[labnetwork] 回覆: Leybold turbo pump controller

[XIN GUO]

Hi Colleagues,

My question might not be quite related to this topic but I hope to get some
feedback.

We are considering to acquire a PECVD and RIE. I saw some buyers explicitly
exclude Leybold pumps in their requirements. I am open to all suppliers but
it does seem that Leybold pumps may have more issues than other reputable
suppliers. Or, maybe I just got a wrong impression. Anyway, I do not mean
to be bias on any supplier.

Btw, any rule of thumb for choosing pumps for cleanroom equipment?

Thanks

Shane



On Fri, Aug 17, 2018 at 8:37 AM Wing Leong CHUNG <mfcchung at ust.hk> wrote:

> Dear all,
>
>
> I would like to express my apperciation to the replies from network
> members, they really give me many valuable suggestions and information
> regarding to my problem.
>
>
> With Many Many Thanks
>
> Jeff Chung
> ------------------------------
> *寄件者:* Wing Leong CHUNG
> *寄件日期:* 2018年8月16日 15:32
> *收件者:* labnetwork at mtl.mit.edu
> *主旨:* Leybold turbo pump controller
>
>
> Dear network members,
>
>
> We have two turbo pump controllers (Mag Drive 1000, to drive MAG 900 turbo
> pump) out of order. It shows "Bearing Sensor" "Levitation Fail" onto the
> display. We swarp a good controller to the system, no error message appear.
> I guest the fault is come form the controller itself. However, I contact
> with Leybold but they said this model is obsoleted, no service can be
> provide further.
>
>
> Is there any suggestion of company can provide service to repair the
> controllers?
>
>
> Jeff Chung
> Engineer
> Nanosystem Fabrication Facility (NFF) of Hong Kong University of Science
> and Technology (HKUST)
> Cell: (852)-2358-7211
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>
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