[labnetwork] Co sputtering targets question

[Guo, Jing]

Dear Colleagues,

Happy new year!

I found a lot of used Co targets while I was checking all the sputtering targets. They are all Co targets from two orders which showed different property as shown in the attachment.

For the top row, all of them surface is shinning but the sputtered ring is not perfect round shape and sharp.
For the second row, the surface is quite different from the top row. And the sputtering mark/ring is sharp and round.

The second picture is Ag (99.99%) targets from different company. The surface showed different property after sputtering also.

I guess the difference came from the different fabrication process to make the targets. Is there anyone familiar about the targets fabrication process? Will this difference affect the sputtering property?
Could you please advise which type of the targets should be ordered next time?

Thank you.



Best Regards,

Jing

Research Lab Supervisor
Nanofabrication Facility
University of Houston
Postal Address:
UNIVERSITY OF HOUSTON
NANOFABRICATION FACILITY
3517 CULLEN BLVD, RM 1011
HOUSTON TX  77204-5062
Phone:  832-842-8822
Email:  jguo5 at central.uh.edu<mailto:jguo5 at central.uh.edu>
Web:  www.uh.edu/nanofab<http://www.uh.edu/nanofab>

[cid:2A56ACF0-B851-4F27-B157-F49FE6E5AD2E at uh.edu][cid:F607D494-473A-4370-9716-7DC609CE5FA3 at uh.edu]
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