[labnetwork] CMP slurry for oxide

Nava Ariel-Sternberg na2661 at columbia.edu
Thu Aug 2 16:32:51 EDT 2018


Dear all, 

 

Can someone recommend a company that sells high quality slurries for oxide
polishing with selectivity to silicon and silicon nitride? 

The company we were buying from discontinued the slurry we were using and a
second vendor is requesting that we sign an NDA before they can send us a
quote. 

 

Any recommendations would be greatly appreciated. 

 

Thanks,

Nava

 

Nava Ariel-Sternberg, Ph.D.

Director of CNI Shared Labs

CEPSR/MC 8903 

530 west 120th st. NY

NY 10027

Office: 212-8549927

Cell: 201-5627600

 

 

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