[labnetwork] Local chiller vs. facility chilled water

Rob Breisch Rob.Breisch at trilliumsubfab.com
Fri Aug 31 10:46:48 EDT 2018


Kevin -

Most modern cleanrooms have a central PCW systems AND water cooled poInt of use chillers and heat exchangers as each chamber/tool will have different heat load and temperature set point requirements.

In your case you will need air cooled chillers. Option 1 is what I would recommend in his instance.  You should consider some standardization/redundancy such that the units can be interchanged between tools/chambers so you can have some flexibility in the event of an unplanned failure.

We can help you with air cooled chillers - it’s one of our core competencies.

Rob Breisch
801-726-5035

On Aug 31, 2018, at 9:34 AM, Kevin McPeak <kmcpeak at lsu.edu<mailto:kmcpeak at lsu.edu>> wrote:

Dear Colleagues,

The central chilled water pump at the facility where the LSU cleanroom is housed died earlier this week. Facilities told me that they have no plans for replacing the pump. The cost is too high (15K) and most of the beamline endstations (our cleanroom lives inside of a synchrotron) have switched to local chillers.

So I have two options:

1). Buy 4 small chillers for an e-beam evaporator, SEM, ICP, sputtering system. This number will grow in the future.

2). Buy one large chiller and connect it to the existing 2" diameter cooling pipe network that is plumbed around the cleanroom perimeter.

I lean towards option #2 but it is less flexible than #1 and could put us in the same situation we are in now (e.g. most machines down) in the case of a failure.

The infastructure of our cleanroom is about 25 years old. So I wanted to ask the list members to get a more modern take on chilled water. Do modern cleanrooms use central chilled water systems or is the local chiller model more popular given the added flexibility and more distributed failure model?

Thanks!

Regards,
Kevin

--
Kevin McPeak
Assistant Professor
Department of Chemical Engineering
Louisiana State University
email: kmcpeak at lsu.edu<mailto:kmcpeak at lsu.edu>
phone: 225-578-0058
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