[labnetwork] Technics PlanarEtch IIA/B

[McWilliams, Scott]

Hello All, Has anyone used the table top Technics PlanarEtch  IIA/B for oxide and/or nitride deposition?  I understand I can get a deposition module to convert from etch mode to deposition mode.  I would appreciate any input on film quality, ease of use, etc.  Also, if know where I can get the deposition module, please let me know.


Thanks,  Scott
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