[labnetwork] STS Multiplex DRIE

[Jim Fraser]

The only one I know of is Gareth Morgan. He has been working with us to solve a downtime issue on our STS ICP RIE system. He has been good to work with and is knowledgeable. His email is: gareth morgan garethmorganctp at yahoo.com<mailto:garethmorganctp at yahoo.com>

Thanks,

James R Fraser
IML Manager
485 CB
Brigham Young University
801-422-4344

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of proma016 at fiu.edu
Sent: Friday, July 27, 2018 3:31 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] STS Multiplex DRIE

Greetings labnetwork

Can someone recommend an FSE for starup and service of an early model STS DRIE bosch process Si etcher?
Sent from my iPhone

On Jul 26, 2018, at 10:06 PM, Paolini, Steven <spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>> wrote:
Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these systems Represent the best in class for university work.
I can’t think of any cons with either platform.

Steve Paolini
Equipment Dood
Harvard University Center for Nanoscale Systems.

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>
www.cns.fas.harvard.edu<http://www.cns.fas.harvard.edu>

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun
Sent: Thursday, July 26, 2018 12:51 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Experience on ICP-RIE

Dear Colleagues,
We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and  Plasma-Therm Apex SLR ICP.
Does anyone have experience on these systems? What’s the pros and cons?  I would greatly appreciate for your feedback!

best,

Jun Chen, Ph.D.
Nanofabrication scientist,
Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh
3700 O'Hara Street, Pittsburgh, PA 15261
T: 412.383.3282
http://www.nano.pitt.edu/<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nano.pitt.edu_&d=DwMF-g&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=rcBR73_HmJ1YnlhPiz3lpHV6zNZE8DiWyvDcNaBXmLA&s=7UtitOhQns4HNOjOgtfXCIyh2ehYIdyHyMWZTAwp9lM&e=>


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