[labnetwork] Phosphorous doping methods

[Iulian Codreanu]

Dear All,

I am working on providing phosphorous doping capability at a tube 
furnace that will be used for fabrication classes (the first class will 
make a solar cell).

My research to date uncovered POCl3 and solid sources as possible 
methods for P diffusion. As expected, each seems to come with benefits 
and drawbacks.

I am hoping that you are willing to share your experience/advcie with me 
and/or the group so I can make a quick and smart decision.

Thank you very much,

Iulian

-- 
iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
163 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu