[labnetwork] Hydrogen Purity for Furnaces

[Mark Weiler]

Hi Jerry,
One could invest in the long term and buy a purification system... pricey, but you’d have to figure out whether the return is worth the expense...

Example:

https://www.entegris.com/shop/en/USD/products/gas-filtration-and-purification/gas-purification-systems/aeronex-gas-purification-systems/Aeronex-HX-Series-Gas-Purification-Systems/p/AeronexHXSeriesGasPurificationSystems

Best,

Mark


Mark Weiler
Fab Equipment & Facilities Manager
Carnegie Mellon Nanofabrication Facility
Electrical and Computer Engineering | Carnegie Mellon University
5000 Forbes Ave., Pittsburgh, PA 15213-3890<x-apple-data-detectors://3/1>
T: 412.268.2471<tel:412.268.5430>
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www.ece.cmu.edu<http://www.ece.cmu.edu/>
nanofab.ece.cmu.edu<http://nanofab.ece.cmu.edu/>

On May 8, 2018, at 8:31 AM, Sandeep Mane <manesandeep83 at gmail.com<mailto:manesandeep83 at gmail.com>> wrote:

How to keep check on purifier health.

On Tue, 8 May 2018, 5:14 am Keith Barnes, <kbarnes at semitorrinc.com<mailto:kbarnes at semitorrinc.com>> wrote:
But a cheaper grade and use purification

Sent from my iPhone

On May 7, 2018, at 12:56 PM, Bowser, Jerry (Fed) <jerry.bowser at nist.gov<mailto:jerry.bowser at nist.gov>> wrote:

Hello Everyone,

Here at NIST we are having problems with reliable and timely deliveries of hydrogen.  I would like to ask the group what hydrogen purity are you using for your oxidation furnaces and what lead times are you currently seeing?

Thanks!

*******************************************
Jerry Bowser
Assistant Manager for Operations
NanoFab Operations Group
Center for Nanoscale Science and Technology
National Institute of Standards and Technology
Phone: (301) 975-8187

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