From paul.delamusica at gmail.com Wed Aug 1 00:55:40 2018 From: paul.delamusica at gmail.com (Paul Delamusica) Date: Tue, 31 Jul 2018 21:55:40 -0700 Subject: [labnetwork] Replacement Light Bulb for Turner 330 Spectrophotometer Message-ID: Hi, I found only one reference online and it says GE1141. Can someone confirm or contradict? Thanks Paul From stieg at cnsi.ucla.edu Wed Aug 1 11:31:56 2018 From: stieg at cnsi.ucla.edu (Stieg, Adam) Date: Wed, 1 Aug 2018 15:31:56 +0000 Subject: [labnetwork] Interlocks - what do you use? In-Reply-To: <5B604BAD.6030307@yale.edu> References: , <5B604BAD.6030307@yale.edu> Message-ID: <9320C7A4-620A-492E-9FC9-ED94B3C93773@cnsi.ucla.edu> Hi All, The interlocks we use are IP based and somewhat home grown. The brains are an ADAM 6060 module by Advantech. The module is integrated into a box with manual override switches, a key lock, and indicators. Best, Adam Adam Stieg Ph.D. Associate Director California NanoSystems Institute UCLA On Jul 31, 2018, at 18:36, Michael Rooks > wrote: We use relay controllers from National Control (https://store.ncd.io) like this one. You can configure them with a variety of communication ports. We use wired ethernet. The relays are controlled with Badger, the commercial version of Coral, from an Amazon server. If you are familiar with Coral, then it would be easy to switch to Badger (badgerlms.com). This discussion comes up so often that we should make a FAQ file for it. -------------------------------- Michael Rooks Yale Institute of Nanoscience and Quantum Engineering nano.yale.edu On 07/30/2018 10:15 AM, Klomparens, Dylan L. (Fed) wrote: Hello everyone, NIST has been using the hardware interlocks that were developed by Stanford, and compatible with Coral. This system has worked well for us for years, however we're starting to think about what a "next gen" interlock might look like. I would like to gather some information, to see what is available on the market, and what has worked well for others. What interlocks do you use for your fab? * Make & model * Do you have a URL to find more information? What has your experience been? Was your solution easy to customize? Did it meet all your requirements? Did you get any extra capability easily (such as data collection or sensors for monitoring the fab)? Please let me know if you're interested in the final results, and I can email the final results of this research to you. -- Dylan Klomparens NIST NanoFab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From bgila at ufl.edu Wed Aug 1 17:13:01 2018 From: bgila at ufl.edu (Brent Gila) Date: Wed, 1 Aug 2018 17:13:01 -0400 Subject: [labnetwork] Interlocks - what do you use? In-Reply-To: <9320C7A4-620A-492E-9FC9-ED94B3C93773@cnsi.ucla.edu> References: <5B604BAD.6030307@yale.edu> <9320C7A4-620A-492E-9FC9-ED94B3C93773@cnsi.ucla.edu> Message-ID: Hello, We are using a homegrown system that is internet based.? We use a 16 channel IP relay card from IORelay (https://urldefense.proofpoint.com/v2/url?u=https-3A__ncd.io_&d=DwID-g&c=pZJPUDQ3SB9JplYbifm4nt2lEVG5pWx2KikqINpWlZM&r=EhqHy4a2rnA5a4ehzWAAfKveFS3lPv3RmQTaTocONM4&m=J-FeKiTjA9O78rEq6rHYAlsXM0b7IZd-XhQHQbcQIy4&s=4CdktWtzerdRWAfIfGoCDzOJ620ad7HvXPYxA1iCM-o&e=) and 24V Relay In Box (RIB) for each tool.? The RIB either provides a closure contact for an interlock or provides cord voltage to the instrument (like a monitor), whatever is needed.? The enclosure is identical to what Adam at UCLA has described (key lock, override switches, indicators).? Our software is written in-house so we have a lot of flexibility in the interface and the reports generated from the data.? We've had this in place for about 9 years and so far it has been great. We call the system Tool Usage Monitor and Interlock (TUMI).? On the few times is has gone down due to internet issues, we tell the users the facility has a TUMI ache. Best Regards, Brent -- Brent P. Gila, PhD. Director, Nanoscale Research Facility 1041 Center Drive University of Florida Gainesville, Florida 32611 Tel:352-273-2245 Fax:352-846-2877 email:bgila at ufl.edu On 8/1/2018 11:31 AM, Stieg, Adam wrote: > Hi All, > > The interlocks we use are IP based and somewhat home grown. The brains > are an ADAM 6060 module by Advantech. The module is integrated into a > box with manual override switches, a key lock, and indicators. > > Best, > Adam > > Adam Stieg Ph.D. > Associate Director > California NanoSystems Institute > UCLA > > On Jul 31, 2018, at 18:36, Michael Rooks > wrote: > >> We use relay controllers from National Control (https://urldefense.proofpoint.com/v2/url?u=https-3A__store.ncd.io&d=DwID-g&c=pZJPUDQ3SB9JplYbifm4nt2lEVG5pWx2KikqINpWlZM&r=EhqHy4a2rnA5a4ehzWAAfKveFS3lPv3RmQTaTocONM4&m=J-FeKiTjA9O78rEq6rHYAlsXM0b7IZd-XhQHQbcQIy4&s=HY_5beQdk5kJBBDN6a3xZvin9UcaD8VK5nUIyVJCwug&e=) >> like this one >> . >> You can configure them with a variety of communication ports. We use >> wired ethernet. The relays are controlled with Badger, the commercial >> version of Coral, from an Amazon server. If you are familiar with >> Coral, then it would be easy to switch to Badger (badgerlms.com >> ). >> >> This discussion comes up so often that we should make a FAQ file for it. >> >> -------------------------------- >> Michael Rooks >> Yale Institute of Nanoscience and Quantum Engineering >> nano.yale.edu >> >> >> >> >> >> On 07/30/2018 10:15 AM, Klomparens, Dylan L. (Fed) wrote: >>> >>> Hello everyone, >>> >>> >>> NIST has been using the hardware interlocks that were developed by >>> Stanford, and compatible with Coral. This system has worked well for >>> us for years, however we're starting to think?about what a "next >>> gen" interlock might look like. I would like to gather some >>> information, to see what is?available on the market, and what has >>> worked well for others. >>> >>> >>> What interlocks do you use for your fab? >>> >>> * Make & model >>> * Do you have a?URL to find more information? >>> >>> >>> What has your experience been? Was your solution easy to customize? >>> Did it meet all your requirements? Did you get any extra capability >>> easily (such as data collection or sensors for monitoring the fab)? >>> >>> >>> Please let me know if you're interested in the final results, and I >>> can email the final results of this research to you. >>> >>> >>> -- Dylan Klomparens >>> >>> NIST NanoFab >>> >>> >>> >>> _______________________________________________ >>> labnetwork mailing list >>> labnetwork at mtl.mit.edu >>> https://urldefense.proofpoint.com/v2/url?u=https-3A__mtl.mit.edu_mailman_listinfo.cgi_labnetwork&d=DwID-g&c=pZJPUDQ3SB9JplYbifm4nt2lEVG5pWx2KikqINpWlZM&r=EhqHy4a2rnA5a4ehzWAAfKveFS3lPv3RmQTaTocONM4&m=J-FeKiTjA9O78rEq6rHYAlsXM0b7IZd-XhQHQbcQIy4&s=CKQiaXP3BDh1sy_0jh0bx-0Y4xLAsYWsm7cP2v3DULM&e= >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://urldefense.proofpoint.com/v2/url?u=https-3A__mtl.mit.edu_mailman_listinfo.cgi_labnetwork&d=DwID-g&c=pZJPUDQ3SB9JplYbifm4nt2lEVG5pWx2KikqINpWlZM&r=EhqHy4a2rnA5a4ehzWAAfKveFS3lPv3RmQTaTocONM4&m=J-FeKiTjA9O78rEq6rHYAlsXM0b7IZd-XhQHQbcQIy4&s=CKQiaXP3BDh1sy_0jh0bx-0Y4xLAsYWsm7cP2v3DULM&e= >> > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://urldefense.proofpoint.com/v2/url?u=https-3A__mtl.mit.edu_mailman_listinfo.cgi_labnetwork&d=DwICAg&c=pZJPUDQ3SB9JplYbifm4nt2lEVG5pWx2KikqINpWlZM&r=_VzhfR25g4PxV91wRmPaWA&m=7Zr6GnR1lwGWTls81YkihVqMpyXUkXEvZf9vq0As6zg&s=m4fVLYNCrushjPgB09YMRvUs5QFbzo-tPmCIvgOJHE8&e= -------------- next part -------------- An HTML attachment was scrubbed... URL: From na2661 at columbia.edu Thu Aug 2 16:32:51 2018 From: na2661 at columbia.edu (Nava Ariel-Sternberg) Date: Thu, 2 Aug 2018 16:32:51 -0400 Subject: [labnetwork] CMP slurry for oxide Message-ID: <031b01d42a9f$fca00860$f5e01920$@columbia.edu> Dear all, Can someone recommend a company that sells high quality slurries for oxide polishing with selectivity to silicon and silicon nitride? The company we were buying from discontinued the slurry we were using and a second vendor is requesting that we sign an NDA before they can send us a quote. Any recommendations would be greatly appreciated. Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mheiden at engr.ucr.edu Fri Aug 3 00:29:44 2018 From: mheiden at engr.ucr.edu (Mark Heiden) Date: Fri, 3 Aug 2018 04:29:44 +0000 Subject: [labnetwork] Anthracene Evaporation Message-ID: <2d09f89994b34b1a919ce94986ed8289@engr.ucr.edu> Does anyone have experience with thermal evaporation of anthracene powder? We have a request for this material in our thermal evaporator but it is completely foreign to us. Mark Heiden NanoFab Cleanroom Manager Center for Nanoscale Science and Engineering University of California, Riverside 951-827-2551 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mheiden at engr.ucr.edu Fri Aug 3 13:43:16 2018 From: mheiden at engr.ucr.edu (Mark Heiden) Date: Fri, 3 Aug 2018 17:43:16 +0000 Subject: [labnetwork] Anthracene Evaporation Message-ID: <3af93f0fd224469d9881e8751aae2893@engr.ucr.edu> Thanks to everyone that provided input about anthracene evaporation. We will pass on this process at this time. It appears that this material would be more appropriate in a dedicated tool rather than a multi-user situation as we have. Cheers, Mark Heiden NanoFab Cleanroom Manager Center for Nanoscale Science and Engineering University of California, Riverside 951-827-2551 -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Fri Aug 3 17:04:24 2018 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Fri, 3 Aug 2018 21:04:24 +0000 Subject: [labnetwork] CMP slurry for oxide In-Reply-To: <031b01d42a9f$fca00860$f5e01920$@columbia.edu> References: <031b01d42a9f$fca00860$f5e01920$@columbia.edu> Message-ID: 1. Versum Materials (formerly Air Products) 2. Cabot Microelectronics Cheers! Julia Aebersold Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg Sent: Thursday, August 2, 2018 4:33 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] CMP slurry for oxide Dear all, Can someone recommend a company that sells high quality slurries for oxide polishing with selectivity to silicon and silicon nitride? The company we were buying from discontinued the slurry we were using and a second vendor is requesting that we sign an NDA before they can send us a quote... Any recommendations would be greatly appreciated. Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 -------------- next part -------------- An HTML attachment was scrubbed... URL: From ahad.syed at kaust.edu.sa Fri Aug 3 22:47:43 2018 From: ahad.syed at kaust.edu.sa (Ahad Syed) Date: Sat, 4 Aug 2018 02:47:43 +0000 Subject: [labnetwork] CMP slurry for oxide In-Reply-To: <031b01d42a9f$fca00860$f5e01920$@columbia.edu> References: <031b01d42a9f$fca00860$f5e01920$@columbia.edu> Message-ID: <1533350860142.28006@kaust.edu.sa> Hello Nava, We have always bought from Cabot Electronics. Very satisfied with their service and turn-around time (to Saudi Arabia). Here are the contact details Alicia Ang Cabot Microelectronics Singapore Pte Ltd Tel: (65) 65110590 Fax:(65) 65111421 Mobile : 98899010 Email id: Alicia_ang at cabotcmp.com Hope this helps. Ahad -- Nanofabrication Core Lab 4700 King Abdullah University of Science and Technology 0247 Building 3, Thuwal 23955-6900, Kingdom of Saudi Arabia Tel:+966 12 808 2348 Visit The Core Labs ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Nava Ariel-Sternberg Sent: Thursday, August 2, 2018 11:32 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] CMP slurry for oxide Dear all, Can someone recommend a company that sells high quality slurries for oxide polishing with selectivity to silicon and silicon nitride? The company we were buying from discontinued the slurry we were using and a second vendor is requesting that we sign an NDA before they can send us a quote... Any recommendations would be greatly appreciated. Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 ________________________________ This message and its contents including attachments are intended solely for the original recipient. If you are not the intended recipient or have received this message in error, please notify me immediately and delete this message from your computer system. Any unauthorized use or distribution is prohibited. Please consider the environment before printing this email. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jjang at udel.edu Tue Aug 7 16:36:55 2018 From: jjang at udel.edu (Seong Jin Jang) Date: Tue, 7 Aug 2018 16:36:55 -0400 Subject: [labnetwork] Photo lithography mask using transparency film Message-ID: Dear all, I am trying to make the photo lithography mask using transparency film. If you tried that before, can you share your experience? For example, Maximum resolution you reach Printer model and specification you use Film specification you use Vendors who can make the mask And, more! I appreciate your help. >From Seong -- Seong Jin Jang Nanofabrication Teaching Laboratory Facility Specialist 302-831-3900 310 DuPont Hall University of Delaware -------------- next part -------------- An HTML attachment was scrubbed... URL: From mpleil at unm.edu Tue Aug 7 20:08:24 2018 From: mpleil at unm.edu (Matthias Pleil) Date: Wed, 8 Aug 2018 00:08:24 +0000 Subject: [labnetwork] Photo lithography mask using transparency film In-Reply-To: References: Message-ID: Hello Seong Jin, Well - there are a lot of ways you can do this. If you don't care about critical dimensions, for example we have our students create an "Art Wafer" - basically they get an image, or drawing an image and print onto a transparency film to the size of the clear mask glass plate. We have them transfer to a 4 or 6in wafer with about 5k SiO2, pattern, etch in BOE 6:1 for 8min, strip the resist and they get a copy of the mask. Varying the SiO2 thickness gives them different colors. If you need more precision, you can find a high end print shop that produce high contrast lithographs on plastic film - I used one a long time ago at a cost of less than $20each. The minimum resolution is on the order of 5um or so. Of course if you need more precision, you can get a chrome/glass plate made - about $500 or so. What is the minimum resolution you need? Kind Regards, Matthias Pleil, Ph.D. Research Professor & Lecturer III of Mech. Eng - UNM UNM MTTC Cleanroom Manager PI - Southwest Center for Microsystems Education, Support Center for Microsystems Education scme-nm.org, scme-support.org (505)272-7157 ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Seong Jin Jang Sent: Tuesday, August 7, 2018 2:36:55 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Photo lithography mask using transparency film Dear all, I am trying to make the photo lithography mask using transparency film. If you tried that before, can you share your experience? For example, Maximum resolution you reach Printer model and specification you use Film specification you use Vendors who can make the mask And, more! I appreciate your help. >From Seong -- Seong Jin Jang Nanofabrication Teaching Laboratory Facility Specialist 302-831-3900 310 DuPont Hall University of Delaware -------------- next part -------------- An HTML attachment was scrubbed... URL: From cekendri at mtu.edu Wed Aug 8 08:55:13 2018 From: cekendri at mtu.edu (Chito Kendrick) Date: Wed, 8 Aug 2018 08:55:13 -0400 Subject: [labnetwork] Photo lithography mask using transparency film In-Reply-To: References: Message-ID: <8f6204c5-9730-31f6-da98-4ed028a498c4@mtu.edu> When our filmstar system was down I did made some mylar masks with an inkjet HP printer I got from Walmart and that would get to 100-150 um feature size lines, but there is a lot of splatter of ink as well it would need multiple passes to get a fully opaque area. I think it could do 1200 dpi. You use to be able to control the level of black on some printers, but this one did not allow it - it would mean you could do just a single pass. The transparency film was whatever Walmart had at that time, nothing special - it did have some features/texture already on it from the manufacturing process. I believe a laser jet is worse for doing this type of thing as it will have alot of pin holes. There are alot of vendors that can make you a mylar mask and depending on feature size they can be as cheap as $25 for a letter size area - I have masks with features down to 10 um, but after that you would need a chrome mask. We have a filmstar photoplotter that can do down to 25 um (~4000 dpi) and you can get a newer version that meant to do 5 um. This requires a darkroom and photosensitive coated mylar films as our one uses a red laser. If you want a vendor for making a mylar mask send me an email. Chito Kendrick On 8/7/2018 4:36 PM, Seong Jin Jang wrote: > Dear all, > > I am trying to make the photo lithography mask using transparency film. > If you tried that before, can you share your experience? > > For example, > Maximum resolution you reach > Printer model and specification you use > Film specification you use > Vendors who can make the mask > And, more! > > I appreciate your help. > > From Seong > > > -- > Seong Jin Jang > Nanofabrication Teaching Laboratory > Facility Specialist > 302-831-3900 > 310 DuPont Hall > University of Delaware > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Chito Kendrick Ph.D. Chito Kendrick Website MTU Microfabrication Website Managing Director of the Microfabrication Facility Research Assistant Professor Electrical and Computer Engineering Michigan Technological University Room 436 M&M Building 1400 Townsend Dr. Houghton, Michigan 49931-1295 814-308-4255 -------------- next part -------------- An HTML attachment was scrubbed... URL: From price.798 at osu.edu Wed Aug 8 09:34:05 2018 From: price.798 at osu.edu (Price, Aimee) Date: Wed, 8 Aug 2018 13:34:05 +0000 Subject: [labnetwork] Photo lithography mask using transparency film In-Reply-To: References: Message-ID: Hi Seong, We do this a lot, both on our contact aligners and stepper. The resolution usually isn?t as much of the issue as the line edge roughness (which is kind of resolution but not exactly). We tried to make our own transparencies, which we do not recommend. The ?off the shelf? films do not have enough transmission in the wavelengths we care about. We use Infinite Graphics (now part of Photronics) for our transparency films. They list the resolution and the appropriate DPI resolution. They have them from really large to 10um resolution. The image above is all done by transparency, all layers. The finest features were ?Brutus Buckeye.? His head is 200um across and I think there are some spaces in his face that are on the order of 10um. For the above type of sizes, with little concern for line edge roughness it is well worth it. For devices, I have used it on device structures with features of around 75um and they work beautifully. Much more cost effective than a full up mask, though those are becoming cheaper as well. I no longer print my own because I can?t compete on cost or turnaround. Hope that helps, I?d be happy to give you more info off-line if needed. Best, Aimee From: labnetwork-bounces at mtl.mit.edu On Behalf Of Seong Jin Jang Sent: Tuesday, August 7, 2018 4:37 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Photo lithography mask using transparency film Dear all, I am trying to make the photo lithography mask using transparency film. If you tried that before, can you share your experience? For example, Maximum resolution you reach Printer model and specification you use Film specification you use Vendors who can make the mask And, more! I appreciate your help. From Seong -- Seong Jin Jang Nanofabrication Teaching Laboratory Facility Specialist 302-831-3900 310 DuPont Hall University of Delaware -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Brutus.png Type: image/png Size: 1026992 bytes Desc: Brutus.png URL: From aju-jugessur at uiowa.edu Wed Aug 8 11:01:03 2018 From: aju-jugessur at uiowa.edu (Jugessur, Aju S) Date: Wed, 8 Aug 2018 15:01:03 +0000 Subject: [labnetwork] Question about Wyko NT 1100 optical profiling system In-Reply-To: References: Message-ID: <81FD5ADD-6937-4562-A3B9-2EF476577196@uiowa.edu> Steven, We ran into the same issue when the screen on the instrument stopped working and Bruker did not offer any repair services on this model. We did it in house. I am afraid that I do not have suggestions for 3rd party repairs. I would suggest that you contact the labnetwork at mtl.mit.edu and you are perhaps, a member of this network already. They will have very useful suggestions. Thanks, Aju On Aug 7, 2018, at 5:57 PM, Steven Makowka > wrote: Dr. Jugessur, I?m emailing from the University at Buffalo School of Dental Medicine. I understand you have a Wyko NT 1100 optical profiling system. We?re considering buying a unit of the same model but according to the parent company Bruker, these units are no longer supported, so I was wondering if you have a third party vendor who performs maintenance. Also do you have any suggestions as to where I could get calibration standards? Any help would be greatly appreciated. Thank you Steve -- Thank you for your time and consideration... Steven Makowka Steven Makowka smakowka at buffalo.edu Research Lab Specialist UB School of Dental Medicine Department of Restorative Dentistry B9/B11 Squire Hall Aju Jugessur, Ph.D. Director, University of Iowa Microfabrication Facility (UIMF) Optical Science and Technology Center Professor Adjunct, Physics and Astronomy University of Iowa Office: IATL 202, Tel: 319-3532342 Labs: IATL 170, 172, 174 https://ostc.uiowa.edu/uimf -------------- next part -------------- An HTML attachment was scrubbed... URL: From kmcpeak at lsu.edu Wed Aug 8 11:47:58 2018 From: kmcpeak at lsu.edu (Kevin McPeak) Date: Wed, 8 Aug 2018 10:47:58 -0500 Subject: [labnetwork] Question about Wyko NT 1100 optical profiling system In-Reply-To: <81FD5ADD-6937-4562-A3B9-2EF476577196@uiowa.edu> References: <81FD5ADD-6937-4562-A3B9-2EF476577196@uiowa.edu> Message-ID: Dear Aju, Here at LSU we used Tony Chaban at RDY Metrology to repair our Wyko 3300 system. Tony is great! Regards, Kevin -- Kevin McPeak Assistant Professor Department of Chemical Engineering Louisiana State University email: kmcpeak at lsu.edu phone: 225-578-0058 On Wed, Aug 8, 2018, 10:38 Jugessur, Aju S wrote: > Steven, > > We ran into the same issue when the screen on the instrument stopped > working and Bruker did not offer any repair services on this model. > We did it in house. I am afraid that I do not have suggestions for 3rd > party repairs. > > I would suggest that you contact the labnetwork at mtl.mit.edu and you are > perhaps, a member of this network already. > They will have very useful suggestions. > > Thanks, > Aju > > > On Aug 7, 2018, at 5:57 PM, Steven Makowka wrote: > > Dr. Jugessur, > > I?m emailing from the University at Buffalo School of Dental Medicine. I > understand you have a Wyko NT 1100 optical profiling system. We?re > considering buying a unit of the same model but according to the parent > company Bruker, these units are no longer supported, so I was wondering if > you have a third party vendor who performs maintenance. Also do you have > any suggestions as to where I could get calibration standards? > > Any help would be greatly appreciated. > > Thank you > Steve > -- > Thank you for your time and consideration... Steven Makowka > > Steven Makowka > smakowka at buffalo.edu > > Research Lab Specialist > > UB School of Dental Medicine > Department of Restorative Dentistry > > B9/B11 Squire Hall > > > Aju Jugessur, Ph.D. > Director, University of Iowa Microfabrication Facility (UIMF) > Optical Science and Technology Center > Professor Adjunct, Physics and Astronomy > University of Iowa > Office: IATL 202, Tel: 319-3532342 > Labs: IATL 170, 172, 174 > https://ostc.uiowa.edu/uimf > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From ngottron at andrew.cmu.edu Wed Aug 8 13:02:55 2018 From: ngottron at andrew.cmu.edu (Norman Gottron) Date: Wed, 8 Aug 2018 17:02:55 +0000 Subject: [labnetwork] Resist Inquiry Message-ID: Hello All, I'm interested to see if any of you use/stock JSR's NFR 016 D2 photoresist. This is a negative photoresist that I have used in the past, and it's quite easy to work with. In trying to acquire this material, I've found that it can only be bought in 1 gallon bottles for >$1000, and NFR is not a fan of giving out samples. So, my questions are: 1. For those that use/stock this material, can it only be acquired through Doe & Ingalls? Are there any other suppliers out there? 2. Can anyone on LabNetwork sell me a sample of this resist? 2oz would be more than enough for my purposes at this time. Regards, Norman Gottron Process Engineer, Carnegie Mellon University Nanofabrication Facility Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave Pittsburgh, PA 15213 Phone: 412-268-4205 www.ece.cmu.edu www.nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From Aaron.Olson at merit.com Thu Aug 9 11:42:35 2018 From: Aaron.Olson at merit.com (Aaron Olson) Date: Thu, 9 Aug 2018 15:42:35 +0000 Subject: [labnetwork] New Fab Design Consultant Message-ID: Hello, My name is Aaron Olson. I am the operations manager for a small fab located in South Jordan Utah. We are planning to immediately build a new fab and would like to get in contact with a trusted consultant who could help in the design process. If anyone in this network knows someone who could help us please send me their contact information. I would very much appreciate it. Thanks Aaron Olson Manager, Operations P: +1 (801) 208-4741 Aaron.Olson at merit.com Merit Sensors ---------------------------------------------------------------------- PRIVACY: This e-mail may contain information that is privileged or confidential. If you are not the intended recipient, please delete the e-mail and any attachments and notify the sender immediately, and do not use, copy, or disclose to anyone any of the contents hereof. -------------- next part -------------- An HTML attachment was scrubbed... URL: From na2661 at columbia.edu Thu Aug 9 15:04:48 2018 From: na2661 at columbia.edu (Nava Ariel-Sternberg) Date: Thu, 9 Aug 2018 15:04:48 -0400 Subject: [labnetwork] New Fab Design Consultant In-Reply-To: References: Message-ID: <004201d43013$d88f0330$89ad0990$@columbia.edu> Hi Aaron, I don't know if they are working in Utah but if they are I highly recommend working with Protecs . They have design and construction capabilities in house and highly professional and very nice people. They did the design and built of the UPENN clean room and the construction part of the clean room at Columbia (including some design fixing problems). I'm copying Dan and Jeremy whom we worked with at Columbia. Good luck, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 From: labnetwork-bounces at mtl.mit.edu On Behalf Of Aaron Olson Sent: Thursday, August 9, 2018 11:43 AM To: labnetwork at mtl.mit.edu Cc: Shiva Pallinti Subject: [labnetwork] New Fab Design Consultant Hello, My name is Aaron Olson. I am the operations manager for a small fab located in South Jordan Utah. We are planning to immediately build a new fab and would like to get in contact with a trusted consultant who could help in the design process. If anyone in this network knows someone who could help us please send me their contact information. I would very much appreciate it. Thanks Aaron Olson Manager, Operations P: +1 (801) 208-4741 Aaron.Olson at merit.com _____ PRIVACY: This e-mail may contain information that is privileged or confidential. If you are not the intended recipient, please delete the e-mail and any attachments and notify the sender immediately, and do not use, copy, or disclose to anyone any of the contents hereof. -------------- next part -------------- An HTML attachment was scrubbed... URL: From Aaron.Olson at merit.com Thu Aug 9 16:02:35 2018 From: Aaron.Olson at merit.com (Aaron Olson) Date: Thu, 9 Aug 2018 20:02:35 +0000 Subject: [labnetwork] New Fab Design Consultant In-Reply-To: <004201d43013$d88f0330$89ad0990$@columbia.edu> References: <004201d43013$d88f0330$89ad0990$@columbia.edu> Message-ID: Thanks, I am getting a lot of recommends to use Abbie Gregg. Have you worked with that firm? From: Nava Ariel-Sternberg Sent: Thursday, August 9, 2018 1:05 PM To: Aaron Olson ; labnetwork at mtl.mit.edu Cc: Shiva Pallinti ; 'Jeremy Gainey' ; 'Daniel Goldmeier' Subject: RE: [labnetwork] New Fab Design Consultant Hi Aaron, I don't know if they are working in Utah but if they are I highly recommend working with Protecs. They have design and construction capabilities in house and highly professional and very nice people. They did the design and built of the UPENN clean room and the construction part of the clean room at Columbia (including some design fixing problems). I'm copying Dan and Jeremy whom we worked with at Columbia. Good luck, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 From: labnetwork-bounces at mtl.mit.edu On Behalf Of Aaron Olson Sent: Thursday, August 9, 2018 11:43 AM To: labnetwork at mtl.mit.edu Cc: Shiva Pallinti Subject: [labnetwork] New Fab Design Consultant Hello, My name is Aaron Olson. I am the operations manager for a small fab located in South Jordan Utah. We are planning to immediately build a new fab and would like to get in contact with a trusted consultant who could help in the design process. If anyone in this network knows someone who could help us please send me their contact information. I would very much appreciate it. Thanks Aaron Olson Manager, Operations P: +1 (801) 208-4741 Aaron.Olson at merit.com [Image removed by sender.] ________________________________ PRIVACY: This e-mail may contain information that is privileged or confidential. If you are not the intended recipient, please delete the e-mail and any attachments and notify the sender immediately, and do not use, copy, or disclose to anyone any of the contents hereof. Aaron Olson Manager, Operations P: +1 (801) 208-4741 Aaron.Olson at merit.com Merit Sensors ---------------------------------------------------------------------- PRIVACY: This e-mail may contain information that is privileged or confidential. If you are not the intended recipient, please delete the e-mail and any attachments and notify the sender immediately, and do not use, copy, or disclose to anyone any of the contents hereof. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 530 bytes Desc: image001.jpg URL: From dgoldmeier at protecsinc.com Thu Aug 9 16:15:37 2018 From: dgoldmeier at protecsinc.com (Daniel Goldmeier) Date: Thu, 9 Aug 2018 20:15:37 +0000 Subject: [labnetwork] New Fab Design Consultant In-Reply-To: <004201d43013$d88f0330$89ad0990$@columbia.edu> References: <004201d43013$d88f0330$89ad0990$@columbia.edu> Message-ID: Nava, Thanks for thinking of us, we actually have an office in Salt Lake City, Utah. I'll pass along Aarons info to out director in Utah. Daniel Goldmeier PROTECS P: 908-698-4070 x336 C: 908-300-2989 From: Nava Ariel-Sternberg Sent: Thursday, August 09, 2018 3:05 PM To: 'Aaron Olson' ; labnetwork at mtl.mit.edu Cc: 'Shiva Pallinti' ; Jeremy Gainey ; Daniel Goldmeier Subject: RE: [labnetwork] New Fab Design Consultant Hi Aaron, I don't know if they are working in Utah but if they are I highly recommend working with Protecs. They have design and construction capabilities in house and highly professional and very nice people. They did the design and built of the UPENN clean room and the construction part of the clean room at Columbia (including some design fixing problems). I'm copying Dan and Jeremy whom we worked with at Columbia. Good luck, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 From: labnetwork-bounces at mtl.mit.edu > On Behalf Of Aaron Olson Sent: Thursday, August 9, 2018 11:43 AM To: labnetwork at mtl.mit.edu Cc: Shiva Pallinti > Subject: [labnetwork] New Fab Design Consultant Hello, My name is Aaron Olson. I am the operations manager for a small fab located in South Jordan Utah. We are planning to immediately build a new fab and would like to get in contact with a trusted consultant who could help in the design process. If anyone in this network knows someone who could help us please send me their contact information. I would very much appreciate it. Thanks Aaron Olson Manager, Operations P: +1 (801) 208-4741 Aaron.Olson at merit.com [http://cloud.merit.com/images/signature/sensor-sig-logo.png] ________________________________ PRIVACY: This e-mail may contain information that is privileged or confidential. If you are not the intended recipient, please delete the e-mail and any attachments and notify the sender immediately, and do not use, copy, or disclose to anyone any of the contents hereof. -------------- next part -------------- An HTML attachment was scrubbed... URL: From laygun at Princeton.EDU Thu Aug 9 20:08:08 2018 From: laygun at Princeton.EDU (Levent Erdal Aygun) Date: Fri, 10 Aug 2018 00:08:08 +0000 Subject: [labnetwork] Methods for preventing ESD during dicing process Message-ID: <8729B76873EE4C49855C771FBA4AF6C7608C136B@csgmbx213w> Hi, We are having ESD issues when we dice our glass substrates with thin-film transistor circuits on them. I would be happy if you can share the methods/tricks that you use to prevent ESD during dicing in your labs. Our setup: Dicer: ADT 7100 (doesn't have CO2 injector to control DI water's impedance) Tape: Ultron 1020R (UV sensitive) Sample: Glass 3"x3", 1.1 mm thick, die size: 5 mm x 5 mm with TFTs on it. To minimize ESD we spin coat photoresist and a conductive layer (Pedot:PSS) on our sample. It works for protecting isolated TFTs but when we have a larger circuit with 100s of TFTs connected via long (~5 mm) interconnects our yield decreased significantly. Bonus questions: - Do you have any suggestions for a conductive material that we can spin coat (short everything) before dicing and remove using acetone/water (don't want to use any acid) after dicing ? - We are thinking about using a precision glass cutter instead of a dicer hoping that we won't have a rotating blade, causing ESD. Any good/bad experience with precision glass cutters ? - Another idea is using tap water instead of DI water during dicing. We may just swap to tap water when we are dicing ESD prone samples and go back to DI water for all other samples. Is there any lab doing a similar trick ? (We got a quote for a CO2 injector ($17k), I don't think we can get that really soon). Best regards, Levent --- Levent Erdal AYGUN PhD Student Dep. of Electrical Engineering Princeton University -------------- next part -------------- An HTML attachment was scrubbed... URL: From agregg at abbiegregg.com Fri Aug 10 03:51:55 2018 From: agregg at abbiegregg.com (Abbie Gregg) Date: Fri, 10 Aug 2018 07:51:55 +0000 Subject: [labnetwork] New Fab Design Consultant- Merit, Utah Message-ID: HI Aaron, We are located in Tempe AZ and would love to help you with this work, Aaron. We are well known to the labnetwork. We have strong experience with various medical devices as well as microelectronics manufacturing. We have done quite a bit of work in Utah. Here is the link to our website. Please give us a call! website www.abbiegregg.com Best Regards, Abbie Gregg President Abbie Gregg, Inc. 1130 East University Drive, Suite 105 Tempe, Arizona 85281 Phone 480 446-8000 x 107 Cell 480-577-5083 FAX 480-446-8001 email agregg at abbiegregg.com website www.abbiegregg.com CONFIDENTIALITY NOTICE: All information contained in or attached to this email constitutes confidential information belonging to Abbie Gregg, Inc., its affiliates and subsidiaries and/or its clients. This email and any attachments are proprietary and/or confidential and are intended for business use of the addressee(s) only. All other uses or disclosures are strictly prohibited. If the reader is not the intended recipient you are hereby notified that the perusal, copying or dissemination of this email is strictly prohibited. If you have received this communication in error, please notify the sender, and delete all copies of this message and its attachments immediately. From: labnetwork-bounces at mtl.mit.edu On Behalf Of Aaron Olson Sent: Thursday, August 9, 2018 8:43 AM To: labnetwork at mtl.mit.edu Cc: Shiva Pallinti Subject: [labnetwork] New Fab Design Consultant Hello, My name is Aaron Olson. I am the operations manager for a small fab located in South Jordan Utah. We are planning to immediately build a new fab and would like to get in contact with a trusted consultant who could help in the design process. If anyone in this network knows someone who could help us please send me their contact information. I would very much appreciate it. Thanks Aaron Olson Manager, Operations P: +1 (801) 208-4741 Aaron.Olson at merit.com [http://cloud.merit.com/images/signature/sensor-sig-logo.png] ________________________________ PRIVACY: This e-mail may contain information that is privileged or confidential. If you are not the intended recipient, please delete the e-mail and any attachments and notify the sender immediately, and do not use, copy, or disclose to anyone any of the contents hereof. -------------- next part -------------- An HTML attachment was scrubbed... URL: From smakowka at buffalo.edu Fri Aug 10 10:53:34 2018 From: smakowka at buffalo.edu (Steven Makowka) Date: Fri, 10 Aug 2018 10:53:34 -0400 Subject: [labnetwork] Question regarding Wyko NT 1100 profiling system capacity Message-ID: Hello all, I?m new to this network and I was directed here as an excellent source of advice. I?m considering buying a Wyko NT 1100 but it doesn?t have the computer or software, so I have to sort that part myself. As such, I was wondering if you could help me with the following questions: 1. What is the maximum sample height that can physically fit on the stage and be scanned (my lab uses a number of small cylinders). I imagine it depends on the desired magnification and stage accessories, but could you give me an idea? From looking at accessories and images, it looks like the maximum is about one inch high. 2. What cables are used to connect the NT1100 to the computer? (Ie. Is it usb or something else?) 3. Where can I get a copy of the Vision32 software? (I believe that?s the name of the software needed for the PC to run the machine, perform calibration, and perform analysis) 4. Where can I get a copy of the user manual? 5. Is the NT 1100 capable of surface correction (ex. Scanning on a regularly or irregularly curved surface)? If you have any other advice regarding this matter please let me know. I know it?s a lot of questions and any help is appreciated. Thank you very much. Steve -- Thank you for your time and consideration... Steven Makowka Steven Makowka smakowka at buffalo.edu Research Lab Specialist UB School of Dental Medicine Department of Restorative Dentistry B9/B11 Squire Hall -------------- next part -------------- An HTML attachment was scrubbed... URL: From mcwilliamss at mail.smu.edu Fri Aug 10 11:36:16 2018 From: mcwilliamss at mail.smu.edu (McWilliams, Scott) Date: Fri, 10 Aug 2018 15:36:16 +0000 Subject: [labnetwork] Dow BCB cyclotene photoactive materials Message-ID: <43cd3785e8654b3f98665e071f2e3a4d@mail.smu.edu> All, I have seen other post asking if there is a way to purchase small amounts of expensive materials for prototype/development work. I was quoted $6000 dollars for the smallest available bottle of 4022-35 Cyclotene (liter size bottle). Can I purchase a much smaller amount of this material through another university or consortium/network? Thank you, Scott -------------- next part -------------- An HTML attachment was scrubbed... URL: From mweiler at andrew.cmu.edu Mon Aug 13 19:18:20 2018 From: mweiler at andrew.cmu.edu (Mark Weiler) Date: Mon, 13 Aug 2018 23:18:20 +0000 Subject: [labnetwork] STS Multiplex DRIE In-Reply-To: <3D93FFD1-8B6F-4815-9501-31F5A2DFB81D@nist.gov> References: <3D93FFD1-8B6F-4815-9501-31F5A2DFB81D@nist.gov> Message-ID: <3A9C42DB-6D9C-4BE6-976F-E5FC506C5488@andrew.cmu.edu> Jeff Hawks has been very helpful for us here at CMU. He provides PLC-based upgrades to STS/STPS systems, and has upgraded our AOE system (previously on a cluster tool) to have its own load lock with new MMI. See John?s email for contact info? Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager CMU Nanofabrication Facility Dept. of Electrical & Computer Engineering 5000 Forbes Avenue Pittsburgh, PA 15213 P: 412-268-2471 F: 412-268-4323 www.ece.cmu.edu [cid:2D2E01E3-CEC1-4F48-A845-224D8D7CED12 at wv.cc.cmu.edu] On Jul 31, 2018, at 9:27 PM, Nibarger, John (Fed) > wrote: We?ve had good luck with Jeff Hawks for our STS ASE DRIE. Jeff Hawks Hawks Technical Services LLC. 2715 Swamp Creek Rd. Green Lane, PA. 18054 C 215-872-0944 Cheers, John John P. Nibarger, Ph.D. Manager, Boulder Micro-fabrication Facility Microfabrication Group Leader (687.10) National Institute of Standards and Technology 325 Broadway, MS 817.03 Boulder, CO 80305 303-497-4575 (phone) 303-497-3042 (fax) john.nibarger at nist.gov From: > on behalf of "proma016 at fiu.edu" > Date: Friday, July 27, 2018 at 6:59 AM To: "labnetwork at mtl.mit.edu" > Subject: [labnetwork] STS Multiplex DRIE Greetings labnetwork Can someone recommend an FSE for starup and service of an early model STS DRIE bosch process Si etcher? Sent from my iPhone On Jul 26, 2018, at 10:06 PM, Paolini, Steven > wrote: Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these systems Represent the best in class for university work. I can?t think of any cons with either platform. Steve Paolini Equipment Dood Harvard University Center for Nanoscale Systems. Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 11 Oxford St. Cambridge, MA 02138 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun Sent: Thursday, July 26, 2018 12:51 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Experience on ICP-RIE Dear Colleagues, We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP. Does anyone have experience on these systems? What?s the pros and cons? I would greatly appreciate for your feedback! best, Jun Chen, Ph.D. Nanofabrication scientist, Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh 3700 O'Hara Street, Pittsburgh, PA 15261 T: 412.383.3282 http://www.nano.pitt.edu/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: images.png Type: image/png Size: 720 bytes Desc: images.png URL: From ngottron at andrew.cmu.edu Tue Aug 14 13:15:00 2018 From: ngottron at andrew.cmu.edu (Norman Gottron) Date: Tue, 14 Aug 2018 17:15:00 +0000 Subject: [labnetwork] Karl Suss MA6 Lamp Power Supply Repair Message-ID: Hi All, I am looking for vendors who could repair/refurbish a CIC500 lamp power supply that is used on our Karl Suss MA6. Does anyone have any recommendations for companies that might be able to do this? Regards, Norman Gottron Process Engineer, Carnegie Mellon University Nanofabrication Facility Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave Pittsburgh, PA 15213 Phone: 412-268-4205 www.ece.cmu.edu www.nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From sturm at Princeton.EDU Tue Aug 14 16:42:31 2018 From: sturm at Princeton.EDU (James C. Sturm) Date: Tue, 14 Aug 2018 20:42:31 +0000 Subject: [labnetwork] PlasmaTherm 720 and a selective SiO2 etch ? Message-ID: <9C4552F2D4B19C44970F1CB90360C991C8E1037F@csgmbx211w> Hi, we have a PlasmaTherm 720 RIE etcher plumbed with CF4 and H2. Does anyone have a recipe for selective etching of thermal SiO2 (stopping on silicon with selectivity > 10). Right now the chamber has an Al feature plate (outside of the wafer) which we'd prefer to leave in if possible. Thanks, Jim Sturm and Eric Mills, Princeton University -------------- next part -------------- An HTML attachment was scrubbed... URL: From rdevito at draper.com Tue Aug 14 17:28:45 2018 From: rdevito at draper.com (DeVito, Richard) Date: Tue, 14 Aug 2018 21:28:45 +0000 Subject: [labnetwork] Karl Suss MA6 Lamp Power Supply Repair In-Reply-To: References: Message-ID: You may already know these guys they are in your area Mask Aligner Service, LLC. 116 Stoney Ridge Road Landenberg, PA 19350 PHONE: +1.919.270.0000 FAX: +1.484.508.8050 EMAIL: service at einmas.com WEB: www.einmas.com Rich DeVito Principle Member Technical Staff Group Leader Microfabrication Lab Draper 555 Technology Square, Cambridge, MA 02139 Phone: 617-258-3819 www.draper.com From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Norman Gottron Sent: Tuesday, August 14, 2018 1:15 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Karl Suss MA6 Lamp Power Supply Repair Hi All, I am looking for vendors who could repair/refurbish a CIC500 lamp power supply that is used on our Karl Suss MA6. Does anyone have any recommendations for companies that might be able to do this? Regards, Norman Gottron Process Engineer, Carnegie Mellon University Nanofabrication Facility Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave Pittsburgh, PA 15213 Phone: 412-268-4205 www.ece.cmu.edu www.nanofab.ece.cmu.edu ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From mapril at draper.com Wed Aug 15 07:27:10 2018 From: mapril at draper.com (April, Mark R.) Date: Wed, 15 Aug 2018 11:27:10 +0000 Subject: [labnetwork] Karl Suss MA6 Lamp Power Supply Repair In-Reply-To: References: Message-ID: Hi Norman You may want to try Mark Anderson, he is a former SUSS employee out on his own. I have had several supplies repaired by him with great success. His contact information is Mark Anderson AlignTech, LLC 802-878-0199 Thanks Mark R. April Senior Equipment Engineer Microfabrication Laboratory Facilities Lead [color_logo_small4] 555 Technology Square Cambridge, MA 02139 mapril at draper.com O # 617-258-1613 C # 617-455-1596 www.draper.com From: labnetwork-bounces at mtl.mit.edu On Behalf Of Norman Gottron Sent: Tuesday, August 14, 2018 1:15 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Karl Suss MA6 Lamp Power Supply Repair Hi All, I am looking for vendors who could repair/refurbish a CIC500 lamp power supply that is used on our Karl Suss MA6. Does anyone have any recommendations for companies that might be able to do this? Regards, Norman Gottron Process Engineer, Carnegie Mellon University Nanofabrication Facility Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave Pittsburgh, PA 15213 Phone: 412-268-4205 www.ece.cmu.edu www.nanofab.ece.cmu.edu ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 1560 bytes Desc: image001.png URL: From jwood1985 at gmail.com Wed Aug 15 07:57:48 2018 From: jwood1985 at gmail.com (Josh Wood) Date: Wed, 15 Aug 2018 06:57:48 -0500 Subject: [labnetwork] Accent PL System Message-ID: Dear colleagues, We recently acquired a Nanometrics / RPM Sigma Accent PL system for our characterization lab. We would like to facilitize the tool, but we do not have a user manual for it. We are looking for folks who can provide that user manual and ideally service for the tool. Any leads or insights you all could provide to me would be welcome. Thank you very much in advance. Best regards, Josh Joshua D. Wood, Ph.D. Senior Process Engineer Cell: (309)-582-6011 -------------- next part -------------- An HTML attachment was scrubbed... URL: From sguo18 at yorku.ca Wed Aug 15 15:14:19 2018 From: sguo18 at yorku.ca (XIN GUO) Date: Wed, 15 Aug 2018 15:14:19 -0400 Subject: [labnetwork] OAI 800E mask aligner Message-ID: Hello all, Does anyone here have an OAI 800E enhanced mask aligner with motorised control? Can you provide some feedback on the performance, reliability and services? Appreciate your kind feedback. Cheers Shane -------------- next part -------------- An HTML attachment was scrubbed... URL: From mfcchung at ust.hk Thu Aug 16 03:32:17 2018 From: mfcchung at ust.hk (Wing Leong CHUNG) Date: Thu, 16 Aug 2018 07:32:17 +0000 Subject: [labnetwork] Leybold turbo pump controller In-Reply-To: References: Message-ID: <1534404737717.20686@ust.hk> Dear network members, We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the display. We swarp a good controller to the system, no error message appear. I guest the fault is come form the controller itself. However, I contact with Leybold but they said this model is obsoleted, no service can be provide further. Is there any suggestion of company can provide service to repair the controllers? Jeff Chung Engineer Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science and Technology (HKUST) Cell: (852)-2358-7211 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jhub at danchip.dtu.dk Thu Aug 16 04:15:37 2018 From: jhub at danchip.dtu.dk (=?iso-8859-1?Q?J=F6rg_H=FCbner?=) Date: Thu, 16 Aug 2018 08:15:37 +0000 Subject: [labnetwork] PlasmaTherm 720 and a selective SiO2 etch ? In-Reply-To: <9C4552F2D4B19C44970F1CB90360C991C8E1037F@csgmbx211w> References: <9C4552F2D4B19C44970F1CB90360C991C8E1037F@csgmbx211w> Message-ID: <16ba7299f3e04430998a6a10ea8d422e@danchip.dtu.dk> Hi, We do not have a PlasmaTherm 720 RIE but have been into etching of SiO2 for some time using our STS machines. The principles are the same regardless the machine and the selectivity of 10 is though (and will most likely be dirty) so here are a few thoughts put together mostly by Prof. Henri Jansen: As usual, recipes are very rare to be transferable between etch tools. Even if the tools are identical (I mean having the same name) tool history and actual use (contamination) is a source of "recipe drift". Of course, different brands will make the direct exchange of a recipe even more tricky. At Danchip we use the advanced oxide etcher from S(P)TS with a dual source arrangement (ICP to create plasma species and CCP to extract the ions). As far as I remember, the PlasmaTherm 720 has a Reinberg reactor design with only a CCP source, so very different. Having said the above, a way to go is not to copy a recipe, but to follow a procedure to find one, because this is independent of the tool. In general, the CF4+H2 plasma produces CF2 radicals that passivates surfaces and CFx+ ions that removes material. The ions are forced towards the substrate in an almost straight line by the dc self-bias as created by the CCP (also called RIE source) and as such the profile will be directional. To enable sufficient selectivity between silicon and silicon dioxide, one should put the recipe exactly there where the fluorocarbon deposit (from the CF2 radicals) will protect the silicon while the SiO2 is still etching. The oxide will etch quicker than the silicon because it's oxygen content will "burn" the FC deposit and consequently the SiO2 surface will be free from the passivating film. Typically, the difference in etch rate between Si and SiO2 is rather small and a ratio of 10 is tough and this will put the system into a position where a lot of FC deposit will start to "grow" on all surfaces, including the reactor walls. This contamination can be minimized using a dual source arrangement, such as Danchip's STS tool, because these tools can create more easily an ion-rich and radical-poor environment. As far as my opinion counts, I would start with a certain setting where the plasma is "happy", i.e., a stable CF4 plasma. Then you change the hydrogen content until the silicon almost stops etching. If correct, at that particular setting the SiO2 etch will still be reasonable, even though it won't be very fast (several 10th of nm per minute). As a final "advice", maybe you could contact PlasmaTherm as they will have sufficient field experience with respect to this tool. The 720 is a very common tool around the globe, so maybe they have a very reasonable starting point even though I believe that a selectivity above 10 cannot be provided directly as many people do not like the frequent cleaning procedure that goes with the fast FC growth. Hope this story is helpful... Regards Henri and J?rg From: labnetwork-bounces at mtl.mit.edu On Behalf Of James C. Sturm Sent: 14. august 2018 22:43 To: labnetwork at mtl.mit.edu Cc: Eric N. Mills Subject: [labnetwork] PlasmaTherm 720 and a selective SiO2 etch ? Hi, we have a PlasmaTherm 720 RIE etcher plumbed with CF4 and H2. Does anyone have a recipe for selective etching of thermal SiO2 (stopping on silicon with selectivity > 10). Right now the chamber has an Al feature plate (outside of the wafer) which we'd prefer to leave in if possible. Thanks, Jim Sturm and Eric Mills, Princeton University -------------- next part -------------- An HTML attachment was scrubbed... URL: From kjvowen at lnf.umich.edu Thu Aug 16 09:26:56 2018 From: kjvowen at lnf.umich.edu (Kevin Owen) Date: Thu, 16 Aug 2018 09:26:56 -0400 Subject: [labnetwork] Leybold turbo pump controller In-Reply-To: <1534404737717.20686@ust.hk> References: <1534404737717.20686@ust.hk> Message-ID: Jeff, You could try Trotec Solutions. I use them for all my turbo refurbs, and they've been able to repair controllers as well. -Kevin On Thu, Aug 16, 2018 at 3:32 AM, Wing Leong CHUNG wrote: > Dear network members, > > > We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo > pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the > display. We swarp a good controller to the system, no error message appear. > I guest the fault is come form the controller itself. However, I contact > with Leybold but they said this model is obsoleted, no service can be > provide further. > > > Is there any suggestion of company can provide service to repair the > controllers? > > > Jeff Chung > Engineer > Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science > and Technology (HKUST) > Cell: (852)-2358-7211 > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- Kevin Owen Senior Engineer in Research Operations Group, Lurie Nanofabrication Facility University of Michigan (734) 545-4014 -------------- next part -------------- An HTML attachment was scrubbed... URL: From sturm at Princeton.EDU Thu Aug 16 09:40:39 2018 From: sturm at Princeton.EDU (James C. Sturm) Date: Thu, 16 Aug 2018 13:40:39 +0000 Subject: [labnetwork] PlasmaTherm 720 and a selective SiO2 etch ? In-Reply-To: <16ba7299f3e04430998a6a10ea8d422e@danchip.dtu.dk> References: <9C4552F2D4B19C44970F1CB90360C991C8E1037F@csgmbx211w> <16ba7299f3e04430998a6a10ea8d422e@danchip.dtu.dk> Message-ID: <9C4552F2D4B19C44970F1CB90360C991C8E117D4@csgmbx211w> Thanks for such a detailed and thoughtful response. Contacting PlasmaTherm is a good idea. Our early experiments showed it wasn't going to be easy! I think we'll explore the added expense of running a new gas source to make it easier. But I have to review what the right gas source would be for a selective SiO2 etch, however. Open to advice and suggestions on that. Sincerely, Jim Sturm From: J?rg H?bner Sent: Thursday, August 16, 2018 4:16 AM To: James C. Sturm ; labnetwork at mtl.mit.edu Cc: Eric N. Mills Subject: RE: PlasmaTherm 720 and a selective SiO2 etch ? Hi, We do not have a PlasmaTherm 720 RIE but have been into etching of SiO2 for some time using our STS machines. The principles are the same regardless the machine and the selectivity of 10 is though (and will most likely be dirty) so here are a few thoughts put together mostly by Prof. Henri Jansen: As usual, recipes are very rare to be transferable between etch tools. Even if the tools are identical (I mean having the same name) tool history and actual use (contamination) is a source of "recipe drift". Of course, different brands will make the direct exchange of a recipe even more tricky. At Danchip we use the advanced oxide etcher from S(P)TS with a dual source arrangement (ICP to create plasma species and CCP to extract the ions). As far as I remember, the PlasmaTherm 720 has a Reinberg reactor design with only a CCP source, so very different. Having said the above, a way to go is not to copy a recipe, but to follow a procedure to find one, because this is independent of the tool. In general, the CF4+H2 plasma produces CF2 radicals that passivates surfaces and CFx+ ions that removes material. The ions are forced towards the substrate in an almost straight line by the dc self-bias as created by the CCP (also called RIE source) and as such the profile will be directional. To enable sufficient selectivity between silicon and silicon dioxide, one should put the recipe exactly there where the fluorocarbon deposit (from the CF2 radicals) will protect the silicon while the SiO2 is still etching. The oxide will etch quicker than the silicon because it's oxygen content will "burn" the FC deposit and consequently the SiO2 surface will be free from the passivating film. Typically, the difference in etch rate between Si and SiO2 is rather small and a ratio of 10 is tough and this will put the system into a position where a lot of FC deposit will start to "grow" on all surfaces, including the reactor walls. This contamination can be minimized using a dual source arrangement, such as Danchip's STS tool, because these tools can create more easily an ion-rich and radical-poor environment. As far as my opinion counts, I would start with a certain setting where the plasma is "happy", i.e., a stable CF4 plasma. Then you change the hydrogen content until the silicon almost stops etching. If correct, at that particular setting the SiO2 etch will still be reasonable, even though it won't be very fast (several 10th of nm per minute). As a final "advice", maybe you could contact PlasmaTherm as they will have sufficient field experience with respect to this tool. The 720 is a very common tool around the globe, so maybe they have a very reasonable starting point even though I believe that a selectivity above 10 cannot be provided directly as many people do not like the frequent cleaning procedure that goes with the fast FC growth. Hope this story is helpful... Regards Henri and J?rg From: labnetwork-bounces at mtl.mit.edu > On Behalf Of James C. Sturm Sent: 14. august 2018 22:43 To: labnetwork at mtl.mit.edu Cc: Eric N. Mills > Subject: [labnetwork] PlasmaTherm 720 and a selective SiO2 etch ? Hi, we have a PlasmaTherm 720 RIE etcher plumbed with CF4 and H2. Does anyone have a recipe for selective etching of thermal SiO2 (stopping on silicon with selectivity > 10). Right now the chamber has an Al feature plate (outside of the wafer) which we'd prefer to leave in if possible. Thanks, Jim Sturm and Eric Mills, Princeton University -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Thu Aug 16 11:22:28 2018 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Thu, 16 Aug 2018 15:22:28 +0000 Subject: [labnetwork] Leybold turbo pump controller In-Reply-To: <1534404737717.20686@ust.hk> References: <1534404737717.20686@ust.hk> Message-ID: Hi Wing! Getting your controller repaired is going to be challenging for finding a repair outfit is getting more challenging and most places will want you to send a good pump and cables along with your controller to make sure the controller is repaired. We're still going through issues of trying to get our DRIE back up and running. We were also prepared to do an upgrade until we found out lead times for new semiconductor pumps were up to 8 months. Best of luck to you. Cheers! Julia Aebersold Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Wing Leong CHUNG Sent: Thursday, August 16, 2018 3:32 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Leybold turbo pump controller Dear network members, We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the display. We swarp a good controller to the system, no error message appear. I guest the fault is come form the controller itself. However, I contact with Leybold but they said this model is obsoleted, no service can be provide further. Is there any suggestion of company can provide service to repair the controllers? Jeff Chung Engineer Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science and Technology (HKUST) Cell: (852)-2358-7211 -------------- next part -------------- An HTML attachment was scrubbed... URL: From spaolini at cns.fas.harvard.edu Thu Aug 16 13:35:00 2018 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Thu, 16 Aug 2018 17:35:00 +0000 Subject: [labnetwork] Leybold turbo pump controller In-Reply-To: References: <1534404737717.20686@ust.hk> Message-ID: Jeff, The message you are getting means that the turbo was jolted or shocked in some manner and you're right, It's specific to the controller. You will have to play with the buttons on the controller to figure out how to clear the message. Steve paolini Equipment Dood Harvard University Center for Nanoscale systems From: labnetwork-bounces at mtl.mit.edu On Behalf Of Aebersold,Julia W. Sent: Thursday, August 16, 2018 11:22 AM To: Wing Leong CHUNG ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Leybold turbo pump controller Hi Wing! Getting your controller repaired is going to be challenging for finding a repair outfit is getting more challenging and most places will want you to send a good pump and cables along with your controller to make sure the controller is repaired. We're still going through issues of trying to get our DRIE back up and running. We were also prepared to do an upgrade until we found out lead times for new semiconductor pumps were up to 8 months. Best of luck to you. Cheers! Julia Aebersold Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Wing Leong CHUNG Sent: Thursday, August 16, 2018 3:32 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Leybold turbo pump controller Dear network members, We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the display. We swarp a good controller to the system, no error message appear. I guest the fault is come form the controller itself. However, I contact with Leybold but they said this model is obsoleted, no service can be provide further. Is there any suggestion of company can provide service to repair the controllers? Jeff Chung Engineer Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science and Technology (HKUST) Cell: (852)-2358-7211 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rc at danchip.dtu.dk Thu Aug 16 15:56:02 2018 From: rc at danchip.dtu.dk (Roy Cork) Date: Thu, 16 Aug 2018 19:56:02 +0000 Subject: [labnetwork] Leybold turbo pump controller In-Reply-To: References: <1534404737717.20686@ust.hk>, Message-ID: Hi Wing, It?s not easy getting the old analogue turbo / controllers fixed, you may need to upgrade to a digital setup. We have used https://www.provac.com in the past with some success. Best regards Roy Cork DTU Danchip ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Aebersold,Julia W. Sent: Thursday, August 16, 2018 5:22:28 PM To: Wing Leong CHUNG; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Leybold turbo pump controller Hi Wing! Getting your controller repaired is going to be challenging for finding a repair outfit is getting more challenging and most places will want you to send a good pump and cables along with your controller to make sure the controller is repaired. We?re still going through issues of trying to get our DRIE back up and running. We were also prepared to do an upgrade until we found out lead times for new semiconductor pumps were up to 8 months. Best of luck to you. Cheers! Julia Aebersold Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Wing Leong CHUNG Sent: Thursday, August 16, 2018 3:32 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Leybold turbo pump controller Dear network members, We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the display. We swarp a good controller to the system, no error message appear. I guest the fault is come form the controller itself. However, I contact with Leybold but they said this model is obsoleted, no service can be provide further. Is there any suggestion of company can provide service to repair the controllers? Jeff Chung Engineer Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science and Technology (HKUST) Cell: (852)-2358-7211 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mapril at draper.com Fri Aug 17 06:07:50 2018 From: mapril at draper.com (April, Mark R.) Date: Fri, 17 Aug 2018 10:07:50 +0000 Subject: [labnetwork] Leybold turbo pump controller In-Reply-To: References: <1534404737717.20686@ust.hk> Message-ID: <5095951b7300486ca30fa1c2e50b670e@draper.com> Hi Jeff I concur with Mr. Paolini, figuring out the button config will clear it. I ran into similar issues several years ago and by chance/luck was able to clear as a button pusher.... Good luck Mark R. April Senior Equipment Engineer Microfabrication Laboratory Facilities Lead [color_logo_small4] 555 Technology Square Cambridge, MA 02139 mapril at draper.com O # 617-258-1613 C # 617-455-1596 www.draper.com From: labnetwork-bounces at mtl.mit.edu On Behalf Of Paolini, Steven Sent: Thursday, August 16, 2018 1:35 PM To: 'Aebersold,Julia W.' ; 'Wing Leong CHUNG' ; 'labnetwork at mtl.mit.edu' Subject: Re: [labnetwork] Leybold turbo pump controller Jeff, The message you are getting means that the turbo was jolted or shocked in some manner and you're right, It's specific to the controller. You will have to play with the buttons on the controller to figure out how to clear the message. Steve paolini Equipment Dood Harvard University Center for Nanoscale systems From: labnetwork-bounces at mtl.mit.edu > On Behalf Of Aebersold,Julia W. Sent: Thursday, August 16, 2018 11:22 AM To: Wing Leong CHUNG >; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Leybold turbo pump controller Hi Wing! Getting your controller repaired is going to be challenging for finding a repair outfit is getting more challenging and most places will want you to send a good pump and cables along with your controller to make sure the controller is repaired. We're still going through issues of trying to get our DRIE back up and running. We were also prepared to do an upgrade until we found out lead times for new semiconductor pumps were up to 8 months. Best of luck to you. Cheers! Julia Aebersold Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Wing Leong CHUNG Sent: Thursday, August 16, 2018 3:32 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Leybold turbo pump controller Dear network members, We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the display. We swarp a good controller to the system, no error message appear. I guest the fault is come form the controller itself. However, I contact with Leybold but they said this model is obsoleted, no service can be provide further. Is there any suggestion of company can provide service to repair the controllers? Jeff Chung Engineer Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science and Technology (HKUST) Cell: (852)-2358-7211 ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 1560 bytes Desc: image001.png URL: From mfcchung at ust.hk Thu Aug 16 22:49:50 2018 From: mfcchung at ust.hk (Wing Leong CHUNG) Date: Fri, 17 Aug 2018 02:49:50 +0000 Subject: [labnetwork] =?big5?b?pl7C0DogTGV5Ym9sZCB0dXJibyBwdW1wIGNvbnRy?= =?big5?b?b2xsZXI=?= In-Reply-To: <1534404737717.20686@ust.hk> References: , <1534404737717.20686@ust.hk> Message-ID: <1534474190234.77176@ust.hk> Dear all,? I would like to express my apperciation to the replies from network members, they really give me many valuable suggestions and information regarding to my problem. With Many Many Thanks Jeff Chung ________________________________ ???: Wing Leong CHUNG ????: 2018?8?16? 15:32 ???: labnetwork at mtl.mit.edu ??: Leybold turbo pump controller Dear network members, We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the display. We swarp a good controller to the system, no error message appear. I guest the fault is come form the controller itself. However, I contact with Leybold but they said this model is obsoleted, no service can be provide further. Is there any suggestion of company can provide service to repair the controllers? Jeff Chung Engineer Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science and Technology (HKUST) Cell: (852)-2358-7211 -------------- next part -------------- An HTML attachment was scrubbed... URL: From sguo18 at yorku.ca Fri Aug 17 09:01:24 2018 From: sguo18 at yorku.ca (XIN GUO) Date: Fri, 17 Aug 2018 09:01:24 -0400 Subject: [labnetwork] =?utf-8?b?5Zue6KaGOiBMZXlib2xkIHR1cmJvIHB1bXAgY29u?= =?utf-8?q?troller?= In-Reply-To: <1534474190234.77176@ust.hk> References: <1534404737717.20686@ust.hk> <1534474190234.77176@ust.hk> Message-ID: Hi Colleagues, My question might not be quite related to this topic but I hope to get some feedback. We are considering to acquire a PECVD and RIE. I saw some buyers explicitly exclude Leybold pumps in their requirements. I am open to all suppliers but it does seem that Leybold pumps may have more issues than other reputable suppliers. Or, maybe I just got a wrong impression. Anyway, I do not mean to be bias on any supplier. Btw, any rule of thumb for choosing pumps for cleanroom equipment? Thanks Shane On Fri, Aug 17, 2018 at 8:37 AM Wing Leong CHUNG wrote: > Dear all, > > > I would like to express my apperciation to the replies from network > members, they really give me many valuable suggestions and information > regarding to my problem. > > > With Many Many Thanks > > Jeff Chung > ------------------------------ > *???:* Wing Leong CHUNG > *????:* 2018?8?16? 15:32 > *???:* labnetwork at mtl.mit.edu > *??:* Leybold turbo pump controller > > > Dear network members, > > > We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo > pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the > display. We swarp a good controller to the system, no error message appear. > I guest the fault is come form the controller itself. However, I contact > with Leybold but they said this model is obsoleted, no service can be > provide further. > > > Is there any suggestion of company can provide service to repair the > controllers? > > > Jeff Chung > Engineer > Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science > and Technology (HKUST) > Cell: (852)-2358-7211 > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From schweig at umich.edu Fri Aug 17 10:57:58 2018 From: schweig at umich.edu (Dennis Schweiger) Date: Fri, 17 Aug 2018 10:57:58 -0400 Subject: [labnetwork] job posting for facilities engineer Message-ID: Good morning all, I have great news for any of you that might be considering a relocation to fabulous Michigan. The University of Michigan Lurie Nanofabrication Facility (LNF) has an opening for an engineer within our Infrastructure group. The candidate would be expected to become extremely familiar with the LNF building systems that include, but are not limited to; Gas delivery, Gas detection and Life Safety, DI water, Process chilled water, HVAC, Security, Video, Acid waste neutralization, and Power distribution. In addition, the candidate will be responsible for additions to the LNF infrastructure that will improve the capabilities of the LNF laboratory, as well as provide facilities support for the surrounding LNF associated labs. For further details, the following link should take you directly to the posting. http://careers.umich.edu/job_detail/161639/senior_engineer_in_research_-_lnf_operations Thank you, Dennis Schweiger University of Michigan/LNF Facilities Manager 734.647.2055 Ofc "People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." Within which group do you belong? -------------- next part -------------- An HTML attachment was scrubbed... URL: From mapril at draper.com Fri Aug 17 11:49:09 2018 From: mapril at draper.com (April, Mark R.) Date: Fri, 17 Aug 2018 15:49:09 +0000 Subject: [labnetwork] =?utf-8?b?5Zue6KaGOiBMZXlib2xkIHR1cmJvIHB1bXAgY29u?= =?utf-8?q?troller?= In-Reply-To: References: <1534404737717.20686@ust.hk> <1534474190234.77176@ust.hk> Message-ID: <9592ceb4dd384b85a8da32bc6b03ad48@draper.com> Hi Shane I have strictly used Ebara pumps now for the past 20 years. I have great results from them and some have been online for over 9 plus years running 24/7 without issue. The customer service is the best I have experienced. Thanks Mark R. April Senior Equipment Engineer Microfabrication Laboratory Facilities Lead [color_logo_small4] 555 Technology Square Cambridge, MA 02139 mapril at draper.com O # 617-258-1613 C # 617-455-1596 www.draper.com From: labnetwork-bounces at mtl.mit.edu On Behalf Of XIN GUO Sent: Friday, August 17, 2018 9:01 AM To: mfcchung at ust.hk Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] ??: Leybold turbo pump controller Hi Colleagues, My question might not be quite related to this topic but I hope to get some feedback. We are considering to acquire a PECVD and RIE. I saw some buyers explicitly exclude Leybold pumps in their requirements. I am open to all suppliers but it does seem that Leybold pumps may have more issues than other reputable suppliers. Or, maybe I just got a wrong impression. Anyway, I do not mean to be bias on any supplier. Btw, any rule of thumb for choosing pumps for cleanroom equipment? Thanks Shane On Fri, Aug 17, 2018 at 8:37 AM Wing Leong CHUNG > wrote: Dear all, I would like to express my apperciation to the replies from network members, they really give me many valuable suggestions and information regarding to my problem. With Many Many Thanks Jeff Chung ________________________________ ???: Wing Leong CHUNG ????: 2018?8?16? 15:32 ???: labnetwork at mtl.mit.edu ??: Leybold turbo pump controller Dear network members, We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the display. We swarp a good controller to the system, no error message appear. I guest the fault is come form the controller itself. However, I contact with Leybold but they said this model is obsoleted, no service can be provide further. Is there any suggestion of company can provide service to repair the controllers? Jeff Chung Engineer Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science and Technology (HKUST) Cell: (852)-2358-7211 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 1560 bytes Desc: image001.png URL: From kjvowen at lnf.umich.edu Fri Aug 17 11:58:03 2018 From: kjvowen at lnf.umich.edu (Kevin Owen) Date: Fri, 17 Aug 2018 11:58:03 -0400 Subject: [labnetwork] =?utf-8?b?5Zue6KaGOiBMZXlib2xkIHR1cmJvIHB1bXAgY29u?= =?utf-8?q?troller?= In-Reply-To: References: <1534404737717.20686@ust.hk> <1534474190234.77176@ust.hk> Message-ID: Shane, My guess is they couldn't strike a contract with Leybold to get a good deal on the pumps. Because I also know vendors that exclusively use Leybold pumps. In my personal experience, I can't say I've had significantly more or significantly fewer "bad" experiences with any particular pump vendor (although the same can not be said for refurbishment companies). Generally, I take the vendor recommendation for high vacuum pumps (turbos, cryos, etc), but request a specific backing/roughing pump, since we have standardized those at the LNF. The vendor should be able to provide the pumping capacity requirement and you can choose based on that (we have standardized to 2 pumps, one big, one small, and choose the one that meets/exceeds the requirement from the vendor). If you don't have anything standardized, I would just go with the recommendation of the vendor, although if they have several options I might see if one of them matches an existing piece of equipment. For us, this is primarily intended to reduce the number of on-site spares we need. -Kevin On Fri, Aug 17, 2018 at 9:01 AM, XIN GUO wrote: > Hi Colleagues, > > My question might not be quite related to this topic but I hope to get > some feedback. > > We are considering to acquire a PECVD and RIE. I saw some buyers > explicitly exclude Leybold pumps in their requirements. I am open to all > suppliers but it does seem that Leybold pumps may have more issues than > other reputable suppliers. Or, maybe I just got a wrong impression. Anyway, > I do not mean to be bias on any supplier. > > Btw, any rule of thumb for choosing pumps for cleanroom equipment? > > Thanks > > Shane > > > > On Fri, Aug 17, 2018 at 8:37 AM Wing Leong CHUNG wrote: > >> Dear all, >> >> >> I would like to express my apperciation to the replies from network >> members, they really give me many valuable suggestions and information >> regarding to my problem. >> >> >> With Many Many Thanks >> >> Jeff Chung >> ------------------------------ >> *???:* Wing Leong CHUNG >> *????:* 2018?8?16? 15:32 >> *???:* labnetwork at mtl.mit.edu >> *??:* Leybold turbo pump controller >> >> >> Dear network members, >> >> >> We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 >> turbo pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto >> the display. We swarp a good controller to the system, no error message >> appear. I guest the fault is come form the controller itself. However, I >> contact with Leybold but they said this model is obsoleted, no service can >> be provide further. >> >> >> Is there any suggestion of company can provide service to repair the >> controllers? >> >> >> Jeff Chung >> Engineer >> Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science >> and Technology (HKUST) >> Cell: (852)-2358-7211 >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- Kevin Owen Senior Engineer in Research Operations Group, Lurie Nanofabrication Facility University of Michigan (734) 545-4014 -------------- next part -------------- An HTML attachment was scrubbed... URL: From kurt.kupcho at wisc.edu Fri Aug 17 16:12:08 2018 From: kurt.kupcho at wisc.edu (Kurt Kupcho) Date: Fri, 17 Aug 2018 20:12:08 +0000 Subject: [labnetwork] (no subject) Message-ID: The quality of the pump is not the only problem. How long does the manufacturer support their pumps and controllers is also very important. When they deem the product obsolete, and some do it after only a few years, it gets harder to get repaired. Then you are stuck finding third party repair that can repair it as long as they can still find the parts on the third party market. This is more for turbos and turbo controllers. Eventually even the third party repair companies cannot fix them anymore, which is why you see the questions come across about certain turbo and controller pairs on the labnetwork. I won?t say what companies these are but definitely something to consider. Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 [Nano-Fab_color-flush] From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kevin Owen Sent: Friday, August 17, 2018 10:58 AM To: XIN GUO Cc: Fab Network Subject: Re: [labnetwork] ??: Leybold turbo pump controller Shane, My guess is they couldn't strike a contract with Leybold to get a good deal on the pumps. Because I also know vendors that exclusively use Leybold pumps. In my personal experience, I can't say I've had significantly more or significantly fewer "bad" experiences with any particular pump vendor (although the same can not be said for refurbishment companies). Generally, I take the vendor recommendation for high vacuum pumps (turbos, cryos, etc), but request a specific backing/roughing pump, since we have standardized those at the LNF. The vendor should be able to provide the pumping capacity requirement and you can choose based on that (we have standardized to 2 pumps, one big, one small, and choose the one that meets/exceeds the requirement from the vendor). If you don't have anything standardized, I would just go with the recommendation of the vendor, although if they have several options I might see if one of them matches an existing piece of equipment. For us, this is primarily intended to reduce the number of on-site spares we need. -Kevin On Fri, Aug 17, 2018 at 9:01 AM, XIN GUO > wrote: Hi Colleagues, My question might not be quite related to this topic but I hope to get some feedback. We are considering to acquire a PECVD and RIE. I saw some buyers explicitly exclude Leybold pumps in their requirements. I am open to all suppliers but it does seem that Leybold pumps may have more issues than other reputable suppliers. Or, maybe I just got a wrong impression. Anyway, I do not mean to be bias on any supplier. Btw, any rule of thumb for choosing pumps for cleanroom equipment? Thanks Shane On Fri, Aug 17, 2018 at 8:37 AM Wing Leong CHUNG > wrote: Dear all, I would like to express my apperciation to the replies from network members, they really give me many valuable suggestions and information regarding to my problem. With Many Many Thanks Jeff Chung ________________________________ ???: Wing Leong CHUNG ????: 2018?8?16? 15:32 ???: labnetwork at mtl.mit.edu ??: Leybold turbo pump controller Dear network members, We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the display. We swarp a good controller to the system, no error message appear. I guest the fault is come form the controller itself. However, I contact with Leybold but they said this model is obsoleted, no service can be provide further. Is there any suggestion of company can provide service to repair the controllers? Jeff Chung Engineer Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science and Technology (HKUST) Cell: (852)-2358-7211 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Kevin Owen Senior Engineer in Research Operations Group, Lurie Nanofabrication Facility University of Michigan (734) 545-4014 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 39543 bytes Desc: image001.png URL: From srinehar at purdue.edu Fri Aug 17 16:58:41 2018 From: srinehar at purdue.edu (Rinehart, Sean M) Date: Fri, 17 Aug 2018 20:58:41 +0000 Subject: [labnetwork] =?utf-8?b?5Zue6KaGOiBMZXlib2xkIHR1cmJvIHB1bXAgY29u?= =?utf-8?q?troller?= In-Reply-To: References: <1534404737717.20686@ust.hk> <1534474190234.77176@ust.hk> Message-ID: <09cff650e50342759d989ab5622aaa37@wppexc05.purdue.lcl> I?ve heard of at least a couple other instances where an obsolete leybold MAG.DRIVE controller has failed and no one can repair it. It seems endemic to their older analog pumps. That said, I haven?t heard anything bad about digital models, and I think my analog MAG.DRIVE controller ran over fifteen years before failing, which isn?t a bad lifetime. Regarding other pumps I usually go with vendor spec, but lately I?ve been moving to replace some wet pumps with dry/scroll options on our older (20+ years) equipment in an effort to save time on maintenance and money on fomblin oil. Best regards, Sean Rinehart Research Engineer ? Plasma and Metrology Systems Birck Nanotechnology Center 2287B | 765.496.9189 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kevin Owen Sent: Friday, August 17, 2018 11:58 AM To: XIN GUO Cc: Fab Network Subject: Re: [labnetwork] ??: Leybold turbo pump controller Shane, My guess is they couldn't strike a contract with Leybold to get a good deal on the pumps. Because I also know vendors that exclusively use Leybold pumps. In my personal experience, I can't say I've had significantly more or significantly fewer "bad" experiences with any particular pump vendor (although the same can not be said for refurbishment companies). Generally, I take the vendor recommendation for high vacuum pumps (turbos, cryos, etc), but request a specific backing/roughing pump, since we have standardized those at the LNF. The vendor should be able to provide the pumping capacity requirement and you can choose based on that (we have standardized to 2 pumps, one big, one small, and choose the one that meets/exceeds the requirement from the vendor). If you don't have anything standardized, I would just go with the recommendation of the vendor, although if they have several options I might see if one of them matches an existing piece of equipment. For us, this is primarily intended to reduce the number of on-site spares we need. -Kevin On Fri, Aug 17, 2018 at 9:01 AM, XIN GUO > wrote: Hi Colleagues, My question might not be quite related to this topic but I hope to get some feedback. We are considering to acquire a PECVD and RIE. I saw some buyers explicitly exclude Leybold pumps in their requirements. I am open to all suppliers but it does seem that Leybold pumps may have more issues than other reputable suppliers. Or, maybe I just got a wrong impression. Anyway, I do not mean to be bias on any supplier. Btw, any rule of thumb for choosing pumps for cleanroom equipment? Thanks Shane On Fri, Aug 17, 2018 at 8:37 AM Wing Leong CHUNG > wrote: Dear all, I would like to express my apperciation to the replies from network members, they really give me many valuable suggestions and information regarding to my problem. With Many Many Thanks Jeff Chung ________________________________ ???: Wing Leong CHUNG ????: 2018?8?16? 15:32 ???: labnetwork at mtl.mit.edu ??: Leybold turbo pump controller Dear network members, We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the display. We swarp a good controller to the system, no error message appear. I guest the fault is come form the controller itself. However, I contact with Leybold but they said this model is obsoleted, no service can be provide further. Is there any suggestion of company can provide service to repair the controllers? Jeff Chung Engineer Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science and Technology (HKUST) Cell: (852)-2358-7211 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Kevin Owen Senior Engineer in Research Operations Group, Lurie Nanofabrication Facility University of Michigan (734) 545-4014 -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Tue Aug 21 18:01:56 2018 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Tue, 21 Aug 2018 22:01:56 +0000 Subject: [labnetwork] Leybold turbo pump controller In-Reply-To: <5095951b7300486ca30fa1c2e50b670e@draper.com> References: <1534404737717.20686@ust.hk> , <5095951b7300486ca30fa1c2e50b670e@draper.com> Message-ID: On a separate note can someone give input on the elusive calibration technique? There is supposed to be a method to calibrate this particular controller with the MAG 900 CT pump even though it not documented. Something along the lines of holding in the stop button, then start button, let go of the start button and finally the stop button. I tried this and nada happened. Any input words of guidance from our esteemed community? Anyone want to have a pump bonfire with me? ?? Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager University of Louisville 2210 South Brook Street Shumaker Research Building, Room 233 Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ ________________________________ From: April, Mark R. Sent: Friday, August 17, 2018 6:07:50 AM To: Paolini, Steven; Aebersold,Julia W.; 'Wing Leong CHUNG'; 'labnetwork at mtl.mit.edu' Subject: RE: Leybold turbo pump controller Hi Jeff I concur with Mr. Paolini, figuring out the button config will clear it. I ran into similar issues several years ago and by chance/luck was able to clear as a button pusher?. Good luck Mark R. April Senior Equipment Engineer Microfabrication Laboratory Facilities Lead [color_logo_small4] 555 Technology Square Cambridge, MA 02139 mapril at draper.com O # 617-258-1613 C # 617-455-1596 www.draper.com From: labnetwork-bounces at mtl.mit.edu On Behalf Of Paolini, Steven Sent: Thursday, August 16, 2018 1:35 PM To: 'Aebersold,Julia W.' ; 'Wing Leong CHUNG' ; 'labnetwork at mtl.mit.edu' Subject: Re: [labnetwork] Leybold turbo pump controller Jeff, The message you are getting means that the turbo was jolted or shocked in some manner and you?re right, It?s specific to the controller. You will have to play with the buttons on the controller to figure out how to clear the message. Steve paolini Equipment Dood Harvard University Center for Nanoscale systems From: labnetwork-bounces at mtl.mit.edu > On Behalf Of Aebersold,Julia W. Sent: Thursday, August 16, 2018 11:22 AM To: Wing Leong CHUNG >; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Leybold turbo pump controller Hi Wing! Getting your controller repaired is going to be challenging for finding a repair outfit is getting more challenging and most places will want you to send a good pump and cables along with your controller to make sure the controller is repaired. We?re still going through issues of trying to get our DRIE back up and running. We were also prepared to do an upgrade until we found out lead times for new semiconductor pumps were up to 8 months. Best of luck to you. Cheers! Julia Aebersold Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Wing Leong CHUNG Sent: Thursday, August 16, 2018 3:32 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Leybold turbo pump controller Dear network members, We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the display. We swarp a good controller to the system, no error message appear. I guest the fault is come form the controller itself. However, I contact with Leybold but they said this model is obsoleted, no service can be provide further. Is there any suggestion of company can provide service to repair the controllers? Jeff Chung Engineer Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science and Technology (HKUST) Cell: (852)-2358-7211 ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 1560 bytes Desc: image001.png URL: From djfortie at ualberta.ca Thu Aug 23 17:32:50 2018 From: djfortie at ualberta.ca (Devin Fortier) Date: Thu, 23 Aug 2018 15:32:50 -0600 Subject: [labnetwork] 3rd Party Service Provider for Olympus OLS3000 LEXT Message-ID: Hello Everyone, We've run into an issue with our Olympus Laser Confocal Microscope OLS3000 LEXT. Ours has the automated stage and stage controller, but the stage controller has an emergency stop condition that cannot be cleared. After reaching out to Olympus for help we discovered that they will no longer provide service for this model. I was wondering if anyone on the network would know of a 3rd party service provider for Olympus microscopes, specifically this model which is about ten years old now? Any suggestions would be greatly appreciated. Thank you, -- Devin Fortier Systems Technician University of Alberta - nanoFAB W1-028A ECERF Building 9107 - 116 Street Edmonton, Alberta Canada T6G 2V4 www.nanofab.ualberta.ca Ph: 780-868-6480 -------------- next part -------------- An HTML attachment was scrubbed... URL: From janney.9 at osu.edu Tue Aug 28 14:29:27 2018 From: janney.9 at osu.edu (Janney, Peter J.) Date: Tue, 28 Aug 2018 18:29:27 +0000 Subject: [labnetwork] (no subject) Message-ID: I have a CVD Gas Conditioning System that I would be willing to donate to a Non-Profit. The tool is in working condition. We were using it and removed because we got a newer scrubber. [cid:image002.png at 01D43EDB.85287C90] Best regards, Peter Janney [The Ohio State University] Peter Janney Lab Services Coordinator Nanotech West Lab 100 Science Village, 1381 Kinnear Road, Columbus, OH 43212 614-688-4213 Office 614-753-3926 Cell janney.9 at osu.edu nanotech.osu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 485248 bytes Desc: image002.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.png Type: image/png Size: 3548 bytes Desc: image003.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: EGC_Facilities.pdf Type: application/pdf Size: 25028 bytes Desc: EGC_Facilities.pdf URL: From mapril at draper.com Wed Aug 29 14:03:07 2018 From: mapril at draper.com (April, Mark R.) Date: Wed, 29 Aug 2018 18:03:07 +0000 Subject: [labnetwork] SUSS MA/BA6 back side alignment microscope assembly Message-ID: Good Afternoon All, I was wondering if anyone had a right and/or left side back side alignment microscope assembly for a Karl Suss MA/BA6, S# 391 era aligner? The part number that I need is 159309 for the right side and 159308 for the left side If anyone would like to sell them, please let me know Thank you Mark R. April Senior Equipment Engineer Microfabrication Laboratory Facilities Lead [color_logo_small4] 555 Technology Square Cambridge, MA 02139 mapril at draper.com O # 617-258-1613 C # 617-455-1596 www.draper.com ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 1560 bytes Desc: image001.png URL: From kmcpeak at lsu.edu Thu Aug 30 21:10:51 2018 From: kmcpeak at lsu.edu (Kevin McPeak) Date: Thu, 30 Aug 2018 20:10:51 -0500 Subject: [labnetwork] Local chiller vs. facility chilled water Message-ID: Dear Colleagues, The central chilled water pump at the facility where the LSU cleanroom is housed died earlier this week. Facilities told me that they have no plans for replacing the pump. The cost is too high (15K) and most of the beamline endstations (our cleanroom lives inside of a synchrotron) have switched to local chillers. So I have two options: 1). Buy 4 small chillers for an e-beam evaporator, SEM, ICP, sputtering system. This number will grow in the future. 2). Buy one large chiller and connect it to the existing 2" diameter cooling pipe network that is plumbed around the cleanroom perimeter. I lean towards option #2 but it is less flexible than #1 and could put us in the same situation we are in now (e.g. most machines down) in the case of a failure. The infastructure of our cleanroom is about 25 years old. So I wanted to ask the list members to get a more modern take on chilled water. Do modern cleanrooms use central chilled water systems or is the local chiller model more popular given the added flexibility and more distributed failure model? Thanks! Regards, Kevin -- Kevin McPeak Assistant Professor Department of Chemical Engineering Louisiana State University email: kmcpeak at lsu.edu phone: 225-578-0058 -------------- next part -------------- An HTML attachment was scrubbed... URL: From Rob.Breisch at trilliumsubfab.com Fri Aug 31 10:46:48 2018 From: Rob.Breisch at trilliumsubfab.com (Rob Breisch) Date: Fri, 31 Aug 2018 14:46:48 +0000 Subject: [labnetwork] Local chiller vs. facility chilled water In-Reply-To: References: Message-ID: <5E10632F-1037-4137-A0B2-25FE70DC0BFC@trilliumsubfab.com> Kevin - Most modern cleanrooms have a central PCW systems AND water cooled poInt of use chillers and heat exchangers as each chamber/tool will have different heat load and temperature set point requirements. In your case you will need air cooled chillers. Option 1 is what I would recommend in his instance. You should consider some standardization/redundancy such that the units can be interchanged between tools/chambers so you can have some flexibility in the event of an unplanned failure. We can help you with air cooled chillers - it?s one of our core competencies. Rob Breisch 801-726-5035 On Aug 31, 2018, at 9:34 AM, Kevin McPeak > wrote: Dear Colleagues, The central chilled water pump at the facility where the LSU cleanroom is housed died earlier this week. Facilities told me that they have no plans for replacing the pump. The cost is too high (15K) and most of the beamline endstations (our cleanroom lives inside of a synchrotron) have switched to local chillers. So I have two options: 1). Buy 4 small chillers for an e-beam evaporator, SEM, ICP, sputtering system. This number will grow in the future. 2). Buy one large chiller and connect it to the existing 2" diameter cooling pipe network that is plumbed around the cleanroom perimeter. I lean towards option #2 but it is less flexible than #1 and could put us in the same situation we are in now (e.g. most machines down) in the case of a failure. The infastructure of our cleanroom is about 25 years old. So I wanted to ask the list members to get a more modern take on chilled water. Do modern cleanrooms use central chilled water systems or is the local chiller model more popular given the added flexibility and more distributed failure model? Thanks! Regards, Kevin -- Kevin McPeak Assistant Professor Department of Chemical Engineering Louisiana State University email: kmcpeak at lsu.edu phone: 225-578-0058 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From schweig at umich.edu Fri Aug 31 10:57:54 2018 From: schweig at umich.edu (Dennis Schweiger) Date: Fri, 31 Aug 2018 10:57:54 -0400 Subject: [labnetwork] Local chiller vs. facility chilled water In-Reply-To: References: Message-ID: Here at UofMichigan, we have two distinct process chilled water (PCW) loops (with redundant pump capacity) that serve various sections of our cleanroom. Both of these PCW loops are fabricated from CPVC materials, polished to ~1Meg-Ohm for resistivity, filled with RO water, and have UV lamps and filters for "cleaning" them up. Both of them reject their heat load into the central campus chiller loop through plate/frame heat exchangers. The only time we'll install a local chiller (heat exchanger) is if we need some special fluid, or much better temperature control (heat and cool), and even then those local units will be configured to be water-water so that their heat load goes into our PCW, and not into our clean air-stream. You have an interesting dilemma.... What type of capacity do you need, what quality of water, how long do you expect to be in the same location? All of these questions will affect the decision. I too would lean towards option #2, with a redundant pump system. It's the best long term solution. Dennis Schweiger University of Michigan/LNF Facilities 734.647.2055 Ofc On Fri, Aug 31, 2018 at 10:32 AM Kevin McPeak wrote: > Dear Colleagues, > > The central chilled water pump at the facility where the LSU cleanroom is > housed died earlier this week. Facilities told me that they have no plans > for replacing the pump. The cost is too high (15K) and most of the beamline > endstations (our cleanroom lives inside of a synchrotron) have switched to > local chillers. > > So I have two options: > > 1). Buy 4 small chillers for an e-beam evaporator, SEM, ICP, sputtering > system. This number will grow in the future. > > 2). Buy one large chiller and connect it to the existing 2" diameter > cooling pipe network that is plumbed around the cleanroom perimeter. > > I lean towards option #2 but it is less flexible than #1 and could put us > in the same situation we are in now (e.g. most machines down) in the case > of a failure. > > The infastructure of our cleanroom is about 25 years old. So I wanted to > ask the list members to get a more modern take on chilled water. Do modern > cleanrooms use central chilled water systems or is the local chiller model > more popular given the added flexibility and more distributed failure model? > > Thanks! > > Regards, > Kevin > > -- > Kevin McPeak > Assistant Professor > Department of Chemical Engineering > Louisiana State University > email: kmcpeak at lsu.edu > phone: 225-578-0058 > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From markjmcc at illinois.edu Fri Aug 31 11:22:08 2018 From: markjmcc at illinois.edu (McCollum, Mark J) Date: Fri, 31 Aug 2018 15:22:08 +0000 Subject: [labnetwork] Job opening at UIUC Message-ID: <36D7598BABB9CC4BA7AFD94FB90C35420A7B26F1@CITESMBX1.ad.uillinois.edu> UIUC has an opening for a Research Engineer who will manage equipment and users in lithography and deposition. The listing is at... https://jobs.illinois.edu/academic-job-board/job-details?jobID=101989&job=research-engineer-micro-and-nanotechnology-laboratory-101989 Dr. Mark J. McCollum Principal Research Engineer Micro and Nanotechnology Laboratory 2260 University of Illinois at Urbana-Champaign 208 North Wright Street Urbana, IL 61801 217-300-5181 email: markjmcc at illinois.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: