[labnetwork] Phosphorous doping methods

[Matthew Moneck]

Hi Iulian,

In the past, we have worked with spin-on dopants from Filmtronics (https://www.filmtronics.com/capabilities/products/diffusants) for our fabrication course and for research.  The advantage is that they don't have the toxicity issues you'll have to deal with using POCl3 (not to say that they aren't hazardous), but they do take some development and also have their pros and cons.  

If you're not familiar with this material, they are a phosphorous doped spin-on glass (they have a boron doped version as well).  You can spin coat the sample, do an initial cure on a hotplate, and then do a high temp anneal in a tube furnance to drive in the dopant (typically 900-1200C depending on the dopant).  After doping, they can be removed with HF.  

Best Regards,

Matt

-- 
Matthew T. Moneck, Ph.D.
Executive Manager, Carnegie Mellon Nanofabrication Facility
Electrical and Computer Engineering | Carnegie Mellon University
5000 Forbes Ave., Pittsburgh, PA 15213-3890
T: 412.268.5430
F: 412.268.3497
www.ece.cmu.edu
nanofab.ece.cmu.edu


-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu
Sent: Friday, September 14, 2018 11:25 AM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Phosphorous doping methods

Dear All,

I am working on providing phosphorous doping capability at a tube furnace that will be used for fabrication classes (the first class will make a solar cell).

My research to date uncovered POCl3 and solid sources as possible methods for P diffusion. As expected, each seems to come with benefits and drawbacks.

I am hoping that you are willing to share your experience/advcie with me and/or the group so I can make a quick and smart decision.

Thank you very much,

Iulian

--
iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
163 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu


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