[labnetwork] Experience on ICP-RIE

[Paolini, Steven]

Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these systems Represent the best in class for university work.
I can't think of any cons with either platform.

Steve Paolini
Equipment Dood
Harvard University Center for Nanoscale Systems.

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun
Sent: Thursday, July 26, 2018 12:51 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Experience on ICP-RIE

Dear Colleagues,
We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and  Plasma-Therm Apex SLR ICP.
Does anyone have experience on these systems? What's the pros and cons?  I would greatly appreciate for your feedback!

best,

Jun Chen, Ph.D.
Nanofabrication scientist,
Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh
3700 O'Hara Street, Pittsburgh, PA 15261
T: 412.383.3282
http://www.nano.pitt.edu/<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nano.pitt.edu_&d=DwMF-g&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=rcBR73_HmJ1YnlhPiz3lpHV6zNZE8DiWyvDcNaBXmLA&s=7UtitOhQns4HNOjOgtfXCIyh2ehYIdyHyMWZTAwp9lM&e=>


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