[labnetwork] Best practices for chemical storage, cross contamination, conservation

[Luciani, Vincent (Fed)]

Good Morning Michael,

I can't say we have the problem solved but we have made some headway.  This is what we have done to date:

We purchased single wafer piranha and RCA spray clean tools.  We are just about to wrap up an oxide integrity study comparing it to immersion RCA. It looks encouraging.  Works with whole wafers (75 mm - 200 mm).  This saves chemicals and manual pouring and handling of waste.

Every Friday evening at about 11 PM, we clear the benches.  Most people know this so there is not much to clean up.  During the week, any beakers that are not labelled properly are removed as soon as we find them.

I am still not happy with our resist and developer handling management.  Still very manual with users having direct access to gallon containers.  There is a session  dedicated to lithography materials management in this year's https://ugim.nano.upenn.edu/ .  I encourage anyone with something to contribute to send in an abstract.  If the upload is not functional yet, send it to me.


Best,
Vince

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Khbeis
Sent: Friday, February 09, 2018 7:19 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Best practices for chemical storage, cross contamination, conservation

Dear Colleagues,

We have many users avoiding shared baths for things like RCA, Piranha, and even developers because they worry about cross-contamination (and rightfully so with random things floating in the baths on a fairly regular basis). However, this has led to numerous users pouring resealable, food grade containers, that subsequently leave them cluttered on our wet process station work surfaces for up to several weeks. This of course is not an acceptable solution but prohibiting this behavior will result in a massive waste of otherwise perfectly good chemicals. So we have a challenge of balancing process integrity, safety, and chemical economy. We are looking for better temporary storage solutions that would allow transport of containers to chemical cabinets, but I am curious how other sites have resolved or administered this issue.

Gratefully,

Dr. Michael Khbeis
Director, Washington Nanofabrication Facility (WNF)
National Nanotechnology Coordinated Infrastructure (NNCI)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu<mailto:khbeis at uw.edu>
www.wnf.washington.edu/<http://www.wnf.washington.edu/>

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