[labnetwork] Ge2Sb2Te5 deposition and annealing

[Abelev, Esta]

Dear Colleagues,

I would like to ask about deposition and annealing of Ge2Sb2Te5.
The sputtering system we use for Ge2Sb2Te5 deposition is without load lock, the smell after depositing is horrible but my main concerns is regarding toxicity. Do you know if those materials/odor toxic?
In addition, the group wants to anneal those samples in RTA at low temp (below 200C) after the deposition, I am concerns about contaminations? Please comment.

Thank you, Esta

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Esta Abelev, PhD
Technical Director, Petersen Institute of NanoScience and Engineering
University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261
412-383-4096 | eabelev at pitt.edu<mailto:eabelev at pitt.edu> | nano.pitt.edu<https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nano.pitt.edu%2F&data=01%7C01%7Ceabelev%40pitt.edu%7C9f5bd58ba84940765cf308d4024fbe18%7C9ef9f489e0a04eeb87cc3a526112fd0d%7C1&sdata=3KfbG5VbshqdoIAPxvX%2F2s1UeU7ultmBoZmm%2FaZ2Itc%3D&reserved=0>


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