[labnetwork] Equipment Support for Strasbaugh CMP?
Christophe Clément
christophe.clement at polymtl.ca
Tue Dec 11 12:32:39 EST 2018
Hi Jim, we have the same tool here at Poly, we bought it from Axus
Technology, they can offer support if you need.
You can contact Tim St Marie:
Tim St. Marie
Customer Support Manager
Axus Technology
<http://www.axustech.com/> WWW.axustech.com
7001 W. Erie Street, Suite 1
Chandler, AZ 85226
Main Number: 480-705-8000
Direct Line: 480-240-5548
Cell Phone: 602-300-7901
Office Fax: 480-705-8011
Regards,
Christophe Clément
Technicien laboratoire
Laboratoire de microfabrication (LMF)
Groupe des Couches Minces (GCM) www.gcmlab.ca <http://www.gcmlab.ca>
Ecole Polytechnique de Montréal <http://www.polymtl.ca/> www.polymtl.ca
Département de génie physique
* 2900 Boulevard Edouard Monpetit
Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4
8 <mailto:christophe.clement at polymtl.ca> christophe.clement at polymtl.ca
( 514 340 4711
Fax : 514 340 4711 # 2417
De : Jim Fraser [mailto:jfraser96 at byu.edu]
Envoyé : 11 décembre 2018 10:58
À : labnetwork at mtl.mit.edu
Objet : [labnetwork] Equipment Support for Strasbaugh CMP?
Dear Colleagues,
One of my researchers is trying to resurrect a Strasbaugh 6EC CMP system. He
is having a problem with the wafer chuck not rotating. He said the company
has been bought out and he cant find anyone who supports the system. Does
anyone have a contact that has been able to help with these older systems?
Thanks for your help,
James R Fraser
IML Manager
460-L EB
Brigham Young University
801-422-4344
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