[labnetwork] Oxygen 2-way valve Solenoid

[Paolini, Steven]

Rich,
  I my experience I would prefer to have a pneumatic bellows sealed or diaphragm style valve controlling O2. You could simply use the 24V to fire a cheap 2 way, self relieving valve to fire the compressed air.
Hope this helps

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Richard N. Savage
Sent: Friday, April 13, 2018 4:34 PM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Oxygen 2-way valve Solenoid


Anyone know of a good 2-way valve for use with high purity oxygen that has 24VDC solenoid actuation?

Rich



Richard N. Savage, Ph.D.

Dean of Graduate Education

Director of Microfab Lab

Cal Poly State University

San Luis Obispo, CA  93407

805-756-6519

________________________________
From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> on behalf of Kyle Keenan <kckeenan at seas.upenn.edu<mailto:kckeenan at seas.upenn.edu>>
Sent: Friday, April 13, 2018 10:19 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Nanonex NX2600BA mask aligner available

Hello,

Our NX2600BA mask aligner module (originally part of our Nanonex
NX2600/2600BA combo system), is no longer needed in our lab, and we are
fielding offers to purchase the unit. Due to a need to create room for
more equipment, and the fact that all of our mask alignment work has
migrated to our Suss aligner, the unit has just been decoupled from the
nanoimprint module, and is available immediately.

The system is in good working order, and in great condition. It is
currently set up for 4" wafers, but can handle up to 6", and is
outfitted with the backside alignment option (including BS alignment
chuck). Please note that the PC and two side panels are not included
with the aligner. Some of the tool specs include:

*Newport/Oriel SP97436-1000 flood exposure UV flood exposure unit
*currently set up for 500w arc lamp (365 & 405mn wavelengths)
*4" wafer chucks and pieces chuck
*5x5" mask holder
*better than 1um layer to layer alignment accuracy
*manual drive of x, y, theta
*motorized z drive (WEC) with encoder
*dual front and backside CCD cameras/optics

If you are interested in purchasing this unit, you can email me directly
with your offer, or if you have any questions. Please note that the
purchaser would be responsible for crating/packaging/shipping/pickup
costs and/or arrangements.

Thank you,
--
Kyle Keenan

Laboratory Manager
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925

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