[labnetwork] Photo lithography mask using transparency film

[Price, Aimee]

Hi Seong,
We do this a lot, both on our contact aligners and stepper.  The resolution usually isn’t as much of the issue as the line edge roughness (which is kind of resolution but not exactly).

We tried to make our own transparencies, which we do not recommend.  The “off the shelf” films do not have enough transmission in the wavelengths we care about.

We use Infinite Graphics (now part of Photronics) for our transparency films.  They list the resolution and the appropriate DPI resolution.  They have them from really large to 10um resolution.  The image above is all done by transparency, all layers.  The finest features were “Brutus Buckeye.”  His head is 200um across and I think there are some spaces in his face that are on the order of 10um.

For the above type of sizes, with little concern for line edge roughness it is well worth it.  For devices, I have used it on device structures with features of around 75um and they work beautifully.  Much more cost effective than a full up mask, though those are becoming cheaper as well.  I no longer print my own because I can’t compete on cost or turnaround.

Hope that helps, I’d be happy to give you more info off-line if needed.


Best,
Aimee

From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Seong Jin Jang
Sent: Tuesday, August 7, 2018 4:37 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Photo lithography mask using transparency film

Dear all,

I am trying to make the photo lithography mask using transparency film.
If you tried that before, can you share your experience?

For example,
Maximum resolution you reach
Printer model and specification you use
Film specification you use
Vendors who can make the mask
And, more!

I appreciate your help.

From Seong


--
Seong Jin Jang
Nanofabrication Teaching Laboratory
Facility Specialist
302-831-3900
310 DuPont Hall
University of Delaware

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