[labnetwork] Photo lithography mask using transparency film

[Matthias Pleil]

Hello Seong Jin,


Well - there are a lot of ways you can do this.  If you don't care about critical dimensions, for example we have our students create an "Art Wafer" - basically they get an image, or drawing an image and print onto a transparency film to the size of the clear mask glass plate.  We have them transfer to a 4 or 6in wafer with about 5k SiO2, pattern, etch in BOE 6:1 for 8min, strip the resist and they get a copy of the mask.  Varying the SiO2 thickness gives them different colors.


If you need more precision, you can find a high end print shop that produce high contrast lithographs on plastic film - I used one a long time ago at a cost of less than $20each.  The minimum resolution is on the order of 5um or so.


Of course if you need more precision, you can get a chrome/glass plate made - about $500 or so.


What is the minimum resolution you need?


Kind Regards,

Matthias Pleil, Ph.D.
Research Professor & Lecturer III of Mech. Eng - UNM
UNM MTTC Cleanroom Manager
PI - Southwest Center for Microsystems Education, Support Center for Microsystems Education
scme-nm.org, scme-support.org
(505)272-7157
________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Seong Jin Jang <jjang at udel.edu>
Sent: Tuesday, August 7, 2018 2:36:55 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Photo lithography mask using transparency film

Dear all,

I am trying to make the photo lithography mask using transparency film.
If you tried that before, can you share your experience?

For example,
Maximum resolution you reach
Printer model and specification you use
Film specification you use
Vendors who can make the mask
And, more!

I appreciate your help.

>From Seong


--
Seong Jin Jang
Nanofabrication Teaching Laboratory
Facility Specialist
302-831-3900
310 DuPont Hall
University of Delaware

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