[labnetwork] ITO deposition
Iulian Codreanu
codreanu at udel.edu
Tue Apr 9 12:54:51 EDT 2019
Dear Colleagues,
We have received a number of requests to provide ITO deposition
capabilities. We have a sputterer but are concerned with the low melting
points for Indium and Tin. I am under the impression that ITO needs a
dedicated deposition system. What is your experience/advice?
Thank you,
Iulian
--
iulian Codreanu, Ph.D.
Director of Operations, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu
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