[labnetwork] XeF2 sources

[Michael Khbeis]

Colleagues and Friends, 

We are trying to source XeF2 for a new SPTS etcher. In the past, I found Pelchem (South Africa) to be the most cost-effective source for XeF2, but I cannot seem to make successful contact despite repeated emails/calls. 

Can you please recommend sources for XeF2? 

Thanks, 

Dr. Michael Khbeis
Associate Director, Washington Nanofabrication Facility (WNF) 
National Nanotechnology Coordinated Infrastructure (NNCI)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu
www.wnf.washington.edu/

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