[labnetwork] sputtering In and Pa

[Vlahakis, James]

Hi everyone, one of our users would like to sputter materials that we are unfamiliar with, indium and palladium.

We are considering allowing these materials in our "dirty" sputter tool which has few material restrictions - Au, Ag, Al, Cu, Ge, ITO, Mg, Ni, Ti, Zn and fully cured polymers are allowed. For ITO and Mg we require the users to follow up with an Al sputter for encapsulation.

Your advice or comments would be much appreciated

Thanks

jim
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