From pestal at eecs.berkeley.edu Fri Jul 6 13:15:31 2018 From: pestal at eecs.berkeley.edu (Danny Pestal) Date: Fri, 6 Jul 2018 10:15:31 -0700 Subject: [labnetwork] Comments inspired by LNF@Michigan sprinkler system nightmare presentation Message-ID: All, it was good seeing everyone in Philly at yet another successful UGIM. A UGIM that was so successful there just wasn't enough time for everyone's comments and questions during the presentations (a good problem to have in my opinion.) So I'm bringing my comments to our other meeting spot: Labnetwork. In regards to Dennis' harrowing tale of destruction by fire sprinkler, I wanted to bring up two related things that we've done here at the Berkeley NanoLab: 1) https://quickstoptool.com/ - We have placed one of these fire sprinkler plug tools on each floor in the rear chase and have trained out engineers on how to use it. Having experienced (some might say caused) a sprinkler to discharge, I know first hand the kind of damage it can do. One of the many things that keeps me up at night is the thought of a staff accidentally knocking a bulb out of a sprinkler head with a ladder, and us having no way to stop the water because all the valves on the sprinkler risers are locked open. This tool allows you to quickly stop a sprinkler once it has been accidentally started. You're going to get very wet in the process, but it could save the lab from a lot of damage. 2) Our furnace pre-clean sinks (piranha, HCl, HF) are protected by sprinklers. We had begun to see some etching of the bulbs in the sprinklers and so took the sprinkler heads in these sinks and dipped them in a wax. We've seen no etching since this treatment. There are specially coated sprinkler heads designed to deal with this issue, but for our combination of pressure/temperature we were unable to find them and so came up with this simple and effective solution. If you haven't thought about the sprinklers in the sinks where you're using HF, I suggest you do. Thanks for your time, Danny Pestal Equipment & Facilities Manager Marvell NanoLab University of California, Berkeley 510-809-8600 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mhofheins at unm.edu Fri Jul 6 15:50:50 2018 From: mhofheins at unm.edu (Mark Hofheins) Date: Fri, 6 Jul 2018 19:50:50 +0000 Subject: [labnetwork] Karl Suss MA6 Main Source pressure fail Message-ID: Has anyone experienced this error? I have good CDA and N2 pressure. Seems like there is a solenoid not responding. Any ideas? Mark Hofheins mhofheins at unm.edu 505-710-3527 Micro Electronics Technician Manufacturing Engineering University of New Mexico MTTC 800 Bradbury S.E. Suit 235 Albuquerque, New Mexico 87106-4346 -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.rooks at yale.edu Tue Jul 10 11:29:15 2018 From: michael.rooks at yale.edu (Michael Rooks) Date: Tue, 10 Jul 2018 11:29:15 -0400 Subject: [labnetwork] job posting - yale cleanroom director In-Reply-To: <5B33D14C.5080104@yale.edu> References: <5B33D14C.5080104@yale.edu> Message-ID: <5B44D0CB.7090105@yale.edu> The position has been posted in the STARS system. *Title: * Research Support Specialist 6 * * 096/Clinical & Research/26 *Posting Title: * Cleanroom Director *Job Family:* Research Res Support *Effective Date:* 10/18/2017 *Job Summary *** Provides professional research and technical support for diagnostic and research projects, studies and experimentation in support of University research projects. *Position Focus ** * The Cleanroom is a central shared user facility with 7500 ft2 of space housing a full complement of process tools for materials fabrication over a broad spectrum of disciplines. The facility mainly supports internal researchers at the graduate and postdoctoral research levels directed toward micro/nano fabrication technologies with a minor number of outside industrial users. The Director serves as the operational leader managing the day to day activities in the facility. Responsibilities include oversight of technical staff, safety, user training in tool use and process development, equipment maintenance, tool acquisition and installation, and all aspects of activities performed within the facility. The Director works closely with facilities personnel, campus safety personnel (fire, EHS, medical), computer support, outside vendors and contractors, and internal administrative personnel (faculty, administrative staff, provost office) to control costs, provide accurate billing and maintain a safe and highly efficient laboratory serving the needs of the university. The Director will provide technical mentorship to users in research topics, process development, debugging tool and process issues as well as benchmarking processes for overall use and is committed to substantial hands-on transfer of experience in all areas of technical expertise including photolithography, chemical processing, vacuum deposition, dry etch and metrology. The Director will provide insight to needs, justification, budget estimates and potential schedules for new tools that require capital funding. Background should be broad in all areas of process engineering and the candidate will be expected to be prepared to update procedures, processes and practices as warranted by newly defined needs as they evolve over time. *Principal Responsibilities ** * 1. Plans, conceives, designs and implements highly specialized state of the art instrumentation equipment and apparatus for a multi-faceted research project. 2. Develops and implements research applications to fabricate electronic materials, devices and processing equipment. 3. Manages research groups for the efficient flow of research projects. 4. Defines the direction of research and equipment design. 5. Manages research, research support design and projects associated with the project. 6. Supervises contractors and technical staff. Assigns design projects to technical staff. 7. Negotiates project designs and cost with prospective contractors. Prepares project designs and determines cost estimates. Develops material specifications and purchases. 8. Consults and advises on research technical designs. 9. Interacts with internal contacts to discuss and consult on research projects. 10. Designs research processes, implements and projects cost estimates. 11. In close cooperation with engineering administration, develops sound business procedures for accurate billing. Maintains source documentation for cost accounting purposes. 12. Interacts with vendors, suppliers, manufacturing companies, and other research institutions to develop and design specialized equipment and instruments. 13. Exchanges technical information. Stays abreast of new research technologies and developments. 14. May perform other duties as assigned. *Required Education and Experience * Bachelor?s Degree in a related field and eight to ten years related work experience in a research development facility, supervising and overseeing facilities operations or the equivalent combination of education and experience. *Preferred Education and Experience * Preferred education and experience related to engineering, physics, photonics, mechanics, chemistry and work experience in an industrial or academic cleanroom environment. *Skills & Abilities * 1. Excellent communication skills are required for interfacing with users, faculty, administration, vendors, contractors, and all others that interact with the cleanroom facility 2. Full complement of technical knowledge and hands-on experience in the operation of tools used for photolithography, photomask design & writing, process chemistry, micro & nano fabrication, vapor deposition including thermal, ebeam, sputter, CVD, PECVD and ALD, dry etch, and metrology. 3. Knowledge of safety and health issues concerning facility, equipment operation, hazardous materials use and disposaland knowledge and ability to train in the safe use of hazardous chemicals and gases as related to process engineering in fabrication methodologies. 4. Knowledge and ability to define tools, facility improvements as related to evolving technologies and needs. 5. Knowledge and ability to troubleshoot, repair and assess process interface issues on all tools available in the cleanroom. *Required Licenses or Certifications * N/A *Physical Requirements * N/A Use the link above, or this one: http://bit.ly/YaleDrCleanroom . -------------- next part -------------- An HTML attachment was scrubbed... URL: From gilheart at rice.edu Tue Jul 10 16:19:21 2018 From: gilheart at rice.edu (Tim Gilheart) Date: Tue, 10 Jul 2018 15:19:21 -0500 Subject: [labnetwork] Sputtering Galfenol (FeGa alloy)? Message-ID: <5686FE9F-6BF6-4E6F-9698-C6BC28AA2330@rice.edu> Greetings all, Glad to catch up with a number of you during the recent UGIM conference. I received a request for sputtering of Galfenol (an alloy of Fe and Ga, with up to 27% Ga), one of several uncommon alloys he?s discussed with me as he explores the right combination of magnetostriction and magnetic permeability for his application. (He?s already decided against Terfenol-D, a TbDyFe alloy that might be more problematic.) My user sent me this article about Galfenol, in case that?s useful: https://aip.scitation.org/doi/10.1063/1.1540130 I was wondering if anyone had experience with introducing Ga to a shared multi-gun sputtering tool and/or any cautionary tales to share on the subject. For reference, our tool has been used for magnetic materials on occasion, so Fe is not really a concern. Thanks, -- Tim Gilheart, Ph.D. Research Scientist - Nanofabrication Clean Room Manager, Shared Equipment Authority (SEA), Rice University Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From mariusz.martyniuk at uwa.edu.au Tue Jul 10 21:32:48 2018 From: mariusz.martyniuk at uwa.edu.au (Mariusz Martyniuk) Date: Wed, 11 Jul 2018 01:32:48 +0000 Subject: [labnetwork] Sputtering Galfenol (FeGa alloy)? In-Reply-To: <5686FE9F-6BF6-4E6F-9698-C6BC28AA2330@rice.edu> References: <5686FE9F-6BF6-4E6F-9698-C6BC28AA2330@rice.edu> Message-ID: We have both Ga and Fe in our sputter. Ga is in a ?bucket? in horizontal position as it can melt and spill. Cheers, Marius From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Tim Gilheart Sent: Wednesday, 11 July 2018 4:19 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Sputtering Galfenol (FeGa alloy)? Greetings all, Glad to catch up with a number of you during the recent UGIM conference. I received a request for sputtering of Galfenol (an alloy of Fe and Ga, with up to 27% Ga), one of several uncommon alloys he?s discussed with me as he explores the right combination of magnetostriction and magnetic permeability for his application. (He?s already decided against Terfenol-D, a TbDyFe alloy that might be more problematic.) My user sent me this article about Galfenol, in case that?s useful: https://aip.scitation.org/doi/10.1063/1.1540130 I was wondering if anyone had experience with introducing Ga to a shared multi-gun sputtering tool and/or any cautionary tales to share on the subject. For reference, our tool has been used for magnetic materials on occasion, so Fe is not really a concern. Thanks, -- Tim Gilheart, Ph.D. Research Scientist - Nanofabrication Clean Room Manager, Shared Equipment Authority (SEA), Rice University Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From shimonel at savion.huji.ac.il Wed Jul 11 01:08:52 2018 From: shimonel at savion.huji.ac.il (Shimon Eliav) Date: Wed, 11 Jul 2018 05:08:52 +0000 Subject: [labnetwork] Sputtering Galfenol (FeGa alloy)? In-Reply-To: <5686FE9F-6BF6-4E6F-9698-C6BC28AA2330@rice.edu> References: <5686FE9F-6BF6-4E6F-9698-C6BC28AA2330@rice.edu> Message-ID: <0D32C39DA6668F40B741AB11E14C367C02180FEC7A@Pegasus2.hustaff.huji.local> Hi Tim, Some good years ago I used to grow bulk GaAs (Czochralsky, Bridgman). As a material I don't think Ga poses a threat for your sputtering system. Just an important remark: Ga is liquid at room temperature. I don't know how the target of Galfenol was made, but if it has "islands" of Ga (not homogeneous alloy), Ga can go out of the target when heated above room temperature and make a mess into your system. Good luck! Regards, Shimon Eliav The Unit for Nano Fabrication The Hebrew University of Jerusalem From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Tim Gilheart Sent: Tuesday, July 10, 2018 11:19 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Sputtering Galfenol (FeGa alloy)? Greetings all, Glad to catch up with a number of you during the recent UGIM conference. I received a request for sputtering of Galfenol (an alloy of Fe and Ga, with up to 27% Ga), one of several uncommon alloys he?s discussed with me as he explores the right combination of magnetostriction and magnetic permeability for his application. (He?s already decided against Terfenol-D, a TbDyFe alloy that might be more problematic.) My user sent me this article about Galfenol, in case that?s useful: https://aip.scitation.org/doi/10.1063/1.1540130 I was wondering if anyone had experience with introducing Ga to a shared multi-gun sputtering tool and/or any cautionary tales to share on the subject. For reference, our tool has been used for magnetic materials on occasion, so Fe is not really a concern. Thanks, -- Tim Gilheart, Ph.D. Research Scientist - Nanofabrication Clean Room Manager, Shared Equipment Authority (SEA), Rice University Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From myoung6 at nd.edu Fri Jul 13 11:23:53 2018 From: myoung6 at nd.edu (Michael Young) Date: Fri, 13 Jul 2018 11:23:53 -0400 Subject: [labnetwork] Cerium handling for vacuum deposition sources - anyone tried it? Message-ID: A web search shows that special care might be required in order to use cerium as an evaporation or sputtering source.? Anyone tried it?? Suggestions/cautions/warnings/horror stories? Thanks... -- Michael P. Young (574) 631-3268 (office) Nanofabrication Specialist (574) 631-4393 (fax) Department of Electrical Engineering (765) 637-3784 (cell) University of Notre Dame mike.young at nd.edu B-38 Stinson-Remick Hall Notre Dame, IN 46556-5637 From rmarchant at unm.edu Fri Jul 13 11:24:13 2018 From: rmarchant at unm.edu (Richard Marchant) Date: Fri, 13 Jul 2018 15:24:13 +0000 Subject: [labnetwork] Staubli Robot system at University of New Mexico. Message-ID: Hello, UNM has decided to remove the Robots in our lab. Ideal situation would be to sell them before removal. I was searching for a user that may need to purchase this Robot system. System was used in a training institute and not the rigors of the manufacturing industry. May be used as spare parts. please call if you can assist me in any way Manufacture - Staubli Model - RX90 and 2x RX130 Thanks Richard Marchant Best Regards, Rick Marchant rmarchant at unm.edu 505-272-7149 office 505-514-3074 cell Micro Electronics Technician Manufacturing Engineering University of New Mexico MTTC 800 Bradbury S.E. Suit 235 Albuquerque, New Mexico 87106-4346 -------------- next part -------------- An HTML attachment was scrubbed... URL: From carsen at stanford.edu Fri Jul 13 14:41:56 2018 From: carsen at stanford.edu (Carsen Kline) Date: Fri, 13 Jul 2018 18:41:56 +0000 Subject: [labnetwork] AMT 8100 schematics Message-ID: Hi all, It was good to meet and catch up with many of you at UGIM. Lots of good ideas shared that will no doubt find their way into SNF. Today, though, it's a 30+ year old etcher we need help with... We have an Applied Materials 8100 Hexode etcher. The system came with three volumes of manuals, and Volume 3 has all the schematics. We're missing a number of pages from the "Overall schematics" section, specifically pages 7-43 to 7-56 and 7-58 to 7-66. Does anyone have these missing pages that you might scan and send over? Many thanks, Carsen Carsen Kline Lab Operations Manager Stanford Nanofabrication Facility (650)724-8214 http://snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From bob at eecs.berkeley.edu Fri Jul 13 17:50:19 2018 From: bob at eecs.berkeley.edu (Robert M. HAMILTON) Date: Fri, 13 Jul 2018 14:50:19 -0700 Subject: [labnetwork] Cerium handling for vacuum deposition sources - anyone tried it? In-Reply-To: References: Message-ID: Michael Young, I'll presume you have identified a cerium compound that disassociates in vacuum, at a reasonable temperature to yield metallic cerium. I have not researched the literature. I do know cerium is used in photocathodes and when I made photomultiplier tubes I routinely evaporated cesium and antimony in situ using dispensers made by SAES, Italy. They also had barium and mercury dispensers. If you have not ID the precursor it might be worth contacting SAES. Regards, Bob Robert Hamilton Mobile 510-325-7557 (my personal mobile) E-mail preferred: bob at eecs.berkeley.edu On Fri, Jul 13, 2018 at 8:23 AM, Michael Young wrote: > A web search shows that special care might be required in order to use > cerium as an evaporation or sputtering source. Anyone tried it? > Suggestions/cautions/warnings/horror stories? > > Thanks... > > -- > Michael P. Young (574) 631-3268 (office) > Nanofabrication Specialist (574) 631-4393 (fax) > Department of Electrical Engineering (765) 637-3784 (cell) > University of Notre Dame mike.young at nd.edu > B-38 Stinson-Remick Hall > Notre Dame, IN 46556-5637 > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From myoung6 at nd.edu Fri Jul 13 23:28:42 2018 From: myoung6 at nd.edu (Mike Young) Date: Fri, 13 Jul 2018 23:28:42 -0400 Subject: [labnetwork] Cerium handling for vacuum deposition sources - anyone tried it? In-Reply-To: References: Message-ID: <51d05b95-853a-8c96-3807-1ca41714176b@nd.edu> Hi Bob. We were originally thinking of e-beam or sputter deposition, using metallic cerium as a source. I'm guessing from your comment that this approach is a bad idea? --Mike On 7/13/2018 5:50 PM, Robert M. HAMILTON wrote: > Michael Young, > > I'll presume you have identified? a cerium compound that disassociates > in vacuum, at a reasonable temperature to yield metallic cerium. I > have not researched the literature. I do know cerium is used in > photocathodes and when I made photomultiplier tubes I routinely > evaporated cesium and antimony in situ using dispensers made by SAES, > Italy. They also had barium and mercury dispensers. If you have not ID > the precursor it might be worth contacting SAES. > > Regards, > Bob > > > > > Robert Hamilton > Mobile 510-325-7557 (my personal mobile) > E-mail preferred: bob at eecs.berkeley.edu > > > On Fri, Jul 13, 2018 at 8:23 AM, Michael Young > wrote: > > A web search shows that special care might be required in order to > use cerium as an evaporation or sputtering source.? Anyone tried > it?? Suggestions/cautions/warnings/horror stories? > > Thanks... > > -- > Michael P. Young? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? (574) 631-3268 > (office) > Nanofabrication Specialist? ? ? ? ? ? ? ? ? ? ? (574) 631-4393 (fax) > Department of Electrical Engineering? ? ? ? ? ? (765) 637-3784 (cell) > University of Notre Dame mike.young at nd.edu > B-38 Stinson-Remick Hall > Notre Dame, IN 46556-5637 > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > -- Michael P. Young (574) 631-3268 (office) Nanofabrication Specialist (574) 631-4393 (fax) Department of Electrical Engineering (765) 637-3784 (cell) University of Notre Dame mike.young at nd.edu B-38 Stinson-Remick Hall Notre Dame, IN 46556-5637 -------------- next part -------------- An HTML attachment was scrubbed... URL: From bob at eecs.berkeley.edu Sat Jul 14 11:00:26 2018 From: bob at eecs.berkeley.edu (Robert M. HAMILTON) Date: Sat, 14 Jul 2018 08:00:26 -0700 Subject: [labnetwork] Cerium handling for vacuum deposition sources - anyone tried it? In-Reply-To: <51d05b95-853a-8c96-3807-1ca41714176b@nd.edu> References: <51d05b95-853a-8c96-3807-1ca41714176b@nd.edu> Message-ID: Mike Young, No suggestion because of lack of experience with cerium PVD. Just thought I'd share a past resource, with a colleague for highly receive metals. Not sure what product lines SAES maintains or if there are other resources. Bob Hamilton Robert Hamilton Mobile 510-325-7557 (my personal mobile) E-mail preferred: bob at eecs.berkeley.edu On Fri, Jul 13, 2018 at 8:28 PM, Mike Young wrote: > Hi Bob. We were originally thinking of e-beam or sputter deposition, using > metallic cerium as a source. I'm guessing from your comment that this > approach is a bad idea? > > --Mike > > On 7/13/2018 5:50 PM, Robert M. HAMILTON wrote: > > Michael Young, > > I'll presume you have identified a cerium compound that disassociates in > vacuum, at a reasonable temperature to yield metallic cerium. I have not > researched the literature. I do know cerium is used in photocathodes and > when I made photomultiplier tubes I routinely evaporated cesium and > antimony in situ using dispensers made by SAES, Italy. They also had barium > and mercury dispensers. If you have not ID the precursor it might be worth > contacting SAES. > > Regards, > Bob > > > > > Robert Hamilton > Mobile 510-325-7557 (my personal mobile) > E-mail preferred: bob at eecs.berkeley.edu > > > On Fri, Jul 13, 2018 at 8:23 AM, Michael Young wrote: > >> A web search shows that special care might be required in order to use >> cerium as an evaporation or sputtering source. Anyone tried it? >> Suggestions/cautions/warnings/horror stories? >> >> Thanks... >> >> -- >> Michael P. Young (574) 631-3268 (office) >> Nanofabrication Specialist (574) 631-4393 (fax) >> Department of Electrical Engineering (765) 637-3784 (cell) >> University of Notre Dame mike.young at nd.edu >> B-38 Stinson-Remick Hall >> Notre Dame, IN 46556-5637 >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> > > > -- > Michael P. Young (574) 631-3268 (office) > Nanofabrication Specialist (574) 631-4393 (fax) > Department of Electrical Engineering (765) 637-3784 (cell) > University of Notre Dame mike.young at nd.edu > B-38 Stinson-Remick Hall > Notre Dame, IN 46556-5637 > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From john.p.snyder at gmail.com Mon Jul 16 13:12:46 2018 From: john.p.snyder at gmail.com (John Snyder) Date: Mon, 16 Jul 2018 19:12:46 +0200 Subject: [labnetwork] bottle of XeF2 available for sale and quick delivery Message-ID: Bottle containing ~500 g of XeF2 available for purchase. XeF2-23 valve configuration. Originally acquired from Pelchem in South Africa, the bottle was briefly used only once. If interested please email me at jpsnyder at alum.mit.edu. -------------- next part -------------- An HTML attachment was scrubbed... URL: From na2661 at columbia.edu Mon Jul 16 15:40:58 2018 From: na2661 at columbia.edu (Nava Ariel-Sternberg) Date: Mon, 16 Jul 2018 15:40:58 -0400 Subject: [labnetwork] KLA-Tencor service Message-ID: <06b301d41d3c$eb928b80$c2b7a280$@columbia.edu> Dear all, We've been having some difficulty with the service from KLA-Tencor on one of the profilometers we purchased (communication with them is not very clear, very high pricing for just initial problem evaluation etc.). Not sure if we're approaching this the wrong way or could be the specific people we communicated with or something else. Has anyone experienced this? Are there any recommended channels of communication that can assure we receive better service? Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 -------------- next part -------------- An HTML attachment was scrubbed... URL: From shimonel at savion.huji.ac.il Tue Jul 17 01:42:11 2018 From: shimonel at savion.huji.ac.il (Shimon Eliav) Date: Tue, 17 Jul 2018 05:42:11 +0000 Subject: [labnetwork] KLA-Tencor service In-Reply-To: <06b301d41d3c$eb928b80$c2b7a280$@columbia.edu> References: <06b301d41d3c$eb928b80$c2b7a280$@columbia.edu> Message-ID: <0D32C39DA6668F40B741AB11E14C367C0218102707@Pegasus2.hustaff.huji.local> Hi Nava, Next time try Bruker: we have a very good experience with them. Their service is good and support from abroad fast and precise. Prices, affordable. Systems are easy to operate. We have three profilometers from them running smooth for good years. Regards, Shimon UNF - Hebrew University From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg Sent: Monday, July 16, 2018 10:41 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] KLA-Tencor service Dear all, We've been having some difficulty with the service from KLA-Tencor on one of the profilometers we purchased (communication with them is not very clear, very high pricing for just initial problem evaluation etc...). Not sure if we're approaching this the wrong way or could be the specific people we communicated with or something else... Has anyone experienced this? Are there any recommended channels of communication that can assure we receive better service? Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 -------------- next part -------------- An HTML attachment was scrubbed... URL: From olinx034 at umn.edu Tue Jul 17 08:31:07 2018 From: olinx034 at umn.edu (Gary Olin) Date: Tue, 17 Jul 2018 07:31:07 -0500 Subject: [labnetwork] KLA-Tencor service In-Reply-To: <06b301d41d3c$eb928b80$c2b7a280$@columbia.edu> References: <06b301d41d3c$eb928b80$c2b7a280$@columbia.edu> Message-ID: Good Morning Nava, I get the same treatment from KLA-Tencor since I don't have service contracts on our profilers. When you get someone to do the work the quality is good. There are some aftermarket firms that do service on KLA profilers. One is Brumley South www.brumleysouth.com , (704) 664-9251 . I have looked into them in the past but never had work done. A second is Metrology Equipment Services, LLC the contact there is Jeff Cada Info at MetrologyEquipmentServices.com 408-392-9100. I have called them for advice and bought parts from them in the past. Easier for me to buy parts from them than from the OEM. Glad to see you in Philly. Have a good day, Gary Gary Olin Equipment Maintenance Minnesota Nano Center University of Minnesota olinx034 at umn.edu (612) 625-9780 On Mon, Jul 16, 2018 at 2:40 PM, Nava Ariel-Sternberg wrote: > Dear all, > > > > We?ve been having some difficulty with the service from KLA-Tencor on one > of the profilometers we purchased (communication with them is not very > clear, very high pricing for just initial problem evaluation etc?). Not > sure if we?re approaching this the wrong way or could be the specific > people we communicated with or something else? > > > > Has anyone experienced this? Are there any recommended channels of > communication that can assure we receive better service? > > > > Thanks, > > Nava > > > > Nava Ariel-Sternberg, Ph.D. > > Director of CNI Shared Labs > > CEPSR/MC 8903 > > 530 west 120th st. NY > > NY 10027 > > Office: 212-8549927 > > Cell: 201-5627600 > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From mweiler at andrew.cmu.edu Tue Jul 17 12:25:18 2018 From: mweiler at andrew.cmu.edu (Mark Weiler) Date: Tue, 17 Jul 2018 16:25:18 +0000 Subject: [labnetwork] KLA-Tencor service In-Reply-To: References: <06b301d41d3c$eb928b80$c2b7a280$@columbia.edu>, Message-ID: <1719ACEB-B1E0-4D93-ACAF-B86C93484B4A@andrew.cmu.edu> Hi Nava, To echo Gary, I?ve seen a rebuilt Surfscan from Metrology Equipment Services that looked and worked awesome. If their onsite services for profilometers are near that quality, they might be worth contacting. Best, Mark Mark Weiler Equipment & Facilities Manager Carnegie Mellon Nanofabrication Facility Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.2471 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu On Jul 17, 2018, at 6:52 PM, Gary Olin > wrote: Good Morning Nava, I get the same treatment from KLA-Tencor since I don't have service contracts on our profilers. When you get someone to do the work the quality is good. There are some aftermarket firms that do service on KLA profilers. One is Brumley South www.brumleysouth.com , (704) 664-9251 . I have looked into them in the past but never had work done. A second is Metrology Equipment Services, LLC the contact there is Jeff Cada Info at MetrologyEquipmentServices.com 408-392-9100. I have called them for advice and bought parts from them in the past. Easier for me to buy parts from them than from the OEM. Glad to see you in Philly. Have a good day, Gary Gary Olin Equipment Maintenance Minnesota Nano Center University of Minnesota olinx034 at umn.edu (612) 625-9780 On Mon, Jul 16, 2018 at 2:40 PM, Nava Ariel-Sternberg > wrote: Dear all, We?ve been having some difficulty with the service from KLA-Tencor on one of the profilometers we purchased (communication with them is not very clear, very high pricing for just initial problem evaluation etc?). Not sure if we?re approaching this the wrong way or could be the specific people we communicated with or something else? Has anyone experienced this? Are there any recommended channels of communication that can assure we receive better service? Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From mmoneck at andrew.cmu.edu Tue Jul 17 13:05:44 2018 From: mmoneck at andrew.cmu.edu (Matthew Moneck) Date: Tue, 17 Jul 2018 17:05:44 +0000 Subject: [labnetwork] KLA-Tencor service In-Reply-To: References: <06b301d41d3c$eb928b80$c2b7a280$@columbia.edu> Message-ID: <4c835f5d5cc547938a0f6301bcb1f351@DCNS-MSGMLT-03.andrew.ad.cmu.edu> Hi Nava, We have had good success with Brumley South. They?ve worked on our P-15, an old P-2, and our Flexus. Best Regards, Matt -- Matthew T. Moneck, Ph.D. Executive Manager, Carnegie Mellon Nanofabrication Facility Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.5430 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Gary Olin Sent: Tuesday, July 17, 2018 8:31 AM To: Nava Ariel-Sternberg Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] KLA-Tencor service Good Morning Nava, I get the same treatment from KLA-Tencor since I don't have service contracts on our profilers. When you get someone to do the work the quality is good. There are some aftermarket firms that do service on KLA profilers. One is Brumley South www.brumleysouth.com , (704) 664-9251 . I have looked into them in the past but never had work done. A second is Metrology Equipment Services, LLC the contact there is Jeff Cada Info at MetrologyEquipmentServices.com 408-392-9100. I have called them for advice and bought parts from them in the past. Easier for me to buy parts from them than from the OEM. Glad to see you in Philly. Have a good day, Gary Gary Olin Equipment Maintenance Minnesota Nano Center University of Minnesota olinx034 at umn.edu (612) 625-9780 On Mon, Jul 16, 2018 at 2:40 PM, Nava Ariel-Sternberg > wrote: Dear all, We?ve been having some difficulty with the service from KLA-Tencor on one of the profilometers we purchased (communication with them is not very clear, very high pricing for just initial problem evaluation etc?). Not sure if we?re approaching this the wrong way or could be the specific people we communicated with or something else? Has anyone experienced this? Are there any recommended channels of communication that can assure we receive better service? Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From hathaway at cns.fas.harvard.edu Tue Jul 17 14:34:08 2018 From: hathaway at cns.fas.harvard.edu (Mac Hathaway) Date: Tue, 17 Jul 2018 14:34:08 -0400 Subject: [labnetwork] KLA-Tencor service In-Reply-To: References: <06b301d41d3c$eb928b80$c2b7a280$@columbia.edu> Message-ID: <5B4E36A0.6050508@cns.fas.harvard.edu> Ditto. Since we're not supposed to slam vendors on this list, you may not get a lot of responses (!)... And, the manual is not great either... Anyway, thanks for the leads on other service providers, Gary. Those will come in handy... Mac Mac Hathaway Senior Process and Systems Engineer Harvard Center for Nanoscale Systems 11 Oxford St. Cambridge, MA02138 617-495-9012 On 7/17/2018 8:31 AM, Gary Olin wrote: > Good Morning Nava, > > I get the same treatment from KLA-Tencor since I don't have service > contracts on our profilers. When you get someone to do the work the > quality is good. > > There are some aftermarket firms that do service on KLA profilers. > One is Brumley South www.brumleysouth.com > > , (704) 664-9251 > > . I have looked into them in the past but never had work done. > > A second is Metrology Equipment Services, LLC the contact there is > Jeff Cada Info at MetrologyEquipmentServices.com > 408-392-9100. I have > called them for advice and bought parts from them in the past. > Easier for me to buy parts from them than from the OEM. > > Glad to see you in Philly. > > Have a good day, > Gary > > > > > Gary Olin > Equipment Maintenance > Minnesota Nano Center > University of Minnesota > olinx034 at umn.edu > (612) 625-9780 > > On Mon, Jul 16, 2018 at 2:40 PM, Nava Ariel-Sternberg > > wrote: > > Dear all, > > We've been having some difficulty with the service from KLA-Tencor > on one of the profilometers we purchased (communication with them > is not very clear, very high pricing for just initial problem > evaluation etc...). Not sure if we're approaching this the wrong > way or could be the specific people we communicated with or > something else... > > Has anyone experienced this? Are there any recommended channels of > communication that can assure we receive better service? > > Thanks, > > Nava > > Nava Ariel-Sternberg, Ph.D. > > Director of CNI Shared Labs > > CEPSR/MC 8903 > > 530 west 120^th st. NY > > NY 10027 > > Office: 212-8549927 > > Cell: 201-5627600 > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From derose at caltech.edu Tue Jul 17 12:28:01 2018 From: derose at caltech.edu (DeRose, Guy A.) Date: Tue, 17 Jul 2018 16:28:01 +0000 Subject: [labnetwork] KLA-Tencor service In-Reply-To: References: <06b301d41d3c$eb928b80$c2b7a280$@columbia.edu> Message-ID: <316CBBAA-E435-48C1-878B-3D63AECDA061@caltech.edu> Nava and Gary, I am having similar experiences with KLA Tencor on the service for my Ambios XP-2 profilometer. The work they do is always good, but getting it scheduled is a challenge for a non-contract customer. I will also try the other firms that were suggested. FYI and thanks, Guy From: on behalf of Gary Olin Date: Tuesday, July 17, 2018 at 8:51 AM To: Nava Ariel-Sternberg Cc: "labnetwork at mtl.mit.edu" Subject: Re: [labnetwork] KLA-Tencor service Good Morning Nava, I get the same treatment from KLA-Tencor since I don't have service contracts on our profilers. When you get someone to do the work the quality is good. There are some aftermarket firms that do service on KLA profilers. One is Brumley South www.brumleysouth.com , (704) 664-9251 . I have looked into them in the past but never had work done. A second is Metrology Equipment Services, LLC the contact there is Jeff Cada Info at MetrologyEquipmentServices.com 408-392-9100. I have called them for advice and bought parts from them in the past. Easier for me to buy parts from them than from the OEM. Glad to see you in Philly. Have a good day, Gary Gary Olin Equipment Maintenance Minnesota Nano Center University of Minnesota olinx034 at umn.edu (612) 625-9780 On Mon, Jul 16, 2018 at 2:40 PM, Nava Ariel-Sternberg > wrote: Dear all, We?ve been having some difficulty with the service from KLA-Tencor on one of the profilometers we purchased (communication with them is not very clear, very high pricing for just initial problem evaluation etc?). Not sure if we?re approaching this the wrong way or could be the specific people we communicated with or something else? Has anyone experienced this? Are there any recommended channels of communication that can assure we receive better service? Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From J.D.Watson at tudelft.nl Wed Jul 18 14:41:24 2018 From: J.D.Watson at tudelft.nl (John Watson) Date: Wed, 18 Jul 2018 18:41:24 +0000 Subject: [labnetwork] Engineering job postings QuTech/TU Delft Message-ID: <567c8a91121e44ee992daa134ac088a5@tudelft.nl> Dear colleagues, QuTech (part of Delft Technical University in the Netherlands) has several job openings for engineering and research positions related to fabrication and materials growth and characterization in its topological quantum computing roadmap. The short descriptions are listed below along with links to the full job posting. I would be very grateful if you could pass this info on to potential candidates. Kind regards, John -- John Watson Researcher Microsoft Station Q, Delft Lorentzweg 1 2628CJ Delft The Netherlands All jobs listed at https://www.tudelft.nl/en/about-tu-delft/working-at-tu-delft/search-jobs/. Scroll to the bottom for QuTech positions. Lab Engineer * Vacancy number QuT18-053 * Short description: general lab and equipment maintenance including vacuum systems and lab support systems * Degree requirements: MTS/HBO degree in engineering technology, mechanical engineering, electrical engineering or related fields Nano-characterization engineer * Vacancy number QuT18-054 * Short description: TEM characterization of semiconductor materials and devices * Degree requirements: PhD or Master?s degree with a minimum of 1-2 year(s) of experience in electron microscopy for Materials Science, Nanotechnology or related disciplines Molecular Beam Epitaxy Engineer * Vacancy number QuT18-057 * Short description: operation and maintenance of III-V MBE system * Degree requirements: Bachelor's degree in electrical engineering, physics, materials science, or related field plus 2-3 years relevant work experience, or Master's degree plus 1-2 years relevant work experience Nano-Fabrication Engineer * Vacancy number: QuT18-058 * Short description: III-V semiconductor device fabrication * Degree requirements: Master's degree or Bachelor's degree with 1-2 years of experience in Materials Science, Materials Engineering, Nanotechnology or related disciplines Fabrication Engineer Lithography * Vacancy number: QuT18-059 * Short description: operation and maintenance of electron beam lithography system * Degree requirements: Master's degree in a relevant field Electrical Test Engineer * Vacancy number: QuT18-062 * Short description: I-V and C-V characterization of semiconductor devices * Degree requirements: Bachelor's degree in electrical engineering, physics, materials science, or related field plus 2-3 years relevant work experience or Master?s degree plus 1-2 years relevant work experience; Postdoc: Advanced Materials Characterization * Vacancy number: QuT18-055 * Short description: electron microscopy (TEM/SEM/FIB) research * Degree requirements: A PhD in Materials Science, Physics or Engineering with at least one year of relevant postdoctoral or industrial experience in transmission electron microscopy in compound semiconductors. Postdoc Advanced MBE of scalable III-V and hybrid metal/semiconductor nanostructures * Vacancy number: QuT18-056 * Short description: growth of novel high mobility/large spin-orbit III-As and III-Sb materials * Degree requirements: A PhD in Materials Science, Physics or Engineering with at least one year of relevant postdoctoral or industrial experience in compound semiconductor MBE ? specifically III-Vs. -------------- next part -------------- An HTML attachment was scrubbed... URL: From carsen at stanford.edu Thu Jul 26 11:00:50 2018 From: carsen at stanford.edu (Carsen Kline) Date: Thu, 26 Jul 2018 15:00:50 +0000 Subject: [labnetwork] ALD valves Message-ID: Hi all, We're seeing 6 month lead times on Swagelok ALD valves. Has anyone had luck rebuilding the valves? Has anyone identified a more readily available second source for a similar valve? Many thanks, Carsen Carsen Kline Lab Operations Manager Stanford Nanofabrication Facility (650)724-8214 http://snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From hathaway at cns.fas.harvard.edu Thu Jul 26 12:00:10 2018 From: hathaway at cns.fas.harvard.edu (Mac Hathaway) Date: Thu, 26 Jul 2018 12:00:10 -0400 Subject: [labnetwork] ALD valves In-Reply-To: References: Message-ID: <5B59F00A.5050503@cns.fas.harvard.edu> Same here. My order from last December is just coming due in August! Apparently there is a semifab boom going on in Asia, and everything is back ordered. I would love to hear if anyone has successfully rebuilt one of these. It should be doable, in that the valve seat is teflon, or somesuch (as I understand it). Mac Mac Hathaway Senior Process and Systems Engineer Harvard Center for Nanoscale Systems 11 Oxford St. Cambridge, MA02138 617-495-9012 On 7/26/2018 11:00 AM, Carsen Kline wrote: > > Hi all, > > We're seeing 6 month lead times on Swagelok ALD valves. Has anyone had > luck rebuilding the valves? Has anyone identified a more readily > available second source for a similar valve? > > Many thanks, > > Carsen > > Carsen Kline > Lab Operations Manager > Stanford Nanofabrication Facility > (650)724-8214 > http://snf.stanford.edu > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From kbarnes at semitorrinc.com Thu Jul 26 11:48:29 2018 From: kbarnes at semitorrinc.com (Keith Barnes) Date: Thu, 26 Jul 2018 15:48:29 +0000 Subject: [labnetwork] ALD valves In-Reply-To: References: Message-ID: Hamlet Sent from my iPhone On Jul 26, 2018, at 8:47 AM, Carsen Kline > wrote: Hi all, We?re seeing 6 month lead times on Swagelok ALD valves. Has anyone had luck rebuilding the valves? Has anyone identified a more readily available second source for a similar valve? Many thanks, Carsen Carsen Kline Lab Operations Manager Stanford Nanofabrication Facility (650)724-8214 http://snf.stanford.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From JUC48 at pitt.edu Thu Jul 26 12:50:43 2018 From: JUC48 at pitt.edu (Chen, Jun) Date: Thu, 26 Jul 2018 16:50:43 +0000 Subject: [labnetwork] Experience on ICP-RIE Message-ID: Dear Colleagues, We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP. Does anyone have experience on these systems? What?s the pros and cons? I would greatly appreciate for your feedback! best, Jun Chen, Ph.D. Nanofabrication scientist, Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh 3700 O'Hara Street, Pittsburgh, PA 15261 T: 412.383.3282 http://www.nano.pitt.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From na2661 at columbia.edu Thu Jul 26 14:05:31 2018 From: na2661 at columbia.edu (Nava Ariel-Sternberg) Date: Thu, 26 Jul 2018 14:05:31 -0400 Subject: [labnetwork] Ru deposition Message-ID: <03e901d4250b$3e3c8a90$bab59fb0$@columbia.edu> Dear all, Does anyone have experience with Ru deposition? E-beam or sputtering? Any safety or contamination concerns? Any recommendations? Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rdevito at draper.com Thu Jul 26 16:00:43 2018 From: rdevito at draper.com (DeVito, Richard) Date: Thu, 26 Jul 2018 20:00:43 +0000 Subject: [labnetwork] Experience on ICP-RIE In-Reply-To: References: Message-ID: Jun we have systems from both manufacturers including an APEX SLR tool purchased less than 2 years ago I can comment on my experience with both...you can call me in the office line to discuss if you want. I am usually available from 8:45-9:30 and again around 12:00 -1:00 Rich DeVito Principle Member Technical Staff Group Leader Microfabrication Lab Draper 555 Technology Square, Cambridge, MA 02139 Phone: 617-258-3819 www.draper.com From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun Sent: Thursday, July 26, 2018 12:51 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Experience on ICP-RIE Dear Colleagues, We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP. Does anyone have experience on these systems? What's the pros and cons? I would greatly appreciate for your feedback! best, Jun Chen, Ph.D. Nanofabrication scientist, Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh 3700 O'Hara Street, Pittsburgh, PA 15261 T: 412.383.3282 http://www.nano.pitt.edu/ ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From spaolini at cns.fas.harvard.edu Thu Jul 26 16:06:21 2018 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Thu, 26 Jul 2018 20:06:21 +0000 Subject: [labnetwork] Experience on ICP-RIE In-Reply-To: References: Message-ID: Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these systems Represent the best in class for university work. I can't think of any cons with either platform. Steve Paolini Equipment Dood Harvard University Center for Nanoscale Systems. Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 11 Oxford St. Cambridge, MA 02138 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun Sent: Thursday, July 26, 2018 12:51 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Experience on ICP-RIE Dear Colleagues, We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP. Does anyone have experience on these systems? What's the pros and cons? I would greatly appreciate for your feedback! best, Jun Chen, Ph.D. Nanofabrication scientist, Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh 3700 O'Hara Street, Pittsburgh, PA 15261 T: 412.383.3282 http://www.nano.pitt.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From rdevito at draper.com Thu Jul 26 16:18:23 2018 From: rdevito at draper.com (DeVito, Richard) Date: Thu, 26 Jul 2018 20:18:23 +0000 Subject: [labnetwork] Ru deposition In-Reply-To: <03e901d4250b$3e3c8a90$bab59fb0$@columbia.edu> References: <03e901d4250b$3e3c8a90$bab59fb0$@columbia.edu> Message-ID: <509e4a3f72184b3a9745bca50406778e@draper.com> Nava, We have e-beam evaporated it for contacts here. There are no toxicity issue I know of..its inert like platinum I believe. Beware of cracking crucibles on cool down.... RD Rich DeVito Principle Member Technical Staff Group Leader Microfabrication Lab Draper 555 Technology Square, Cambridge, MA 02139 Phone: 617-258-3819 www.draper.com From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg Sent: Thursday, July 26, 2018 2:06 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Ru deposition Dear all, Does anyone have experience with Ru deposition? E-beam or sputtering? Any safety or contamination concerns? Any recommendations? Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Thu Jul 26 17:31:31 2018 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Thu, 26 Jul 2018 21:31:31 +0000 Subject: [labnetwork] ALD valves In-Reply-To: <5B59F00A.5050503@cns.fas.harvard.edu> References: , <5B59F00A.5050503@cns.fas.harvard.edu> Message-ID: Everything is correct...including pumps, too. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager University of Louisville 2210 South Brook Street Shumaker Research Building, Room 233 Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Mac Hathaway Sent: Thursday, July 26, 2018 12:00:10 PM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] ALD valves Same here. My order from last December is just coming due in August! Apparently there is a semifab boom going on in Asia, and everything is back ordered. I would love to hear if anyone has successfully rebuilt one of these. It should be doable, in that the valve seat is teflon, or somesuch (as I understand it). Mac Mac Hathaway Senior Process and Systems Engineer Harvard Center for Nanoscale Systems 11 Oxford St. Cambridge, MA 02138 617-495-9012 On 7/26/2018 11:00 AM, Carsen Kline wrote: Hi all, We?re seeing 6 month lead times on Swagelok ALD valves. Has anyone had luck rebuilding the valves? Has anyone identified a more readily available second source for a similar valve? Many thanks, Carsen Carsen Kline Lab Operations Manager Stanford Nanofabrication Facility (650)724-8214 http://snf.stanford.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From mmoneck at andrew.cmu.edu Thu Jul 26 19:52:34 2018 From: mmoneck at andrew.cmu.edu (Matthew Moneck) Date: Thu, 26 Jul 2018 23:52:34 +0000 Subject: [labnetwork] Ru deposition In-Reply-To: <509e4a3f72184b3a9745bca50406778e@draper.com> References: <03e901d4250b$3e3c8a90$bab59fb0$@columbia.edu> <509e4a3f72184b3a9745bca50406778e@draper.com> Message-ID: <61fa4e6500b74838a681628280a4ad51@andrew.cmu.edu> Hi Nava, We have done a lot of Ru sputtering over the years. Most of our films are for magnetic applications and tend to be thin, ranging from a few angstroms to a few tens of nanometers. We have had no issues in these cases. In cases where we've gone thicker (>100nm), we have had some issues with stress-induced cracking of the films at times, although, we were able to resolve the problem with proper choice of deposition conditions. Best Regards, Matt -- Matthew T. Moneck, Ph.D. Executive Manager, Carnegie Mellon Nanofabrication Facility Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.5430 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of DeVito, Richard Sent: Thursday, July 26, 2018 4:18 PM To: Nava Ariel-Sternberg ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Ru deposition Nava, We have e-beam evaporated it for contacts here. There are no toxicity issue I know of..its inert like platinum I believe. Beware of cracking crucibles on cool down.... RD Rich DeVito Principle Member Technical Staff Group Leader Microfabrication Lab Draper 555 Technology Square, Cambridge, MA 02139 Phone: 617-258-3819 www.draper.com From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg Sent: Thursday, July 26, 2018 2:06 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Ru deposition Dear all, Does anyone have experience with Ru deposition? E-beam or sputtering? Any safety or contamination concerns? Any recommendations? Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From fouad.karouta at anu.edu.au Thu Jul 26 19:47:29 2018 From: fouad.karouta at anu.edu.au (Fouad Karouta) Date: Thu, 26 Jul 2018 23:47:29 +0000 Subject: [labnetwork] Experience on ICP-RIE In-Reply-To: References: Message-ID: Hi Jun, I also have experience with both. In general you need to consider the service provided by the companies and this depends much on geographical area. Another general aspect you need to consider: combining the two Cl and F chemistries in one system may lead to non-reproducibility issues which may be overcome by setting a strict procedure when switching from one chemistry to the other. If you need more discussions as Rich mentioned send an email off-line to the person directly. Regards, Fouad Karouta ************************************* Manager ANFF ACT Node Australian National Fabrication Facility Research School of Physics and Engineering L. Huxley Building (#56), Mills Road, Room 4.02 Australian National University ACT 2601, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au http://anff-act.anu.edu.au/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of DeVito, Richard Sent: Friday, 27 July 2018 6:01 AM To: Chen, Jun ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Experience on ICP-RIE Jun we have systems from both manufacturers including an APEX SLR tool purchased less than 2 years ago I can comment on my experience with both...you can call me in the office line to discuss if you want. I am usually available from 8:45-9:30 and again around 12:00 -1:00 Rich DeVito Principle Member Technical Staff Group Leader Microfabrication Lab Draper 555 Technology Square, Cambridge, MA 02139 Phone: 617-258-3819 www.draper.com From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun Sent: Thursday, July 26, 2018 12:51 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Experience on ICP-RIE Dear Colleagues, We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP. Does anyone have experience on these systems? What's the pros and cons? I would greatly appreciate for your feedback! best, Jun Chen, Ph.D. Nanofabrication scientist, Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh 3700 O'Hara Street, Pittsburgh, PA 15261 T: 412.383.3282 http://www.nano.pitt.edu/ ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From proma016 at fiu.edu Fri Jul 27 05:30:33 2018 From: proma016 at fiu.edu (proma016 at fiu.edu) Date: Fri, 27 Jul 2018 11:30:33 +0200 Subject: [labnetwork] STS Multiplex DRIE Message-ID: Greetings labnetwork Can someone recommend an FSE for starup and service of an early model STS DRIE bosch process Si etcher? Sent from my iPhone > On Jul 26, 2018, at 10:06 PM, Paolini, Steven wrote: > > Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these systems Represent the best in class for university work. > I can?t think of any cons with either platform. > > Steve Paolini > Equipment Dood > Harvard University Center for Nanoscale Systems. > > Steve Paolini > Principal Equipment Engineer > Harvard University Center for Nanoscale Systems > 11 Oxford St. > Cambridge, MA 02138 > 617- 496- 9816 > spaolini at cns.fas.harvard.edu > www.cns.fas.harvard.edu > > From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun > Sent: Thursday, July 26, 2018 12:51 PM > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Experience on ICP-RIE > > Dear Colleagues, > We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP. > Does anyone have experience on these systems? What?s the pros and cons? I would greatly appreciate for your feedback! > > best, > > Jun Chen, Ph.D. > Nanofabrication scientist, > Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh > 3700 O'Hara Street, Pittsburgh, PA 15261 > T: 412.383.3282 > http://www.nano.pitt.edu/ > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From iharvey at princeton.edu Sat Jul 28 11:24:56 2018 From: iharvey at princeton.edu (Ian Harvey) Date: Sat, 28 Jul 2018 15:24:56 +0000 Subject: [labnetwork] Cleanroom Tool Engineer opening at Princeton University... Message-ID: <15D4C4D6-69EA-4F34-936A-3D8FB9F43392@princeton.edu> https://research-princeton.icims.com/jobs/8986/mnfl-tool-maint-%26-repair-tech/job?hub=15&mobile=false&width=1200&height=500&bga=true&needsRedirect=false&jan1offset=-300&jun1offset=-240 Dear Labnetwork Colleagues, We are loooking for a serial tinkerer, preferably someone with a few (or more) gray hairs who wants to work at a beautiful and historic campus community, in a challenging and satisfying environment, and live in the rural part of the Garden State. Full-time, regular employee. Salary negotiable. (Our HR people suggested we post this notice on Indeed, and indeed the first applicant was a Sous Chef?!!) Please contact me directly with any questions since our website is not yet updated with details on our new facility or after completing move-in. Thank you, Ian R. Harvey Director, PRISM Cleanroom 609-285-9951 [cid:704752F9-04E0-4CFA-80C6-95108A8D866D at hsd1.nj.comcast.net.] Overview Support all cleanroom tool maintenance, troubleshooting and repair functions of the Princeton PRISM MNFL, including but not limited to vacuum tools, plasma reactors, thermal and plasma deposition processes, laser direct patterning tools, as well as back-end processing tools (bonding, dicing); in all functions such as pneumatic, high-purity gas handling, electronic, ultra high vacuum, RF, electromechanical and robotic. Repairs computers and control electronics associated with the operation of such tools. Designs and builds UL/CE compliant electronics to interrupt key tool functions in order to enable management control of access to tools including those using hazardous process materials (HPM's). Works with safety specialists and process engineers to ensure components do not present hazardous exposure (chemical, electrical, thermal) risk to staff or to lab researchers using the tools. Rigs, moves, installs new tools and brings them to the point of process qualification by engineers. Works and communicates easily with lab clients to understand relevant issues representing sub-optimal tool performance and seeks to immediately rectify underlying issues. Interfaces with field service representatives to both constantly learn new approaches and to ensure function to specification. Responsibilities Ensure the proper operation of cleanroom tools by working with process engineers or by independently assessing process performance trends and pro-actively performing preventive maintenance. This includes tool inspection, diagnostics, teardown, repair, full reassembly (including tool skins) and documentation of effort for future reference. Documents and tracks tool age, use history, PM schedule and procedures and maintains the documented institutional memory of tool repair successes and failures. This individual owns the primary responsibility among all staff for cleanroom process and support equipment troubleshooting, repair and modification. He or she will have a broad capability for troubleshooting and repairing tools used for microfabrication: vacuum and RF plasma-based thin film deposition and patterning tools. Backend tools. Lithography tools. Must be willing and able to kneel, squat, reach, and be comfortable working in confined spaces and in a cleanroom suit with hood, face cover, gloves and clean coveralls. Must be familiar with vacuum leak checking approaches. Plasma diagnostic skills using optical spectrophotometers a plus. Understands risks of oil based vacuum pumps and is capable of maintaining dry pumps. Assist equipment installations by working with colleagues to ensure proper installation conditions, rig and move the tool to the use location, complete final connections, start-up and test. Support troubleshooting during qualification. Skill and experience in operating these tools is an added benefit but not as important as demonstrated electromechanical and vacuum understanding and skills. De-installs, rigs and crates obsolete tools and arranges for re-use or disposal. The individual knows when they have reached the end of their own skills and when it is appropriate to call in external resources or seek learning from other resources. Has a broad contact list of external resources. Qualifications Bachelor degree or equivalent required in 10-30 years practical experience. Must be willing to work a modified shift, coming in first thing in the morning (6-7 am), assess the status of the lab and tools in the lab as well as alarm systems for supporting (e.g., gas delivery) and supporting infrastructure. Must be willing and able to come in at nights or on weekends on-call to support unanticipated facilities, equipment and personnel events. Good with people. Good communicator. Respectful of students, colleagues, faculty, administrators and suppliers. Attitude is "get 'er done!" Diversity of skills is required. The ideal candidate will be a serial tinkerer??someone who loves to understand how things work??and finds challenge, opportunity and satisfaction in building, creating, problem solving and fixing something broken. Unafraid of the type of challenge, whether robotic, electronic, pneumatic, mechanical, electromechanical, RF, vacuum or laser. Multi-tasks. Specific skills and experience to be demonstrated in an evaluation setting: Vacuum troubleshooting and repair. Electronics use, troubleshooting and repair. Safe practices in lock-out / tag-out. Fastidous in getting the job done, doing it properly and cleaning up when finished. https://research-princeton.icims.com/jobs/8986/mnfl-tool-maint-%26-repair-tech/job?hub=15&mobile=false&width=1200&height=500&bga=true&needsRedirect=false&jan1offset=-300&jun1offset=-240 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: PastedGraphic-1.png Type: image/png Size: 46780 bytes Desc: PastedGraphic-1.png URL: From dylan.klomparens at nist.gov Mon Jul 30 10:15:43 2018 From: dylan.klomparens at nist.gov (Klomparens, Dylan L. (Fed)) Date: Mon, 30 Jul 2018 14:15:43 +0000 Subject: [labnetwork] Interlocks - what do you use? Message-ID: Hello everyone, NIST has been using the hardware interlocks that were developed by Stanford, and compatible with Coral. This system has worked well for us for years, however we're starting to think about what a "next gen" interlock might look like. I would like to gather some information, to see what is available on the market, and what has worked well for others. What interlocks do you use for your fab? * Make & model * Do you have a URL to find more information? What has your experience been? Was your solution easy to customize? Did it meet all your requirements? Did you get any extra capability easily (such as data collection or sensors for monitoring the fab)? Please let me know if you're interested in the final results, and I can email the final results of this research to you. -- Dylan Klomparens NIST NanoFab -------------- next part -------------- An HTML attachment was scrubbed... URL: From mpleil at unm.edu Mon Jul 30 12:22:10 2018 From: mpleil at unm.edu (Matthias Pleil) Date: Mon, 30 Jul 2018 16:22:10 +0000 Subject: [labnetwork] STS Multiplex DRIE In-Reply-To: References: Message-ID: Hello, We have had good luck with the following fellow, Pascal Bouvron for our Alcatel DRIE. "BOUVRON FIELD SERVICES, LLC" Address 4397 Norris road Fremont, CA 94536, USA Cell +(1) 510.599.5203 Office +(1) 510.257.4246 Fax +(1) 610.870.3762 Email pascal at bouvronfieldservices.com LinkedIn https://www.linkedin.com/in/pascal-bouvron-2487621 [https://static.licdn.com/scds/common/u/images/themes/katy/ghosts/person/ghost_person_200x200_v1.png] Pascal Bouvron | LinkedIn www.linkedin.com View Pascal Bouvron?s profile on LinkedIn, the world's largest professional community. Pascal has 6 jobs listed on their profile. See the complete profile on LinkedIn and discover Pascal?s connections and jobs at similar companies. Kind Regards, Matthias Pleil, Ph.D. Research Professor & Lecturer III of Mech. Eng - UNM UNM MTTC Cleanroom Manager PI - Southwest Center for Microsystems Education, Support Center for Microsystems Education scme-nm.org, scme-support.org (505)272-7157 ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of proma016 at fiu.edu Sent: Friday, July 27, 2018 3:30:33 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] STS Multiplex DRIE Greetings labnetwork Can someone recommend an FSE for starup and service of an early model STS DRIE bosch process Si etcher? Sent from my iPhone On Jul 26, 2018, at 10:06 PM, Paolini, Steven > wrote: Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these systems Represent the best in class for university work. I can?t think of any cons with either platform. Steve Paolini Equipment Dood Harvard University Center for Nanoscale Systems. Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 11 Oxford St. Cambridge, MA 02138 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun Sent: Thursday, July 26, 2018 12:51 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Experience on ICP-RIE Dear Colleagues, We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP. Does anyone have experience on these systems? What?s the pros and cons? I would greatly appreciate for your feedback! best, Jun Chen, Ph.D. Nanofabrication scientist, Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh 3700 O'Hara Street, Pittsburgh, PA 15261 T: 412.383.3282 http://www.nano.pitt.edu/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From hathaway at cns.fas.harvard.edu Mon Jul 30 16:29:23 2018 From: hathaway at cns.fas.harvard.edu (Mac Hathaway) Date: Mon, 30 Jul 2018 16:29:23 -0400 Subject: [labnetwork] Interlocks - what do you use? In-Reply-To: References: Message-ID: <5B5F7523.4030408@cns.fas.harvard.edu> Hi Dylan, At Harvard CNS, we use a 6-channel ethernet-connected relay, called the ADAM 6060 from Advantech. Each of these goes into a custom electronics enclosure (the ICP) that we have built by a guy from labmanone.com. These can send out either 12V (to power relays) or present "dry contacts" to internal equipment interlock circuits, to disable tools when no user is logged in. The power relays either depower the relevant monitor (for a control PC), or they depower the entire system. These have been impressively robust, although a firmware change/Java version change has rendered older units a bit tricky to control manually using stand-alone control apps... compatibility with our CLEAN system has never been an issue. These have worked well for our purposes, in conjunction with our home-grown CLEAN system (similar to Badger/Coral/iLabs/etc.). My only wish is that there was a 12-channel version, as we sometimes have to co-locate several ICP control boxes to get a sufficient number of control channels. Mac Mac Hathaway Senior Process and Systems Engineer Harvard Center for Nanoscale Systems 11 Oxford St. Cambridge, MA02138 617-495-9012 On 7/30/2018 10:15 AM, Klomparens, Dylan L. (Fed) wrote: > > Hello everyone, > > > NIST has been using the hardware interlocks that were developed by > Stanford, and compatible with Coral. This system has worked well for > us for years, however we're starting to think about what a "next gen" > interlock might look like. I would like to gather some information, to > see what is available on the market, and what has worked well for others. > > > What interlocks do you use for your fab? > > * Make & model > * Do you have a URL to find more information? > > > What has your experience been? Was your solution easy to customize? > Did it meet all your requirements? Did you get any extra capability > easily (such as data collection or sensors for monitoring the fab)? > > > Please let me know if you're interested in the final results, and I > can email the final results of this research to you. > > > -- Dylan Klomparens > > NIST NanoFab > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From shuyou at fomnetworks.com Mon Jul 30 22:49:14 2018 From: shuyou at fomnetworks.com (Shuyou Li) Date: Mon, 30 Jul 2018 21:49:14 -0500 Subject: [labnetwork] Interlocks - what do you use? In-Reply-To: References: Message-ID: Hi Dylan, At FOM we design and currently manufacture relay boxes for this purpose of resource access control. Since we have control over the entire design, from the enclosure box to the circuit to the bits on the microcontroller, we've been able to customize the boxes to whatever extra capabilities the customer institution wants. These features range from across-the-board helpful features like physical control against users messing with it and multi-channel versions, to customer-specific features like temperature monitoring, interfacing with a card swipe reader so users can log into the instrument without using a separate computer, and more. In our experience, it is not really that difficult to add features if the core hardware and software is made with extensibility in mind. What "next-gen" means for hardware access control depends on what the lab actually needs, which can be vastly different across even similar labs. So, in lieu of defining "next-gen" in terms of a list of specific features, which would make the hardware unnecessarily complex (if only 10% of labs using the hardware need temperature monitoring, for instance, should temperature sensors be added to everyone's box?), we feel that "next-gen" simply means very flexible, customizable, and extensible, to be able to accommodate any new feature, rather than to just have a long laundry list of existing features. Shuyou _________________ Shuyou Li, Ph.D. FOM Networks, Inc. www.fomnetworks.com Ph: (224) 225-9168 Fax: (224) 218-2807 On Mon, Jul 30, 2018 at 9:15 AM, Klomparens, Dylan L. (Fed) < dylan.klomparens at nist.gov> wrote: > Hello everyone, > > > NIST has been using the hardware interlocks that were developed by > Stanford, and compatible with Coral. This system has worked well for us for > years, however we're starting to think about what a "next gen" interlock > might look like. I would like to gather some information, to see what > is available on the market, and what has worked well for others. > > > What interlocks do you use for your fab? > > > - Make & model > - Do you have a URL to find more information? > > > What has your experience been? Was your solution easy to customize? Did it > meet all your requirements? Did you get any extra capability easily (such > as data collection or sensors for monitoring the fab)? > > > Please let me know if you're interested in the final results, and I can > email the final results of this research to you. > > > -- Dylan Klomparens > > NIST NanoFab > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > ? -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.rooks at yale.edu Tue Jul 31 07:44:45 2018 From: michael.rooks at yale.edu (Michael Rooks) Date: Tue, 31 Jul 2018 07:44:45 -0400 Subject: [labnetwork] Interlocks - what do you use? In-Reply-To: References: Message-ID: <5B604BAD.6030307@yale.edu> We use relay controllers from National Control (https://store.ncd.io) like this one . You can configure them with a variety of communication ports. We use wired ethernet. The relays are controlled with Badger, the commercial version of Coral, from an Amazon server. If you are familiar with Coral, then it would be easy to switch to Badger (badgerlms.com). This discussion comes up so often that we should make a FAQ file for it. -------------------------------- Michael Rooks Yale Institute of Nanoscience and Quantum Engineering nano.yale.edu On 07/30/2018 10:15 AM, Klomparens, Dylan L. (Fed) wrote: > > Hello everyone, > > > NIST has been using the hardware interlocks that were developed by > Stanford, and compatible with Coral. This system has worked well for > us for years, however we're starting to think about what a "next gen" > interlock might look like. I would like to gather some information, to > see what is available on the market, and what has worked well for others. > > > What interlocks do you use for your fab? > > * Make & model > * Do you have a URL to find more information? > > > What has your experience been? Was your solution easy to customize? > Did it meet all your requirements? Did you get any extra capability > easily (such as data collection or sensors for monitoring the fab)? > > > Please let me know if you're interested in the final results, and I > can email the final results of this research to you. > > > -- Dylan Klomparens > > NIST NanoFab > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From lrehn at tamu.edu Tue Jul 31 10:39:08 2018 From: lrehn at tamu.edu (Rehn, Larry A) Date: Tue, 31 Jul 2018 14:39:08 +0000 Subject: [labnetwork] STS Multiplex DRIE In-Reply-To: References: Message-ID: <8f5f69bec13245b29ac8c26e62591b4e@tamu.edu> We are in the process to set up an STS Multiplex system with the Bosch process, too. The installation work has not begun yet, but we did find a former STS engineer who is familiar with these tools. He now has his own business to work on these tools. His name is Gareth Morgan, contact information below: Suppliers Name: Gareth Morgan Suppliers Company Name: CTP Company Services Suppliers Address: 3 Commercial Road Cwmfelinfach Nr Newport Gwent Email Address: garethmorganctp at outlook.com Mobile Number: 44 07754002875 Larry A Rehn Technical Lab Manager AggieFab Nanofabrication Facility Texas A&M University 979 845-3199 lrehn at tamu.edu [cid:image001.jpg at 01CEC37D.FAF8C9E0] From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of proma016 at fiu.edu Sent: Friday, July 27, 2018 4:31 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] STS Multiplex DRIE Greetings labnetwork Can someone recommend an FSE for starup and service of an early model STS DRIE bosch process Si etcher? Sent from my iPhone On Jul 26, 2018, at 10:06 PM, Paolini, Steven > wrote: Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these systems Represent the best in class for university work. I can?t think of any cons with either platform. Steve Paolini Equipment Dood Harvard University Center for Nanoscale Systems. Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 11 Oxford St. Cambridge, MA 02138 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun Sent: Thursday, July 26, 2018 12:51 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Experience on ICP-RIE Dear Colleagues, We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP. Does anyone have experience on these systems? What?s the pros and cons? I would greatly appreciate for your feedback! best, Jun Chen, Ph.D. Nanofabrication scientist, Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh 3700 O'Hara Street, Pittsburgh, PA 15261 T: 412.383.3282 http://www.nano.pitt.edu/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 13188 bytes Desc: image001.jpg URL: From jfraser96 at byu.edu Tue Jul 31 11:40:49 2018 From: jfraser96 at byu.edu (Jim Fraser) Date: Tue, 31 Jul 2018 15:40:49 +0000 Subject: [labnetwork] STS Multiplex DRIE In-Reply-To: References: Message-ID: <5b52fb281e8e45e8820b7fa7aaff2e39@MB10.byu.local> The only one I know of is Gareth Morgan. He has been working with us to solve a downtime issue on our STS ICP RIE system. He has been good to work with and is knowledgeable. His email is: gareth morgan garethmorganctp at yahoo.com Thanks, James R Fraser IML Manager 485 CB Brigham Young University 801-422-4344 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of proma016 at fiu.edu Sent: Friday, July 27, 2018 3:31 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] STS Multiplex DRIE Greetings labnetwork Can someone recommend an FSE for starup and service of an early model STS DRIE bosch process Si etcher? Sent from my iPhone On Jul 26, 2018, at 10:06 PM, Paolini, Steven > wrote: Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these systems Represent the best in class for university work. I can?t think of any cons with either platform. Steve Paolini Equipment Dood Harvard University Center for Nanoscale Systems. Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 11 Oxford St. Cambridge, MA 02138 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun Sent: Thursday, July 26, 2018 12:51 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Experience on ICP-RIE Dear Colleagues, We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP. Does anyone have experience on these systems? What?s the pros and cons? I would greatly appreciate for your feedback! best, Jun Chen, Ph.D. Nanofabrication scientist, Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh 3700 O'Hara Street, Pittsburgh, PA 15261 T: 412.383.3282 http://www.nano.pitt.edu/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From Milan.Begliarbekov at asrc.cuny.edu Tue Jul 31 16:11:05 2018 From: Milan.Begliarbekov at asrc.cuny.edu (Milan Begliarbekov) Date: Tue, 31 Jul 2018 20:11:05 +0000 Subject: [labnetwork] 10 inch manual ISO Flanged gate valve Message-ID: <1cae129242f84305afa9c58b0898b30c@EXCPMNJ02.enterpriseapps.cuny.adlan> Hi All, We are currently in the marked for a 10 inch (outer diameter) ISO flanged manual gate valve to isolate a cryo pump. Most companies have a 6 months lead time. If anyone has a spare one (a used one in working condition is fine) or can recommend a good supplier, please email me. Thank you as always, Milan Begliarbekov CUNY Advanced Science Research Center -------------- next part -------------- An HTML attachment was scrubbed... URL: From bob.geil at unc.edu Mon Jul 30 21:42:46 2018 From: bob.geil at unc.edu (Geil, Bob) Date: Tue, 31 Jul 2018 01:42:46 +0000 Subject: [labnetwork] STS Multiplex DRIE In-Reply-To: References: , Message-ID: I second that. Pascal is great. ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Matthias Pleil Sent: Monday, July 30, 2018 12:22:10 PM To: proma016 at fiu.edu; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] STS Multiplex DRIE Hello, We have had good luck with the following fellow, Pascal Bouvron for our Alcatel DRIE. "BOUVRON FIELD SERVICES, LLC" Address 4397 Norris road Fremont, CA 94536, USA Cell +(1) 510.599.5203 Office +(1) 510.257.4246 Fax +(1) 610.870.3762 Email pascal at bouvronfieldservices.com LinkedIn https://www.linkedin.com/in/pascal-bouvron-2487621 [https://static.licdn.com/scds/common/u/images/themes/katy/ghosts/person/ghost_person_200x200_v1.png] Pascal Bouvron | LinkedIn www.linkedin.com View Pascal Bouvron?s profile on LinkedIn, the world's largest professional community. Pascal has 6 jobs listed on their profile. See the complete profile on LinkedIn and discover Pascal?s connections and jobs at similar companies. Kind Regards, Matthias Pleil, Ph.D. Research Professor & Lecturer III of Mech. Eng - UNM UNM MTTC Cleanroom Manager PI - Southwest Center for Microsystems Education, Support Center for Microsystems Education scme-nm.org, scme-support.org (505)272-7157 ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of proma016 at fiu.edu Sent: Friday, July 27, 2018 3:30:33 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] STS Multiplex DRIE Greetings labnetwork Can someone recommend an FSE for starup and service of an early model STS DRIE bosch process Si etcher? Sent from my iPhone On Jul 26, 2018, at 10:06 PM, Paolini, Steven > wrote: Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these systems Represent the best in class for university work. I can?t think of any cons with either platform. Steve Paolini Equipment Dood Harvard University Center for Nanoscale Systems. Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 11 Oxford St. Cambridge, MA 02138 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun Sent: Thursday, July 26, 2018 12:51 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Experience on ICP-RIE Dear Colleagues, We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP. Does anyone have experience on these systems? What?s the pros and cons? I would greatly appreciate for your feedback! best, Jun Chen, Ph.D. Nanofabrication scientist, Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh 3700 O'Hara Street, Pittsburgh, PA 15261 T: 412.383.3282 http://www.nano.pitt.edu/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From john.nibarger at nist.gov Tue Jul 31 21:27:09 2018 From: john.nibarger at nist.gov (Nibarger, John (Fed)) Date: Wed, 1 Aug 2018 01:27:09 +0000 Subject: [labnetwork] STS Multiplex DRIE In-Reply-To: References: Message-ID: <3D93FFD1-8B6F-4815-9501-31F5A2DFB81D@nist.gov> We?ve had good luck with Jeff Hawks for our STS ASE DRIE. Jeff Hawks Hawks Technical Services LLC. 2715 Swamp Creek Rd. Green Lane, PA. 18054 C 215-872-0944 Cheers, John John P. Nibarger, Ph.D. Manager, Boulder Micro-fabrication Facility Microfabrication Group Leader (687.10) National Institute of Standards and Technology 325 Broadway, MS 817.03 Boulder, CO 80305 303-497-4575 (phone) 303-497-3042 (fax) john.nibarger at nist.gov From: on behalf of "proma016 at fiu.edu" Date: Friday, July 27, 2018 at 6:59 AM To: "labnetwork at mtl.mit.edu" Subject: [labnetwork] STS Multiplex DRIE Greetings labnetwork Can someone recommend an FSE for starup and service of an early model STS DRIE bosch process Si etcher? Sent from my iPhone On Jul 26, 2018, at 10:06 PM, Paolini, Steven > wrote: Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these systems Represent the best in class for university work. I can?t think of any cons with either platform. Steve Paolini Equipment Dood Harvard University Center for Nanoscale Systems. Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 11 Oxford St. Cambridge, MA 02138 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun Sent: Thursday, July 26, 2018 12:51 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Experience on ICP-RIE Dear Colleagues, We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and Plasma-Therm Apex SLR ICP. Does anyone have experience on these systems? What?s the pros and cons? I would greatly appreciate for your feedback! best, Jun Chen, Ph.D. Nanofabrication scientist, Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh 3700 O'Hara Street, Pittsburgh, PA 15261 T: 412.383.3282 http://www.nano.pitt.edu/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: