[labnetwork] XeF2 sources

[Bob Bicchieri]

Hi Michael,

 

They are part of Linde now.

Call Jane...

 

Regards,

Bob

 

 

Jane Pike

Customer Service, Electronics II 

Linde Electronics and Specialty Gases,

a division of Linde Gas North America LLC

1 Greenwich Street, Suite 100, Stewartsville, NJ 08886

Direct:  908-329-9751  Fax: 866-417-8064

Toll Free: 800-932-0624

 

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Michael Khbeis
Sent: Friday, October 27, 2017 3:06 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] XeF2 sources

 

Colleagues and Friends, 

 

We are trying to source XeF2 for a new SPTS etcher. In the past, I found
Pelchem (South Africa) to be the most cost-effective source for XeF2, but I
cannot seem to make successful contact despite repeated emails/calls. 

 

Can you please recommend sources for XeF2? 

 

Thanks, 

 

Dr. Michael Khbeis
Associate Director, Washington Nanofabrication Facility (WNF) 
National Nanotechnology Coordinated Infrastructure (NNCI)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu
www.wnf.washington.edu/

 

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