[labnetwork] MKS MFCs vendors?

[DeVito, Richard]

Try coastal instrument out of N.C.



Rich DeVito
Principle Member Technical Staff
Group Leader Microfabrication Lab
Draper
555 Technology Square,
Cambridge, MA 02139
Phone:  617-258-3819
www.draper.com<http://www.draper.com/>



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg
Sent: Thursday, May 17, 2018 11:20 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] MKS MFCs vendors?

Dear all,

Our N2 MFC for the Cambridge ALD died. We contacted both MKS and the representing company (currently Veeco). MKS are not getting back to us and from Veeco we got an outrageous price quotation for a different range MFC and a recommendation to upgrade the ALD system for several tens of thousands of dollars so it can match their currently available MFCs…

Does anyone have a recommended alternative for these MFCs? It’s a 100SCCM range N2 MFC.

Thanks,
Nava


[cid:image001.jpg at 01D3EE04.6D8B9360]
Nava Ariel-Sternberg, Ph.D.
Director of CNI Shared Facilities
Columbia University
530 w120th st., NY 10027
Room 1015/MC 8903
Office: 212-854-9927
Cell: 201-562-7600

​

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