[labnetwork] AMT 8100 schematics

[Carsen Kline]

Hi all,

It was good to meet and catch up with many of you at UGIM. Lots of good ideas shared that will no doubt find their way into SNF.  Today, though, it's a 30+ year old etcher we need help with...

We have an Applied Materials 8100 Hexode etcher. The system came with three volumes of manuals, and Volume 3 has all the schematics. We're missing a number of pages from the "Overall schematics" section, specifically pages 7-43 to 7-56 and 7-58 to 7-66.

Does anyone have these missing pages that you might scan and send over?

Many thanks,

Carsen

Carsen Kline
Lab Operations Manager
Stanford Nanofabrication Facility
(650)724-8214
http://snf.stanford.edu<http://snf.stanford.edu/>

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