pitchforks if they were exposed to high levels of F2, even if we explained it was permissible. I hope this helps. Best, Noah Noah Clay Director, Quattrone Nanofabrication Facility University of Pennsylvania On Mar 3, 2017, at 14:28, Sandrine Martin wrote: Hello, There are a few individual labs here at the University of Michigan that have excimer lasers and use F2 premix gases with 0.1 or 0.2% F2. So far, these gases have been installed in gas cabinets. We are now involved in a new installation and are getting some push back about the need for a gas cabinet. The argument is made using the Compressed Gas Assoc Pamphlet P-20 Standard for Classification of Toxic Gas Mixtures (2009) that apparently states that, if the LC50 value is over 5,000ppm, the gas mixture is not considered toxic. Pure F2 is listed with a LC50 (rat, 1h) at 185ppm. At 0.2% F2, the calculated LC50 is then 92,500ppm, well above the 5,000ppm threshold and the premix is no longer considered a toxic gas. (it also has an NFPA rating of "1" in health on the MSDS) Since the mixture is not toxic and the F2 concentration is <1%, EH&S concludes that a gas cabinet is not required. However, considering that the F2 PEL is 0.1ppm and IDLH 25ppm, it still seems that a gas cabinet would be the safest option and the best solution Has anybody gone through similar discussions? If you have a lab with a fluorine premix gas, is it in a gas cabinet? If not, what type of space is it in, and what kind of ventilation and gas detection are in place? Thanks Sandrine -- Sandrine Martin, Ph.D. University of Michigan LNF Managing Director 1246D EECS, 1301 Beal Ave Ann Arbor, MI 48109 Cell 734-277-2365 Fax 734-647-1781 www.LNF.umich.edu @LurieNanofab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From stuart.pearce at huawei.com Wed Mar 8 13:36:46 2017 From: stuart.pearce at huawei.com (Stuart Pearce) Date: Wed, 8 Mar 2017 18:36:46 +0000 Subject: [labnetwork] Si RIE etch In-Reply-To: <4aec6439-36ac-782e-f03a-d5cb5bd1c0bf@mtl.mit.edu> References: <4aec6439-36ac-782e-f03a-d5cb5bd1c0bf@mtl.mit.edu> Message-ID: <12365E1B3369A349B4716C5F18F5365A010E59A7@FRAEML521-MBX.china.huawei.com> That?s a good call by Bernard actually, just looking at your numbers again you are already working over 12% which is rather high for a CF4 process. Best Regards, Stuart ________________________________ Dr Stuart Pearce Senior Process Engineer and Cleanroom Manager ???????? Huawei Technologies (UK) Co., Ltd [cid:image001.jpg at 01D1B042.F1D20CA0] Phone: +44 147 366 3153 Email: stuart.pearce at huawei.com Web: http://www.huawei.com Web: http://www.ciphotonics.com CIP Technologies is the trading name of The Centre for Integrated Photonics Ltd., a wholly owned subsidiary of Huawei Technologies (UK) Co., Ltd. Registered Office: - Phoenix House, Adastral Park, Martlesham Heath, Ipswich, Suffolk IP5 3RE. Registered in England no. 4905488 ________________________________ ???????????????????????????????????????? ???????????????????????????????????????? ??????????????????????????????????? This e-mail and its attachments contain confidential information from HUAWEI, which is intended only for the person or entity whose address is listed above. Any use of the information contained herein in any way (including, but not limited to, total or partial disclosure, reproduction, or dissemination) by persons other than the intended recipient(s) is prohibited. If you receive this e-mail in error, please notify the sender by phone or email immediately and delete it! From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bernard Alamariu Sent: 08 March 2017 13:39 To: Jugessur, Aju S ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Si RIE etch Hello, CF4/O2 ratio is too high, I think. I suggest to do a run without O2 first, just to check it. Then try it with no more than 1-2% O2; however I see you are using very very low flow rate for O2 and making it even low you might reach the MFC accuracy limits. I suggest to increase accordingly the CF4 flow rate to allow 1-2% O2 flow, and try to maintain the pressure value. Some comments and suggestions: The CF4 plasma etch was the first one used to etch SiO2, Si3N4 and Si more than 40 years ago. The German LFE barrel reactor machine was one of them. The main problem was its selectivity to Si, which was solved by adding H2 and He for safety reasons. Then was the etch rate which was not stable; it was discovered that the O2 desorbed from the Quartz walls was the culprit. The chamber process history counted. Then it has been established that adding ~ 1-2% of Oxygen increases the etch rate and makes it repeatable, while adding more than 3% quenches the the etch rate. Practically an even higher etch rate was observed by using industrial O2 from a tank, which adds more impurities! The scientific explanation was based on the so named " Second Order Atomic Collision" phenomena. The main etching specie is CF3- molecular ion. Its plasma concentration is increased by adding some Oxygen which enhances its ionization rate, by the second order atomic collision. The O2 is brought by RF plasma in a long lifetime metastable energy state higher than the CF4 ionization energy; by inelastic collision O2 transfer this extra energy to CF4 and increases its ionization rate. The low O2 concentration acts like a ionization catalyzer. More O2 is an inhibitor. There are old papers in the Journal of Physical Chemistry around 1973, etc. Thanks, Bernard On 3/7/17 1:14 PM, Jugessur, Aju S wrote: Hi, I have a user who is using the following Si etch recipe on our Oxford NGP80 etcher: RF power: 100 W Pressure: 100 mT CF4 flow rate: 25 sccm O2 flow rate: 3.1 sccm The etch rate from the above parameters is ~ 0.15 microns/min. The selectivity is 1:3. Can anyone suggest what parameters to tweak to increase the etch rate without causing too much substrate damage or roughness? Thanks for your suggestions. Regards Aju Aju Jugessur Ph.D. Director, University of Iowa Microfabrication Facility Professor (Adj.), Physics and Astronomy OSTC, Iowa Advanced Technology Labs University of Iowa 205 N. Madison St Iowa City, IA 52242 319 -353-2342 aju-jugessur at uiowa.edu http://ostc.uiowa.edu/uimf _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.jpg Type: image/jpeg Size: 2827 bytes Desc: image002.jpg URL: From pramodrvndr at gmail.com Sun Mar 12 15:28:34 2017 From: pramodrvndr at gmail.com (Pramod Ravindra) Date: Mon, 13 Mar 2017 00:58:34 +0530 Subject: [labnetwork] Error during excimer laser operation (Coherent COMPex Pro 102F) Message-ID: Hi, We use a 'Coherent COMPex Pro 102F' excimer laser (248 nm, KrF) as the laser source for pulsed laser deposition. Recently, close to 30 s into the deposition run at 5 Hz (150 pulses), the pulsing stopped and 'rec. error' was printed on the display of the laser controller. Has anyone ever encountered such an error? If yes, what does it mean and what do I need to do to correct it? There was a power surge in the lab a day before this happened but at that time, although the laser was connected to the power lines, it was turned off. Could this be an effect of the surge? Some background: -We operate the laser using the controller. No external triggering - Recent gas mixture refill was <20 days before pulsing - Laser is used routinely - no long periods of dormancy Thank you! Regards, -- Pramod Ravindra PhD Candidate Centre for Nano-Science and Engineering (CeNSE) Indian Institute of Science, Bangalore +91-9916890128 -------------- next part -------------- An HTML attachment was scrubbed... URL: From kamal.yadav at gmail.com Mon Mar 13 17:17:04 2017 From: kamal.yadav at gmail.com (Kamal Yadav) Date: Mon, 13 Mar 2017 14:17:04 -0700 Subject: [labnetwork] Flip Chip Bonding needs Message-ID: Dear All, Kindly let me know if you know or if you can provide flip chip bonding services at a University cleanroom or similar, on the west coast preferably [due to our own location], but we are open to other places as well. Bonding force required: Around 50 Kg Die Size: 5 mm to 35 mm. Alignment: 5 micron or better. -- Thanks, Kamal -------------- next part -------------- An HTML attachment was scrubbed... URL: From khbeis at uw.edu Tue Mar 14 07:54:46 2017 From: khbeis at uw.edu (Michael Khbeis) Date: Tue, 14 Mar 2017 04:54:46 -0700 Subject: [labnetwork] Flip Chip Bonding needs In-Reply-To: References: Message-ID: <61A4E102-0B6C-40AA-AE0E-84F240146E4C@uw.edu> Kamal We can accommodate. What type of bond? Best, Dr. Michael Khbeis Washington Nanofab Facility University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (C) 443.254.5192 khbeis at uw.edu > On Mar 13, 2017, at 2:17 PM, Kamal Yadav wrote: > > Dear All, > > Kindly let me know if you know or if you can provide flip chip bonding services at a University cleanroom or similar, on the west coast preferably [due to our own location], but we are open to other places as well. > > Bonding force required: Around 50 Kg > Die Size: 5 mm to 35 mm. > Alignment: 5 micron or better. > > -- > Thanks, > Kamal > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Tue Mar 14 10:25:02 2017 From: julia.aebersold at louisville.edu (julia.aebersold at louisville.edu) Date: Tue, 14 Mar 2017 14:25:02 +0000 Subject: [labnetwork] Flip Chip Bonding needs In-Reply-To: <61A4E102-0B6C-40AA-AE0E-84F240146E4C@uw.edu> References: <61A4E102-0B6C-40AA-AE0E-84F240146E4C@uw.edu> Message-ID: We also have flip chip bonding capabilities. 50kg seems quite a bit and would crush most silicon and/or glass substrates. Cheers! Julia Aebersold, Ph.D. Cleanroom Manager Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Khbeis Sent: Tuesday, March 14, 2017 7:55 AM To: Kamal Yadav Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Flip Chip Bonding needs Kamal We can accommodate. What type of bond? Best, Dr. Michael Khbeis Washington Nanofab Facility University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (C) 443.254.5192 khbeis at uw.edu On Mar 13, 2017, at 2:17 PM, Kamal Yadav > wrote: Dear All, Kindly let me know if you know or if you can provide flip chip bonding services at a University cleanroom or similar, on the west coast preferably [due to our own location], but we are open to other places as well. Bonding force required: Around 50 Kg Die Size: 5 mm to 35 mm. Alignment: 5 micron or better. -- Thanks, Kamal _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From norman.bergren at nist.gov Tue Mar 14 11:04:25 2017 From: norman.bergren at nist.gov (Bergren, Norman F. (Fed)) Date: Tue, 14 Mar 2017 15:04:25 +0000 Subject: [labnetwork] Nitrogen Generator Message-ID: Hi All, We have a 3000 SCFH Nitrogen generator for the cleanroom. Our technical services divisions looking into buying one. I just wanted to get some feedback on the units other cleanrooms have. Thanks Norm Bergren [cid:image001.png at 01D15F30.2A5E7F40] ************************************ Norman F. Bergren Boulder Micro-fabrication Facility 325 Broadway Mail Stop 817.03 Boulder, CO 80305 303-497-5344 bergren at nist.gov -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 2594 bytes Desc: image001.png URL: From lino.eugene at uwaterloo.ca Tue Mar 14 11:39:10 2017 From: lino.eugene at uwaterloo.ca (Lino Eugene) Date: Tue, 14 Mar 2017 15:39:10 +0000 Subject: [labnetwork] Long prebakes of PMMA for EBL Message-ID: <9CF394BB949EBF4AA2A40316765349F83E89FE@connmbx04> Dear colleagues, I would like to have inputs from you regarding long prebakes of PMMA before e-beam lithography. I have always used 180 C for 90 s on hotplate as recommended in the technical data from Microchem. However, I have seen some SOPs where the prebake is longer, between 3 min and 20 min. I am wondering if there is any concern about the anisole solvent degassing in the vacuum chamber and if some EBL systems are more sensitive than others. Also, I am wondering what the impact of a longer prebake has on the EBL process. I would expect a longer development time. What about the dose? Thank you! Lino Eugene, Ph.D., Jr. Eng. Quantum NanoFab University of Waterloo 200 University Avenue West Waterloo, ON, Canada N2L 3G1 Ph: +1 519-888-4567 #37788 Cell: +1 226-929-1685 Website: https://fab.qnc.uwaterloo.ca/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.rooks at yale.edu Tue Mar 14 12:03:09 2017 From: michael.rooks at yale.edu (Michael Rooks) Date: Tue, 14 Mar 2017 12:03:09 -0400 Subject: [labnetwork] Long prebakes of PMMA for EBL In-Reply-To: <9CF394BB949EBF4AA2A40316765349F83E89FE@connmbx04> References: <9CF394BB949EBF4AA2A40316765349F83E89FE@connmbx04> Message-ID: <58C8143D.7080608@yale.edu> I have never seen a difference between baking a few minutes or a few years. Once the solvent is gone, it's gone. The required dose is insensitive to the bake time. Outgassing of the solvent is not a problem. Also, outgassing of low molecular-weight pmma is not a problem. We are not using UHV systems for lithography. Systems that use electrostatic deflection (JEOL) are slightly sensitive to polymer deposition on the deflection plates, but system diagnostics keep track of distortion and warn the operator when cleaning is necessary (which is, hardly ever). -------------------------------- Michael Rooks Yale Institute of Nanoscience and Quantum Engineering nano.yale.edu On 03/14/2017 11:39 AM, Lino Eugene wrote: > > Dear colleagues, > > I would like to have inputs from you regarding long prebakes of PMMA > before e-beam lithography. I have always used 180 C for 90 s on > hotplate as recommended in the technical data from Microchem. However, > I have seen some SOPs where the prebake is longer, between 3 min and > 20 min. I am wondering if there is any concern about the anisole > solvent degassing in the vacuum chamber and if some EBL systems are > more sensitive than others. > > Also, I am wondering what the impact of a longer prebake has on the > EBL process. I would expect a longer development time. What about the > dose? > > Thank you! > > ** > > *Lino Eugene, Ph.D., Jr. Eng.* > > Quantum NanoFab > > University of Waterloo > > 200 University Avenue West > > Waterloo, ON, Canada > > N2L 3G1 > > Ph: +1 519-888-4567 #37788 > > Cell: +1 226-929-1685 > > Website:https://fab.qnc.uwaterloo.ca/ > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From betemc at rit.edu Tue Mar 14 13:56:53 2017 From: betemc at rit.edu (Bruce Tolleson) Date: Tue, 14 Mar 2017 17:56:53 +0000 Subject: [labnetwork] Ion Implanter Spare Boards Message-ID: Dear Labnetwork, RIT is looking for two boards for our Varian 350D Ion Implanter. They Are: Transwave M-8016/A Memory Board, Rev F (5-9-88) Transwave K-8073A Processor Board, Rev H (5-9-88) If you have either of these in spares/excess parts that you would be willing to part with please contact me. Thank you, Bruce E. Tolleson Rochester Institute of Technology 82 Lomb Memorial Drive, Bldg 17-2627 Rochester, NY 14623-5604 (585) 478-3836 [http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 2550 bytes Desc: image001.jpg URL: From ra at finetechusa.com Tue Mar 14 12:15:36 2017 From: ra at finetechusa.com (Robert Avila) Date: Tue, 14 Mar 2017 16:15:36 +0000 Subject: [labnetwork] Flip Chip Bonding needs In-Reply-To: References: <61A4E102-0B6C-40AA-AE0E-84F240146E4C@uw.edu> Message-ID: Good to see Dr. Khbeis and others respond. Finetech has die bonders installed at many Universities?to name a few and my apologies for those I missed ? University of Arizona, University of Arizona State Cal Berkeley Cal Davis Stanford Cal Tech University of Washington University of Louisville University of Colorado State University of Alaska University of Alberta University of Arkansas University of S.Florida MIT Harvard Rice Regards, Robert Avila (')480.231.7902 mobile (')480-893-1630 office finetechusa.com ? From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of julia.aebersold at louisville.edu Sent: Tuesday, March 14, 2017 7:25 AM To: Michael Khbeis ; Kamal Yadav Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Flip Chip Bonding needs We also have flip chip bonding capabilities. 50kg seems quite a bit and would crush most silicon and/or glass substrates. Cheers! Julia Aebersold, Ph.D. Cleanroom Manager Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Khbeis Sent: Tuesday, March 14, 2017 7:55 AM To: Kamal Yadav > Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Flip Chip Bonding needs Kamal We can accommodate. What type of bond? Best, Dr. Michael Khbeis Washington Nanofab Facility University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (C) 443.254.5192 khbeis at uw.edu On Mar 13, 2017, at 2:17 PM, Kamal Yadav > wrote: Dear All, Kindly let me know if you know or if you can provide flip chip bonding services at a University cleanroom or similar, on the west coast preferably [due to our own location], but we are open to other places as well. Bonding force required: Around 50 Kg Die Size: 5 mm to 35 mm. Alignment: 5 micron or better. -- Thanks, Kamal _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From pilarhf at umich.edu Tue Mar 14 21:48:33 2017 From: pilarhf at umich.edu (Pilar Herrera-Fierro) Date: Tue, 14 Mar 2017 21:48:33 -0400 Subject: [labnetwork] Flip Chip Bonding needs In-Reply-To: References: <61A4E102-0B6C-40AA-AE0E-84F240146E4C@uw.edu> Message-ID: And at LNF in the University of Michigan ! Pilar Herrera-Fierro Sent from my iPhone > On Mar 14, 2017, at 10:25 AM, julia.aebersold at louisville.edu wrote: > > Cheers! From Vincent.Luciani at nist.gov Wed Mar 15 09:33:31 2017 From: Vincent.Luciani at nist.gov (Luciani, Vincent (Fed)) Date: Wed, 15 Mar 2017 13:33:31 +0000 Subject: [labnetwork] Flip Chip Bonding needs In-Reply-To: References: Message-ID: Hello Kamal, Add us to the list. We have the following: https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-tresky-t-3000-fc3-hf-flip-chip-bonder [cid:image003.jpg at 01D29D6F.341DBAE0] Best, Vince Vincent K. Luciani NanoFab Manager Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, MS 6201 Gaithersburg, MD 20899-6200 USA +1-301-975-2886 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kamal Yadav Sent: Monday, March 13, 2017 5:17 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Flip Chip Bonding needs Dear All, Kindly let me know if you know or if you can provide flip chip bonding services at a University cleanroom or similar, on the west coast preferably [due to our own location], but we are open to other places as well. Bonding force required: Around 50 Kg Die Size: 5 mm to 35 mm. Alignment: 5 micron or better. -- Thanks, Kamal -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.jpg Type: image/jpeg Size: 28480 bytes Desc: image003.jpg URL: From Thomas_Ferraguto at uml.edu Wed Mar 15 12:44:16 2017 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas) Date: Wed, 15 Mar 2017 16:44:16 +0000 Subject: [labnetwork] Free Vacuum and ALD Course at UMass Lowell Message-ID: Colleagues, Our friends at Kurt Lesker are providing a free short course on Vacuum Technology and Atomic Layer Deposition on Tuesday April 11th 2017 9:00 AM to 3:00 PM. Lunch will be provided. The event will held in the Lydon Library room 110 (Right next to UMass Lowell Nanofab #1 on the attached map) If you'd like to attend , just send me an email and I'll coordinate parking for you. This is great opportunity for students as well as staff. We look forward to seeing you there. Best Regards Tom Thomas S. Ferraguto Saab ETIC Nanofabrication Laboratory Director Saab ETIC Building Director 1 University Avenue Lowell MA 01854 Mobile 617-755-0910 Land 978-934-1809 Fax 978-934-1014 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Lesker U course listing and times - as of 15 December 2016.pdf Type: application/pdf Size: 706461 bytes Desc: Lesker U course listing and times - as of 15 December 2016.pdf URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Campus Map_tcm18-49920.pdf Type: application/pdf Size: 674353 bytes Desc: Campus Map_tcm18-49920.pdf URL: From ra at finetechusa.com Wed Mar 15 12:51:03 2017 From: ra at finetechusa.com (Robert Avila) Date: Wed, 15 Mar 2017 16:51:03 +0000 Subject: [labnetwork] FW: Flip Chip Bonding needs In-Reply-To: <02bc01d29d17$bedf7590$3c9e60b0$@ece.ucsb.edu> References: <61A4E102-0B6C-40AA-AE0E-84F240146E4C@uw.edu> <009001d29d14$532731b0$f9759510$@ece.ucsb.edu> <02bc01d29d17$bedf7590$3c9e60b0$@ece.ucsb.edu> Message-ID: ALL FINETECH BONDERS ? University of Santa Barbara Microtek San Diego ? contract manufacture Quickpak San Diego - contract manufacturer Jabil AOC norther California ? contract manufacturer University of Michigan And some more?.. Arizona State University Cal Tech Case Western Clemson University (Stock NH PO 5720) Cleveland Clinic Colorado State Cornell University Ecole Polytechnique (Queens Univ) Ecole Polytechnique (Univ. of Montreal) Ecole technology superior (ETS) Georgia Tech - NRC / MIRC (Stock AZ) Georgia Tech - PRC Georgia Tech - PRC (stock) Harvard University - MA Johns Hopkins Kent State/Hanna Maryland Procurement Office - MD Massachussetts Institute of Technology (MIT) Notre Dame Penn State University (Donated) Purdue Purdue Rensselaer Polytechnic Stanford University - SLAC University of Alaska - Fairbanks University of Alberta - Edmonton, Canada University of Arizona University of CA - Berkeley University of CA - Davis University of CA - Santa Barbara University of Calgary (ACAMP) University of Central Florida University of Connecticut University of Illinois University of Lousiville University of Maryland University of Massachusetts Amherst University of N. Carolina - Chapel Hill University of N. Carolina - Charlotte University of S. Carolina University of Sherbrooke (IBM - C2MI) University of Sherbrooke (IBM - C2MI) University of Virginia (was HVVI) University of Washington University of Waterloo University of Waterloo, Canada Regards, Robert Avila (')480.231.7902 mobile (')480-893-1630 office finetechusa.com ? From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Avila Sent: Tuesday, March 14, 2017 9:16 AM To: julia.aebersold at louisville.edu; Michael Khbeis >; Kamal Yadav > Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Flip Chip Bonding needs Good to see Dr. Khbeis and others respond. Finetech has die bonders installed at many Universities?to name a few and my apologies for those I missed ? University of Arizona, University of Arizona State Cal Berkeley Cal Davis Stanford Cal Tech University of Washington University of Louisville University of Colorado State University of Alaska University of Alberta University of Arkansas University of S.Florida MIT Harvard Rice Regards, Robert Avila (')480.231.7902 mobile (')480-893-1630 office finetechusa.com ? From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of julia.aebersold at louisville.edu Sent: Tuesday, March 14, 2017 7:25 AM To: Michael Khbeis >; Kamal Yadav > Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Flip Chip Bonding needs We also have flip chip bonding capabilities. 50kg seems quite a bit and would crush most silicon and/or glass substrates. Cheers! Julia Aebersold, Ph.D. Cleanroom Manager Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Khbeis Sent: Tuesday, March 14, 2017 7:55 AM To: Kamal Yadav > Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Flip Chip Bonding needs Kamal We can accommodate. What type of bond? Best, Dr. Michael Khbeis Washington Nanofab Facility University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (C) 443.254.5192 khbeis at uw.edu On Mar 13, 2017, at 2:17 PM, Kamal Yadav > wrote: Dear All, Kindly let me know if you know or if you can provide flip chip bonding services at a University cleanroom or similar, on the west coast preferably [due to our own location], but we are open to other places as well. Bonding force required: Around 50 Kg Die Size: 5 mm to 35 mm. Alignment: 5 micron or better. -- Thanks, Kamal _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork [https://ipmcdn.avast.com/images/icons/icon-envelope-tick-green-avg-v1.png] Virus-free. www.avg.com -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- An embedded and charset-unspecified text was scrubbed... Name: Untitled attachment 00029.txt URL: From thibeault at ece.ucsb.edu Wed Mar 15 16:36:38 2017 From: thibeault at ece.ucsb.edu (Brian Thibeault) Date: Wed, 15 Mar 2017 13:36:38 -0700 Subject: [labnetwork] Flip Chip Bonding needs In-Reply-To: References: <61A4E102-0B6C-40AA-AE0E-84F240146E4C@uw.edu> Message-ID: <027801d29dcb$d8d2eef0$8a78ccd0$@ece.ucsb.edu> To all, Please add UCSB to the list as well. Thanks, Brian *********************************** Brian Thibeault, Ph.D Project Scientist/Manager UCSB Nanofabrication Facility Santa Barbara, CA 93106 805-893-2268 www.nanotech.ucsb.edu thibeault at ece.ucsb.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Avila Sent: Tuesday, March 14, 2017 9:16 AM To: julia.aebersold at louisville.edu; Michael Khbeis ; Kamal Yadav Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Flip Chip Bonding needs Good to see Dr. Khbeis and others respond. Finetech has die bonders installed at many Universities?to name a few and my apologies for those I missed ? University of Arizona, University of Arizona State Cal Berkeley Cal Davis Stanford Cal Tech University of Washington University of Louisville University of Colorado State University of Alaska University of Alberta University of Arkansas University of S.Florida MIT Harvard Rice Regards, Robert Avila (')480.231.7902 mobile (')480-893-1630 office finetechusa.com 8 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of julia.aebersold at louisville.edu Sent: Tuesday, March 14, 2017 7:25 AM To: Michael Khbeis >; Kamal Yadav > Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Flip Chip Bonding needs We also have flip chip bonding capabilities. 50kg seems quite a bit and would crush most silicon and/or glass substrates. Cheers! Julia Aebersold, Ph.D. Cleanroom Manager Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Khbeis Sent: Tuesday, March 14, 2017 7:55 AM To: Kamal Yadav > Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Flip Chip Bonding needs Kamal We can accommodate. What type of bond? Best, Dr. Michael Khbeis Washington Nanofab Facility University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (C) 443.254.5192 khbeis at uw.edu On Mar 13, 2017, at 2:17 PM, Kamal Yadav > wrote: Dear All, Kindly let me know if you know or if you can provide flip chip bonding services at a University cleanroom or similar, on the west coast preferably [due to our own location], but we are open to other places as well. Bonding force required: Around 50 Kg Die Size: 5 mm to 35 mm. Alignment: 5 micron or better. -- Thanks, Kamal _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From pestal at eecs.berkeley.edu Thu Mar 16 15:43:16 2017 From: pestal at eecs.berkeley.edu (Danny Pestal) Date: Thu, 16 Mar 2017 12:43:16 -0700 Subject: [labnetwork] Chemical resistant apron storage Message-ID: Dear Labnetwork, I am reaching out for responses on how everyone manages their chemical resistant apron PPE storage. Our current solution of hanging them from hooks on the sides of the wet process benches leaves much to be desired. There is not a lot of room in the hanging area so the aprons get bunched up and apron fronts touch apron backs which increases the potential risk of a chemical exposure to the next wearer. Before I spend the efforts attempting to come up with a mechanical solution of hanging the aprons so they can't interact (with themselves and with each other), I am wondering if anyone has implemented a more simple way to manage this risk. Thanks, Danny Pestal Facilities Manager Marvell NanoLab University of California, Berkeley 510-809-8600 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mrisley at andrew.cmu.edu Fri Mar 17 08:52:51 2017 From: mrisley at andrew.cmu.edu (Mason Risley) Date: Fri, 17 Mar 2017 12:52:51 +0000 Subject: [labnetwork] Synchronized Clocks for Facility Message-ID: <1ff1e4ea8f41485685e00d92ee3645f5@DCNS-MSGMLT-03.andrew.ad.cmu.edu> Happy St. Patricks day everyone, Have a less technical and more mundane question today - I'm looking into getting a synchronized clock system for our lab and was wondering if anyone had positive or negative experiences with a clock company or clock supplier they've working with and/or preferences of wired vs wifi etc. Thanks, Mason Risley Process Development Engineer Carnegie Mellon University Nanofabrication 5000 Forbes Street, Pittsburgh PA 15213 nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ ph: 412.268.5419 | cell : 505.795.4805 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mweiler at andrew.cmu.edu Fri Mar 17 13:08:21 2017 From: mweiler at andrew.cmu.edu (Mark Weiler) Date: Fri, 17 Mar 2017 17:08:21 +0000 Subject: [labnetwork] Synchronized Clocks for Facility In-Reply-To: <1ff1e4ea8f41485685e00d92ee3645f5@DCNS-MSGMLT-03.andrew.ad.cmu.edu> References: <1ff1e4ea8f41485685e00d92ee3645f5@DCNS-MSGMLT-03.andrew.ad.cmu.edu> Message-ID: <4d31a7d414e74454849bfcfc029477a5@PGH-MSGMLT-01.andrew.ad.cmu.edu> Tissot is great' Sent from my iPhone On Mar 17, 2017, at 11:44 AM, Mason Risley > wrote: Happy St. Patricks day everyone, Have a less technical and more mundane question today - I'm looking into getting a synchronized clock system for our lab and was wondering if anyone had positive or negative experiences with a clock company or clock supplier they've working with and/or preferences of wired vs wifi etc. Thanks, Mason Risley Process Development Engineer Carnegie Mellon University Nanofabrication 5000 Forbes Street, Pittsburgh PA 15213 nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ ph: 412.268.5419 | cell : 505.795.4805 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From myoung6 at nd.edu Fri Mar 17 13:56:05 2017 From: myoung6 at nd.edu (Michael Young) Date: Fri, 17 Mar 2017 13:56:05 -0400 Subject: [labnetwork] Synchronized Clocks for Facility In-Reply-To: <1ff1e4ea8f41485685e00d92ee3645f5@DCNS-MSGMLT-03.andrew.ad.cmu.edu> References: <1ff1e4ea8f41485685e00d92ee3645f5@DCNS-MSGMLT-03.andrew.ad.cmu.edu> Message-ID: An HTML attachment was scrubbed... URL: From nclay at upenn.edu Fri Mar 17 21:19:08 2017 From: nclay at upenn.edu (Noah Clay) Date: Fri, 17 Mar 2017 21:19:08 -0400 Subject: [labnetwork] Synchronized Clocks for Facility In-Reply-To: <4d31a7d414e74454849bfcfc029477a5@PGH-MSGMLT-01.andrew.ad.cmu.edu> References: <1ff1e4ea8f41485685e00d92ee3645f5@DCNS-MSGMLT-03.andrew.ad.cmu.edu> <4d31a7d414e74454849bfcfc029477a5@PGH-MSGMLT-01.andrew.ad.cmu.edu> Message-ID: <3E85B10C-59A5-49F8-80D4-B823E5706653@upenn.edu> Mason, We use Lacrosse clocks; perhaps we have ~12 of these. I believe the model is: http://www.lacrossetechnology.com/wt-8112u-solar-atomic-digital-clock/ We liked the temp/humidity display, but please don't ask how we might one day calibrate this :-D They don't always sync, yet they are all consistently within 1-3 minutes of each other. Noah Clay Director, Quattrone Nanofabrication Facility University of Pennsylvania > On Mar 17, 2017, at 13:08, Mark Weiler wrote: > > Tissot is great' > > Sent from my iPhone > > On Mar 17, 2017, at 11:44 AM, Mason Risley wrote: > >> Happy St. Patricks day everyone, >> >> Have a less technical and more mundane question today ? I?m looking into getting a synchronized clock system for our lab and was wondering if anyone had positive or negative experiences with a clock company or clock supplier they?ve working with and/or preferences of wired vs wifi etc. >> >> >> Thanks, >> >> Mason Risley >> Process Development Engineer >> Carnegie Mellon University Nanofabrication >> 5000 Forbes Street, Pittsburgh PA 15213 >> nanofab-staff at lists.andrew.cmu.edu | http://www.nanofab.ece.cmu.edu/ >> ph: 412.268.5419 | cell : 505.795.4805 >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From lej at danchip.dtu.dk Sat Mar 18 07:43:48 2017 From: lej at danchip.dtu.dk (Leif Johansen) Date: Sat, 18 Mar 2017 11:43:48 +0000 Subject: [labnetwork] Chemical resistant apron storage In-Reply-To: References: Message-ID: <879AEF5002D70747B136D02BC86A9C980C5BE40B@ait-pex02mbx05.win.dtu.dk> Hello Danny, We have had the same problem at DTU Danchip and have come up with two attempts to solve it (please refer to the pictures below). The first solution is simply to place aprons on hangers. This takes up space and the risk of the inside of an apron touching the outside of another apron is still present, albeit somewhat reduced. The second solution is to hang the aprons on a triangular pole. If one only hangs one apron on each side, the risk of aprons touching each other is reduced. This, however, limits the number of aprons to three. The pole consists of magnetic, stainless steel plates, which are welded together. All items hanging on the pole are fixed with magnets. [cid:image005.jpg at 01D29FE5.49CE26E0] [cid:image006.jpg at 01D29FE5.49CE26E0] Best regards, Leif Leif S. Johansen Head of Operations DTU Danchip Technical University of Denmark [http://www.dtu.dk/images/DTU_email_logo_01.gif] Danchip ?rsteds Plads, Byg. 347 2800 Lyngby Direct +45 45255713 Mobile +45 25348992 lesjo at danchip.dtu.dk www.danchip.dtu.dk/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Danny Pestal Sent: 16. marts 2017 20:43 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Chemical resistant apron storage Dear Labnetwork, I am reaching out for responses on how everyone manages their chemical resistant apron PPE storage. Our current solution of hanging them from hooks on the sides of the wet process benches leaves much to be desired. There is not a lot of room in the hanging area so the aprons get bunched up and apron fronts touch apron backs which increases the potential risk of a chemical exposure to the next wearer. Before I spend the efforts attempting to come up with a mechanical solution of hanging the aprons so they can't interact (with themselves and with each other), I am wondering if anyone has implemented a more simple way to manage this risk. Thanks, Danny Pestal Facilities Manager Marvell NanoLab University of California, Berkeley 510-809-8600 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image007.gif Type: image/gif Size: 1055 bytes Desc: image007.gif URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image005.jpg Type: image/jpeg Size: 33824 bytes Desc: image005.jpg URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image006.jpg Type: image/jpeg Size: 44737 bytes Desc: image006.jpg URL: From jclarkson at google.com Mon Mar 20 23:25:19 2017 From: jclarkson at google.com (Jeff Clarkson) Date: Mon, 20 Mar 2017 20:25:19 -0700 Subject: [labnetwork] Flip Chip Bonding needs In-Reply-To: <027801d29dcb$d8d2eef0$8a78ccd0$@ece.ucsb.edu> References: <61A4E102-0B6C-40AA-AE0E-84F240146E4C@uw.edu> <027801d29dcb$d8d2eef0$8a78ccd0$@ece.ucsb.edu> Message-ID: That's a great list! We have an opening in our microfabrication lab here at Verily (Formerly Google Life Sciences) for a packaging/assembly/flip-chip bonding process engineer. Most of their work will be oriented around chip bonding processes using a Fineplacer Femto automated system. A job description is attached. Please submit resumes to me directly. Regards, On Wed, Mar 15, 2017 at 1:36 PM, Brian Thibeault wrote: > To all, Please add UCSB to the list as well. > > > > Thanks, > > Brian > > > > > > *********************************** > > Brian Thibeault, Ph.D > > Project Scientist/Manager > > UCSB Nanofabrication Facility > > Santa Barbara, CA 93106 > > > > 805-893-2268 <(805)%20893-2268> > > www.nanotech.ucsb.edu > > thibeault at ece.ucsb.edu > > > > > > > > *From:* labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces@ > mtl.mit.edu] *On Behalf Of *Robert Avila > *Sent:* Tuesday, March 14, 2017 9:16 AM > *To:* julia.aebersold at louisville.edu; Michael Khbeis ; > Kamal Yadav > > *Cc:* labnetwork at mtl.mit.edu > *Subject:* Re: [labnetwork] Flip Chip Bonding needs > > > > Good to see Dr. Khbeis and others respond. > > > > Finetech has die bonders installed at many Universities?to name a few and > my apologies for those I missed ? > > > > University of Arizona, > > University of Arizona State > > Cal Berkeley > > Cal Davis > > Stanford > > Cal Tech > > University of Washington > > University of Louisville > > University of Colorado State > > University of Alaska > > University of Alberta > > University of Arkansas > > University of S.Florida > > MIT > > Harvard > > Rice > > > > > > > > Regards, > > Robert Avila > > (')480.231.7902 <(480)%20231-7902> mobile > > (')480-893-1630 <(480)%20893-1630> office > > finetechusa.com *8* > > > > > > *From:* labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces@ > mtl.mit.edu ] *On Behalf Of * > julia.aebersold at louisville.edu > *Sent:* Tuesday, March 14, 2017 7:25 AM > *To:* Michael Khbeis ; Kamal Yadav > *Cc:* labnetwork at mtl.mit.edu > *Subject:* Re: [labnetwork] Flip Chip Bonding needs > > > > We also have flip chip bonding capabilities. 50kg seems quite a bit and > would crush most silicon and/or glass substrates. > > > > Cheers! > > > > Julia Aebersold, Ph.D. > > Cleanroom Manager > > Micro/Nano Technology Center > > University of Louisville > > Shumaker Research Building, Room 233 > > 2210 South Brook Street > > Louisville, KY 40292 > > > > 502-852-1572 <(502)%20852-1572> > > http://louisville.edu/micronano/ > > > > *From:* labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces@ > mtl.mit.edu ] *On Behalf Of *Michael > Khbeis > *Sent:* Tuesday, March 14, 2017 7:55 AM > *To:* Kamal Yadav > *Cc:* labnetwork at mtl.mit.edu > *Subject:* Re: [labnetwork] Flip Chip Bonding needs > > > > Kamal > > > > We can accommodate. What type of bond? > > > > Best, > > Dr. Michael Khbeis > > Washington Nanofab Facility > University of Washington > Fluke Hall, Box 352143 > (O) 206.543.5101 > (C) 443.254.5192 > khbeis at uw.edu > > > On Mar 13, 2017, at 2:17 PM, Kamal Yadav wrote: > > Dear All, > > > > Kindly let me know if you know or if you can provide flip chip bonding > services at a University cleanroom or similar, on the west coast preferably > [due to our own location], but we are open to other places as well. > > > > Bonding force required: Around 50 Kg > > Die Size: 5 mm to 35 mm. > > Alignment: 5 micron or better. > > > > -- > > Thanks, > > Kamal > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- Jeffrey P. Clarkson, *Ph.D.* | Hardware Engineer | jclarkson at google.com | 650-495-2071 *v**erily* -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: OpenRelease-HardwareTestEngineerJD (1).pdf Type: application/pdf Size: 49818 bytes Desc: not available URL: From novembre at Princeton.EDU Tue Mar 21 15:14:23 2017 From: novembre at Princeton.EDU (Anthony Novembre Jr.) Date: Tue, 21 Mar 2017 19:14:23 +0000 Subject: [labnetwork] Job Opportunity at Princeton's Micro/Nanofabrication Clean Room Facility Message-ID: <5F0E8DF192EC06419E5D0A0A567A10ADCAA42EDC@CSGMBX212W.pu.win.princeton.edu> Hello Everyone, The PRISM Micro/Nanofabrication clean room facility at Princeton University has an immediate opening for a Director of Research and User Relations. A general description of the position is as follows: The role of the Director of Research and User Relations is to be the scientific and technical leader of the PRISM Micro/Nanofabrication clean room facility. Responsibilities will include daily oversight of the technical staff and equipment maintenance as well as user assistance and training. In addition, the ideal candidate will help in developing research and educational activities within PRISM. Candidates for this position are expected to have experience in the operations of an academic clean room and expertise in technical areas including photolithography, nanolithography, metrology, physical & chemical vapor deposition, pattern transfer processes and soft lithography. For complete details and how to apply for this position please go to: https://puwebp.princeton.edu/AcadHire/apply/application.xhtml?listingId=321 Job requisition number: D-17-PSM-00001 Anthony Novembre Associate Director Princeton Institute for the Science & Technology of Materials (PRISM) Princeton University, 322 Bowen Hall 70 Prospect Ave., Princeton, NJ 08540 Tel: (609) 258-6855, Fax: (609) 258-1177 novembre at princeton.edu http://www.princeton.edu/prism/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From eabelev at pitt.edu Tue Mar 21 15:49:04 2017 From: eabelev at pitt.edu (Abelev, Esta) Date: Tue, 21 Mar 2017 19:49:04 +0000 Subject: [labnetwork] Surplus equipment Message-ID: Dear All, Our facility is looking to acquire following pieces of equipment: thermal evaporator, sputtering tool, spin coaters, hot plates, oxidation oven and RTA. If somebody can recommend a reliable refurb company or may have such an equipment and looking to sell it, please let me know. Thank you, Esta ----------------------- Esta Abelev, PhD Technical Director, Petersen Institute of NanoScience and Engineering University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261 412-383-4096 | eabelev at pitt.edu | nano.pitt.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Tue Mar 21 18:15:01 2017 From: julia.aebersold at louisville.edu (julia.aebersold at louisville.edu) Date: Tue, 21 Mar 2017 22:15:01 +0000 Subject: [labnetwork] Surplus equipment In-Reply-To: References: Message-ID: Be very careful with surplused equipment. Many of us have stories of companies that are predators and you should run away from. Rather than a full name shame please e-mail me directly for whom I am referring if interested. Cheers! Julia Aebersold Manager, Micro/Nano Technology Center University of Louisville 2210 South Brook Street Louisville, KY 40292 (502)852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abelev, Esta Sent: Tuesday, March 21, 2017 3:49 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Surplus equipment Dear All, Our facility is looking to acquire following pieces of equipment: thermal evaporator, sputtering tool, spin coaters, hot plates, oxidation oven and RTA. If somebody can recommend a reliable refurb company or may have such an equipment and looking to sell it, please let me know. Thank you, Esta ----------------------- Esta Abelev, PhD Technical Director, Petersen Institute of NanoScience and Engineering University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261 412-383-4096 | eabelev at pitt.edu | nano.pitt.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From kamal.yadav at gmail.com Tue Mar 21 20:24:33 2017 From: kamal.yadav at gmail.com (Kamal Yadav) Date: Tue, 21 Mar 2017 17:24:33 -0700 Subject: [labnetwork] Flip Chip Bonding needs In-Reply-To: References: <61A4E102-0B6C-40AA-AE0E-84F240146E4C@uw.edu> <027801d29dcb$d8d2eef0$8a78ccd0$@ece.ucsb.edu> Message-ID: Dear All, Thanks for your responses, I have contacted separately people who have responded to this. On Mon, Mar 20, 2017 at 8:25 PM, Jeff Clarkson wrote: > That's a great list! > > We have an opening in our microfabrication lab here at Verily (Formerly > Google Life Sciences) for a packaging/assembly/flip-chip bonding process > engineer. Most of their work will be oriented around chip bonding > processes using a Fineplacer Femto automated system. A job description is > attached. > > Please submit resumes to me directly. > > Regards, > > On Wed, Mar 15, 2017 at 1:36 PM, Brian Thibeault > wrote: > >> To all, Please add UCSB to the list as well. >> >> >> >> Thanks, >> >> Brian >> >> >> >> >> >> *********************************** >> >> Brian Thibeault, Ph.D >> >> Project Scientist/Manager >> >> UCSB Nanofabrication Facility >> >> Santa Barbara, CA 93106 >> >> >> >> 805-893-2268 <(805)%20893-2268> >> >> www.nanotech.ucsb.edu >> >> thibeault at ece.ucsb.edu >> >> >> >> >> >> >> >> *From:* labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl >> .mit.edu] *On Behalf Of *Robert Avila >> *Sent:* Tuesday, March 14, 2017 9:16 AM >> *To:* julia.aebersold at louisville.edu; Michael Khbeis ; >> Kamal Yadav >> >> *Cc:* labnetwork at mtl.mit.edu >> *Subject:* Re: [labnetwork] Flip Chip Bonding needs >> >> >> >> Good to see Dr. Khbeis and others respond. >> >> >> >> Finetech has die bonders installed at many Universities?to name a few and >> my apologies for those I missed ? >> >> >> >> University of Arizona, >> >> University of Arizona State >> >> Cal Berkeley >> >> Cal Davis >> >> Stanford >> >> Cal Tech >> >> University of Washington >> >> University of Louisville >> >> University of Colorado State >> >> University of Alaska >> >> University of Alberta >> >> University of Arkansas >> >> University of S.Florida >> >> MIT >> >> Harvard >> >> Rice >> >> >> >> >> >> >> >> Regards, >> >> Robert Avila >> >> (')480.231.7902 <(480)%20231-7902> mobile >> >> (')480-893-1630 <(480)%20893-1630> office >> >> finetechusa.com *8* >> >> >> >> >> >> *From:* labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl >> .mit.edu ] *On Behalf Of * >> julia.aebersold at louisville.edu >> *Sent:* Tuesday, March 14, 2017 7:25 AM >> *To:* Michael Khbeis ; Kamal Yadav >> *Cc:* labnetwork at mtl.mit.edu >> *Subject:* Re: [labnetwork] Flip Chip Bonding needs >> >> >> >> We also have flip chip bonding capabilities. 50kg seems quite a bit and >> would crush most silicon and/or glass substrates. >> >> >> >> Cheers! >> >> >> >> Julia Aebersold, Ph.D. >> >> Cleanroom Manager >> >> Micro/Nano Technology Center >> >> University of Louisville >> >> Shumaker Research Building, Room 233 >> >> 2210 South Brook Street >> >> Louisville, KY 40292 >> >> >> >> 502-852-1572 <(502)%20852-1572> >> >> http://louisville.edu/micronano/ >> >> >> >> *From:* labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl >> .mit.edu ] *On Behalf Of *Michael Khbeis >> *Sent:* Tuesday, March 14, 2017 7:55 AM >> *To:* Kamal Yadav >> *Cc:* labnetwork at mtl.mit.edu >> *Subject:* Re: [labnetwork] Flip Chip Bonding needs >> >> >> >> Kamal >> >> >> >> We can accommodate. What type of bond? >> >> >> >> Best, >> >> Dr. Michael Khbeis >> >> Washington Nanofab Facility >> University of Washington >> Fluke Hall, Box 352143 >> (O) 206.543.5101 >> (C) 443.254.5192 >> khbeis at uw.edu >> >> >> On Mar 13, 2017, at 2:17 PM, Kamal Yadav wrote: >> >> Dear All, >> >> >> >> Kindly let me know if you know or if you can provide flip chip bonding >> services at a University cleanroom or similar, on the west coast preferably >> [due to our own location], but we are open to other places as well. >> >> >> >> Bonding force required: Around 50 Kg >> >> Die Size: 5 mm to 35 mm. >> >> Alignment: 5 micron or better. >> >> >> >> -- >> >> Thanks, >> >> Kamal >> >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> > > > -- > > > Jeffrey P. Clarkson, *Ph.D.* | Hardware Engineer | > jclarkson at google.com | 650-495-2071 <(650)%20495-2071> > *v**erily* > -- Thanks, Kamal -------------- next part -------------- An HTML attachment was scrubbed... URL: From bob.henderson at etchedintimeinc.com Tue Mar 21 21:59:10 2017 From: bob.henderson at etchedintimeinc.com (Bob Henderson) Date: Tue, 21 Mar 2017 18:59:10 -0700 Subject: [labnetwork] Surplus equipment In-Reply-To: References: Message-ID: <002d01d2a2af$e5d2a710$b177f530$@henderson@etchedintimeinc.com> Esta and Julia: I agree with Julia that there are some shady equipment companies and care must be taken to avoid being burned. That being said I have been involved in the semiconductor industry since 1970 and have held a number of titles such as process engineer, section manager, plasma etch engineer for many years. I started and equipment company in 2000 for new and used equipment sales. Currently, I am winding down my operation to concentrate on a new technology we developed at Etched In Time, Inc. I have been a member of this site for a number of years but I respect the no sales commitment the site asks to follow. I have placed sputtering systems with Berkeley and a number of other universities thru the years and can provide superior references for you to check out. I currently have an MRC 943 sputtering system that EITI completely rebuilt for a Motorola facility in 2001. It has upgraded controls and comes with a substantial spare parts inventory. I recently repurchased it when Motorola closed down the R&D facility it was installed in. This system has 3 cathodes set up for DC magnetron deposition primarily for metals. If you want you can call me at 602-206-6154 for more details. Additionally, I am currently trying to purchase an evaporation system we installed at a local company but I have not inked a purchase yet. Sorry about the length of this email but better safe than sorry. Bob Henderson-President Etched In Time, Inc. 941 S. Park Lane Tempe, Arizona 85281 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of julia.aebersold at louisville.edu Sent: Tuesday, March 21, 2017 3:15 PM To: Abelev, Esta; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Surplus equipment Be very careful with surplused equipment. Many of us have stories of companies that are predators and you should run away from. Rather than a full name shame please e-mail me directly for whom I am referring if interested. Cheers! Julia Aebersold Manager, Micro/Nano Technology Center University of Louisville 2210 South Brook Street Louisville, KY 40292 (502)852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abelev, Esta Sent: Tuesday, March 21, 2017 3:49 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Surplus equipment Dear All, Our facility is looking to acquire following pieces of equipment: thermal evaporator, sputtering tool, spin coaters, hot plates, oxidation oven and RTA. If somebody can recommend a reliable refurb company or may have such an equipment and looking to sell it, please let me know. Thank you, Esta ----------------------- Esta Abelev, PhD Technical Director, Petersen Institute of NanoScience and Engineering University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261 412-383-4096 | eabelev at pitt.edu | nano.pitt.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From ra at finetechusa.com Tue Mar 21 23:08:30 2017 From: ra at finetechusa.com (Robert Avila) Date: Wed, 22 Mar 2017 03:08:30 +0000 Subject: [labnetwork] Surplus equipment In-Reply-To: References: Message-ID: I agree. One of the things to consider, especially being an equipment provider is reach out to your prospective provider and ask them if there is a reconditioned/refurbished/demo unit available. We warranty our used equipment like a new machine. Others should follow suite. Furthermore, if you buy a used machine, the supplier should stand by their product, regardless of who the user is. Imagine Ford saying, sorry, no part for you...you didn't buy it. Regards, Robert Avila (')480.231.7902 mobile (')480-893-1630 office finetechusa.com * From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of julia.aebersold at louisville.edu Sent: Tuesday, March 21, 2017 3:15 PM To: Abelev, Esta ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Surplus equipment Be very careful with surplused equipment. Many of us have stories of companies that are predators and you should run away from. Rather than a full name shame please e-mail me directly for whom I am referring if interested. Cheers! Julia Aebersold Manager, Micro/Nano Technology Center University of Louisville 2210 South Brook Street Louisville, KY 40292 (502)852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abelev, Esta Sent: Tuesday, March 21, 2017 3:49 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Surplus equipment Dear All, Our facility is looking to acquire following pieces of equipment: thermal evaporator, sputtering tool, spin coaters, hot plates, oxidation oven and RTA. If somebody can recommend a reliable refurb company or may have such an equipment and looking to sell it, please let me know. Thank you, Esta ----------------------- Esta Abelev, PhD Technical Director, Petersen Institute of NanoScience and Engineering University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261 412-383-4096 | eabelev at pitt.edu | nano.pitt.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From rdevito at draper.com Wed Mar 22 10:34:10 2017 From: rdevito at draper.com (DeVito, Richard) Date: Wed, 22 Mar 2017 14:34:10 +0000 Subject: [labnetwork] Surplus equipment In-Reply-To: References: Message-ID: <4D4DC9950B39B0489D5F4855A55FB0BE566F3753@mbx1.draper.com> It's always good to get an itemized list and break down of what was done to actually refurbish the machine and have them sign off on it. Also, have a site or factory acceptance test with criterion that ensures it is a working system and hold back 20% or so if they don't pass the acceptance test. It is a very good incentive for them to give you a working piece of equipment. IF companies won't abide by this then walk away no matter how attractive the price point looks! Rich DeVito Microfab Director/Group Leader Draper Labs Cambridge MA From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of julia.aebersold at louisville.edu Sent: Tuesday, March 21, 2017 6:15 PM To: Abelev, Esta ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Surplus equipment Be very careful with surplused equipment. Many of us have stories of companies that are predators and you should run away from. Rather than a full name shame please e-mail me directly for whom I am referring if interested. Cheers! Julia Aebersold Manager, Micro/Nano Technology Center University of Louisville 2210 South Brook Street Louisville, KY 40292 (502)852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abelev, Esta Sent: Tuesday, March 21, 2017 3:49 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Surplus equipment Dear All, Our facility is looking to acquire following pieces of equipment: thermal evaporator, sputtering tool, spin coaters, hot plates, oxidation oven and RTA. If somebody can recommend a reliable refurb company or may have such an equipment and looking to sell it, please let me know. Thank you, Esta ----------------------- Esta Abelev, PhD Technical Director, Petersen Institute of NanoScience and Engineering University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261 412-383-4096 | eabelev at pitt.edu | nano.pitt.edu ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From tbritton at criticalsystemsinc.com Wed Mar 22 11:52:07 2017 From: tbritton at criticalsystemsinc.com (Tom Britton) Date: Wed, 22 Mar 2017 15:52:07 +0000 Subject: [labnetwork] Surplus equipment In-Reply-To: References: Message-ID: Hi Esta, What Julia writes is very true. When it comes to "used" equipment, you can get everything from a stripped tool with missing parts and obsolete software, no passwords to service the equipment and minimal to no support, to fully-reconditioned equipment with an excellent support network, access to spare parts, field service, warrantees, etc. The old adage that says "if it sounds too good to be true, it probably is" really applies here and it pays to do your homework. That being said, there are a number of companies who actively support the UGIM network, providing either used, rebuilt or reconditioned tools, and are excellent suppliers, going out of their way to make sure that the University cleanrooms are provided with first rate equipment, service and cost savings. When selecting a supplier it is best to make sure they first, have a good reputation; second, have a support team with the technical ability to answer your questions and fix the tools provided; third, have the spare parts to cover the equipment "after" the sale; and fourth, have a warranty that adequately covers the equipment after you buy it. It they don't have this, understand that your team will need to either hire the support functions or do it themselves. It wasn't long ago when Universities relied on "donated" equipment and had to make it work, and that can still be a good way to save money if you are set up to support the equipment internally in an "as-is" state. Shameless plug: Our company, Critical Systems, has been providing Universities with professionally reconditioned gas delivery and abatement equipment for over 15 years, and provides the cost savings desired by those on a budget, on equipment that includes full engineering support, on-site startup and training, off the shelf spares, free technical phone support and warrantees that compare to new equipment. I hope this helps. All the best, Tom Tom Britton Director of Sales Critical Systems, Inc. Direct: 208-890-1417 Office: 877-572-5515 www.CriticalSystemsInc.com [logo for email signature png] From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of julia.aebersold at louisville.edu Sent: Tuesday, March 21, 2017 4:15 PM To: Abelev, Esta ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Surplus equipment Be very careful with surplused equipment. Many of us have stories of companies that are predators and you should run away from. Rather than a full name shame please e-mail me directly for whom I am referring if interested. Cheers! Julia Aebersold Manager, Micro/Nano Technology Center University of Louisville 2210 South Brook Street Louisville, KY 40292 (502)852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abelev, Esta Sent: Tuesday, March 21, 2017 3:49 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Surplus equipment Dear All, Our facility is looking to acquire following pieces of equipment: thermal evaporator, sputtering tool, spin coaters, hot plates, oxidation oven and RTA. If somebody can recommend a reliable refurb company or may have such an equipment and looking to sell it, please let me know. Thank you, Esta ----------------------- Esta Abelev, PhD Technical Director, Petersen Institute of NanoScience and Engineering University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261 412-383-4096 | eabelev at pitt.edu | nano.pitt.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 9501 bytes Desc: image001.png URL: From philh at montana.edu Wed Mar 22 15:44:25 2017 From: philh at montana.edu (Himmer, Phil) Date: Wed, 22 Mar 2017 19:44:25 +0000 Subject: [labnetwork] Surplus equipment In-Reply-To: References: , Message-ID: HI Esta One item I have not seen mentioned on this thread is problem of shipping used goods. Unless the seller is willing to take shipping responsibility, FOB destination, I would suggest that you should not purchase from them. This should not be an issue with reliable vendors. This way the seller is responsible If the tool doesn?t work as promised. Good luck Phil Dr. Phillip Himmer Facility Manager- Montana Microfacrication Facility Montana State University From: Tom Britton Sent: Wednesday, March 22, 2017 1:25 PM To: Abelev, Esta; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Surplus equipment Hi Esta, What Julia writes is very true. When it comes to ?used? equipment, you can get everything from a stripped tool with missing parts and obsolete software, no passwords to service the equipment and minimal to no support, to fully-reconditioned equipment with an excellent support network, access to spare parts, field service, warrantees, etc. The old adage that says ?if it sounds too good to be true, it probably is? really applies here and it pays to do your homework. That being said, there are a number of companies who actively support the UGIM network, providing either used, rebuilt or reconditioned tools, and are excellent suppliers, going out of their way to make sure that the University cleanrooms are provided with first rate equipment, service and cost savings. When selecting a supplier it is best to make sure they first, have a good reputation; second, have a support team with the technical ability to answer your questions and fix the tools provided; third, have the spare parts to cover the equipment ?after? the sale; and fourth, have a warranty that adequately covers the equipment after you buy it. It they don?t have this, understand that your team will need to either hire the support functions or do it themselves. It wasn?t long ago when Universities relied on ?donated? equipment and had to make it work, and that can still be a good way to save money if you are set up to support the equipment internally in an ?as-is? state. Shameless plug: Our company, Critical Systems, has been providing Universities with professionally reconditioned gas delivery and abatement equipment for over 15 years, and provides the cost savings desired by those on a budget, on equipment that includes full engineering support, on-site startup and training, off the shelf spares, free technical phone support and warrantees that compare to new equipment. I hope this helps. All the best, Tom Tom Britton Director of Sales Critical Systems, Inc. Direct: 208-890-1417 Office: 877-572-5515 www.CriticalSystemsInc.com [logo for email signature png] From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of julia.aebersold at louisville.edu Sent: Tuesday, March 21, 2017 4:15 PM To: Abelev, Esta ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Surplus equipment Be very careful with surplused equipment. Many of us have stories of companies that are predators and you should run away from. Rather than a full name shame please e-mail me directly for whom I am referring if interested. Cheers! Julia Aebersold Manager, Micro/Nano Technology Center University of Louisville 2210 South Brook Street Louisville, KY 40292 (502)852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abelev, Esta Sent: Tuesday, March 21, 2017 3:49 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Surplus equipment Dear All, Our facility is looking to acquire following pieces of equipment: thermal evaporator, sputtering tool, spin coaters, hot plates, oxidation oven and RTA. If somebody can recommend a reliable refurb company or may have such an equipment and looking to sell it, please let me know. Thank you, Esta ----------------------- Esta Abelev, PhD Technical Director, Petersen Institute of NanoScience and Engineering University of Pittsburgh | 3700 O?Hara Street | 636| Pittsburgh, PA 15261 412-383-4096 | eabelev at pitt.edu | nano.pitt.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 9501 bytes Desc: image001.png URL: From info at fabsurplus.com Thu Mar 23 11:57:52 2017 From: info at fabsurplus.com (Stephen Howe) Date: Thu, 23 Mar 2017 16:57:52 +0100 Subject: [labnetwork] Surplus equipment In-Reply-To: References: , Message-ID: <1490284672.2941.32.camel@stephen-Q500A> Dear Phil, This is not how the used equipment business works. They have a great saying that explains this part of the sales procedure in Italian. In the Middle Ages, if you wanted to sell a pig, the sales procedure was you took it to the market on a leash and you tried to offer it to people until you found a buyer who satisfied your expectations of value. In Italy, they say that a wise seller will always "Keep the pig in his hand" until the negotiation is finished and money is exchanged. If a buyer is purchasing equipment "as is", then they should expect to pay for the equipment 100% down, before the equipment is shipped. Having said that, of course I would very strongly recommend that one should always carefully inspect in as much detail as possible any item of equipment before it is purchased. No exceptions. It is also a very good idea to record as many serial numbers as possible during the inspection and keep a close watch on subsequent operations like crating, because it has happened to me that certain unscrupulous companies (At least one of whom are in the Fortune 500) have removed parts, lost parts or swapped out parts on equipment which I have purchased prior to the equipment leaving the customer dock. Personally, I always thoroughly inventory and keep a close eye on the equipment until the crates are sealed and the equipment has been picked up by my forwarder unless I very well know and trust the supplier. I have been dealing in used semiconductor equipment since 1998, and , I am sorry to say that my confidence in human nature has only declined over the years in the light of my experiences. The whole area of used equipment is most definitely covered by another Latin saying "Cavit Emptor" i.e. "Buyer beware". Yours sincerely, Stephen Howe Company Owner SDI Fabsurplus Group +1 830 388 1071 (Mobile) +39 335 710 7756 (Mobile, Italy) Skype: Stephencshowe email: info at fabsurplus.com WWW.FABSURPLUS.COM Facebook: www.facebook.com/fabsurplus Twitter: http://twitter.com/fabsurplus Google+: https://plus.google.com/+Fabsurplus On Wed, 2017-03-22 at 19:44 +0000, Himmer, Phil wrote: > HI Esta > > > > One item I have not seen mentioned on this thread is problem of > shipping used goods. > > Unless the seller is willing to take shipping responsibility, FOB > destination, I would suggest that you should not purchase from them. > This should not be an issue with reliable vendors. This way the seller > is responsible If the tool doesn?t work as promised. > > > > > > Good luck > > Phil > > > > > > Dr. Phillip Himmer > Facility Manager- Montana Microfacrication Facility > Montana State University > > > > From: Tom Britton > Sent: Wednesday, March 22, 2017 1:25 PM > To: Abelev, Esta; labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Surplus equipment > > > > > > Hi Esta, > > > > What Julia writes is very true. When it comes to ?used? equipment, you > can get everything from a stripped tool with missing parts and > obsolete software, no passwords to service the equipment and minimal > to no support, to fully-reconditioned equipment with an excellent > support network, access to spare parts, field service, warrantees, > etc. The old adage that says ?if it sounds too good to be true, it > probably is? really applies here and it pays to do your homework. > > > > That being said, there are a number of companies who actively support > the UGIM network, providing either used, rebuilt or reconditioned > tools, and are excellent suppliers, going out of their way to make > sure that the University cleanrooms are provided with first rate > equipment, service and cost savings. When selecting a supplier it is > best to make sure they first, have a good reputation; second, have a > support team with the technical ability to answer your questions and > fix the tools provided; third, have the spare parts to cover the > equipment ?after? the sale; and fourth, have a warranty that > adequately covers the equipment after you buy it. It they don?t have > this, understand that your team will need to either hire the support > functions or do it themselves. It wasn?t long ago when Universities > relied on ?donated? equipment and had to make it work, and that can > still be a good way to save money if you are set up to support the > equipment internally in an ?as-is? state. > > > > Shameless plug: Our company, Critical Systems, has been providing > Universities with professionally reconditioned gas delivery and > abatement equipment for over 15 years, and provides the cost savings > desired by those on a budget, on equipment that includes full > engineering support, on-site startup and training, off the shelf > spares, free technical phone support and warrantees that compare to > new equipment. > > > > I hope this helps. > > > > All the best, > > > > Tom > > > > Tom Britton > > Director of Sales > > Critical Systems, Inc. > > Direct: 208-890-1417 > > Office: 877-572-5515 > > www.CriticalSystemsInc.com > > > > logo for email signature png > > > > > From: labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of > julia.aebersold at louisville.edu > Sent: Tuesday, March 21, 2017 4:15 PM > To: Abelev, Esta ; labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Surplus equipment > > > > > Be very careful with surplused equipment. Many of us have stories of > companies that are predators and you should run away from. Rather > than a full name shame please e-mail me directly for whom I am > referring if interested. > > > > Cheers! > > > > Julia Aebersold > > Manager, Micro/Nano Technology Center > > University of Louisville > > 2210 South Brook Street > > Louisville, KY 40292 > > (502)852-1572 > > > > http://louisville.edu/micronano/ > > > > > From: labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abelev, Esta > Sent: Tuesday, March 21, 2017 3:49 PM > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Surplus equipment > > > > > Dear All, > > > > Our facility is looking to acquire following pieces of equipment: > thermal evaporator, sputtering tool, spin coaters, hot plates, > oxidation oven and RTA. If somebody can recommend a reliable refurb > company or may have such an equipment and looking to sell it, please > let me know. > > > > Thank you, Esta > > > > ----------------------- > > Esta Abelev, PhD > > Technical Director, Petersen Institute of NanoScience and Engineering > > University of Pittsburgh | 3700 O?Hara Street | 636| Pittsburgh, PA > 15261 > > 412-383-4096 | eabelev at pitt.edu | nano.pitt.edu > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From philh at montana.edu Thu Mar 23 12:35:33 2017 From: philh at montana.edu (Himmer, Phil) Date: Thu, 23 Mar 2017 16:35:33 +0000 Subject: [labnetwork] Surplus equipment shipping Message-ID: Hi Stephen I apologize for not being more detailed in my email. My primary concern is not necessarily the uncertainty of working with a used equipment broker, I agree many are quite reliable , but the combination of the shipping company and equipment vender. If the tool does not work as the buyer you have limited ability to hold either party responsible. As a person who works in this field perhaps you can shed some light on how a buyer can insure a used equipment shipment for damage due to shipping. In my limited experience shippers will not offer insurance on used goods so in effect you are buying as-is not only from the equipment vendor but also the shipping company. Appreciate any guidance on this issue will be appreciated as I also like to purchase used tools when possible Regards Phil -----Original Message----- From: Stephen Howe [mailto:info at fabsurplus.com] Sent: Thursday, March 23, 2017 9:58 AM To: Himmer, Phil Cc: Abelev, Esta ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Surplus equipment Dear Phil, This is not how the used equipment business works. They have a great saying that explains this part of the sales procedure in Italian. In the Middle Ages, if you wanted to sell a pig, the sales procedure was you took it to the market on a leash and you tried to offer it to people until you found a buyer who satisfied your expectations of value. In Italy, they say that a wise seller will always "Keep the pig in his hand" until the negotiation is finished and money is exchanged. If a buyer is purchasing equipment "as is", then they should expect to pay for the equipment 100% down, before the equipment is shipped. Having said that, of course I would very strongly recommend that one should always carefully inspect in as much detail as possible any item of equipment before it is purchased. No exceptions. It is also a very good idea to record as many serial numbers as possible during the inspection and keep a close watch on subsequent operations like crating, because it has happened to me that certain unscrupulous companies (At least one of whom are in the Fortune 500) have removed parts, lost parts or swapped out parts on equipment which I have purchased prior to the equipment leaving the customer dock. Personally, I always thoroughly inventory and keep a close eye on the equipment until the crates are sealed and the equipment has been picked up by my forwarder unless I very well know and trust the supplier. I have been dealing in used semiconductor equipment since 1998, and , I am sorry to say that my confidence in human nature has only declined over the years in the light of my experiences. The whole area of used equipment is most definitely covered by another Latin saying "Cavit Emptor" i.e. "Buyer beware". Yours sincerely, Stephen Howe Company Owner SDI Fabsurplus Group +1 830 388 1071 (Mobile) +39 335 710 7756 (Mobile, Italy) Skype: Stephencshowe email: info at fabsurplus.com WWW.FABSURPLUS.COM Facebook: www.facebook.com/fabsurplus Twitter: http://twitter.com/fabsurplus Google+: https://plus.google.com/+Fabsurplus On Wed, 2017-03-22 at 19:44 +0000, Himmer, Phil wrote: > HI Esta > > > > One item I have not seen mentioned on this thread is problem of > shipping used goods. > > Unless the seller is willing to take shipping responsibility, FOB > destination, I would suggest that you should not purchase from them. > This should not be an issue with reliable vendors. This way the seller > is responsible If the tool doesn?t work as promised. > > > > > > Good luck > > Phil > > > > > > Dr. Phillip Himmer > Facility Manager- Montana Microfacrication Facility Montana State > University > > > > From: Tom Britton > Sent: Wednesday, March 22, 2017 1:25 PM > To: Abelev, Esta; labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Surplus equipment > > > > > > Hi Esta, > > > > What Julia writes is very true. When it comes to ?used? equipment, you > can get everything from a stripped tool with missing parts and > obsolete software, no passwords to service the equipment and minimal > to no support, to fully-reconditioned equipment with an excellent > support network, access to spare parts, field service, warrantees, > etc. The old adage that says ?if it sounds too good to be true, it > probably is? really applies here and it pays to do your homework. > > > > That being said, there are a number of companies who actively support > the UGIM network, providing either used, rebuilt or reconditioned > tools, and are excellent suppliers, going out of their way to make > sure that the University cleanrooms are provided with first rate > equipment, service and cost savings. When selecting a supplier it is > best to make sure they first, have a good reputation; second, have a > support team with the technical ability to answer your questions and > fix the tools provided; third, have the spare parts to cover the > equipment ?after? the sale; and fourth, have a warranty that > adequately covers the equipment after you buy it. It they don?t have > this, understand that your team will need to either hire the support > functions or do it themselves. It wasn?t long ago when Universities > relied on ?donated? equipment and had to make it work, and that can > still be a good way to save money if you are set up to support the > equipment internally in an ?as-is? state. > > > > Shameless plug: Our company, Critical Systems, has been providing > Universities with professionally reconditioned gas delivery and > abatement equipment for over 15 years, and provides the cost savings > desired by those on a budget, on equipment that includes full > engineering support, on-site startup and training, off the shelf > spares, free technical phone support and warrantees that compare to > new equipment. > > > > I hope this helps. > > > > All the best, > > > > Tom > > > > Tom Britton > > Director of Sales > > Critical Systems, Inc. > > Direct: 208-890-1417 > > Office: 877-572-5515 > > www.CriticalSystemsInc.com > > > > logo for email signature png > > > > > From: labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of > julia.aebersold at louisville.edu > Sent: Tuesday, March 21, 2017 4:15 PM > To: Abelev, Esta ; labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Surplus equipment > > > > > Be very careful with surplused equipment. Many of us have stories of > companies that are predators and you should run away from. Rather > than a full name shame please e-mail me directly for whom I am > referring if interested. > > > > Cheers! > > > > Julia Aebersold > > Manager, Micro/Nano Technology Center > > University of Louisville > > 2210 South Brook Street > > Louisville, KY 40292 > > (502)852-1572 > > > > http://louisville.edu/micronano/ > > > > > From: labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abelev, Esta > Sent: Tuesday, March 21, 2017 3:49 PM > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Surplus equipment > > > > > Dear All, > > > > Our facility is looking to acquire following pieces of equipment: > thermal evaporator, sputtering tool, spin coaters, hot plates, > oxidation oven and RTA. If somebody can recommend a reliable refurb > company or may have such an equipment and looking to sell it, please > let me know. > > > > Thank you, Esta > > > > ----------------------- > > Esta Abelev, PhD > > Technical Director, Petersen Institute of NanoScience and Engineering > > University of Pittsburgh | 3700 O?Hara Street | 636| Pittsburgh, PA > 15261 > > 412-383-4096 | eabelev at pitt.edu | nano.pitt.edu > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From info at fabsurplus.com Thu Mar 23 14:15:44 2017 From: info at fabsurplus.com (Stephen Howe) Date: Thu, 23 Mar 2017 19:15:44 +0100 Subject: [labnetwork] Surplus equipment shipping In-Reply-To: References: Message-ID: <1490292944.2941.71.camel@stephen-Q500A> Dear Phil, I think the key points here are the conditions of sale. If the equipment is sold "as is", without warranty, then you can't rely on being able to return the goods so therefore they must be inspected carefully before purchase. Of course, used equipment can also be purchased with a warranty, in which case the sales procedure is similar to that as for new equipment and a return may be possible under the terms of the warranty. Regarding insurance during the shipping procedure, this is covered by "Incoterms" , which are explained here:- https://en.wikipedia.org/wiki/Incoterms In any case, regardless of all the problems, we do get a huge volume of requests for used equipment(More than we can answer, unfortunately.) as the prices of used tools are generally lower than the prices of new tools. Also, it does pay to shop about, as the market is very diversified and the price you pay for equipment depends a lot on the circumstances of the seller and how urgently he needs to sell the equipment, especially with larger 300 mm tools which cost a lot to store and ship. Yours sincerely, Stephen Howe Company Owner SDI Fabsurplus Group +1 830 388 1071 (Mobile) +39 335 710 7756 (Mobile, Italy) Skype: Stephencshowe email: info at fabsurplus.com WWW.FABSURPLUS.COM Facebook: www.facebook.com/fabsurplus Twitter: http://twitter.com/fabsurplus Google+: https://plus.google.com/+Fabsurplus On Thu, 2017-03-23 at 16:35 +0000, Himmer, Phil wrote: > Hi Stephen > > I apologize for not being more detailed in my email. My primary concern is not necessarily the uncertainty of working with a used equipment broker, I agree many are quite reliable , but the combination of the shipping company and equipment vender. If the tool does not work as the buyer you have limited ability to hold either party responsible. > As a person who works in this field perhaps you can shed some light on how a buyer can insure a used equipment shipment for damage due to shipping. In my limited experience shippers will not offer insurance on used goods so in effect you are buying as-is not only from the equipment vendor but also the shipping company. > Appreciate any guidance on this issue will be appreciated as I also like to purchase used tools when possible > > Regards > Phil > > > > > > -----Original Message----- > From: Stephen Howe [mailto:info at fabsurplus.com] > Sent: Thursday, March 23, 2017 9:58 AM > To: Himmer, Phil > Cc: Abelev, Esta ; labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Surplus equipment > > Dear Phil, > > This is not how the used equipment business works. > > They have a great saying that explains this part of the sales procedure in Italian. > In the Middle Ages, if you wanted to sell a pig, the sales procedure was you took it to the market on a leash and you tried to offer it to people until you found a buyer who satisfied your expectations of value. > > In Italy, they say that a wise seller will always "Keep the pig in his hand" until the negotiation is finished and money is exchanged. > > If a buyer is purchasing equipment "as is", then they should expect to pay for the equipment 100% down, before the equipment is shipped. > > Having said that, of course I would very strongly recommend that one should always carefully inspect in as much detail as possible any item of equipment before it is purchased. No exceptions. > It is also a very good idea to record as many serial numbers as possible during the inspection and keep a close watch on subsequent operations like crating, because it has happened to me that certain unscrupulous companies (At least one of whom are in the Fortune 500) have removed parts, lost parts or swapped out parts on equipment which I have purchased prior to the equipment leaving the customer dock. > Personally, I always thoroughly inventory and keep a close eye on the equipment until the crates are sealed and the equipment has been picked up by my forwarder unless I very well know and trust the supplier. > > I have been dealing in used semiconductor equipment since 1998, and , I am sorry to say that my confidence in human nature has only declined over the years in the light of my experiences. > > The whole area of used equipment is most definitely covered by another Latin saying "Cavit Emptor" i.e. "Buyer beware". > > Yours sincerely, > > Stephen Howe > Company Owner > SDI Fabsurplus Group > > +1 830 388 1071 (Mobile) > +39 335 710 7756 (Mobile, Italy) > > Skype: Stephencshowe > email: info at fabsurplus.com > > WWW.FABSURPLUS.COM > > Facebook: www.facebook.com/fabsurplus > Twitter: http://twitter.com/fabsurplus > Google+: https://plus.google.com/+Fabsurplus > > > On Wed, 2017-03-22 at 19:44 +0000, Himmer, Phil wrote: > > HI Esta > > > > > > > > One item I have not seen mentioned on this thread is problem of > > shipping used goods. > > > > Unless the seller is willing to take shipping responsibility, FOB > > destination, I would suggest that you should not purchase from them. > > This should not be an issue with reliable vendors. This way the seller > > is responsible If the tool doesn?t work as promised. > > > > > > > > > > > > Good luck > > > > Phil > > > > > > > > > > > > Dr. Phillip Himmer > > Facility Manager- Montana Microfacrication Facility Montana State > > University > > > > > > > > From: Tom Britton > > Sent: Wednesday, March 22, 2017 1:25 PM > > To: Abelev, Esta; labnetwork at mtl.mit.edu > > Subject: Re: [labnetwork] Surplus equipment > > > > > > > > > > > > Hi Esta, > > > > > > > > What Julia writes is very true. When it comes to ?used? equipment, you > > can get everything from a stripped tool with missing parts and > > obsolete software, no passwords to service the equipment and minimal > > to no support, to fully-reconditioned equipment with an excellent > > support network, access to spare parts, field service, warrantees, > > etc. The old adage that says ?if it sounds too good to be true, it > > probably is? really applies here and it pays to do your homework. > > > > > > > > That being said, there are a number of companies who actively support > > the UGIM network, providing either used, rebuilt or reconditioned > > tools, and are excellent suppliers, going out of their way to make > > sure that the University cleanrooms are provided with first rate > > equipment, service and cost savings. When selecting a supplier it is > > best to make sure they first, have a good reputation; second, have a > > support team with the technical ability to answer your questions and > > fix the tools provided; third, have the spare parts to cover the > > equipment ?after? the sale; and fourth, have a warranty that > > adequately covers the equipment after you buy it. It they don?t have > > this, understand that your team will need to either hire the support > > functions or do it themselves. It wasn?t long ago when Universities > > relied on ?donated? equipment and had to make it work, and that can > > still be a good way to save money if you are set up to support the > > equipment internally in an ?as-is? state. > > > > > > > > Shameless plug: Our company, Critical Systems, has been providing > > Universities with professionally reconditioned gas delivery and > > abatement equipment for over 15 years, and provides the cost savings > > desired by those on a budget, on equipment that includes full > > engineering support, on-site startup and training, off the shelf > > spares, free technical phone support and warrantees that compare to > > new equipment. > > > > > > > > I hope this helps. > > > > > > > > All the best, > > > > > > > > Tom > > > > > > > > Tom Britton > > > > Director of Sales > > > > Critical Systems, Inc. > > > > Direct: 208-890-1417 > > > > Office: 877-572-5515 > > > > www.CriticalSystemsInc.com > > > > > > > > logo for email signature png > > > > > > > > > > From: labnetwork-bounces at mtl.mit.edu > > [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of > > julia.aebersold at louisville.edu > > Sent: Tuesday, March 21, 2017 4:15 PM > > To: Abelev, Esta ; labnetwork at mtl.mit.edu > > Subject: Re: [labnetwork] Surplus equipment > > > > > > > > > > Be very careful with surplused equipment. Many of us have stories of > > companies that are predators and you should run away from. Rather > > than a full name shame please e-mail me directly for whom I am > > referring if interested. > > > > > > > > Cheers! > > > > > > > > Julia Aebersold > > > > Manager, Micro/Nano Technology Center > > > > University of Louisville > > > > 2210 South Brook Street > > > > Louisville, KY 40292 > > > > (502)852-1572 > > > > > > > > http://louisville.edu/micronano/ > > > > > > > > > > From: labnetwork-bounces at mtl.mit.edu > > [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abelev, Esta > > Sent: Tuesday, March 21, 2017 3:49 PM > > To: labnetwork at mtl.mit.edu > > Subject: [labnetwork] Surplus equipment > > > > > > > > > > Dear All, > > > > > > > > Our facility is looking to acquire following pieces of equipment: > > thermal evaporator, sputtering tool, spin coaters, hot plates, > > oxidation oven and RTA. If somebody can recommend a reliable refurb > > company or may have such an equipment and looking to sell it, please > > let me know. > > > > > > > > Thank you, Esta > > > > > > > > ----------------------- > > > > Esta Abelev, PhD > > > > Technical Director, Petersen Institute of NanoScience and Engineering > > > > University of Pittsburgh | 3700 O?Hara Street | 636| Pittsburgh, PA > > 15261 > > > > 412-383-4096 | eabelev at pitt.edu | nano.pitt.edu > > > > > > > > > > > > > > _______________________________________________ > > labnetwork mailing list > > labnetwork at mtl.mit.edu > > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > From dcchrist at wisc.edu Fri Mar 24 14:12:13 2017 From: dcchrist at wisc.edu (Daniel Christensen) Date: Fri, 24 Mar 2017 18:12:13 +0000 Subject: [labnetwork] job open: University of Wisconsin-Madison nanolithography engineer Message-ID: We have a position open at UW-Madison: Nano-Lithography Engineer PVL #88559 Nano-Lithography Engineer PVL #88559 University of Wisconsin - Madison Wisconsin Center for Applied Microelectronics (WCAM) The Wisconsin Center for Applied Microelectronics (WCAM) at the University of Wisconsin-Madison is seeking a Nano-Lithography Engineer. Position Vacancy Listing (PVL) #88559 with an anticipated start date of June 1, 2017. A minimum of BS in Electrical Engineering, Chemical Engineering, Physics, Materials Science, or Interdisciplinary Program Degree with micro/nano device fabrication experience is required. An advanced degree is desirable or equivalent professional experience and knowledge in varied area of semiconductor fabrication and process design. The candidate must have a strong background in the use of micro- and nanofabrication techniques, equipment, and clean room protocols. The position will be responsible for all maintenance and processes in a Nikon i-line stepper and a future (already funded) electron beam lithography tool. Preference will be given to candidates that have a thorough understanding of the operation of the stepper and electron beam instrument, including editing software job files and troubleshooting computer operations. Maintenance will be performed independently by the candidate and in close collaboration with field service engineers. The candidate will be expected to assist students and other researchers in all areas of tool use and process development. The position will be responsible for developing documentation and training materials. The positon will be responsible to training new users on the proper operation of the Nikon i-line stepper and the future electron beam lithography instrument. For a Full Position Description, More Information, & Specific Application Instructions, Please Visit: http://jobs.hr.wisc.edu/cw/en-us/job/493633/nanolithography-engineer All applications must be placed online. A successful applicant will be responsible for ensuring eligibility for employment in the United States on or before the effective date of the appointment. University sponsorship is not available for this position. Unless confidentiality is requested in writing, information regarding applicants must be released upon request. Finalists cannot be guaranteed confidentiality. UW-Madison provides equal employment opportunity for all persons and is in compliance with State and Federal regulations. Daniel C. Christensen WCAM, University of Wisconsin-Madison 1550 Engineering Dr Madison, WI 53706 -------------- next part -------------- An HTML attachment was scrubbed... URL: From na2661 at columbia.edu Tue Mar 28 08:36:41 2017 From: na2661 at columbia.edu (Nava Ariel-Sternberg) Date: Tue, 28 Mar 2017 08:36:41 -0400 Subject: [labnetwork] CoFeB sputtering Message-ID: <004101d2a7bf$f3f2e660$dbd8b320$@columbia.edu> Good morning, Does anyone have experience with sputtering CoFeB? Are there any issues to worry about? (tool contamination, process sensitivities, etc.) Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Facilities Columbia University 530 w120th st., NY 10027 Room 1015/MC 8903 Office: 212-854-9927 Cell: 201-562-7600 ? -------------- next part -------------- An HTML attachment was scrubbed... URL: From sgupta at eng.ua.edu Tue Mar 28 14:47:20 2017 From: sgupta at eng.ua.edu (Gupta, Su) Date: Tue, 28 Mar 2017 18:47:20 +0000 Subject: [labnetwork] CoFeB sputtering In-Reply-To: <004101d2a7bf$f3f2e660$dbd8b320$@columbia.edu> References: <004101d2a7bf$f3f2e660$dbd8b320$@columbia.edu> Message-ID: <7C950A0523CDD047B990B0628532BF36B5A8418F@EX10MBN02.ua-net.ua.edu> Dear Nava: We sputter CoFeB all the time and have no issues to report other than your magnetron needs to be strong enough to sputter a magnetic materials. Best, Su Gupta ________________________________ From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Nava Ariel-Sternberg [na2661 at columbia.edu] Sent: Tuesday, March 28, 2017 7:36 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] CoFeB sputtering Good morning, Does anyone have experience with sputtering CoFeB? Are there any issues to worry about? (tool contamination, process sensitivities, etc.) Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Facilities Columbia University 530 w120th st., NY 10027 Room 1015/MC 8903 Office: 212-854-9927 Cell: 201-562-7600 ? -------------- next part -------------- An HTML attachment was scrubbed... URL: From Vincent.Luciani at nist.gov Tue Mar 28 19:11:59 2017 From: Vincent.Luciani at nist.gov (Luciani, Vincent (Fed)) Date: Tue, 28 Mar 2017 23:11:59 +0000 Subject: [labnetwork] CoFeB sputtering In-Reply-To: <004101d2a7bf$f3f2e660$dbd8b320$@columbia.edu> References: <004101d2a7bf$f3f2e660$dbd8b320$@columbia.edu> Message-ID: Hello Nava, I talked to our PVD expert, Dr. Gerard Henein and he wrote: Yes we do have this target and several users have used it over the years. No safety or contamination concern. It is a very strong ferromagnet so the target needs to be thin (ours is 1/8?) and you need very strong magnets in the sputter gun. The material is also brittle and will develop a crack in the long run. Gradual power up and power down is best. Binding it to a copper backing plate will also help. Feel free to contact Gerard directly if you like. He is a wealth of knowledge. Best, Vince Vincent K. Luciani NanoFab Manager Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, MS 6201 Gaithersburg, MD 20899-6200 USA +1-301-975-2886 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg Sent: Tuesday, March 28, 2017 8:37 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] CoFeB sputtering Good morning, Does anyone have experience with sputtering CoFeB? Are there any issues to worry about? (tool contamination, process sensitivities, etc.) Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Facilities Columbia University 530 w120th st., NY 10027 Room 1015/MC 8903 Office: 212-854-9927 Cell: 201-562-7600 ? -------------- next part -------------- An HTML attachment was scrubbed... URL: From mmoneck at andrew.cmu.edu Tue Mar 28 21:04:31 2017 From: mmoneck at andrew.cmu.edu (Matt Moneck) Date: Tue, 28 Mar 2017 21:04:31 -0400 Subject: [labnetwork] CoFeB sputtering In-Reply-To: <004101d2a7bf$f3f2e660$dbd8b320$@columbia.edu> References: <004101d2a7bf$f3f2e660$dbd8b320$@columbia.edu> Message-ID: <03db01d2a828$6ce91ae0$46bb50a0$@andrew.cmu.edu> Hi Nava, We have done a lot of CoFeB (20-30% B by weight and many variations of Co and Fe percentage) in our facility, and in general, it is not a cause for concern in regards to contamination. We have, however, had issues with flakes building up on the system shields for thick films. On the process side, there are some issues to consider depending on the application. As Su Gupta pointed out, you need to ensure you have enough pass through flux to sustain a DC plasma. Depending on how your cathode is set up, you may need to consider thin targets (<0.1?) if you do not have enough pass through flux. You also need to consider substrate heat. Boron will diffuse out of the CoFeB at temperatures of 250C or above. Even at temperatures below 250C, you can see an impact on the coercivity. While it is unlikely that you will approach anything near 250C from DC sputtering alone, you will want to consider temperature impacts on the film properties. Lastly, you may want to consider the addition of an in situ magnetic field at the substrate if a strong easy axis is required. If your application is simply to have a low coercivity film, you should be able to get what you need relatively easily. However, if your application is for other applications, such as magnetic tunnel junctions, there are many other process related things to consider. I?d be happy to discuss more if needed. Best Regards, Matt -- Matthew T. Moneck, Ph.D. Executive Manager, Carnegie Mellon Nanofabrication Facility Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.5430 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg Sent: Tuesday, March 28, 2017 8:37 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] CoFeB sputtering Good morning, Does anyone have experience with sputtering CoFeB? Are there any issues to worry about? (tool contamination, process sensitivities, etc.) Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Facilities Columbia University 530 w120th st., NY 10027 Room 1015/MC 8903 Office: 212-854-9927 Cell: 201-562-7600 ? -------------- next part -------------- An HTML attachment was scrubbed... URL: From eabelev at pitt.edu Wed Mar 29 21:12:52 2017 From: eabelev at pitt.edu (Abelev, Esta) Date: Thu, 30 Mar 2017 01:12:52 +0000 Subject: [labnetwork] Evaporation of Zn, In and Pb Message-ID: Dear All, Lately our facility had number of requests to deposit Zn, Au-Zn, Pb and In. Please let me know how you handle those in your facilities? Thank you much, Esta ----------------------- Esta Abelev, PhD Technical Director, Petersen Institute of NanoScience and Engineering University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261 412-383-4096 | eabelev at pitt.edu | nano.pitt.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From Boris.Lamontagne at nrc-cnrc.gc.ca Thu Mar 30 16:41:57 2017 From: Boris.Lamontagne at nrc-cnrc.gc.ca (Lamontagne, Boris) Date: Thu, 30 Mar 2017 16:41:57 -0400 Subject: [labnetwork] job opening: PDF on optical MEMS-thin film processing at NRC, Ottawa, Canada Message-ID: The National Research Council, Canada is looking for candidates for a postdoctoral fellowship opening in Ottawa, Canada. Title of the project: Augmented reality eyeglass based on micro-blinds (MEMS) The project will require a recently graduated PhD physicist or engineer with hands-on experience in microfabrication in a cleanroom environment. Experience with MEMS, electrical characterization or flat panel displays will be considered an asset. Please check http://www.nrc-cnrc.gc.ca/eng/careers/programs/postdoctoral_fellowships/pdf_projects.html for more information. Regards, Boris Lamontagne -------------- next part -------------- An HTML attachment was scrubbed... URL: From sturm at Princeton.EDU Fri Mar 31 15:59:48 2017 From: sturm at Princeton.EDU (James C. Sturm) Date: Fri, 31 Mar 2017 19:59:48 +0000 Subject: [labnetwork] Handheld Hydrogen and Hydride (Phosphine, Germane, diborane, silane) detectors Message-ID: <9C4552F2D4B19C44970F1CB90360C99194260EF9@CSGMBX211W.pu.win.princeton.edu> I am looking for handheld detectors to "sniff" at VCR or swagelock joints for leaks of hydrogen and also for common hydrides (silane, germane, diborane, phosphine...). The lab has a central system already, but I am looking for something to sniff at joints with after making connections and repressurizing. (Yes we will Helium leak-check too, but this is as a followup with less likelihood of someone doing it wrong). Many years (25?) we had a handheld unit for hydrides (about 7" x 3 " x 1", with a 4" long rubber sniffer port). Probably made by Matheson but can't seem to find anything similar from them now (although I didn't look very hard). Suggestions? Thanks, Jim Sturm -------------- next part -------------- An HTML attachment was scrubbed... URL: From nclay at upenn.edu Fri Mar 31 20:57:46 2017 From: nclay at upenn.edu (Noah Clay) Date: Fri, 31 Mar 2017 20:57:46 -0400 Subject: [labnetwork] Handheld Hydrogen and Hydride (Phosphine, Germane, diborane, silane) detectors In-Reply-To: <9C4552F2D4B19C44970F1CB90360C99194260EF9@CSGMBX211W.pu.win.princeton.edu> References: <9C4552F2D4B19C44970F1CB90360C99194260EF9@CSGMBX211W.pu.win.princeton.edu> Message-ID: Jim, This may be a good fit: http://www.dodtec.com/clpx/ Or http://www.dodtec.com/xp-703dhydrides/ Best, Noah Noah Clay Director, Quattrone Nanofabrication Facility University of Pennsylvania > On Mar 31, 2017, at 15:59, James C. Sturm wrote: > > I am looking for handheld detectors to ?sniff? at VCR or swagelock joints for leaks of hydrogen and also for common hydrides (silane, germane, diborane, phosphine?). The lab has a central system already, but I am looking for something to sniff at joints with after making connections and repressurizing. (Yes we will Helium leak-check too, but this is as a followup with less likelihood of someone doing it wrong). > > Many years (25?) we had a handheld unit for hydrides (about 7? x 3 ? x 1?, with a 4? long rubber sniffer port). Probably made by Matheson but can?t seem to find anything similar from them now (although I didn?t look very hard). > > Suggestions? > > Thanks, Jim Sturm > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From cekendri at mtu.edu Fri Mar 31 21:17:35 2017 From: cekendri at mtu.edu (Chito Kendrick) Date: Fri, 31 Mar 2017 21:17:35 -0400 Subject: [labnetwork] Handheld Hydrogen and Hydride (Phosphine, Germane, diborane, silane) detectors In-Reply-To: <9C4552F2D4B19C44970F1CB90360C99194260EF9@CSGMBX211W.pu.win.princeton.edu> References: <9C4552F2D4B19C44970F1CB90360C99194260EF9@CSGMBX211W.pu.win.princeton.edu> Message-ID: <58deffaf.c821240a.18b2e.9a5c@mx.google.com> You could try dod technologies. http://www.dodtec.com/xp-703dhydrides/ Chito. -----Original Message----- From: "James C. Sturm" Sent: ?3/?31/?2017 20:15 To: "labnetwork at mtl.mit.edu" Subject: [labnetwork] Handheld Hydrogen and Hydride (Phosphine, Germane,diborane, silane) detectors I am looking for handheld detectors to ?sniff? at VCR or swagelock joints for leaks of hydrogen and also for common hydrides (silane, germane, diborane, phosphine?). The lab has a central system already, but I am looking for something to sniff at joints with after making connections and repressurizing. (Yes we will Helium leak-check too, but this is as a followup with less likelihood of someone doing it wrong). Many years (25?) we had a handheld unit for hydrides (about 7? x 3 ? x 1?, with a 4? long rubber sniffer port). Probably made by Matheson but can?t seem to find anything similar from them now (although I didn?t look very hard). Suggestions? Thanks, Jim Sturm -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Fri Mar 31 21:31:57 2017 From: shott at stanford.edu (John D Shott) Date: Sat, 1 Apr 2017 01:31:57 +0000 Subject: [labnetwork] Handheld Hydrogen and Hydride (Phosphine, Germane, diborane, silane) detectors In-Reply-To: <9C4552F2D4B19C44970F1CB90360C99194260EF9@CSGMBX211W.pu.win.princeton.edu> References: <9C4552F2D4B19C44970F1CB90360C99194260EF9@CSGMBX211W.pu.win.princeton.edu> Message-ID: Jim: Good to hear from you. Even though I am no longer of the front lines, Stanford has used several of these things both for routine checks and for emergency response situations. We have, and still use, a couple of the old Matheson 8057A units that you describe: http://www2.mathesongas.com/pdfs/products/Model-8057A-General-Purpose-Gas-Detector.pdf We also have a couple of the RKI Instruments multi-channel units ? the RKI Eagle which is/was a 4-channel detector. Actually, the newer RKI Eagle 2 monitors up to 6 different gases when you don't know what you are sniffing for. These seems to the the detector of choice for the Fire Departments and HazMat Teams with which I am familiar. http://www.rkiinstruments.com/product/eagle-2/ We also have a handheld paper tape unit made by DODTec for hydrides that can detect all the way down to the TLV for Arsine ? which, to my knowledge, the electrochemical cells can't do: http://www.dodtec.com/clpx/ I'm sure there are more companies with offerings and likely more and newer models, but this should be a starting point for you. I personally like the multi gas units ? even if you think you know what you are looking for ? because I want to be sniffing for as many things as possible when I don't know what I'm looking for. Have a good weekend, John Sent from my iPhone On Mar 31, 2017, at 5:19 PM, James C. Sturm > wrote: I am looking for handheld detectors to ?sniff? at VCR or swagelock joints for leaks of hydrogen and also for common hydrides (silane, germane, diborane, phosphine?). The lab has a central system already, but I am looking for something to sniff at joints with after making connections and repressurizing. (Yes we will Helium leak-check too, but this is as a followup with less likelihood of someone doing it wrong). Many years (25?) we had a handheld unit for hydrides (about 7? x 3 ? x 1?, with a 4? long rubber sniffer port). Probably made by Matheson but can?t seem to find anything similar from them now (although I didn?t look very hard). Suggestions? Thanks, Jim Sturm _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From mmoneck at andrew.cmu.edu Fri Mar 31 23:53:51 2017 From: mmoneck at andrew.cmu.edu (Matt Moneck) Date: Fri, 31 Mar 2017 23:53:51 -0400 Subject: [labnetwork] Handheld Hydrogen and Hydride (Phosphine, Germane, diborane, silane) detectors In-Reply-To: <9C4552F2D4B19C44970F1CB90360C99194260EF9@CSGMBX211W.pu.win.princeton.edu> References: <9C4552F2D4B19C44970F1CB90360C99194260EF9@CSGMBX211W.pu.win.princeton.edu> Message-ID: <189801d2aa9b$93adcf20$bb096d60$@andrew.cmu.edu> Hi Jim, We have used PS-7 and XPS-7 detectors from DOD Technologies for the past few years and have been happy with their performance/ease of use. The XPS-7 is a battery powered handheld portable detector with sensors available for the hydrides you listed (http://www.dodtec.com/site/files/843/87759/315219/450853/XPS-7_rev6.pdf). While I do not have experience "sniffing" such hydrides, I have used the XPS-7 to "sniff" Cl in a manner similar to what you described. Best Regards, Matt -- Matthew T. Moneck, Ph.D. Executive Manager, Carnegie Mellon Nanofabrication Facility Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.5430 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of James C. Sturm Sent: Friday, March 31, 2017 4:00 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Handheld Hydrogen and Hydride (Phosphine, Germane, diborane, silane) detectors I am looking for handheld detectors to "sniff" at VCR or swagelock joints for leaks of hydrogen and also for common hydrides (silane, germane, diborane, phosphine.). The lab has a central system already, but I am looking for something to sniff at joints with after making connections and repressurizing. (Yes we will Helium leak-check too, but this is as a followup with less likelihood of someone doing it wrong). Many years (25?) we had a handheld unit for hydrides (about 7" x 3 " x 1", with a 4" long rubber sniffer port). Probably made by Matheson but can't seem to find anything similar from them now (although I didn't look very hard). Suggestions? Thanks, Jim Sturm -------------- next part -------------- An HTML attachment was scrubbed... URL: