[labnetwork] ALD question

[Stuart Pearce]

Hi,

We are looking to purchase an ALD tool and am now down to the final two possibilities and I was wondering if any of the forum users out there have knowledge/experience (good and bad) of both tools.  If you have a film properties you can share such as roughness, uniformity and particles for materials like SiO2, SiN, Al203 as well that would be very helpful. I’ve already spoken to a few users of both tools so have some idea on them but would now like to broadcast to a wider audience to gather more information.

Tool 1: Picosun R-200 Advanced

Tool 2: Fiji 200 Gen 2

I hope to hear from you soon.

Best Regards, Stuart

Dr. Stuart Pearce
Senior Process Engineer/Cleanroom Manager I Ipswich Research Centre
Tel: +44(0)01473663153 I E-mail: stuart.pearce at huawei.com<mailto:stuart.pearce at huawei.com>
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