[labnetwork] Phosphorous doping methods

[A. William (Bill) FLOUNDERS]

 Response posted to network not just Iulian.
Discussion of bubbler vs solid source vs spin on welcome
Bill Flounders
UC Berkeley


Iulian,
We have used a spin on glass product for the n type doping
of our academic class for years.
This way you only support an oxidation / drive in furnace.
There is no need to dedicate another tube for POCl3 or solid source.
Spin on products are simple - and available in a wide variety.
Here are two sources

https://www.filmtronics.com/

http://desertsilicon.com/spin-on-glass/


On Fri, Sep 14, 2018 at 8:24 AM, Iulian Codreanu <codreanu at udel.edu> wrote:

> Dear All,
>
> I am working on providing phosphorous doping capability at a tube furnace
> that will be used for fabrication classes (the first class will make a
> solar cell).
>
> My research to date uncovered POCl3 and solid sources as possible methods
> for P diffusion. As expected, each seems to come with benefits and
> drawbacks.
>
> I am hoping that you are willing to share your experience/advcie with me
> and/or the group so I can make a quick and smart decision.
>
> Thank you very much,
>
> Iulian
>
> --
> iulian Codreanu, Ph.D.
> Director of Operations, UD NanoFab
> 163 ISE Lab
> 221 Academy Street
> Newark, DE 19716
> 302-831-2784
> http://udnf.udel.edu
>
>
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