From rreger at purdue.edu Tue May 1 09:50:23 2018 From: rreger at purdue.edu (Reger, Ronald K) Date: Tue, 1 May 2018 13:50:23 +0000 Subject: [labnetwork] Air-Showers in the Cleanroom In-Reply-To: <1525143394746.33461@kaust.edu.sa> References: <1525143394746.33461@kaust.edu.sa> Message-ID: <94627ec9abf641a9a0b1497dae811f69@wppexc01.purdue.lcl> Purdue answers below. Thanks, Ron Ron Reger Engineering Manager Birck Nanotechnology Center | Room 2289 | Office: 765.494.6667 | Email: rreger at purdue.edu Wiki: https://wiki.itap.purdue.edu/display/BNCWiki iLabs: https://purdue.ilabsolutions.com/homepage/ ______________________________________________________________ [DP-BirckNanotechCtr-H-BG-RGB] From: labnetwork-bounces at mtl.mit.edu On Behalf Of Ahad Syed Sent: Monday, April 30, 2018 10:57 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Air-Showers in the Cleanroom Dear Colleagues, We have been conducting a feasibility study for installing air showers in our cleanroom at KAUST. Could you please share with us some info regarding your facilities? Cleanroom ISO 6 or 5 (class 1000 or 100) ISO 3, 4, and 5 Area: Total of 25,000 ft^2 Approximate number of users: > 150 Have installed air showers: (Y/N) Yes, one before entering gowning; the second before entering the cleanroom Comments: The first air shower is with shoe covers and bouffant cap. The second air shower is after the complete cleanroom gown is donned. Your responses are highly appreciated. Thanks, Ahad -- Lead Scientist, Safety & Facility Nanofabrication Core Lab 4700 King Abdullah University of Science and Technology 0247 Building 3, Thuwal 23955-6900, Kingdom of Saudi Arabia Tel:+966 12 808 2348 Visit The Core Labs ________________________________ This message and its contents including attachments are intended solely for the original recipient. If you are not the intended recipient or have received this message in error, please notify me immediately and delete this message from your computer system. Any unauthorized use or distribution is prohibited. Please consider the environment before printing this email. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 3988 bytes Desc: image001.jpg URL: From carsen at stanford.edu Tue May 1 10:03:47 2018 From: carsen at stanford.edu (Carsen Kline) Date: Tue, 1 May 2018 14:03:47 +0000 Subject: [labnetwork] Air-Showers in the Cleanroom In-Reply-To: <1525143394746.33461@kaust.edu.sa> References: <1525143394746.33461@kaust.edu.sa> Message-ID: Hello Ahad, For Stanford Nanofabrication Facility (SNF): class 100 (~70%) and class 10 (~30%) 10,000 sq. ft. 200+ monthly users / 500+ annually No air showers Comments: Full cleanroom gown/hood/booties, face mask or beard cover as needed. Shoe covers and hair net worn before entering gowning room. Tacky mats at entrance. No plain paper allowed, wipe-down station for laptops in gowning room. Semi-monthly wet mop throughout, quarterly deep clean throughout, includes wet wipedown/mop of all floors, walls, and ceilings. Best regards, Carsen Carsen Kline Lab Operations Manager Stanford Nanofabrication Facility (650)724-8214 http://snf.stanford.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Ahad Syed Sent: Monday, April 30, 2018 7:57 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Air-Showers in the Cleanroom Dear Colleagues, We have been conducting a feasibility study for installing air showers in our cleanroom at KAUST. Could you please share with us some info regarding your facilities? Cleanroom ISO 6 or 5 (class 1000 or 100) Area: Approximate number of users: Have installed air showers: (Y/N) Comments: Your responses are highly appreciated. Thanks, Ahad -- Lead Scientist, Safety & Facility Nanofabrication Core Lab 4700 King Abdullah University of Science and Technology 0247 Building 3, Thuwal 23955-6900, Kingdom of Saudi Arabia Tel:+966 12 808 2348 Visit The Core Labs ________________________________ This message and its contents including attachments are intended solely for the original recipient. If you are not the intended recipient or have received this message in error, please notify me immediately and delete this message from your computer system. Any unauthorized use or distribution is prohibited. Please consider the environment before printing this email. -------------- next part -------------- An HTML attachment was scrubbed... URL: From agregg at abbiegregg.com Tue May 1 23:06:46 2018 From: agregg at abbiegregg.com (Abbie Gregg) Date: Wed, 2 May 2018 03:06:46 +0000 Subject: [labnetwork] Air-Showers in the Cleanroom- KAUST Message-ID: HI Team, We did not design air showers into the gowning room at KAUST's Nanofab. Data taken in the 1990s through the 2000s indicated that air showers stir up particles from both street clothing and from street clothing under cleanroom garments, particularly dacron polyester cleanroom garments with conductive fibers woven into them. We have found that laminar downflow Class 100 (high to full HEPA coverage at 80 fpm) creates a downward sweep of particles shed by people and their clothing that is much more effective than air showers. Pausing at the stages of gowning to allow this "air washing" of particles to the floor should be part of the gowning process. This is the concept behind the original design and construction of the KAUST nanofab gowning room from 2008 through 2011. I don't know what you are experiencing that makes you think you need air showers in the KAUST Nanofab? We would be curious to know.... Best Regards, Abbie Gregg President Abbie Gregg, Inc. (KAUST Nanofab cleanroom design and construction supervision) 1130 East University Drive, Suite 105 Tempe, Arizona 85281 Phone 480 446-8000 x 107 Cell 480-577-5083 FAX 480-446-8001 email agregg at abbiegregg.com website www.abbiegregg.com CONFIDENTIALITY NOTICE: All information contained in or attached to this email constitutes confidential information belonging to Abbie Gregg, Inc., its affiliates and subsidiaries and/or its clients. This email and any attachments are proprietary and/or confidential and are intended for business use of the addressee(s) only. All other uses or disclosures are strictly prohibited. If the reader is not the intended recipient you are hereby notified that the perusal, copying or dissemination of this email is strictly prohibited. If you have received this communication in error, please notify the sender, and delete all copies of this message and its attachments immediately. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Ahad Syed Sent: Monday, April 30, 2018 7:57 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Air-Showers in the Cleanroom Dear Colleagues, We have been conducting a feasibility study for installing air showers in our cleanroom at KAUST. Could you please share with us some info regarding your facilities? Cleanroom ISO 6 or 5 (class 1000 or 100) Area: Approximate number of users: Have installed air showers: (Y/N) Comments: Your responses are highly appreciated. Thanks, Ahad -- Lead Scientist, Safety & Facility Nanofabrication Core Lab 4700 King Abdullah University of Science and Technology 0247 Building 3, Thuwal 23955-6900, Kingdom of Saudi Arabia Tel:+966 12 808 2348 Visit The Core Labs ________________________________ This message and its contents including attachments are intended solely for the original recipient. If you are not the intended recipient or have received this message in error, please notify me immediately and delete this message from your computer system. Any unauthorized use or distribution is prohibited. Please consider the environment before printing this email. -------------- next part -------------- An HTML attachment was scrubbed... URL: From mcwilliamss at mail.smu.edu Wed May 2 10:28:32 2018 From: mcwilliamss at mail.smu.edu (McWilliams, Scott) Date: Wed, 2 May 2018 14:28:32 +0000 Subject: [labnetwork] Need Schematic for Varian Vacuum Process Control 980-6100 for E-beam system Message-ID: Anyone know where I can purchase or find schematics for the Varian vacuum process controller 980-6100 for an E-beam deposition tool? I couldn't find any sites that had these schematics for sale or download. Thanks, Scott -------------- next part -------------- An HTML attachment was scrubbed... URL: From kurt.kupcho at wisc.edu Wed May 2 16:22:02 2018 From: kurt.kupcho at wisc.edu (Kurt Kupcho) Date: Wed, 2 May 2018 20:22:02 +0000 Subject: [labnetwork] metals in a III-V oxidation furnace Message-ID: Hi all Are there any concerns with allowing gold or other metals into a III-V material oxidation furnace like there is with metals in a Si thermal oxidation furnace? Thank you --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer WCAM 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 [http://wcam.engr.wisc.edu/logos/pics/wcam420x80.png] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 23961 bytes Desc: image001.png URL: From larry.rehn at att.net Wed May 2 16:38:13 2018 From: larry.rehn at att.net (Larry Rehn) Date: Wed, 2 May 2018 20:38:13 +0000 (UTC) Subject: [labnetwork] Senior Research Instrumentation Specialist Job Posting References: <756703848.3492620.1525293493361.ref@mail.yahoo.com> Message-ID: <756703848.3492620.1525293493361@mail.yahoo.com> Hello Colleagues, We are looking to hire an experienced tech to perform R&M and operational support for process and instrumentation equipment in the Texas A&M nanofabrication lab.? The ideal candidate would have some prior experience trouble shooting equipment?in the semiconductor industry. For more information visit:?https://tamus.wd1.myworkdayjobs.com/en-US/TEES_External/job/College-Station-TAMU/Senior-Research-Instrumentation-Specialist_R-003768 Best regards,Larry RehnTechnical ManagerAggieFab Nanofabrication FacilityTexas A&M UniversityCollege Station, Texas979 845-3199 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Job Description-Tech.pdf Type: application/pdf Size: 244317 bytes Desc: not available URL: From bob at eecs.berkeley.edu Wed May 2 17:48:19 2018 From: bob at eecs.berkeley.edu (Robert M. HAMILTON) Date: Wed, 2 May 2018 14:48:19 -0700 Subject: [labnetwork] Air-Showers in the Cleanroom- KAUST In-Reply-To: References: Message-ID: Colleagues, I think the pertinent question re: air showers has to do with what is being done in a lab. If it is ULSI production where yields need to be in the 90% + than every level and technique for reducing particles needs evaluation. For a research facility exploring or making devices devices such as a university or government research lab and air shower makes no sense. In the 24 years the University of California Microlab operated, with a researcher count in the thousands, we never had a complaint that airborne particle counts prevented a research product from yielding enough devices to be relevant. Also note we used Tyvek disposable garments, did not have an air shower, shoe vacuum or other elaborations. When one considers the environments within the tools, PVD, etch, furnaces and lpcvd, Class 100 or better met every need. Robert Hamilton, Retired Robert Hamilton Mobile 510-325-7557 (my personal mobile) E-mail preferred: bob at eecs.berkeley.edu On Tue, May 1, 2018 at 8:06 PM, Abbie Gregg wrote: > HI Team, > > We did not design air showers into the gowning room at KAUST?s Nanofab. > Data taken in the 1990s through the 2000s indicated that air showers stir > up particles from both street clothing and from street clothing under > cleanroom garments, particularly dacron polyester cleanroom garments with > conductive fibers woven into them. We have found that laminar downflow > Class 100 (high to full HEPA coverage at 80 fpm) creates a downward sweep > of particles shed by people and their clothing that is much more effective > than air showers. > > Pausing at the stages of gowning to allow this ?air washing? of particles > to the floor should be part of the gowning process. > > This is the concept behind the original design and construction of the > KAUST nanofab gowning room from 2008 through 2011. > > I don?t know what you are experiencing that makes you think you need air > showers in the KAUST Nanofab? We would be curious to know?. > > Best Regards, > > > > > > Abbie Gregg > > President > > Abbie Gregg, Inc. (KAUST Nanofab cleanroom design and construction > supervision) > > 1130 East University Drive, Suite 105 > > Tempe, Arizona 85281 > > Phone 480 446-8000 x 107 > > Cell 480-577-5083 > > FAX 480-446-8001 > > email agregg at abbiegregg.com > > website www.abbiegregg.com > > > > *CONFIDENTIALITY NOTICE: All information contained in or attached to > this email constitutes confidential information belonging to Abbie Gregg, > Inc., its affiliates and subsidiaries and/or its clients. This email and > any attachments are proprietary and/or confidential and are intended for > business use of the addressee(s) only. All other uses or disclosures are > strictly prohibited. If the reader is not the intended recipient you are > hereby notified that the perusal, copying or dissemination of this email is > strictly prohibited. If you have received this communication in error, > please notify the sender, and delete all copies of this message and its > attachments immediately*. > > > > > > *From:* labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces@ > mtl.mit.edu] *On Behalf Of *Ahad Syed > *Sent:* Monday, April 30, 2018 7:57 PM > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Air-Showers in the Cleanroom > > > > Dear Colleagues, > > > > We have been conducting a feasibility study for installing air showers in > our cleanroom at KAUST. > > Could you please share with us some info regarding your facilities? > > > > Cleanroom ISO 6 or 5 (class 1000 or 100) > > Area: > > Approximate number of users: > > Have installed air showers: (Y/N) > > Comments: > > > > Your responses are highly appreciated. > > > Thanks, > > Ahad > > > > -- > > Lead Scientist, Safety & Facility > Nanofabrication Core Lab > > 4700 King Abdullah University of Science and Technology > 0247 Building 3, Thuwal 23955-6900, Kingdom of Saudi Arabia > Tel:+966 <+966> 12 808 2348 > > Visit The Core Labs > > > ------------------------------ > > This message and its contents including attachments are intended solely > for the original recipient. If you are not the intended recipient or have > received this message in error, please notify me immediately and delete > this message from your computer system. Any unauthorized use or > distribution is prohibited. Please consider the environment before printing > this email. > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From nclay at upenn.edu Wed May 2 22:06:25 2018 From: nclay at upenn.edu (Noah Clay) Date: Wed, 2 May 2018 22:06:25 -0400 Subject: [labnetwork] metals in a III-V oxidation furnace In-Reply-To: References: Message-ID: Hi Kurt, When I worked in industry, we oxidized GaAs/AlGaAs VCSELs before metal dep, converting a high Al-containing AlAs layer to Al-O-As. The concern for us was Au diffusion beyond the device?s contact layers. I do recall that Au and other metals that we used, by themselves, were stable at the oxidation temp of ~500C, especially when compared to gold?s melting point of ~1000C. Assuming that you don?t have another option for metal annealing, I suppose you have to consider that trace Au contamination will occur. However, if it was deposited on the chamber walls, it is unlikely to vaporize at 500C during a subsequent oxidation run. If a small fraction were to break free from the furnace walls, there would be minimal cross-section for diffusing back into your target oxidation layer (considering a high O2 concentration gradient that results in O2 diffusion much faster than Au). After gold annealing, you could mitigate the risk of trace Au diffusion by burning in your furnace at a relatively high temp (e.g., 750C, if your hardware permits) under O2 for a relatively long time (e.g., 4-6 hours) to recondition the furnace for oxidation. My thinking here - with no data - is to promote Au migration towards the end of the tube, downstream from the hot zone or the device location during oxidation. This assumes that Ar or some other gas was flowing during any Au annealing, so that contamination is not ubiquitous in the tube. Good luck, Noah BTW, anyone who reads this needs to register immediately for UGIM: ugim.nano.upenn.edu Sent from my iPhone > On May 2, 2018, at 16:22, Kurt Kupcho wrote: > > Hi all > > Are there any concerns with allowing gold or other metals into a III-V material oxidation furnace like there is with metals in a Si thermal oxidation furnace? > > Thank you > > > --------------------------------------------------- > Kurt Kupcho > Process Engineer/Safety Officer > > WCAM > 1550 Engineering Drive > ECB Room 3110 > Madison, WI 53706 > > E: kurt.kupcho at wisc.edu > T: 608-262-2982 > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From dgrimard at mit.edu Thu May 3 10:48:51 2018 From: dgrimard at mit.edu (Dennis Grimard) Date: Thu, 3 May 2018 14:48:51 +0000 Subject: [labnetwork] Position at MIT Message-ID: <5F7A88260FF94B47B34C0B2E3F56CBCBA31D6C00@OC11EXPO29.exchange.mit.edu> All: There is a new opportunity at MIT.nano for the position of Assistant Director of User Services. Please follow the link to the job description: https://careers.peopleclick.com/careerscp/client_mit/int1069591092/jobDetails/jobDetail.html?jobPostId=12690&localeCode=en-us The posting is for a Ph.D.-level position with at least five years' experience in semiconductor processing and an extensive knowledge of metrology techniques and methods. D Dennis S Grimard, Ph.D Managing Director MIT.nano Massachusetts Institute of Technology 60 Vassar Street, Bldg 39-559 Cambridge, MA 02139 C: (734) 368-7172 EM: dgrimard at mit.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From kmcpeak at lsu.edu Fri May 4 14:19:28 2018 From: kmcpeak at lsu.edu (Kevin McPeak) Date: Fri, 4 May 2018 13:19:28 -0500 Subject: [labnetwork] Uniform temperature hot plates Message-ID: Dear Colleagues, Our cleanroom here at LSU is in need of a high-temperature hot plate (~400 C) with excellent uniformity across the surface, e.g. +/- 5 C. The manufacturers we are currently considering are: - MTIxtl EQ-HP-1515-LD https://www.mtixtl.com/EQ-HP-1515.aspx - Wenesco - https://www.wenesco.com/wenesco-hot-plates - Harry Gestigkeit - http://www.gestigkeit.de/126/precision-hotplates-products-english/precision-hotplate-4500c Any input on the above makes/models or other systems to look at is most appreciated. Price is an issue here. All of these are in the $1500 - $2500 range, so if there is a less expensive option out there I would love to learn about it. Thank you. Regards, Kevin -- Kevin M. McPeak Assistant Professor Louisiana State University Dept. of Chemical Engineering 110 Chemical Engineering Bldg Room 324 S. Stadium Drive Baton Rouge, LA 70803 email: kmcpeak at lsu.edu phone: 225-578-0058 From dave101260 at gmail.com Fri May 4 15:16:00 2018 From: dave101260 at gmail.com (Dave Terry) Date: Fri, 04 May 2018 19:16:00 +0000 Subject: [labnetwork] EV Group 620 Bond Aligner Message-ID: Hello everyone, At MIT Cambridge, we have an EVG 620 Bond Aligner in need of service. Does anyone have a service contact outside of EV Group? The system is about 17 years old, and EVG isn?t very helpful these days with the older tools. Any info is greatly appreciated. -- Best Regards, Dave Terry ??????????????????? Sent from Gmail Mobile on iPhone 5s 617 784 7942 -------------- next part -------------- An HTML attachment was scrubbed... URL: From khbeis at uw.edu Fri May 4 16:38:36 2018 From: khbeis at uw.edu (Michael Khbeis) Date: Fri, 4 May 2018 13:38:36 -0700 Subject: [labnetwork] EV Group 620 Bond Aligner In-Reply-To: References: Message-ID: Dave, We have been using ClassOne Equipment for 3rd party service on our EVGs. Best, Dr. Michael Khbeis Director, Washington Nanofabrication Facility (WNF) National Nanotechnology Coordinated Infrastructure (NNCI) University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (F) 206.221.1681 (C) 443.254.5192 khbeis at uw.edu www.wnf.washington.edu/ > On May 4, 2018, at 12:16 PM, Dave Terry wrote: > > Hello everyone, > > At MIT Cambridge, we have an EVG 620 Bond Aligner in need of service. > > Does anyone have a service contact outside of EV Group? The system is about 17 years old, and EVG isn?t very helpful these days with the older tools. > > Any info is greatly appreciated. > > > > -- > Best Regards, Dave Terry ??????????????????? Sent from Gmail Mobile on iPhone 5s 617 784 7942 > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork From lej at danchip.dtu.dk Fri May 4 17:46:09 2018 From: lej at danchip.dtu.dk (Leif Johansen) Date: Fri, 4 May 2018 21:46:09 +0000 Subject: [labnetwork] EV Group 620 Bond Aligner In-Reply-To: References: Message-ID: I think ClassOne Equipment might be able to help you. http://www.classoneequipment.com Leif From: dave101260 at gmail.com Sent: 4 May 2018 10:10 pm To: ward at mtl.mit.edu; labnetwork at mtl.mit.edu Subject: [labnetwork] EV Group 620 Bond Aligner Hello everyone, At MIT Cambridge, we have an EVG 620 Bond Aligner in need of service. Does anyone have a service contact outside of EV Group? The system is about 17 years old, and EVG isn?t very helpful these days with the older tools. Any info is greatly appreciated. -- Best Regards, Dave Terry ??????????????????? Sent from Gmail Mobile on iPhone 5s 617 784 7942 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jerry.bowser at nist.gov Mon May 7 11:29:47 2018 From: jerry.bowser at nist.gov (Bowser, Jerry (Fed)) Date: Mon, 7 May 2018 15:29:47 +0000 Subject: [labnetwork] Hydrogen Purity for Furnaces Message-ID: Hello Everyone, Here at NIST we are having problems with reliable and timely deliveries of hydrogen. I would like to ask the group what hydrogen purity are you using for your oxidation furnaces and what lead times are you currently seeing? Thanks! ******************************************* Jerry Bowser Assistant Manager for Operations NanoFab Operations Group Center for Nanoscale Science and Technology National Institute of Standards and Technology Phone: (301) 975-8187 -------------- next part -------------- An HTML attachment was scrubbed... URL: From kbarnes at semitorrinc.com Mon May 7 16:46:04 2018 From: kbarnes at semitorrinc.com (Keith Barnes) Date: Mon, 7 May 2018 20:46:04 +0000 Subject: [labnetwork] Hydrogen Purity for Furnaces In-Reply-To: References: Message-ID: <9A797D54-FD48-46BA-8F62-7A731B24D053@semitorrinc.com> But a cheaper grade and use purification Sent from my iPhone On May 7, 2018, at 12:56 PM, Bowser, Jerry (Fed) > wrote: Hello Everyone, Here at NIST we are having problems with reliable and timely deliveries of hydrogen. I would like to ask the group what hydrogen purity are you using for your oxidation furnaces and what lead times are you currently seeing? Thanks! ******************************************* Jerry Bowser Assistant Manager for Operations NanoFab Operations Group Center for Nanoscale Science and Technology National Institute of Standards and Technology Phone: (301) 975-8187 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From manesandeep83 at gmail.com Mon May 7 21:20:22 2018 From: manesandeep83 at gmail.com (Sandeep Mane) Date: Tue, 08 May 2018 01:20:22 +0000 Subject: [labnetwork] Hydrogen Purity for Furnaces In-Reply-To: <9A797D54-FD48-46BA-8F62-7A731B24D053@semitorrinc.com> References: <9A797D54-FD48-46BA-8F62-7A731B24D053@semitorrinc.com> Message-ID: How to keep check on purifier health. On Tue, 8 May 2018, 5:14 am Keith Barnes, wrote: > But a cheaper grade and use purification > > Sent from my iPhone > > On May 7, 2018, at 12:56 PM, Bowser, Jerry (Fed) > wrote: > > Hello Everyone, > > > > Here at NIST we are having problems with reliable and timely deliveries of > hydrogen. I would like to ask the group what hydrogen purity are you using > for your oxidation furnaces and what lead times are you currently seeing? > > > > Thanks! > > > > ******************************************* > > Jerry Bowser > > Assistant Manager for Operations > > NanoFab Operations Group > > Center for Nanoscale Science and Technology > > National Institute of Standards and Technology > > Phone: (301) 975-8187 > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From myoung6 at nd.edu Tue May 8 08:39:21 2018 From: myoung6 at nd.edu (Michael Young) Date: Tue, 8 May 2018 08:39:21 -0400 Subject: [labnetwork] Hydrogen Purity for Furnaces In-Reply-To: References: <9A797D54-FD48-46BA-8F62-7A731B24D053@semitorrinc.com> Message-ID: An HTML attachment was scrubbed... URL: From mweiler at andrew.cmu.edu Tue May 8 09:01:38 2018 From: mweiler at andrew.cmu.edu (Mark Weiler) Date: Tue, 8 May 2018 13:01:38 +0000 Subject: [labnetwork] Hydrogen Purity for Furnaces In-Reply-To: References: <9A797D54-FD48-46BA-8F62-7A731B24D053@semitorrinc.com>, Message-ID: Hi Jerry, One could invest in the long term and buy a purification system... pricey, but you?d have to figure out whether the return is worth the expense... Example: https://www.entegris.com/shop/en/USD/products/gas-filtration-and-purification/gas-purification-systems/aeronex-gas-purification-systems/Aeronex-HX-Series-Gas-Purification-Systems/p/AeronexHXSeriesGasPurificationSystems Best, Mark Mark Weiler Fab Equipment & Facilities Manager Carnegie Mellon Nanofabrication Facility Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.2471 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu On May 8, 2018, at 8:31 AM, Sandeep Mane > wrote: How to keep check on purifier health. On Tue, 8 May 2018, 5:14 am Keith Barnes, > wrote: But a cheaper grade and use purification Sent from my iPhone On May 7, 2018, at 12:56 PM, Bowser, Jerry (Fed) > wrote: Hello Everyone, Here at NIST we are having problems with reliable and timely deliveries of hydrogen. I would like to ask the group what hydrogen purity are you using for your oxidation furnaces and what lead times are you currently seeing? Thanks! ******************************************* Jerry Bowser Assistant Manager for Operations NanoFab Operations Group Center for Nanoscale Science and Technology National Institute of Standards and Technology Phone: (301) 975-8187 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From spaolini at cns.fas.harvard.edu Tue May 8 11:34:18 2018 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Tue, 8 May 2018 15:34:18 +0000 Subject: [labnetwork] Hydrogen Purity for Furnaces In-Reply-To: References: Message-ID: Jerry, We have switched over to a hydrogen generator that is sized at 40% more than our consumption in a full flow, worst case scenario for future expansion. We have had very good performance over the 7 years it has been in service. We keep a cylinder piped in with check valves to carry over the duty if the generator needs service. The purity is an astonishing 6 "nines". I consider it a very good investment and time saver. You will need a DI water loop to feed it. Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 11 Oxford St. Cambridge, MA 02138 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bowser, Jerry (Fed) Sent: Monday, May 07, 2018 11:30 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Hydrogen Purity for Furnaces Hello Everyone, Here at NIST we are having problems with reliable and timely deliveries of hydrogen. I would like to ask the group what hydrogen purity are you using for your oxidation furnaces and what lead times are you currently seeing? Thanks! ******************************************* Jerry Bowser Assistant Manager for Operations NanoFab Operations Group Center for Nanoscale Science and Technology National Institute of Standards and Technology Phone: (301) 975-8187 -------------- next part -------------- An HTML attachment was scrubbed... URL: From lvchang at Central.UH.EDU Tue May 8 15:30:03 2018 From: lvchang at Central.UH.EDU (Chang, Long) Date: Tue, 8 May 2018 19:30:03 +0000 Subject: [labnetwork] Antistick coating for nanoimprint mold Message-ID: <6DFF06C1-F74B-4F0E-AB43-933CD3576AAD@cougarnet.uh.edu> Hi All, Does anyone provide a service to coat an antistick layer on a 4" oxide nanoimprint mold? Thanks, Long Chang Manager UH Nanofabrication Facility University of Houston 3605 Cullen Blvd, Entrance 14 Room E1007A, SERC Bldg 545 Houston, TX 77204-5062 -------------- next part -------------- An HTML attachment was scrubbed... URL: From bob.geil at unc.edu Thu May 10 16:20:34 2018 From: bob.geil at unc.edu (Geil, Bob) Date: Thu, 10 May 2018 20:20:34 +0000 Subject: [labnetwork] Cryo Si Etching Message-ID: I'm wondering if anyone has worked with Cryogenic ICP etch systems for Si processing. Oxford Instruments is the only vendor I could find that manufactures these systems. There also seems to be only a couple of university micro/nanofab facilities with such a system: Georgia Tech and U. Michigan (I'm sure I missed a few others...) So, my questions are: does anyone know of other vendors that manufacture cryo ICP etch systems, and is there a particular reason these systems seen to be unpopular? Best regards, Bob Geil Bob Geil, PhD Cleanroom Manager, CHANL Chapel Hill Analytical and Nanofabrication Laboratory Department of Applied Physical Sciences University of North Carolina 223 Chapman Hall, CB# 3216 Chapel Hill, NC 27599 Phone: (919) 843-6555 From Vincent.Luciani at nist.gov Fri May 11 08:37:41 2018 From: Vincent.Luciani at nist.gov (Luciani, Vincent (Fed)) Date: Fri, 11 May 2018 12:37:41 +0000 Subject: [labnetwork] Cryo Si Etching In-Reply-To: References: Message-ID: Hello Bob, We have a Cryogenic ICP system. There are folks in this group that can give a much more detailed answer than I can but from the NanoFab Manager's view point I can state the following: The most obvious is that it enables very high power density and other more exotic etches. You can also get vertical sidewalls in thick dielectrics which has been very useful to our friends near us at the NIH. It is a nice RIE research feature and What I don't like: Because of the hardware design that provides the cooling, it is much more finicky than a basic flat platen or electrostatic chuck. Keeping the helium leak-rate from the backside low requires time and effort from the equipment engineers. Even for room temperature etches, the cryogenic chuck adds more failure modes in getting any wafer in then out. It requires frequent staff intervention to help users with wafer transport and positioning problems. Non-flat wafers present a significant problem. It is a matter of how important it is for your users to have the process capability vs your ability to maintain uptime on the tool to everyone's satisfaction. I will gladly connect you to our RIE engineer and/or our Equipment Engineer if you like. Vincent K. Luciani Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, Stop 6201 Gaithersburg, MD 20899-6201 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Geil, Bob Sent: Thursday, May 10, 2018 4:21 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cryo Si Etching I'm wondering if anyone has worked with Cryogenic ICP etch systems for Si processing. Oxford Instruments is the only vendor I could find that manufactures these systems. There also seems to be only a couple of university micro/nanofab facilities with such a system: Georgia Tech and U. Michigan (I'm sure I missed a few others...) So, my questions are: does anyone know of other vendors that manufacture cryo ICP etch systems, and is there a particular reason these systems seen to be unpopular? Best regards, Bob Geil Bob Geil, PhD Cleanroom Manager, CHANL Chapel Hill Analytical and Nanofabrication Laboratory Department of Applied Physical Sciences University of North Carolina 223 Chapman Hall, CB# 3216 Chapel Hill, NC 27599 Phone: (919) 843-6555 From mcwilliamss at mail.smu.edu Fri May 11 09:21:53 2018 From: mcwilliamss at mail.smu.edu (McWilliams, Scott) Date: Fri, 11 May 2018 13:21:53 +0000 Subject: [labnetwork] Cryo Si Etching In-Reply-To: References: Message-ID: Hello Bob, It has been many years since I've done deep Si etching, but STS has a good installed base for such tools. It seems they are still selling these tools, http://www.spts.com/Products/Plasma-Etch/Si-DRIE. Regards, Scott -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Geil, Bob Sent: Thursday, May 10, 2018 3:21 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cryo Si Etching I'm wondering if anyone has worked with Cryogenic ICP etch systems for Si processing. Oxford Instruments is the only vendor I could find that manufactures these systems. There also seems to be only a couple of university micro/nanofab facilities with such a system: Georgia Tech and U. Michigan (I'm sure I missed a few others...) So, my questions are: does anyone know of other vendors that manufacture cryo ICP etch systems, and is there a particular reason these systems seen to be unpopular? Best regards, Bob Geil Bob Geil, PhD Cleanroom Manager, CHANL Chapel Hill Analytical and Nanofabrication Laboratory Department of Applied Physical Sciences University of North Carolina 223 Chapman Hall, CB# 3216 Chapel Hill, NC 27599 Phone: (919) 843-6555 From spaolini at cns.fas.harvard.edu Fri May 11 12:17:19 2018 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Fri, 11 May 2018 16:17:19 +0000 Subject: [labnetwork] Cryo Si Etching In-Reply-To: References: Message-ID: Vince, We have a new system with the same capabilities but our users have not used the cryogenic temperature capabilities as of yet. Your response is interesting to me since it is a snapshot of what could come our way in the future. I realize that we are not supposed to be specific on this network regarding vendor brands but does your ICP vendor begin with an "O" end in a "D" and have an "XFOR" in the middle :)? Best regards Equipment Dood Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 11 Oxford St. Cambridge, MA 02138 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Luciani, Vincent (Fed) Sent: Friday, May 11, 2018 8:38 AM To: Geil, Bob; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Cryo Si Etching Hello Bob, We have a Cryogenic ICP system. There are folks in this group that can give a much more detailed answer than I can but from the NanoFab Manager's view point I can state the following: The most obvious is that it enables very high power density and other more exotic etches. You can also get vertical sidewalls in thick dielectrics which has been very useful to our friends near us at the NIH. It is a nice RIE research feature and What I don't like: Because of the hardware design that provides the cooling, it is much more finicky than a basic flat platen or electrostatic chuck. Keeping the helium leak-rate from the backside low requires time and effort from the equipment engineers. Even for room temperature etches, the cryogenic chuck adds more failure modes in getting any wafer in then out. It requires frequent staff intervention to help users with wafer transport and positioning problems. Non-flat wafers present a significant problem. It is a matter of how important it is for your users to have the process capability vs your ability to maintain uptime on the tool to everyone's satisfaction. I will gladly connect you to our RIE engineer and/or our Equipment Engineer if you like. Vincent K. Luciani Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, Stop 6201 Gaithersburg, MD 20899-6201 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Geil, Bob Sent: Thursday, May 10, 2018 4:21 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cryo Si Etching I'm wondering if anyone has worked with Cryogenic ICP etch systems for Si processing. Oxford Instruments is the only vendor I could find that manufactures these systems. There also seems to be only a couple of university micro/nanofab facilities with such a system: Georgia Tech and U. Michigan (I'm sure I missed a few others...) So, my questions are: does anyone know of other vendors that manufacture cryo ICP etch systems, and is there a particular reason these systems seen to be unpopular? Best regards, Bob Geil Bob Geil, PhD Cleanroom Manager, CHANL Chapel Hill Analytical and Nanofabrication Laboratory Department of Applied Physical Sciences University of North Carolina 223 Chapman Hall, CB# 3216 Chapel Hill, NC 27599 Phone: (919) 843-6555 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork From Milan.Begliarbekov at asrc.cuny.edu Fri May 11 14:18:59 2018 From: Milan.Begliarbekov at asrc.cuny.edu (Milan Begliarbekov) Date: Fri, 11 May 2018 18:18:59 +0000 Subject: [labnetwork] Laundry Machines for Clean Room Suits Message-ID: Hi All, Does anyone have experience with washing / drying their own clean room suits? Are there good specs out there for the soap, types of washing and drying machines, the requirements for the water to those machines? Also are there some manufacturers for the washing / drying machines that are good for this purpose? Laundry SOP's would also be helpful. Thank you for the help, Milan Begliarbekov, Ph.D. NanoFabrication Manager CUNY Advanced Science Research Center -------------- next part -------------- An HTML attachment was scrubbed... URL: From Vincent.Luciani at nist.gov Mon May 14 09:43:45 2018 From: Vincent.Luciani at nist.gov (Luciani, Vincent (Fed)) Date: Mon, 14 May 2018 13:43:45 +0000 Subject: [labnetwork] Laundry Machines for Clean Room Suits In-Reply-To: References: Message-ID: Hello Milan, I initiated a discussion thread about a year ago regarding cleanroom garments. Below, is the summary I made back then. It might save you some leg work. Eventually, we decided to stay with a commercial service. We conducted extensive market research about the plans and options available and learned that many different plans and options are available and, as usual, "the devil is in the details". We re-competed the contract with detailed provisions stipulating the service we required. Award is pending. Laundering our own was not the answer for us, but is for some. We don't have access to a student body labor pool, nor an ideal spot for the infrastructure. To All: By the way, topics like these always come up at the UGIM, especially in the Bootie Camp on Sunday morning. If you have not registered for the UGIM yet, I encourage you to do so here: REGISTER FOR UGIM Good Luck, Vince Vincent K. Luciani Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, Stop 6201 Gaithersburg, MD 20899-6201 >From May 18, 2017 Hello All, Thanks for all the great responses. I very briefly summarized them in the table below. Lab Solution Comments NIST CNST NanoFab Laundry service Cycled weekly, significant problem with replacement cost, about 100 sets/week University of Louisville Self-laundered No significant problems University of Wisconsin Self-laundered Owns their garments laundered in their HEPA filtered washer and dryer University of CA, Berkeley Tyvek User replaces their own regularly Cornell Nanoscale Facility Laundry service Had a problem, reduced inspection criteria to control replacement costs Draper Labs Laundry service 60 users. Vendor offered insurance that proved cost effective University of Delaware Laundry service Cycled out every two weeks, also some problems with cost of replacing damaged goods University of Washington Laundry service Had a similar experience to NIST. Switched vendors and it got better. UCSB Nanofabrication Facility Laundry service Large volume. Found better, cheaper service from a local small business instead of the big guys University of Pennsylvania Laundry service Suffering similar experience as NIST. Working with vendor to try to control costs. MIT Lincoln Laboratory Laundry service Switched to Alltex fiber suits. Just as clean as Gore-Tex University of Utah Laundry service Owns their garments, laundered by contractor every two weeks. I am not sure what we will do yet as we are trying to negotiate with the vendor. We reduced to the lowest inspection criteria but are still having problems, for example booties with a piece of tape stuck to them pulled as defective, then it takes them 8 weeks to replace it. We now require all rejected garments be returned to us for inspection. We then inspect all discarded garments ourselves in order to train the vendor on what constitutes a defect. It is a painful process. Disposable garments are in our future until and if we can find a better solution. Thanks again, Vince From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Milan Begliarbekov Sent: Friday, May 11, 2018 2:19 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Laundry Machines for Clean Room Suits Hi All, Does anyone have experience with washing / drying their own clean room suits? Are there good specs out there for the soap, types of washing and drying machines, the requirements for the water to those machines? Also are there some manufacturers for the washing / drying machines that are good for this purpose? Laundry SOP's would also be helpful. Thank you for the help, Milan Begliarbekov, Ph.D. NanoFabrication Manager CUNY Advanced Science Research Center -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Mon May 14 10:50:18 2018 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Mon, 14 May 2018 14:50:18 +0000 Subject: [labnetwork] Laundry Machines for Clean Room Suits In-Reply-To: References: Message-ID: We have our own front loading washer for washing suits. The washer is placed in the chase area of our cleanroom. and we use a detergent with DI water. They are air dried in our chase since it has great air flow. Cheers! Julia Aebersold Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Milan Begliarbekov Sent: Friday, May 11, 2018 2:19 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Laundry Machines for Clean Room Suits Hi All, Does anyone have experience with washing / drying their own clean room suits? Are there good specs out there for the soap, types of washing and drying machines, the requirements for the water to those machines? Also are there some manufacturers for the washing / drying machines that are good for this purpose? Laundry SOP's would also be helpful. Thank you for the help, Milan Begliarbekov, Ph.D. NanoFabrication Manager CUNY Advanced Science Research Center -------------- next part -------------- An HTML attachment was scrubbed... URL: From nclay at upenn.edu Mon May 14 23:08:16 2018 From: nclay at upenn.edu (Noah Clay) Date: Mon, 14 May 2018 23:08:16 -0400 Subject: [labnetwork] UGIM 2018 Final Program. Message-ID: Dear All, I?m looking forward to seeing you in Philadelphia next month at UGIM 2018. We have put together a very strong program that is now finalized. Please visit the following link (click on the Conference Program drop-down) for more information: https://ugim.nano.upenn.edu/ Kind regards, Noah Clay & Vincent Luciani Sent from my iPhone -------------- next part -------------- An HTML attachment was scrubbed... URL: From dcchrist at wisc.edu Tue May 15 08:53:48 2018 From: dcchrist at wisc.edu (Daniel Christensen) Date: Tue, 15 May 2018 12:53:48 +0000 Subject: [labnetwork] Laundry Machines for Clean Room Suits In-Reply-To: References: Message-ID: We do our own laundry at the University of Wisconsin. Our washer and dryer are commercial grade systems with stainless steel drums. The systems are located in a non-cleanroom space adjacent to the gowning area. The washing machine is connected to our building's RO water system. This is NOT our 18M-ohm processing DI water. The laundry water has been thru the RO system, has a 0.2 micron filter, and a 254nm UV lamp. It typically is something like 1M-ohm. The dryer has a 2ft by 2ft HEPA filter on the air intake. We pay undergraduate students McDonald's wages to move the garments thru laundry. By far the biggest time requirements is to fold the garments prior to placing them back in the gowning area. The folding is done on a counter top next to the dryer. We use a liquid soap without bleach and I'm not sure about other spec's for it. We don't have any measurement mechanisms in place to monitor the particle count of the garments coming out of the laundry cycle but we have not had any complaints about yield issues. Drawbacks to this approach are that we have to initially buy the garment and we have to repair the garments (lots of zipper and bootie repairs). Dan Christensen From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Milan Begliarbekov Sent: Friday, May 11, 2018 1:19 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Laundry Machines for Clean Room Suits Hi All, Does anyone have experience with washing / drying their own clean room suits? Are there good specs out there for the soap, types of washing and drying machines, the requirements for the water to those machines? Also are there some manufacturers for the washing / drying machines that are good for this purpose? Laundry SOP's would also be helpful. Thank you for the help, Milan Begliarbekov, Ph.D. NanoFabrication Manager CUNY Advanced Science Research Center -------------- next part -------------- An HTML attachment was scrubbed... URL: From na2661 at columbia.edu Thu May 17 11:19:33 2018 From: na2661 at columbia.edu (Nava Ariel-Sternberg) Date: Thu, 17 May 2018 11:19:33 -0400 Subject: [labnetwork] MKS MFCs vendors? Message-ID: <001f01d3edf2$762a0450$627e0cf0$@columbia.edu> Dear all, Our N2 MFC for the Cambridge ALD died. We contacted both MKS and the representing company (currently Veeco). MKS are not getting back to us and from Veeco we got an outrageous price quotation for a different range MFC and a recommendation to upgrade the ALD system for several tens of thousands of dollars so it can match their currently available MFCs? Does anyone have a recommended alternative for these MFCs? It?s a 100SCCM range N2 MFC. Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Facilities Columbia University 530 w120th st., NY 10027 Room 1015/MC 8903 Office: 212-854-9927 Cell: 201-562-7600 ? -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 68179 bytes Desc: not available URL: From rdevito at draper.com Thu May 17 17:28:12 2018 From: rdevito at draper.com (DeVito, Richard) Date: Thu, 17 May 2018 21:28:12 +0000 Subject: [labnetwork] MKS MFCs vendors? In-Reply-To: <001f01d3edf2$762a0450$627e0cf0$@columbia.edu> References: <001f01d3edf2$762a0450$627e0cf0$@columbia.edu> Message-ID: <5e3606872bda4378b15cbf231456b9a3@draper.com> Try coastal instrument out of N.C. Rich DeVito Principle Member Technical Staff Group Leader Microfabrication Lab Draper 555 Technology Square, Cambridge, MA 02139 Phone: 617-258-3819 www.draper.com From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg Sent: Thursday, May 17, 2018 11:20 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] MKS MFCs vendors? Dear all, Our N2 MFC for the Cambridge ALD died. We contacted both MKS and the representing company (currently Veeco). MKS are not getting back to us and from Veeco we got an outrageous price quotation for a different range MFC and a recommendation to upgrade the ALD system for several tens of thousands of dollars so it can match their currently available MFCs? Does anyone have a recommended alternative for these MFCs? It?s a 100SCCM range N2 MFC. Thanks, Nava [cid:image001.jpg at 01D3EE04.6D8B9360] Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Facilities Columbia University 530 w120th st., NY 10027 Room 1015/MC 8903 Office: 212-854-9927 Cell: 201-562-7600 ? ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 68179 bytes Desc: image001.jpg URL: From kjvowen at lnf.umich.edu Thu May 17 17:30:44 2018 From: kjvowen at lnf.umich.edu (Kevin Owen) Date: Thu, 17 May 2018 17:30:44 -0400 Subject: [labnetwork] MKS MFCs vendors? In-Reply-To: <001f01d3edf2$762a0450$627e0cf0$@columbia.edu> References: <001f01d3edf2$762a0450$627e0cf0$@columbia.edu> Message-ID: Nava, I usually get my MFCs (MKS and others) calibrated/refurbed/etc by Coastal Instruments (http://mfchelp.com/) with good results. I believe they sell MFCs (at least refurbished ones) as well, calibrated to whatever spec you need. They may also be able to refurbish your dead one. -Kevin On Thu, May 17, 2018 at 11:19 AM, Nava Ariel-Sternberg wrote: > Dear all, > > > > Our N2 MFC for the Cambridge ALD died. We contacted both MKS and the > representing company (currently Veeco). MKS are not getting back to us and > from Veeco we got an outrageous price quotation for a different range MFC > and a recommendation to upgrade the ALD system for several tens of > thousands of dollars so it can match their currently available MFCs? > > > > Does anyone have a recommended alternative for these MFCs? It?s a 100SCCM > range N2 MFC. > > > > Thanks, > > Nava > > > > > > Nava Ariel-Sternberg, Ph.D. > > Director of CNI Shared Facilities > > Columbia University > > 530 w120th st., NY 10027 > > Room 1015/MC 8903 > > Office: 212-854-9927 > > Cell: 201-562-7600 > > > > ? > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- Kevin Owen Senior Engineer in Research Operations Group, Lurie Nanofabrication Facility University of Michigan (734) 545-4014 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 68179 bytes Desc: not available URL: From schweig at umich.edu Fri May 18 05:56:17 2018 From: schweig at umich.edu (Dennis Schweiger) Date: Fri, 18 May 2018 05:56:17 -0400 Subject: [labnetwork] MKS MFCs vendors? Message-ID: Nava, good morning. You might also want to try Critical Systems, Inc. https://www.criticalsystemsinc.com/ They may have exactly what you need, and could provide support for your existing hardware set. Dennis Schweiger Facilities Manager University of Michigan/LNF 734.647.2055 Ofc On Thu, May 17, 2018 at 11:19 AM, Nava Ariel-Sternberg wrote: > Dear all, > > > > Our N2 MFC for the Cambridge ALD died. We contacted both MKS and the > representing company (currently Veeco). MKS are not getting back to us and > from Veeco we got an outrageous price quotation for a different range MFC > and a recommendation to upgrade the ALD system for several tens of > thousands of dollars so it can match their currently available MFCs? > > > > Does anyone have a recommended alternative for these MFCs? It?s a 100SCCM > range N2 MFC. > > > > Thanks, > > Nava > > > > > > Nava Ariel-Sternberg, Ph.D. > > Director of CNI Shared Facilities > > Columbia University > > 530 w120th st., NY 10027 > > Room 1015/MC 8903 > > Office: 212-854-9927 > > Cell: 201-562-7600 > > > > ? > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 68179 bytes Desc: not available URL: From olinx034 at umn.edu Fri May 18 08:07:00 2018 From: olinx034 at umn.edu (Gary Olin) Date: Fri, 18 May 2018 07:07:00 -0500 Subject: [labnetwork] MKS MFCs vendors? In-Reply-To: <001f01d3edf2$762a0450$627e0cf0$@columbia.edu> References: <001f01d3edf2$762a0450$627e0cf0$@columbia.edu> Message-ID: Hi Nava, I suggest Coastal instruments out of Burgaw, NC or Semiflow Engineering out of Sunnyvale, CA to repair your MFC. I have that machine here, never suffered a MFC failure but have had plenty of events with the control box that I have so far successfully repaired. If your MFC tests good I would suspect the +-15 volt power to the MFC from the Control box. Let me know if you need more help, Gary Gary Olin Equipment Maintenance Minnesota Nano Center University of Minnesota olinx034 at umn.edu (612) 625-9780 On Thu, May 17, 2018 at 10:19 AM, Nava Ariel-Sternberg wrote: > Dear all, > > > > Our N2 MFC for the Cambridge ALD died. We contacted both MKS and the > representing company (currently Veeco). MKS are not getting back to us and > from Veeco we got an outrageous price quotation for a different range MFC > and a recommendation to upgrade the ALD system for several tens of > thousands of dollars so it can match their currently available MFCs? > > > > Does anyone have a recommended alternative for these MFCs? It?s a 100SCCM > range N2 MFC. > > > > Thanks, > > Nava > > > > > > Nava Ariel-Sternberg, Ph.D. > > Director of CNI Shared Facilities > > Columbia University > > 530 w120th st., NY 10027 > > Room 1015/MC 8903 > > Office: 212-854-9927 > > Cell: 201-562-7600 > > > > ? > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 68179 bytes Desc: not available URL: From fouad.karouta at anu.edu.au Sun May 20 23:00:07 2018 From: fouad.karouta at anu.edu.au (Fouad Karouta) Date: Mon, 21 May 2018 03:00:07 +0000 Subject: [labnetwork] HF Vapour Setup Message-ID: Dear all, We have an AMMT HF vapour setup for up to 4 " wafer size. Recently we are experiencing problems not being able to apply a voltage on the electro-static chuck to hold the wafer. We tried to contact AMMT in Germany (2 emails and 3 phone calls talking with an administrator) but we never got any feedback/reply from an engineer. Has anyone experience with HF vapour setup? I wonder if someone has established contacts with someone from AMMT. Also has anyone good experience with other possible suppliers of HF vapour setup? Thank you, Fouad Karouta ************************************* Manager ANFF ACT Node Australian National Fabrication Facility Research School of Physics and Engineering L. Huxley Building (#56), Mills Road, Room 4.02 Australian National University ACT 2601, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au http://anff-act.anu.edu.au/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Mon May 21 10:59:53 2018 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Mon, 21 May 2018 14:59:53 +0000 Subject: [labnetwork] HF Vapour Setup In-Reply-To: References: Message-ID: We have the SPTS Microetch HF Vapor System, but it does not use an electrostatic chuck. Wafers sit on top of pins or we have a fixture that holds individual samples. Cheers! Julia Aebersold Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Fouad Karouta Sent: Sunday, May 20, 2018 11:00 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] HF Vapour Setup Dear all, We have an AMMT HF vapour setup for up to 4 " wafer size. Recently we are experiencing problems not being able to apply a voltage on the electro-static chuck to hold the wafer. We tried to contact AMMT in Germany (2 emails and 3 phone calls talking with an administrator) but we never got any feedback/reply from an engineer. Has anyone experience with HF vapour setup? I wonder if someone has established contacts with someone from AMMT. Also has anyone good experience with other possible suppliers of HF vapour setup? Thank you, Fouad Karouta ************************************* Manager ANFF ACT Node Australian National Fabrication Facility Research School of Physics and Engineering L. Huxley Building (#56), Mills Road, Room 4.02 Australian National University ACT 2601, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au http://anff-act.anu.edu.au/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From F.W.A.Dirne at tudelft.nl Tue May 22 03:04:23 2018 From: F.W.A.Dirne at tudelft.nl (Frank Dirne - TNW) Date: Tue, 22 May 2018 07:04:23 +0000 Subject: [labnetwork] HF Vapour Setup In-Reply-To: References: Message-ID: <78cd7aa043ae490a919672fa883540d8@tudelft.nl> Idonus has a similar set-up. Recently we had a failure in the electrostatic chuck and after returning it to Idonus we had a repaired chuck within 7 working days. best regards / met vriendelijke groeten, Frank Dirne Managing Director Kavli Nanolab Delft University of Technology Lorentzweg 1, 2628 CJ Delft TNW (bldg 22) - room D121 Phone: +31 (0)15 27 82357 / +31 614330507 email: F.W.A.Dirne at tudelft.nl secretary: +31 (0)15 27 82898 website: www.qn.tudelft.nl/KN [cid:BE01F5A2-838B-40F8-A7BA-0A109001FFB3] Fank Dirne From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Fouad Karouta Sent: maandag 21 mei 2018 5:00 To: labnetwork at mtl.mit.edu Subject: [labnetwork] HF Vapour Setup Dear all, We have an AMMT HF vapour setup for up to 4 " wafer size. Recently we are experiencing problems not being able to apply a voltage on the electro-static chuck to hold the wafer. We tried to contact AMMT in Germany (2 emails and 3 phone calls talking with an administrator) but we never got any feedback/reply from an engineer. Has anyone experience with HF vapour setup? I wonder if someone has established contacts with someone from AMMT. Also has anyone good experience with other possible suppliers of HF vapour setup? Thank you, Fouad Karouta ************************************* Manager ANFF ACT Node Australian National Fabrication Facility Research School of Physics and Engineering L. Huxley Building (#56), Mills Road, Room 4.02 Australian National University ACT 2601, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au http://anff-act.anu.edu.au/ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 17854 bytes Desc: image001.png URL: From JUC48 at pitt.edu Tue May 22 09:35:35 2018 From: JUC48 at pitt.edu (Chen, Jun) Date: Tue, 22 May 2018 13:35:35 +0000 Subject: [labnetwork] Open position: Technical Director PINSE - University of Pittsburgh Message-ID: Dear Colleagues, A new position of technical director at University of Pittsburgh Nanofab is now open. Please help spread the word. The link of this position is here: https://www.pittsource.com/postings/158504 http://www.nano.pitt.edu/ Description of the job: Job Type Faculty Position Title Technical Director PINSE Department Name 23204-Mechanical Engineering and Materials Science Position Number 0133282 Position Details The Technical Director will be responsible for the management, smooth operation and development of the nanofabrication and characterization facility (NFCF).This includes the hiring, training and supervision of facility personnel; determining responsibilities of assigned staff positions to accomplish service and growth objectives; budget allocation of resources; billing for services rendered; establishing policies for effective operation of the facility; and assisting in securing funds for the expansion of PINSE/NFCF capabilities. The technical director is also expected to provide direct user support in one of the four core areas of NFCF services (nanolithography, film technology, electron microscopy, or spectroscopy). The Technical Director will report directly to the Academic Director of PINSE and will be expected to manage the NFCF?s scientific and support staff with the goals of (1) enhancing the strengths and visibility of existing multidisciplinary staff and user research programs; (2) identifying new directions that are strategically aligned with PINSE/NFCF mission; (3) enabling a world-class user program with an engaged, satisfied, and diverse user community; (4) promoting interactions with other programmatic Centers and user facilities; (5) interfacing effectively with the University of Pittsburgh educational programs in nanoscience and technology;; and (6) ensuring high standards in Environmental, Safety, and Health and quality assurance for all of thePINSE/NFCF?s activities. Requirements & Minimum Qualifications ? Elements Ph.D. degree in science or engineering and extensive experience and expertise in materials characterization and/or micro-nano fabrication. Demonstrated experience in management. Clean room experience in performing research would be an asset. Application Process Qualified applicants should submit their applications electronically to pinsesearch at pitt.edu. The application should include the following materials in PDF form: a curriculum vitae, a 1-2 page description of work/research experience in a clean room environment and in nanoscale characterization, and three letters of reference. Review of applications will begin on May 28, 2018 and continue until the position is filled. The University of Pittsburgh is an EEO/ AA/ M/F/Vets/Disabled employer. Child Protection Clearances The following PA Act 153 clearances and background checks may be required prior to commencement of employment and as a condition of continued employment: PA State Police Criminal Record Check, FBI Criminal Record Check, PA Child Abuse History Clearance. Date Posted 05/15/2018 Open Until Filled No Anticipated Application Deadline (Close date) 06/04/2018 best, Jun Chen, Ph.D. Nanofabrication scientist, Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh 3700 O'Hara Street, Pittsburgh, PA 15261 T: 412.383.3282 http://www.nano.pitt.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From kmcpeak at lsu.edu Tue May 22 13:15:32 2018 From: kmcpeak at lsu.edu (Kevin McPeak) Date: Tue, 22 May 2018 12:15:32 -0500 Subject: [labnetwork] MET ONE 227-B calibration Message-ID: Dear Colleagues, Here at the LSU cleanroom we have a MET ONE 227-B particle analyzer that we need to calibrate. We used to have Hach do this but our administrator tells me that Hach is now Beckman and they won't calibrate our model anymore. Does anyone have suggestions for 3rd party calibration companies for this model? I can Google around but I figured it wise to ask the list first. Thanks. Regards, Kevin -- Kevin McPeak Assistant Professor Department of Chemical Engineering Louisiana State University email: kmcpeak at lsu.edu phone: 225-578-0058 -------------- next part -------------- An HTML attachment was scrubbed... URL: From lvchang at Central.UH.EDU Tue May 22 16:20:50 2018 From: lvchang at Central.UH.EDU (Chang, Long) Date: Tue, 22 May 2018 20:20:50 +0000 Subject: [labnetwork] Sputtering LiPON Message-ID: <49907DA7-57E5-4A7C-95C4-3EE600304D62@cougarnet.uh.edu> Hi All, We have a new group that is interested in sputtering 1-10 microns of a ceramic named LiPON (Lithium Phosphorus Oxynitride). From my conversation with them so far, they know very little about what they need to do. Does anyone have experience with this material? Any concerns I should consider? What's the best way to process this material? Thanks, Long From michael.hume at ualberta.ca Tue May 22 16:59:56 2018 From: michael.hume at ualberta.ca (Michael Hume) Date: Tue, 22 May 2018 14:59:56 -0600 Subject: [labnetwork] HF Vapour Setup In-Reply-To: <78cd7aa043ae490a919672fa883540d8@tudelft.nl> References: <78cd7aa043ae490a919672fa883540d8@tudelft.nl> Message-ID: We also have a Vapour HF setup but it does not include an electrostatic chuck, the wafer is simply held in place by a set of drop in pins. On Tue, May 22, 2018 at 1:04 AM, Frank Dirne - TNW wrote: > Idonus has a similar set-up. > > Recently we had a failure in the electrostatic chuck and after returning > it to Idonus we had a repaired chuck within 7 working days. > > > > > > best regards / met vriendelijke groeten, > > Frank Dirne > > > > Managing Director Kavli Nanolab > > Delft University of Technology > > Lorentzweg 1, 2628 CJ Delft > > TNW (bldg 22) - room D121 > > Phone: +31 (0)15 27 82357 / +31 614330507 > > email: F.W.A.Dirne at tudelft.nl > > > > secretary: +31 (0)15 27 82898 > > website: www.qn.tudelft.nl/KN > > > > [image: cid:BE01F5A2-838B-40F8-A7BA-0A109001FFB3] > > > > Fank Dirne > > > > *From:* labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces@ > mtl.mit.edu] *On Behalf Of *Fouad Karouta > *Sent:* maandag 21 mei 2018 5:00 > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] HF Vapour Setup > > > > Dear all, > > > > We have an AMMT HF vapour setup for up to 4 ? wafer size. > > Recently we are experiencing problems not being able to apply a voltage on > the electro-static chuck to hold the wafer. We tried to contact AMMT in > Germany (2 emails and 3 phone calls talking with an administrator) but we > never got any feedback/reply from an engineer. > > > > Has anyone experience with HF vapour setup? I wonder if someone has > established contacts with someone from AMMT. > > Also has anyone good experience with other possible suppliers of HF > vapour setup? > > > > Thank you, > > Fouad Karouta > > > > ************************************* > > Manager ANFF ACT Node > > Australian National Fabrication Facility > > Research School of Physics and Engineering > > L. Huxley Building (#56), Mills Road, Room 4.02 > > Australian National University > > ACT 2601, Canberra, Australia > > Tel: + 61 2 6125 7174 > > Mob: + 61 451 046 412 > > Email: fouad.karouta at anu.edu.au > > http://anff-act.anu.edu.au/ > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- -Michael. *PLEASE NOTE MY PHONE NUMBER HAS CHANGED: 780-953-5081* Michael Hume Operations Manager University of Alberta - nanoFAB W1-060 ECERF Building 9107 - 116 Street Edmonton, Alberta Canada T6G 2V4 www.nanofab.ualberta.ca Ph: *780-953-5081* (New)* -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 17854 bytes Desc: not available URL: From jrg at lesker.com Tue May 22 19:57:31 2018 From: jrg at lesker.com (JR Gaines) Date: Tue, 22 May 2018 23:57:31 +0000 Subject: [labnetwork] Sputtering LiPON In-Reply-To: <49907DA7-57E5-4A7C-95C4-3EE600304D62@cougarnet.uh.edu> References: <49907DA7-57E5-4A7C-95C4-3EE600304D62@cougarnet.uh.edu> Message-ID: ?Dear Long, LIPON is the electrolyte used in solid-state thin film lithium batteries. The patents go back to Dr. John Bates at the Oak Ridge National Laboratory in the early 90's. The material is made by reactively sputtering Li3PO4, by RF, in pure N2 gas. There are several papers out there on making this material as a thin film. Our company makes the precursor target material, lithium orthophosphate, as a sputter target or evaporation materials. I have made this ceramic for more than 20 years and supported most of the major research and commercial efforts in the area of solid state batteries. Let me know if you are interested in papers on the reactive deposition of Li3PO4 to form LIPON. Best regards, J.R. JR Gaines | Technical Director of Education | Tel: +1 (412) 896-8402 | Cell: +1 (614) 446-2202 | Fax: +1 (412) 872-5046 | Email: jrg at lesker.com?| http://www.lesker.com If this email is transmitted to you in error, please notify me, and then delete this email and all copies. If this email is sent for legal or business purposes, (a) this email and its content or attachments may include confidential and/or proprietary information of Kurt J. Lesker Company, in which case all rights to that information are reserved by the Company, and (b) your right and authorization to retain, and use, this information is limited to the purpose(s)expressly stated in, or reasonably implied by, this email. Any questions should be directed to me. Thank you. -----Original Message----- From: labnetwork-bounces at mtl.mit.edu On Behalf Of Chang, Long Sent: Tuesday, May 22, 2018 4:21 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Sputtering LiPON Hi All, We have a new group that is interested in sputtering 1-10 microns of a ceramic named LiPON (Lithium Phosphorus Oxynitride). From my conversation with them so far, they know very little about what they need to do. Does anyone have experience with this material? Any concerns I should consider? What's the best way to process this material? Thanks, Long _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork From gheorghe.iordache at kaust.edu.sa Wed May 23 10:23:42 2018 From: gheorghe.iordache at kaust.edu.sa (Gheorghe Iordache) Date: Wed, 23 May 2018 14:23:42 +0000 Subject: [labnetwork] Cleanroom Team Lead - open position at KAUST Nanofabrication Core Lab Message-ID: Please share the info with professionals you think may be interested in this dream job at KAUST, a rising star university, located in an international, multicultural campus, a genuine Research Resort on the shores of the Red Sea with 364 ? sunny days per year. Kind regards, ======================= Gheorghe IORDACHE, PhD Physics, MBA Director of the Nanofabrication Core Lab at KAUST King Abdullah University of Science & Technology Al Khawarizmi Building 1 East, Level 3, Office 3415 Thuwal 23955-6900 Kingdom of Saudi Arabia Office: +966 12 808 0447 Mobile: +966 54 038 1154 Email: gheorghe.iordache at kaust.edu.sa Linkedin: https://sa.linkedin.com/in/gheorghe-iordache-phd-mba-6a15611 [static_qr_code_without_logo] Follow the Core Labs on corelabs.kaust.edu.sa , LinkedIn and Instagram Visit the Core Labs: https://corelabs.kaust.edu.sa/visitor-information ================ Please note that the weekend in Saudi Arabia is Friday and Saturday ======== KAUST Nanofabrication Core Lab Cleanroom Team Lead The KAUST Nanofabrication Core Lab (NCL) is seeking a highly motivated Cleanroom Team Lead with strong background and hands-on experience in cleanroom operations and equipment, standards and cleanroom-related safety procedures. The individual will lead the Cleanroom team of engineers and scientists with responsibilities over a 2000 sq. m. state-of-the-art user-shared Cleanroom lab, ISO 5 and ISO 6, fitted with state-of-the-art equipment for micro- and nanofabrication. The responsibilities of this position are related to the mission of the NCL to support and provide high quality and safe laboratory working environment for all staff and users involved in research projects: ? Building and maintaining relationships with the relevant departments at KAUST in order to ensure good collaboration in activities related to safety and facilities; ? Managing the Cleanroom team staff and coordinating with the other lab teams; ? Ensuring that the lab is a safe and productive workplace; ? Oversee Installing and maintaining lab equipment and instruments; ? Maintaining a lab supply inventory; Reports to KAUST Nanofabrication Core Lab Director. This is a permanent position and the work language is English. Attractive benefits package includes tax-free salary, free international school for kids, fully furnished house, access to many recreation facilities as gym, golf, etc. Job Requirements * Advanced degree (PhD) or significant industry experience in Materials Science, Physics, Electrical or Chemical Engineering or related fields * Deep understanding of Cleanroom standard (ISO 14644), equipment, operations, safety and procedures * Previous hands-on experience in working in a semiconductor or materials science research cleanroom environment (10+ years); * Previous experience in managing a team of cleanroom technical staff and leading of projects of setting up a cleanroom either in a similar university cleanroom or related industry (5+ years); * Previous experience in dealing with materials science research users and providing technological guidance and support; * Strong hands-on laboratory skills; * Strong problem solving and technical troubleshooting skills; * Excellent communication and organizational skills; * Ability to quickly and independently assess causes of equipment shutdown, communicate efficiently with the staff and management while coordinating the team activities in following the troubleshooting and maintenance procedures; * Ability to efficiently communicate with other departments, vendors, and keep track of the stock of consumables and spare parts; * Ability to plan budgets and acquisitions and oversee the execution; * Ability to substantially contribute in assessing emergency scenarios and developing emergency response procedures; * Ability to draft documentation, reports to management, negotiate contracts with service providers and evaluate the quality of service; * Ability to work well with minimal supervision and able to lead a team toward reaching set objectives in a multi-cultural collaborative environment; www.kaust.edu.sa Contact: gheorghe.iordache / at / kaust / edu/sa ________________________________ This message and its contents including attachments are intended solely for the original recipient. If you are not the intended recipient or have received this message in error, please notify me immediately and delete this message from your computer system. Any unauthorized use or distribution is prohibited. Please consider the environment before printing this email. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 3739 bytes Desc: image001.png URL: From nclay at seas.upenn.edu Thu May 24 23:42:36 2018 From: nclay at seas.upenn.edu (Noah Clay) Date: Thu, 24 May 2018 23:42:36 -0400 Subject: [labnetwork] UGIM 2018 Updates. Message-ID: <67F31CC0-50CB-478F-94A7-366894B1EB3C@seas.upenn.edu> Good morning, With one month until the start of UGIM 2018, we are writing to inform you of program updates (see UGIM web site) along with sharing the vendor/exhibitor list. We have an impressive lineup of sponsors who are highly committed to the success of this year?s conference. Please visit the UGIM website for further information: https://ugim.nano.upenn.edu/home/event-sponsorship/ https://ugim.nano.upenn.edu/ If you haven?t done so already, please register and make final travel arrangements as soon as possible. There are hotel rooms remaining at the Sheraton - University City (see details in the travel section of the web site). As a final note, this year?s lineup of speakers and session chairs will be a milestone in terms of international participation in UGIM. We look forward to seeing you next month in Philadelphia! Kind regards, Noah Clay & Vincent Luciani -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Fri May 25 08:32:42 2018 From: codreanu at udel.edu (Iulian Codreanu) Date: Fri, 25 May 2018 08:32:42 -0400 Subject: [labnetwork] Mechanical pump advice Message-ID: <4e631da2-ab2f-2d10-1927-850faff342e8@udel.edu> Dear Colleagues, Over the past four years I have been purchasing equipment for my lab and I did not have the knowledge or the bandwidth to direct the vendors to provide a certain make of mechanical pumps. I am working on building a stock of spare parts, pumps, etc and once again I am tapping into your vast knowledge and willingness to help. If you could share your recommendations on mechanical pumps brands, that would be very much appreciated. Thank you very much and have a wonderful Memorial Day weekend, Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD NanoFab 163 ISE Lab 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu From ryan.d.taylor at utah.edu Fri May 25 16:36:20 2018 From: ryan.d.taylor at utah.edu (Ryan Taylor) Date: Fri, 25 May 2018 14:36:20 -0600 Subject: [labnetwork] ugim.org domain ownership transfer? Message-ID: <089ef8cf-4004-b74a-2384-1cc437605153@utah.edu> Hi, Last year I registered the ugim.org domain name and set it up to simply forward to https://ugim.nano.upenn.edu/.? It would be nice if it were set up as a landing page with links to past UGIM archives of presentations along with information about the current UGIM and future UGIMs. I was hoping to set something like that up, but alas, I haven't had the time. My domain registration is expiring in June and I am thinking I will not renew it. Is anyone here interested in becoming the steward of this domain name? If so, I can see if I can figure out how to transfer it to you. Thanks, Ryan -- --------- Ryan Taylor Software Developer University of Utah College of Engineering Phone: (801) 585-9034 Email: ryan.d.taylor at utah.edu From kevin.walsh at louisville.edu Sat May 26 03:44:10 2018 From: kevin.walsh at louisville.edu (Walsh,Kevin M.) Date: Sat, 26 May 2018 07:44:10 +0000 Subject: [labnetwork] ugim.org domain ownership transfer? In-Reply-To: <089ef8cf-4004-b74a-2384-1cc437605153@utah.edu> References: <089ef8cf-4004-b74a-2384-1cc437605153@utah.edu> Message-ID: <6B4EC2A2-2C5A-469D-ADDC-15B811863AE4@louisville.edu> We set up a home site for UGIM a few years ago with a history of the conf, past sites, photos, and a lot of other info. It is Louisville.edu/ugim My associate Ana Sanchez maintains it for the organization. I will copy her. Prof Kevin Walsh Associate Dean of Research Speed School of Engineering University of Louisville > On May 26, 2018, at 2:01 AM, Ryan Taylor wrote: > > Hi, > > Last year I registered the ugim.org domain name and set it up to simply forward to https://urldefense.proofpoint.com/v2/url?u=https-3A__ugim.nano.upenn.edu_&d=DwIGaQ&c=OAG1LQNACBDguGvBeNj18Swhr9TMTjS-x4O_KuapPgY&r=xaW_cuYe0C0wYgzm__RIHeqkGUxnC9oKNbyEasYivdE&m=ZwAVB_XtEoynQp68xDJJuDaAIaI2cDYbo4KwTqAWf18&s=I5wc0nPBfyxck-aPxsfxKmQb8W2Jqx_EASsYAuDcAvA&e=. It would be nice if it were set up as a landing page with links to past UGIM archives of presentations along with information about the current UGIM and future UGIMs. I was hoping to set something like that up, but alas, I haven't had the time. My domain registration is expiring in June and I am thinking I will not renew it. Is anyone here interested in becoming the steward of this domain name? If so, I can see if I can figure out how to transfer it to you. > > Thanks, > > Ryan > > -- > --------- > Ryan Taylor > Software Developer > University of Utah > College of Engineering > > Phone: (801) 585-9034 > Email: ryan.d.taylor at utah.edu > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://urldefense.proofpoint.com/v2/url?u=https-3A__mtl.mit.edu_mailman_listinfo.cgi_labnetwork&d=DwIGaQ&c=OAG1LQNACBDguGvBeNj18Swhr9TMTjS-x4O_KuapPgY&r=xaW_cuYe0C0wYgzm__RIHeqkGUxnC9oKNbyEasYivdE&m=ZwAVB_XtEoynQp68xDJJuDaAIaI2cDYbo4KwTqAWf18&s=wOEk_s0sWZa0ZCnTKMx8ptU4Gm9Xt01FgxfNw4kTiKo&e= From fouad.karouta at anu.edu.au Mon May 28 04:28:10 2018 From: fouad.karouta at anu.edu.au (Fouad Karouta) Date: Mon, 28 May 2018 08:28:10 +0000 Subject: [labnetwork] HF Vapour Setup In-Reply-To: References: <78cd7aa043ae490a919672fa883540d8@tudelft.nl> Message-ID: Thank you all for your input, it was very helpful! Best regards, Fouad Karouta From: Michael Hume [mailto:michael.hume at ualberta.ca] Sent: Wednesday, 23 May 2018 7:00 AM To: Frank Dirne - TNW Cc: Fouad Karouta ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] HF Vapour Setup We also have a Vapour HF setup but it does not include an electrostatic chuck, the wafer is simply held in place by a set of drop in pins. On Tue, May 22, 2018 at 1:04 AM, Frank Dirne - TNW > wrote: Idonus has a similar set-up. Recently we had a failure in the electrostatic chuck and after returning it to Idonus we had a repaired chuck within 7 working days. best regards / met vriendelijke groeten, Frank Dirne Managing Director Kavli Nanolab Delft University of Technology Lorentzweg 1, 2628 CJ Delft TNW (bldg 22) - room D121 Phone: +31 (0)15 27 82357 / +31 614330507 email: F.W.A.Dirne at tudelft.nl secretary: +31 (0)15 27 82898 website: www.qn.tudelft.nl/KN [cid:BE01F5A2-838B-40F8-A7BA-0A109001FFB3] Fank Dirne From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Fouad Karouta Sent: maandag 21 mei 2018 5:00 To: labnetwork at mtl.mit.edu Subject: [labnetwork] HF Vapour Setup Dear all, We have an AMMT HF vapour setup for up to 4 ? wafer size. Recently we are experiencing problems not being able to apply a voltage on the electro-static chuck to hold the wafer. We tried to contact AMMT in Germany (2 emails and 3 phone calls talking with an administrator) but we never got any feedback/reply from an engineer. Has anyone experience with HF vapour setup? I wonder if someone has established contacts with someone from AMMT. Also has anyone good experience with other possible suppliers of HF vapour setup? Thank you, Fouad Karouta ************************************* Manager ANFF ACT Node Australian National Fabrication Facility Research School of Physics and Engineering L. Huxley Building (#56), Mills Road, Room 4.02 Australian National University ACT 2601, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au http://anff-act.anu.edu.au/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- -Michael. PLEASE NOTE MY PHONE NUMBER HAS CHANGED: 780-953-5081 Michael Hume Operations Manager University of Alberta - nanoFAB W1-060 ECERF Building 9107 - 116 Street Edmonton, Alberta Canada T6G 2V4 www.nanofab.ualberta.ca Ph: 780-953-5081* (New) -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 17854 bytes Desc: image001.png URL: From rdevito at draper.com Tue May 29 09:30:22 2018 From: rdevito at draper.com (DeVito, Richard) Date: Tue, 29 May 2018 13:30:22 +0000 Subject: [labnetwork] Mechanical pump advice In-Reply-To: <4e631da2-ab2f-2d10-1927-850faff342e8@udel.edu> References: <4e631da2-ab2f-2d10-1927-850faff342e8@udel.edu> Message-ID: <03fe74dcb8454dd08758e92d24b1c5e5@draper.com> Iulian While they may not necessarily be the cheapest we have chosen to go with Ebara for all our rough style pumps-dry pumps. This was in a lab wide effort to removal all oil pumps from the fab . Also, they have great added value in that we have a service contract for them to come in periodically and service all the pumps . We get a good deal on rebuilds as well. These days no one can justify someone full time to service or manage all these pumps so this was a a logical choice for us. We also don't have to stock any spare parts-just a few spare pumps. When we spec new tools they must come with a certain model Ebara rough pump that is common to most of the large tools in the fab. In that way if one goes down it's a quick swap out with one of the spares we keep on hand. Having said all this, I am not sure if the service here will reflect the service where you are...? Best Rich DeVito Principle Member Technical Staff Group Leader Microfabrication Lab Draper 555 Technology Square, Cambridge, MA 02139 Phone: 617-258-3819 www.draper.com -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Friday, May 25, 2018 8:33 AM To: Fab Network Subject: [labnetwork] Mechanical pump advice Dear Colleagues, Over the past four years I have been purchasing equipment for my lab and I did not have the knowledge or the bandwidth to direct the vendors to provide a certain make of mechanical pumps. I am working on building a stock of spare parts, pumps, etc and once again I am tapping into your vast knowledge and willingness to help. If you could share your recommendations on mechanical pumps brands, that would be very much appreciated. Thank you very much and have a wonderful Memorial Day weekend, Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD NanoFab 163 ISE Lab 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ From shuyou at fomnetworks.com Wed May 30 09:57:23 2018 From: shuyou at fomnetworks.com (Shuyou Li) Date: Wed, 30 May 2018 08:57:23 -0500 Subject: [labnetwork] ugim.org domain ownership transfer? In-Reply-To: <6B4EC2A2-2C5A-469D-ADDC-15B811863AE4@louisville.edu> References: <089ef8cf-4004-b74a-2384-1cc437605153@utah.edu> <6B4EC2A2-2C5A-469D-ADDC-15B811863AE4@louisville.edu> Message-ID: Hi all, I'm not sure if it's appropriate for a vendor to be offering this, but if there are no objections, FOM Networks would be happy to design a one-page landing page and host & maintain a main website for this conference at that domain. For past conferences, we can either work with past organizing universities to copy over the websites for archival, or just simply link them. For future conferences, we can also either give some credentials (FTP) to the conference organizers to edit the site for that year, or just link to a site hosted on the organizing university. Shuyou _________________ Shuyou Li, Ph.D. FOM Networks, Inc. www.fomnetworks.com Ph: (224) 225-9168 Fax: (224) 218-2807 ? On Sat, May 26, 2018 at 2:44 AM, Walsh,Kevin M. wrote: > We set up a home site for UGIM a few years ago with a history of the conf, > past sites, photos, and a lot of other info. It is > > Louisville.edu/ugim > > My associate Ana Sanchez maintains it for the organization. I will copy > her. > > Prof Kevin Walsh > Associate Dean of Research > Speed School of Engineering > University of Louisville > > > On May 26, 2018, at 2:01 AM, Ryan Taylor wrote: > > > > Hi, > > > > Last year I registered the ugim.org domain name and set it up to simply > forward to https://urldefense.proofpoint.com/v2/url?u=https-3A__ugim. > nano.upenn.edu_&d=DwIGaQ&c=OAG1LQNACBDguGvBeNj18Swhr9TMTj > S-x4O_KuapPgY&r=xaW_cuYe0C0wYgzm__RIHeqkGUxnC9oKNbyEasYivdE&m=ZwAVB_ > XtEoynQp68xDJJuDaAIaI2cDYbo4KwTqAWf18&s=I5wc0nPBfyxck- > aPxsfxKmQb8W2Jqx_EASsYAuDcAvA&e=. It would be nice if it were set up as > a landing page with links to past UGIM archives of presentations along with > information about the current UGIM and future UGIMs. I was hoping to set > something like that up, but alas, I haven't had the time. My domain > registration is expiring in June and I am thinking I will not renew it. Is > anyone here interested in becoming the steward of this domain name? If so, > I can see if I can figure out how to transfer it to you. > > > > Thanks, > > > > Ryan > > > > -- > > --------- > > Ryan Taylor > > Software Developer > > University of Utah > > College of Engineering > > > > Phone: (801) 585-9034 > > Email: ryan.d.taylor at utah.edu > > > > > > _______________________________________________ > > labnetwork mailing list > > labnetwork at mtl.mit.edu > > https://urldefense.proofpoint.com/v2/url?u=https-3A__mtl. > mit.edu_mailman_listinfo.cgi_labnetwork&d=DwIGaQ&c= > OAG1LQNACBDguGvBeNj18Swhr9TMTjS-x4O_KuapPgY&r=xaW_cuYe0C0wYgzm__ > RIHeqkGUxnC9oKNbyEasYivdE&m=ZwAVB_XtEoynQp68xDJJuDaAIaI2cDYbo4Kw > TqAWf18&s=wOEk_s0sWZa0ZCnTKMx8ptU4Gm9Xt01FgxfNw4kTiKo&e= > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From nclay at seas.upenn.edu Thu May 31 02:25:59 2018 From: nclay at seas.upenn.edu (Noah Clay) Date: Wed, 30 May 2018 23:25:59 -0700 Subject: [labnetwork] UGIM 2018 Update. Message-ID: Dear All, With 3.5 weeks to go until the kickoff of UGIM 2018, I?m writing to let you know that there are a few hotel rooms available at the Sheraton - University City in Philadelphia. This hotel is two blocks from the conference venues; discounted rates for rooms ends on June 4th, 2018 and will increase significantly thereafter. As before, I look forward to seeing you in Philadelphia - Kind regards, Noah Clay ugim.nano.upenn.edu From bill_flounders at berkeley.edu Thu May 31 11:23:38 2018 From: bill_flounders at berkeley.edu (A. William (Bill) FLOUNDERS) Date: Thu, 31 May 2018 08:23:38 -0700 Subject: [labnetwork] ugim.org domain ownership transfer? In-Reply-To: References: <089ef8cf-4004-b74a-2384-1cc437605153@utah.edu> <6B4EC2A2-2C5A-469D-ADDC-15B811863AE4@louisville.edu> Message-ID: Thanks to Louisville for stepping up and maintaining our UGIM site. Thanks for the offer to FOM but I agree that it would not be appropriate for a vendor to host this site. Bill Flounders UC Berkeley On Wed, May 30, 2018 at 6:57 AM, Shuyou Li wrote: > Hi all, > > I'm not sure if it's appropriate for a vendor to be offering this, but if > there are no objections, FOM Networks would be happy to design a one-page > landing page and host & maintain a main website for this conference at that > domain. > > For past conferences, we can either work with past organizing universities > to copy over the websites for archival, or just simply link them. For > future conferences, we can also either give some credentials (FTP) to the > conference organizers to edit the site for that year, or just link to a > site hosted on the organizing university. > > Shuyou > _________________ > Shuyou Li, Ph.D. > FOM Networks, Inc. > www.fomnetworks.com > Ph: (224) 225-9168 > Fax: (224) 218-2807 > > > > ? > > On Sat, May 26, 2018 at 2:44 AM, Walsh,Kevin M. < > kevin.walsh at louisville.edu> wrote: > >> We set up a home site for UGIM a few years ago with a history of the >> conf, past sites, photos, and a lot of other info. It is >> >> Louisville.edu/ugim >> >> My associate Ana Sanchez maintains it for the organization. I will copy >> her. >> >> Prof Kevin Walsh >> Associate Dean of Research >> Speed School of Engineering >> University of Louisville >> >> > On May 26, 2018, at 2:01 AM, Ryan Taylor >> wrote: >> > >> > Hi, >> > >> > Last year I registered the ugim.org domain name and set it up to >> simply forward to https://urldefense.proofpoint. >> com/v2/url?u=https-3A__ugim.nano.upenn.edu_&d=DwIGaQ&c=OAG1L >> QNACBDguGvBeNj18Swhr9TMTjS-x4O_KuapPgY&r=xaW_cuYe0C0wYgzm >> __RIHeqkGUxnC9oKNbyEasYivdE&m=ZwAVB_XtEoynQp68xDJJuDaAIaI2cD >> Ybo4KwTqAWf18&s=I5wc0nPBfyxck-aPxsfxKmQb8W2Jqx_EASsYAuDcAvA&e=. It >> would be nice if it were set up as a landing page with links to past UGIM >> archives of presentations along with information about the current UGIM and >> future UGIMs. I was hoping to set something like that up, but alas, I >> haven't had the time. My domain registration is expiring in June and I am >> thinking I will not renew it. Is anyone here interested in becoming the >> steward of this domain name? If so, I can see if I can figure out how to >> transfer it to you. >> > >> > Thanks, >> > >> > Ryan >> > >> > -- >> > --------- >> > Ryan Taylor >> > Software Developer >> > University of Utah >> > College of Engineering >> > >> > Phone: (801) 585-9034 >> > Email: ryan.d.taylor at utah.edu >> > >> > >> > _______________________________________________ >> > labnetwork mailing list >> > labnetwork at mtl.mit.edu >> > https://urldefense.proofpoint.com/v2/url?u=https-3A__mtl.mit >> .edu_mailman_listinfo.cgi_labnetwork&d=DwIGaQ&c=OAG1LQNACBDg >> uGvBeNj18Swhr9TMTjS-x4O_KuapPgY&r=xaW_cuYe0C0wYgzm__RI >> HeqkGUxnC9oKNbyEasYivdE&m=ZwAVB_XtEoynQp68xDJJuDaAIaI2cDYbo4 >> KwTqAWf18&s=wOEk_s0sWZa0ZCnTKMx8ptU4Gm9Xt01FgxfNw4kTiKo&e= >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From na2661 at columbia.edu Thu May 31 16:07:23 2018 From: na2661 at columbia.edu (Nava Ariel Sternberg) Date: Thu, 31 May 2018 16:07:23 -0400 Subject: [labnetwork] Two position openings in Columbia University labs Message-ID: Dear all, We are still looking for a clean room engineer and we also have another opening now for an equipment engineer for our clean room and other labs (characterization and electron microscopy). For more information and to apply to the clean room engineer position please go here . And for the equipment engineer position please go here . Thanks and have a good weekend, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Facilities Columbia University 530 W120th Street, NY 10027 Room 1015/MC 8903 Office: 212-854-9927 Cell: 201-562-7600 -------------- next part -------------- An HTML attachment was scrubbed... URL: From lckimball at bridgetronic.com Thu May 31 19:28:32 2018 From: lckimball at bridgetronic.com (Lauren Kimball) Date: Thu, 31 May 2018 23:28:32 +0000 Subject: [labnetwork] Zygo Mark III Message-ID: Hello All, We recently purchased a Zygo Mark III Interferometer but the seller didn't include the reference blank. Does anyone have a spare reference blank that they would sell / trade to us? Thanks in advance for your help! Best, ------------------------------------------ Lauren Kimball Manager Bridge Tronic Global Inc 425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1851 ex. 100 Fax: +1 949.396.1859 Email: lckimball at bridgetronic.com Website: www.bridgetronic.com -------------- next part -------------- An HTML attachment was scrubbed... URL: