[labnetwork] i-line filter for contact mask aligner?

[Xuekun Lu]

Dear all,

I am wondering if there is any benefit to install an i-line filter on
contact mask aligner.

We have a user wanting to create a large hexagonal array of holes in
positive resist. The diameter of the holes is 1um, edge to edge spacing
0.5~0.6um. Since the spacing is pretty close to the long wavelength in the
broadband light source. I am afraid there will be some
diffraction/inteference issues. Does anybody have experience with this?
Will i-line filter hlep in this case?

Thanks for any feedback,
Xuekun

-- 
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Dr. Xuekun Lu

University of California, San Diego
Calit2 M/C 0436
9500 Gilman Drive
La Jolla, CA 92093-0436

For Fedex Shipping:
Dr. Xuekun Lu
University of California, San Diego
Atkinson Hall 5th Floor Front Desk
9500 Gilman Drive
La Jolla, CA 92093

Phone: (858) 246-0411
Fax:   (858) 246-0408
E-mail: xklu at ucsd.edu
http://nano3.calit2.net/
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