From James.Vlahakis at tufts.edu  Thu Aug  1 15:04:25 2019
From: James.Vlahakis at tufts.edu (Vlahakis, James)
Date: Thu, 1 Aug 2019 19:04:25 +0000
Subject: [labnetwork] Dicing Saw Advice.....
Message-ID: <676C9381B5E6AC4FAE9CD9CFCC40DF1E010BB05D8A@SSVMEXDAG01MB01.tufts.ad.tufts.edu>

Hi everyone, I'm hoping the group can provide some advice regarding dicing and dicing saws.

We have a refurbished (within the past 3yrs) MicroAutomation MA1006<https://engineering.tufts.edu/microfab/capabilities/MA1006Saw.htm> saw which requires significant time/resources to keep online. Unfortunately, it is underutilized, only 1-2 dicing jobs per month. With such poor bang-for-the-buck we're considering alternatives -


  *   A different service provider - maybe our support is subpar?

For those who have similar tools, who maintains them? What are your results?

  *   Purchase a different, hopefully more reliable saw

For those with other saws, what do you have? Can you comment on reliability? Consumable costs? Ease of use?

  *   Remove the saw and do not replace it

Losing capabilities is suboptimal and perhaps sets a perilous precedent (we are university lab, none of our tools are justified *economically*). Have others done this? Can anyone recommend a source for dicing services - specifically for small, infrequent jobs?

  *   Other possibilities we haven't considered?

I'm eager to hear various perspectives and experiences.

jim



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From spaolini at cns.fas.harvard.edu  Thu Aug  1 17:48:22 2019
From: spaolini at cns.fas.harvard.edu (Paolini, Steven)
Date: Thu, 1 Aug 2019 21:48:22 +0000
Subject: [labnetwork] Dicing Saw Advice.....
In-Reply-To: <676C9381B5E6AC4FAE9CD9CFCC40DF1E010BB05D8A@SSVMEXDAG01MB01.tufts.ad.tufts.edu>
References: <676C9381B5E6AC4FAE9CD9CFCC40DF1E010BB05D8A@SSVMEXDAG01MB01.tufts.ad.tufts.edu>
Message-ID: <BL0PR07MB4004FD33B1F7C852839B7B71DFDE0@BL0PR07MB4004.namprd07.prod.outlook.com>

That photo of the MicroAutomation saw gave me some creepy flashbacks! I worked on a fleet of those about 25 years ago.
Two vendors come to mind, one being K&S and another being Disco. I have experience with both, but Disco has been the most developed and supportive dicing saw vendor.
Good luck,

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Vlahakis, James
Sent: Thursday, August 01, 2019 3:04 PM
To: 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Dicing Saw Advice.....

Hi everyone, I'm hoping the group can provide some advice regarding dicing and dicing saws.

We have a refurbished (within the past 3yrs) MicroAutomation MA1006<https://urldefense.proofpoint.com/v2/url?u=https-3A__engineering.tufts.edu_microfab_capabilities_MA1006Saw.htm&d=DwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=nuBi9zk2EtI6eQL594rhhH5VsjHUTxPycO_Gg5IDIM8&s=3PgdUx-pKubD7Vy0tdjZzybiPz87wKFgXWO_0GbQRMg&e=> saw which requires significant time/resources to keep online. Unfortunately, it is underutilized, only 1-2 dicing jobs per month. With such poor bang-for-the-buck we're considering alternatives -


  *   A different service provider - maybe our support is subpar?

For those who have similar tools, who maintains them? What are your results?

  *   Purchase a different, hopefully more reliable saw

For those with other saws, what do you have? Can you comment on reliability? Consumable costs? Ease of use?

  *   Remove the saw and do not replace it

Losing capabilities is suboptimal and perhaps sets a perilous precedent (we are university lab, none of our tools are justified *economically*). Have others done this? Can anyone recommend a source for dicing services - specifically for small, infrequent jobs?

  *   Other possibilities we haven't considered?

I'm eager to hear various perspectives and experiences.

jim



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From yb2471 at columbia.edu  Thu Aug  1 19:44:50 2019
From: yb2471 at columbia.edu (Youry Borisenkov)
Date: Thu, 1 Aug 2019 19:44:50 -0400
Subject: [labnetwork] Dicing Saw Advice.....
In-Reply-To: <BL0PR07MB4004FD33B1F7C852839B7B71DFDE0@BL0PR07MB4004.namprd07.prod.outlook.com>
References: <676C9381B5E6AC4FAE9CD9CFCC40DF1E010BB05D8A@SSVMEXDAG01MB01.tufts.ad.tufts.edu>
 <BL0PR07MB4004FD33B1F7C852839B7B71DFDE0@BL0PR07MB4004.namprd07.prod.outlook.com>
Message-ID: <CAGOt4s11EV=dQNmuLEGdymimVVi8R76jWdE4538OepGCPGDp2w@mail.gmail.com>

Definitely disco. I had the competitive?s vendor engineers coming over to
our facility to understand how Disco can be so good. The dicing experience
is very convenient (after a rather short learning curve). The machine is
very reliable and does not require much maintenance, if it?s not being
abused.. i.e. good cooling water (preferably DI), weekly cleaning of the
chamber, etc...

Best,
Youry

On Thu, Aug 1, 2019 at 7:38 PM Paolini, Steven <spaolini at cns.fas.harvard.edu>
wrote:

> That photo of the MicroAutomation saw gave me some creepy flashbacks! I
> worked on a fleet of those about 25 years ago.
>
> Two vendors come to mind, one being K&S and another being Disco. I have
> experience with both, but Disco has been the most developed and supportive
> dicing saw vendor.
>
> <https://www.google.com/maps/search/11+Oxford+St.+%0D%0A+Cambridge,+MA+02138?entry=gmail&source=g>
>
> Good luck,
>
>
>
> Steve Paolini
>
> Principal Equipment Engineer
>
> Harvard University Center for Nanoscale Systems
>
> 11 Oxford St.
> <https://www.google.com/maps/search/11+Oxford+St.+%0D%0A+Cambridge,+MA+02138?entry=gmail&source=g>
>
> Cambridge, MA 02138
> <https://www.google.com/maps/search/11+Oxford+St.+%0D%0A+Cambridge,+MA+02138?entry=gmail&source=g>
>
> 617- 496- 9816
>
> spaolini at cns.fas.harvard.edu
>
> www.cns.fas.harvard.edu
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> *On
> Behalf Of *Vlahakis, James
> *Sent:* Thursday, August 01, 2019 3:04 PM
> *To:* 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] Dicing Saw Advice.....
>
>
>
> Hi everyone, I?m hoping the group can provide some advice regarding dicing
> and dicing saws.
>
>
>
> We have a refurbished (within the past 3yrs) MicroAutomation MA1006
> <https://urldefense.proofpoint.com/v2/url?u=https-3A__engineering.tufts.edu_microfab_capabilities_MA1006Saw.htm&d=DwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=nuBi9zk2EtI6eQL594rhhH5VsjHUTxPycO_Gg5IDIM8&s=3PgdUx-pKubD7Vy0tdjZzybiPz87wKFgXWO_0GbQRMg&e=>
> saw which requires significant time/resources to keep online.
> Unfortunately, it is underutilized, only 1-2 dicing jobs per month. With
> such poor bang-for-the-buck we?re considering alternatives -
>
>
>
>    - A different service provider ? maybe our support is subpar?
>
> For those who have similar tools, who maintains them? What are your
> results?
>
>    - Purchase a different, hopefully more reliable saw
>
> For those with other saws, what do you have? Can you comment on
> reliability? Consumable costs? Ease of use?
>
>    - Remove the saw and do not replace it
>
> Losing capabilities is suboptimal and perhaps sets a perilous precedent
> (we are university lab, none of our tools are justified **economically**).
> Have others done this? Can anyone recommend a source for dicing services ?
> specifically for small, infrequent jobs?
>
>    - Other possibilities we haven?t considered?
>
>
>
> I?m eager to hear various perspectives and experiences.
>
>
>
> jim
>
>
>
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
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From shimonel at savion.huji.ac.il  Fri Aug  2 01:36:42 2019
From: shimonel at savion.huji.ac.il (Shimon Eliav)
Date: Fri, 2 Aug 2019 05:36:42 +0000
Subject: [labnetwork] Dicing Saw Advice.....
In-Reply-To: <BL0PR07MB4004FD33B1F7C852839B7B71DFDE0@BL0PR07MB4004.namprd07.prod.outlook.com>
References: <676C9381B5E6AC4FAE9CD9CFCC40DF1E010BB05D8A@SSVMEXDAG01MB01.tufts.ad.tufts.edu>
 <BL0PR07MB4004FD33B1F7C852839B7B71DFDE0@BL0PR07MB4004.namprd07.prod.outlook.com>
Message-ID: <VI1PR10MB1983E6A39B391BF8F8C27868D6D90@VI1PR10MB1983.EURPRD10.PROD.OUTLOOK.COM>

As Steve, I also got the exact same feeling when I saw the picture: I refurbished one of those machines some 30 years ago. Today we have an ADT system. It is simple to use, ease to program and all in all we are very satisfied with it: it is running for more than ten years with not big maintenance issues. It is a "work horse" and its flexibility makes it very suitable for academic use. The support we have here in Israel is nice (perhaps also in US). The machine we got was an ADT demo system, we purchased it by half price, some 60k$.
Good luck!

Shimon Eliav
The Unit for Nano Fabrication (UNF)
The Hebrew University of Jerusalem

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven
Sent: Friday, 2 August 2019 0:48
To: Vlahakis, James K. <james.vlahakis at tufts.edu>; 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Dicing Saw Advice.....

That photo of the MicroAutomation saw gave me some creepy flashbacks! I worked on a fleet of those about 25 years ago.
Two vendors come to mind, one being K&S and another being Disco. I have experience with both, but Disco has been the most developed and supportive dicing saw vendor.
Good luck,

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>
www.cns.fas.harvard.edu<http://www.cns.fas.harvard.edu>

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Vlahakis, James
Sent: Thursday, August 01, 2019 3:04 PM
To: 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] Dicing Saw Advice.....

Hi everyone, I'm hoping the group can provide some advice regarding dicing and dicing saws.

We have a refurbished (within the past 3yrs) MicroAutomation MA1006<https://urldefense.proofpoint.com/v2/url?u=https-3A__engineering.tufts.edu_microfab_capabilities_MA1006Saw.htm&d=DwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=nuBi9zk2EtI6eQL594rhhH5VsjHUTxPycO_Gg5IDIM8&s=3PgdUx-pKubD7Vy0tdjZzybiPz87wKFgXWO_0GbQRMg&e=> saw which requires significant time/resources to keep online. Unfortunately, it is underutilized, only 1-2 dicing jobs per month. With such poor bang-for-the-buck we're considering alternatives -


  *   A different service provider - maybe our support is subpar?

For those who have similar tools, who maintains them? What are your results?

  *   Purchase a different, hopefully more reliable saw

For those with other saws, what do you have? Can you comment on reliability? Consumable costs? Ease of use?

  *   Remove the saw and do not replace it

Losing capabilities is suboptimal and perhaps sets a perilous precedent (we are university lab, none of our tools are justified *economically*). Have others done this? Can anyone recommend a source for dicing services - specifically for small, infrequent jobs?

  *   Other possibilities we haven't considered?

I'm eager to hear various perspectives and experiences.

jim



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From jim at photomaskportal.com  Fri Aug  2 07:56:24 2019
From: jim at photomaskportal.com (Jim Carroll)
Date: Fri, 2 Aug 2019 06:56:24 -0500
Subject: [labnetwork] Dicing Saw Advice.....
In-Reply-To: <BL0PR07MB4004FD33B1F7C852839B7B71DFDE0@BL0PR07MB4004.namprd07.prod.outlook.com>
References: <676C9381B5E6AC4FAE9CD9CFCC40DF1E010BB05D8A@SSVMEXDAG01MB01.tufts.ad.tufts.edu>
 <BL0PR07MB4004FD33B1F7C852839B7B71DFDE0@BL0PR07MB4004.namprd07.prod.outlook.com>
Message-ID: <CACVEG9irPNfhb2rgQeNcC6tXoWQ+Nwf=F-hMUhF1uzY5dcsehQ@mail.gmail.com>

Hi James,

If you decide to outsource, we have a world-class process for dicing masks
and wafers with state-of-the-art saws.  No job is too small.  Let us know
if we can help.

Thanks,
Jim Carroll
*PhotomaskPORTAL*
*We help you make masks*
(415) 448-6275

   -
   <http://www.photomaskportal.com>



On Thu, Aug 1, 2019 at 6:39 PM Paolini, Steven <spaolini at cns.fas.harvard.edu>
wrote:

> That photo of the MicroAutomation saw gave me some creepy flashbacks! I
> worked on a fleet of those about 25 years ago.
>
> Two vendors come to mind, one being K&S and another being Disco. I have
> experience with both, but Disco has been the most developed and supportive
> dicing saw vendor.
>
> Good luck,
>
>
>
> Steve Paolini
>
> Principal Equipment Engineer
>
> Harvard University Center for Nanoscale Systems
>
> 11 Oxford St.
>
> Cambridge, MA 02138
>
> 617- 496- 9816
>
> spaolini at cns.fas.harvard.edu
>
> www.cns.fas.harvard.edu
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> *On
> Behalf Of *Vlahakis, James
> *Sent:* Thursday, August 01, 2019 3:04 PM
> *To:* 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] Dicing Saw Advice.....
>
>
>
> Hi everyone, I?m hoping the group can provide some advice regarding dicing
> and dicing saws.
>
>
>
> We have a refurbished (within the past 3yrs) MicroAutomation MA1006
> <https://urldefense.proofpoint.com/v2/url?u=https-3A__engineering.tufts.edu_microfab_capabilities_MA1006Saw.htm&d=DwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=nuBi9zk2EtI6eQL594rhhH5VsjHUTxPycO_Gg5IDIM8&s=3PgdUx-pKubD7Vy0tdjZzybiPz87wKFgXWO_0GbQRMg&e=>
> saw which requires significant time/resources to keep online.
> Unfortunately, it is underutilized, only 1-2 dicing jobs per month. With
> such poor bang-for-the-buck we?re considering alternatives -
>
>
>
>    - A different service provider ? maybe our support is subpar?
>
> For those who have similar tools, who maintains them? What are your
> results?
>
>    - Purchase a different, hopefully more reliable saw
>
> For those with other saws, what do you have? Can you comment on
> reliability? Consumable costs? Ease of use?
>
>    - Remove the saw and do not replace it
>
> Losing capabilities is suboptimal and perhaps sets a perilous precedent
> (we are university lab, none of our tools are justified **economically**).
> Have others done this? Can anyone recommend a source for dicing services ?
> specifically for small, infrequent jobs?
>
>    - Other possibilities we haven?t considered?
>
>
>
> I?m eager to hear various perspectives and experiences.
>
>
>
> jim
>
>
>
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
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From christophe.clement at polymtl.ca  Fri Aug  2 11:26:08 2019
From: christophe.clement at polymtl.ca (Christophe =?utf-8?Q?Cl=C3=A9ment?=)
Date: Fri, 2 Aug 2019 11:26:08 -0400 (EDT)
Subject: [labnetwork] Dicing Saw Advice.....
In-Reply-To: <VI1PR10MB1983E6A39B391BF8F8C27868D6D90@VI1PR10MB1983.EURPRD10.PROD.OUTLOOK.COM>
References: <676C9381B5E6AC4FAE9CD9CFCC40DF1E010BB05D8A@SSVMEXDAG01MB01.tufts.ad.tufts.edu>
 <BL0PR07MB4004FD33B1F7C852839B7B71DFDE0@BL0PR07MB4004.namprd07.prod.outlook.com>
 <VI1PR10MB1983E6A39B391BF8F8C27868D6D90@VI1PR10MB1983.EURPRD10.PROD.OUTLOOK.COM>
Message-ID: <494730822.3219213.1564759568737.JavaMail.zimbra@polymtl.ca>

Hello, I will second Shimon's comment. 
Here at Polytechnic School of Montreal, we have an ADT dicing 7100 for 10 years now with relative few maintenances to do (cleaning, blade calibration..etc). The tool is very easy to use and to program. Cost for blades are around 35 US$, we buy it directly from ADT in Israel, and we have also good service from ADT US. We bought the tool new in 2010, and we do not regret our choice so far. 
Hope this help! 
Christophe Cl?ment 



De: "Shimon Eliav" <shimonel at savion.huji.ac.il> 
?: "Paolini, Steven" <spaolini at cns.fas.harvard.edu>, "Vlahakis, James K." <james.vlahakis at tufts.edu>, "labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu> 
Envoy?: Vendredi 2 Ao?t 2019 01:36:42 
Objet: Re: [labnetwork] Dicing Saw Advice..... 



As Steve, I also got the exact same feeling when I saw the picture: I refurbished one of those machines some 30 years ago. Today we have an ADT system. It is simple to use, ease to program and all in all we are very satisfied with it: it is running for more than ten years with not big maintenance issues. It is a ?work horse? and its flexibility makes it very suitable for academic use. The support we have here in Israel is nice (perhaps also in US). The machine we got was an ADT demo system, we purchased it by half price, some 60k$. 

Good luck! 



Shimon Eliav 

The Unit for Nano Fabrication (UNF) 

The Hebrew University of Jerusalem 




From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven 
Sent: Friday, 2 August 2019 0:48 
To: Vlahakis, James K. <james.vlahakis at tufts.edu>; 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu> 
Subject: Re: [labnetwork] Dicing Saw Advice..... 




That photo of the MicroAutomation saw gave me some creepy flashbacks! I worked on a fleet of those about 25 years ago. 

Two vendors come to mind, one being K&S and another being Disco. I have experience with both, but Disco has been the most developed and supportive dicing saw vendor. 

Good luck, 




Steve Paolini 

Principal Equipment Engineer 

Harvard University Center for Nanoscale Systems 

11 Oxford St. 

Cambridge, MA 02138 

617- 496- 9816 

[ mailto:spaolini at cns.fas.harvard.edu | spaolini at cns.fas.harvard.edu ] 

[ http://www.cns.fas.harvard.edu/ | www.cns.fas.harvard.edu ] 





From: [ mailto:labnetwork-bounces at mtl.mit.edu | 
labnetwork-bounces at mtl.mit.edu ] < [ mailto:labnetwork-bounces at mtl.mit.edu | labnetwork-bounces at mtl.mit.edu ] > On Behalf Of Vlahakis, James 
Sent: Thursday, August 01, 2019 3:04 PM 
To: 'labnetwork at mtl.mit.edu' < [ mailto:labnetwork at mtl.mit.edu | labnetwork at mtl.mit.edu ] > 
Subject: [labnetwork] Dicing Saw Advice..... 




Hi everyone, I?m hoping the group can provide some advice regarding dicing and dicing saws. 



We have a refurbished (within the past 3yrs) [ https://urldefense.proofpoint.com/v2/url?u=https-3A__engineering.tufts.edu_microfab_capabilities_MA1006Saw.htm&d=DwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=nuBi9zk2EtI6eQL594rhhH5VsjHUTxPycO_Gg5IDIM8&s=3PgdUx-pKubD7Vy0tdjZzybiPz87wKFgXWO_0GbQRMg&e= | 
MicroAutomation MA1006 ] saw which requires significant time/resources to keep online. Unfortunately, it is underutilized, only 1-2 dicing jobs per month. With such poor bang-for-the-buck we?re considering alternatives - 



    * A different service provider ? maybe our support is subpar? 


For those who have similar tools, who maintains them? What are your results? 

    * Purchase a different, hopefully more reliable saw 


For those with other saws, what do you have? Can you comment on reliability? Consumable costs? Ease of use? 

    * Remove the saw and do not replace it 


Losing capabilities is suboptimal and perhaps sets a perilous precedent (we are university lab, none of our tools are justified * economically *). Have others done this? Can anyone recommend a source for dicing services ? specifically for small, infrequent jobs? 

    * Other possibilities we haven?t considered? 




I?m eager to hear various perspectives and experiences. 



jim 







_______________________________________________ 
labnetwork mailing list 
labnetwork at mtl.mit.edu 
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork 
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From jpalmer at Princeton.EDU  Fri Aug  2 12:17:09 2019
From: jpalmer at Princeton.EDU (Joseph E. Palmer)
Date: Fri, 2 Aug 2019 12:17:09 -0400
Subject: [labnetwork] Dicing Saw Advice.....
In-Reply-To: <VI1PR10MB1983E6A39B391BF8F8C27868D6D90@VI1PR10MB1983.EURPRD10.PROD.OUTLOOK.COM>
References: <676C9381B5E6AC4FAE9CD9CFCC40DF1E010BB05D8A@SSVMEXDAG01MB01.tufts.ad.tufts.edu>
 <BL0PR07MB4004FD33B1F7C852839B7B71DFDE0@BL0PR07MB4004.namprd07.prod.outlook.com>
 <VI1PR10MB1983E6A39B391BF8F8C27868D6D90@VI1PR10MB1983.EURPRD10.PROD.OUTLOOK.COM>
Message-ID: <2edf74ab-f91d-ac61-e246-1dcc50bb87b3@exchange.princeton.edu>

I will second Shimon on ADT.? When we had to replace our old K&S, I 
evaluated Disco vs. ADT.? While Disco is good (very) for Si wafers, It 
did not have a wide enough range of capabilities for us.

Joe

On 8/2/2019 1:36 AM, Shimon Eliav wrote:
>
> As Steve, I also got the exact same feeling when I saw the picture: I 
> refurbished one of those machines some 30 years ago. Today we have an 
> ADT system. It is simple to use, ease to program and all in all we are 
> very satisfied with it: it is running for more than ten years with not 
> big maintenance issues. It is a ?work horse? and its flexibility makes 
> it very suitable for academic use. The support we have here in Israel 
> is nice (perhaps also in US). The machine we got was an ADT demo 
> system, we purchased it by half price, some 60k$.
>
> Good luck!
>
> Shimon Eliav
>
> The Unit for Nano Fabrication (UNF)
>
> The Hebrew University of Jerusalem
>
> *From:* labnetwork-bounces at mtl.mit.edu 
> [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Paolini, Steven
> *Sent:* Friday, 2 August 2019 0:48
> *To:* Vlahakis, James K. <james.vlahakis at tufts.edu>; 
> 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu>
> *Subject:* Re: [labnetwork] Dicing Saw Advice.....
>
> That photo of the MicroAutomation saw gave me some creepy flashbacks! 
> I worked on a fleet of those about 25 years ago.
>
> Two vendors come to mind, one being K&S and another being Disco. I 
> have experience with both, but Disco has been the most developed and 
> supportive dicing saw vendor.
>
> Good luck,
>
> Steve Paolini
>
> Principal Equipment Engineer
>
> Harvard University Center for Nanoscale Systems
>
> 11 Oxford St.
>
> Cambridge, MA 02138
>
> 617- 496- 9816
>
> spaolini at cns.fas.harvard.edu <mailto:spaolini at cns.fas.harvard.edu>
>
> www.cns.fas.harvard.edu <http://www.cns.fas.harvard.edu>
>
> *From:* labnetwork-bounces at mtl.mit.edu 
> <mailto:labnetwork-bounces at mtl.mit.edu> 
> <labnetwork-bounces at mtl.mit.edu 
> <mailto:labnetwork-bounces at mtl.mit.edu>> *On Behalf Of *Vlahakis, James
> *Sent:* Thursday, August 01, 2019 3:04 PM
> *To:* 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu 
> <mailto:labnetwork at mtl.mit.edu>>
> *Subject:* [labnetwork] Dicing Saw Advice.....
>
> Hi everyone, I?m hoping the group can provide some advice regarding 
> dicing and dicing saws.
>
> We have a refurbished (within the past 3yrs) MicroAutomation MA1006 
> <https://urldefense.proofpoint.com/v2/url?u=https-3A__engineering.tufts.edu_microfab_capabilities_MA1006Saw.htm&d=DwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=nuBi9zk2EtI6eQL594rhhH5VsjHUTxPycO_Gg5IDIM8&s=3PgdUx-pKubD7Vy0tdjZzybiPz87wKFgXWO_0GbQRMg&e=> 
> saw which requires significant time/resources to keep online. 
> Unfortunately, it is underutilized, only 1-2 dicing jobs per month. 
> With such poor bang-for-the-buck we?re considering alternatives -
>
>   * A different service provider ? maybe our support is subpar?
>
> For those who have similar tools, who maintains them? What are your 
> results?
>
>   * Purchase a different, hopefully more reliable saw
>
> For those with other saws, what do you have? Can you comment on 
> reliability? Consumable costs? Ease of use?
>
>   * Remove the saw and do not replace it
>
> Losing capabilities is suboptimal and perhaps sets a perilous 
> precedent (we are university lab, none of our tools are justified 
> **economically**). Have others done this? Can anyone recommend a 
> source for dicing services ? specifically for small, infrequent jobs?
>
>   * Other possibilities we haven?t considered?
>
> I?m eager to hear various perspectives and experiences.
>
> jim
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From usha at stanford.edu  Fri Aug  2 12:50:34 2019
From: usha at stanford.edu (Usha Raghuram)
Date: Fri, 2 Aug 2019 16:50:34 +0000
Subject: [labnetwork] Dicing Saw Advice.....
In-Reply-To: <CAGOt4s11EV=dQNmuLEGdymimVVi8R76jWdE4538OepGCPGDp2w@mail.gmail.com>
References: <676C9381B5E6AC4FAE9CD9CFCC40DF1E010BB05D8A@SSVMEXDAG01MB01.tufts.ad.tufts.edu>
 <BL0PR07MB4004FD33B1F7C852839B7B71DFDE0@BL0PR07MB4004.namprd07.prod.outlook.com>
 <CAGOt4s11EV=dQNmuLEGdymimVVi8R76jWdE4538OepGCPGDp2w@mail.gmail.com>
Message-ID: <BYAPR02MB49033AB9F0891DE8A705EB56B8D90@BYAPR02MB4903.namprd02.prod.outlook.com>

We have been using DISCO wafersaw at Stanford for the last 5 years with minimal down time and over 300 users using the tool in that time frame.

Best,

Usha

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Youry Borisenkov
Sent: Thursday, August 1, 2019 4:45 PM
To: Paolini, Steven <spaolini at cns.fas.harvard.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Dicing Saw Advice.....

Definitely disco. I had the competitive?s vendor engineers coming over to our facility to understand how Disco can be so good. The dicing experience is very convenient (after a rather short learning curve). The machine is very reliable and does not require much maintenance, if it?s not being abused.. i.e. good cooling water (preferably DI), weekly cleaning of the chamber, etc...

Best,
Youry

On Thu, Aug 1, 2019 at 7:38 PM Paolini, Steven <spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>> wrote:
That photo of the MicroAutomation saw gave me some creepy flashbacks! I worked on a fleet of those about 25 years ago.
Two vendors come to mind, one being K&S and another being Disco. I have experience with both, but Disco has been the most developed and supportive dicing saw vendor.
Good luck,

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.<https://www.google.com/maps/search/11+Oxford+St.+%0D%0A+Cambridge,+MA+02138?entry=gmail&source=g>
Cambridge, MA 02138<https://www.google.com/maps/search/11+Oxford+St.+%0D%0A+Cambridge,+MA+02138?entry=gmail&source=g>
617- 496- 9816
spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>
www.cns.fas.harvard.edu<http://www.cns.fas.harvard.edu>

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Vlahakis, James
Sent: Thursday, August 01, 2019 3:04 PM
To: 'labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>' <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] Dicing Saw Advice.....

Hi everyone, I?m hoping the group can provide some advice regarding dicing and dicing saws.

We have a refurbished (within the past 3yrs) MicroAutomation MA1006<https://urldefense.proofpoint.com/v2/url?u=https-3A__engineering.tufts.edu_microfab_capabilities_MA1006Saw.htm&d=DwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=nuBi9zk2EtI6eQL594rhhH5VsjHUTxPycO_Gg5IDIM8&s=3PgdUx-pKubD7Vy0tdjZzybiPz87wKFgXWO_0GbQRMg&e=> saw which requires significant time/resources to keep online. Unfortunately, it is underutilized, only 1-2 dicing jobs per month. With such poor bang-for-the-buck we?re considering alternatives -


  *   A different service provider ? maybe our support is subpar?

For those who have similar tools, who maintains them? What are your results?

  *   Purchase a different, hopefully more reliable saw

For those with other saws, what do you have? Can you comment on reliability? Consumable costs? Ease of use?

  *   Remove the saw and do not replace it

Losing capabilities is suboptimal and perhaps sets a perilous precedent (we are university lab, none of our tools are justified *economically*). Have others done this? Can anyone recommend a source for dicing services ? specifically for small, infrequent jobs?

  *   Other possibilities we haven?t considered?

I?m eager to hear various perspectives and experiences.

jim



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From James.Vlahakis at tufts.edu  Fri Aug  2 14:47:32 2019
From: James.Vlahakis at tufts.edu (Vlahakis, James)
Date: Fri, 2 Aug 2019 18:47:32 +0000
Subject: [labnetwork] Dicing Saw Advice.....
In-Reply-To: <494730822.3219213.1564759568737.JavaMail.zimbra@polymtl.ca>
References: <676C9381B5E6AC4FAE9CD9CFCC40DF1E010BB05D8A@SSVMEXDAG01MB01.tufts.ad.tufts.edu>
 <BL0PR07MB4004FD33B1F7C852839B7B71DFDE0@BL0PR07MB4004.namprd07.prod.outlook.com>
 <VI1PR10MB1983E6A39B391BF8F8C27868D6D90@VI1PR10MB1983.EURPRD10.PROD.OUTLOOK.COM>
 <494730822.3219213.1564759568737.JavaMail.zimbra@polymtl.ca>
Message-ID: <676C9381B5E6AC4FAE9CD9CFCC40DF1E010BB0DC9F@tabvmexdag1mb03.tufts.ad.tufts.edu>

Hi Christophe, thanks for the info, ADT users have very positive experience with the saws

Have a good weekend

jim

From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Christophe Cl?ment
Sent: Friday, August 2, 2019 11:26 AM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Dicing Saw Advice.....

Hello, I will second Shimon's comment.
Here at Polytechnic School of Montreal, we have an ADT dicing 7100 for 10 years now with relative few maintenances to do (cleaning, blade calibration..etc). The tool is very easy to use and to program. Cost for blades are around 35 US$, we buy it directly from ADT in Israel, and we have also good service from ADT US. We bought the tool new in 2010, and we do not regret our choice so far.
Hope this help!
Christophe Cl?ment


________________________________
De: "Shimon Eliav" <shimonel at savion.huji.ac.il<mailto:shimonel at savion.huji.ac.il>>
?: "Paolini, Steven" <spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>>, "Vlahakis, James K." <james.vlahakis at tufts.edu<mailto:james.vlahakis at tufts.edu>>, "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Envoy?: Vendredi 2 Ao?t 2019 01:36:42
Objet: Re: [labnetwork] Dicing Saw Advice.....

As Steve, I also got the exact same feeling when I saw the picture: I refurbished one of those machines some 30 years ago. Today we have an ADT system. It is simple to use, ease to program and all in all we are very satisfied with it: it is running for more than ten years with not big maintenance issues. It is a ?work horse? and its flexibility makes it very suitable for academic use. The support we have here in Israel is nice (perhaps also in US). The machine we got was an ADT demo system, we purchased it by half price, some 60k$.
Good luck!

Shimon Eliav
The Unit for Nano Fabrication (UNF)
The Hebrew University of Jerusalem

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven
Sent: Friday, 2 August 2019 0:48
To: Vlahakis, James K. <james.vlahakis at tufts.edu<mailto:james.vlahakis at tufts.edu>>; 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: Re: [labnetwork] Dicing Saw Advice.....

That photo of the MicroAutomation saw gave me some creepy flashbacks! I worked on a fleet of those about 25 years ago.
Two vendors come to mind, one being K&S and another being Disco. I have experience with both, but Disco has been the most developed and supportive dicing saw vendor.
Good luck,

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>
www.cns.fas.harvard.edu<http://www.cns.fas.harvard.edu>

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Vlahakis, James
Sent: Thursday, August 01, 2019 3:04 PM
To: 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] Dicing Saw Advice.....

Hi everyone, I?m hoping the group can provide some advice regarding dicing and dicing saws.

We have a refurbished (within the past 3yrs) MicroAutomation MA1006<https://urldefense.proofpoint.com/v2/url?u=https-3A__engineering.tufts.edu_microfab_capabilities_MA1006Saw.htm&d=DwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=nuBi9zk2EtI6eQL594rhhH5VsjHUTxPycO_Gg5IDIM8&s=3PgdUx-pKubD7Vy0tdjZzybiPz87wKFgXWO_0GbQRMg&e=> saw which requires significant time/resources to keep online. Unfortunately, it is underutilized, only 1-2 dicing jobs per month. With such poor bang-for-the-buck we?re considering alternatives -

?         A different service provider ? maybe our support is subpar?

For those who have similar tools, who maintains them? What are your results?
?         Purchase a different, hopefully more reliable saw

For those with other saws, what do you have? Can you comment on reliability? Consumable costs? Ease of use?
?         Remove the saw and do not replace it

Losing capabilities is suboptimal and perhaps sets a perilous precedent (we are university lab, none of our tools are justified *economically*). Have others done this? Can anyone recommend a source for dicing services ? specifically for small, infrequent jobs?
?         Other possibilities we haven?t considered?

I?m eager to hear various perspectives and experiences.

jim




_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From bill_flounders at berkeley.edu  Fri Aug  2 18:20:09 2019
From: bill_flounders at berkeley.edu (A. William (Bill) FLOUNDERS)
Date: Fri, 2 Aug 2019 15:20:09 -0700
Subject: [labnetwork] Dicing Saw Advice.....
In-Reply-To: <676C9381B5E6AC4FAE9CD9CFCC40DF1E010BB05D8A@SSVMEXDAG01MB01.tufts.ad.tufts.edu>
References: <676C9381B5E6AC4FAE9CD9CFCC40DF1E010BB05D8A@SSVMEXDAG01MB01.tufts.ad.tufts.edu>
Message-ID: <CAHxjShn9kFAvZ8Xxx0+T+JMeYWSSYisrg73PfRt2zj8-OdOn-A@mail.gmail.com>

Since this has become a poll of sorts:
Disco, 100's of users, highest quality, trouble free
Bill Flounders
UC Berkeley

On Thu, Aug 1, 2019 at 12:49 PM Vlahakis, James <James.Vlahakis at tufts.edu>
wrote:

> Hi everyone, I?m hoping the group can provide some advice regarding dicing
> and dicing saws.
>
>
>
> We have a refurbished (within the past 3yrs) MicroAutomation MA1006
> <https://engineering.tufts.edu/microfab/capabilities/MA1006Saw.htm> saw
> which requires significant time/resources to keep online. Unfortunately, it
> is underutilized, only 1-2 dicing jobs per month. With such poor
> bang-for-the-buck we?re considering alternatives -
>
>
>
>    - A different service provider ? maybe our support is subpar?
>
> For those who have similar tools, who maintains them? What are your
> results?
>
>    - Purchase a different, hopefully more reliable saw
>
> For those with other saws, what do you have? Can you comment on
> reliability? Consumable costs? Ease of use?
>
>    - Remove the saw and do not replace it
>
> Losing capabilities is suboptimal and perhaps sets a perilous precedent
> (we are university lab, none of our tools are justified **economically**).
> Have others done this? Can anyone recommend a source for dicing services ?
> specifically for small, infrequent jobs?
>
>    - Other possibilities we haven?t considered?
>
>
>
> I?m eager to hear various perspectives and experiences.
>
>
>
> jim
>
>
>
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
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From james.beall at nist.gov  Mon Aug  5 12:52:48 2019
From: james.beall at nist.gov (Beall, James A. (Fed))
Date: Mon, 5 Aug 2019 16:52:48 +0000
Subject: [labnetwork] Dicing Saw Advice.....
In-Reply-To: <CAHxjShn9kFAvZ8Xxx0+T+JMeYWSSYisrg73PfRt2zj8-OdOn-A@mail.gmail.com>
References: <676C9381B5E6AC4FAE9CD9CFCC40DF1E010BB05D8A@SSVMEXDAG01MB01.tufts.ad.tufts.edu>
 <CAHxjShn9kFAvZ8Xxx0+T+JMeYWSSYisrg73PfRt2zj8-OdOn-A@mail.gmail.com>
Message-ID: <C0032476-B7C8-44FC-B76B-E82C4A83AC77@nist.gov>

Ditto what Bill F. reported. We have 2 DISCO DAD3220 (one set up for silicon and one for hard materials).
They are very solid with many users. We have DISCO service them ~every 2 years.


Jim Beall
National Institute of Standards and Technology
Quantum Sensors Group
Mailcode 687.08
325 Broadway 1C-110
Boulder, CO 80305-3328
303-497-5989
303-497-3042 (fax)

On Aug 2, 2019, at 4:20 PM, A. William (Bill) FLOUNDERS <bill_flounders at berkeley.edu<mailto:bill_flounders at berkeley.edu>> wrote:

Since this has become a poll of sorts:
Disco, 100's of users, highest quality, trouble free
Bill Flounders
UC Berkeley

On Thu, Aug 1, 2019 at 12:49 PM Vlahakis, James <James.Vlahakis at tufts.edu<mailto:James.Vlahakis at tufts.edu>> wrote:
Hi everyone, I?m hoping the group can provide some advice regarding dicing and dicing saws.

We have a refurbished (within the past 3yrs) MicroAutomation MA1006<https://gcc01.safelinks.protection.outlook.com/?url=https%3A%2F%2Fengineering.tufts.edu%2Fmicrofab%2Fcapabilities%2FMA1006Saw.htm&data=02%7C01%7Cjames.beall%40nist.gov%7C507a488af2344990d67808d717a46050%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C1%7C637003867075897169&sdata=riTIX5ox1lG6wS9qJBa73f6N2BBeVCLvw7UplBlPIvM%3D&reserved=0> saw which requires significant time/resources to keep online. Unfortunately, it is underutilized, only 1-2 dicing jobs per month. With such poor bang-for-the-buck we?re considering alternatives -


  *   A different service provider ? maybe our support is subpar?

For those who have similar tools, who maintains them? What are your results?

  *   Purchase a different, hopefully more reliable saw

For those with other saws, what do you have? Can you comment on reliability? Consumable costs? Ease of use?

  *   Remove the saw and do not replace it

Losing capabilities is suboptimal and perhaps sets a perilous precedent (we are university lab, none of our tools are justified *economically*). Have others done this? Can anyone recommend a source for dicing services ? specifically for small, infrequent jobs?

  *   Other possibilities we haven?t considered?

I?m eager to hear various perspectives and experiences.

jim



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork<https://gcc01.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&data=02%7C01%7Cjames.beall%40nist.gov%7C507a488af2344990d67808d717a46050%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C1%7C637003867075907162&sdata=PsZmtHCR71cgQSH%2Bh0WNQ%2FHHOp2rnHf%2BfMtzBXUqKAg%3D&reserved=0>
_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://gcc01.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&amp;data=02%7C01%7Cjames.beall%40nist.gov%7C507a488af2344990d67808d717a46050%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C1%7C637003867075927151&amp;sdata=NbKIN3sW6HE3OCJ1zijtf5xhpTBEW1Yy6yYJksPwc78%3D&amp;reserved=0

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From shimonel at savion.huji.ac.il  Tue Aug  6 05:42:27 2019
From: shimonel at savion.huji.ac.il (Shimon Eliav)
Date: Tue, 6 Aug 2019 09:42:27 +0000
Subject: [labnetwork] EDC from Laurell
Message-ID: <VI1PR10MB19837D86D4FE3867C144D9D8D6D50@VI1PR10MB1983.EURPRD10.PROD.OUTLOOK.COM>

Hello everybody,

We are considering to purchase an EDC<http://www.laurell.com/spin-coater/?model=EDC-650-23> (Etch Develop Clean) spinner from Laurell to deal with Piranha cleaning of wafers, masks and small Si pieces. Someone have already experience with Piranha cleaning using this spinner?
Thanks in advance,

Shimon Eliav
The Hebrew University of Jerusalem
The Unit for Nano Fabrication (UNF)
Jerusalem - ISRAEL


From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of A. William (Bill) FLOUNDERS
Sent: Saturday, 3 August 2019 1:20
To: Vlahakis, James <James.Vlahakis at tufts.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Dicing Saw Advice.....

Since this has become a poll of sorts:
Disco, 100's of users, highest quality, trouble free
Bill Flounders
UC Berkeley

On Thu, Aug 1, 2019 at 12:49 PM Vlahakis, James <James.Vlahakis at tufts.edu<mailto:James.Vlahakis at tufts.edu>> wrote:
Hi everyone, I?m hoping the group can provide some advice regarding dicing and dicing saws.

We have a refurbished (within the past 3yrs) MicroAutomation MA1006<https://engineering.tufts.edu/microfab/capabilities/MA1006Saw.htm> saw which requires significant time/resources to keep online. Unfortunately, it is underutilized, only 1-2 dicing jobs per month. With such poor bang-for-the-buck we?re considering alternatives -


  *   A different service provider ? maybe our support is subpar?

For those who have similar tools, who maintains them? What are your results?

  *   Purchase a different, hopefully more reliable saw

For those with other saws, what do you have? Can you comment on reliability? Consumable costs? Ease of use?

  *   Remove the saw and do not replace it

Losing capabilities is suboptimal and perhaps sets a perilous precedent (we are university lab, none of our tools are justified *economically*). Have others done this? Can anyone recommend a source for dicing services ? specifically for small, infrequent jobs?

  *   Other possibilities we haven?t considered?

I?m eager to hear various perspectives and experiences.

jim



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From rmorrison at draper.com  Tue Aug  6 08:07:48 2019
From: rmorrison at draper.com (Morrison, Richard H., Jr)
Date: Tue, 6 Aug 2019 12:07:48 +0000
Subject: [labnetwork] EDC from Laurell
In-Reply-To: <VI1PR10MB19837D86D4FE3867C144D9D8D6D50@VI1PR10MB1983.EURPRD10.PROD.OUTLOOK.COM>
References: <VI1PR10MB19837D86D4FE3867C144D9D8D6D50@VI1PR10MB1983.EURPRD10.PROD.OUTLOOK.COM>
Message-ID: <bedd68e888d3484fa48b02163dd4232d@draper.com>

I have used a Laurell spinner for cleans and acid etches. You have to make sure that the delivery system for your acids are Teflon coated otherwise any metal surfaces will be corroded. I would mount the spinner directly in to a fume hood and of course you wil need the proper waste drain for the material you are going to etch.

For piranha you cannot use a pressure delivery tank much too dangerous, you will need to have 2 tanks one for Sulfuric and one for peroxide and develop a ratio to get the proper mix at the wafer surface. Remember that the mix creates a lot of heat so process development will be key.

Good luck

Rick


Richard H. Morrison
Principal Member of the Technical Staff
Draper
555 Technology Square
Cambridge, MA
02139-3573

Work  617-258-3420
Cell  508-930-3461
www.draper.com<http://www.draper.com>



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shimon Eliav
Sent: Tuesday, August 06, 2019 5:42 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] EDC from Laurell

Hello everybody,

We are considering to purchase an EDC<http://www.laurell.com/spin-coater/?model=EDC-650-23> (Etch Develop Clean) spinner from Laurell to deal with Piranha cleaning of wafers, masks and small Si pieces. Someone have already experience with Piranha cleaning using this spinner?
Thanks in advance,

Shimon Eliav
The Hebrew University of Jerusalem
The Unit for Nano Fabrication (UNF)
Jerusalem - ISRAEL


From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of A. William (Bill) FLOUNDERS
Sent: Saturday, 3 August 2019 1:20
To: Vlahakis, James <James.Vlahakis at tufts.edu<mailto:James.Vlahakis at tufts.edu>>
Cc: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Dicing Saw Advice.....

Since this has become a poll of sorts:
Disco, 100's of users, highest quality, trouble free
Bill Flounders
UC Berkeley

On Thu, Aug 1, 2019 at 12:49 PM Vlahakis, James <James.Vlahakis at tufts.edu<mailto:James.Vlahakis at tufts.edu>> wrote:
Hi everyone, I?m hoping the group can provide some advice regarding dicing and dicing saws.

We have a refurbished (within the past 3yrs) MicroAutomation MA1006<https://engineering.tufts.edu/microfab/capabilities/MA1006Saw.htm> saw which requires significant time/resources to keep online. Unfortunately, it is underutilized, only 1-2 dicing jobs per month. With such poor bang-for-the-buck we?re considering alternatives -


  *   A different service provider ? maybe our support is subpar?

For those who have similar tools, who maintains them? What are your results?

  *   Purchase a different, hopefully more reliable saw

For those with other saws, what do you have? Can you comment on reliability? Consumable costs? Ease of use?

  *   Remove the saw and do not replace it

Losing capabilities is suboptimal and perhaps sets a perilous precedent (we are university lab, none of our tools are justified *economically*). Have others done this? Can anyone recommend a source for dicing services ? specifically for small, infrequent jobs?

  *   Other possibilities we haven?t considered?

I?m eager to hear various perspectives and experiences.

jim



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
________________________________
Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
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From travisgabel at boisestate.edu  Tue Aug  6 11:52:08 2019
From: travisgabel at boisestate.edu (Travis Gabel)
Date: Tue, 6 Aug 2019 09:52:08 -0600
Subject: [labnetwork] Wyko NT1100 parts
Message-ID: <CAMjbU8fqDWoJ-3Rbrm+QHts2NCMVDuvrAR=vPk-qA+hQR=c-9Q@mail.gmail.com>

Hi

Does any one have a lead on parts for a Wyko NT1100 optical profiler? Our
monitor on the instrument seems to be going out. It's saturating with very
little light intensity. The screen goes blank and gives a no input message.
We are having to use the intensity screen on the machine pc to find our
fringes.

The monitor itself is obsolete and Bruker doesn't have any.

Thanks in advance.
-Travis
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From km at highrioptics.com  Tue Aug  6 13:54:41 2019
From: km at highrioptics.com (Keiko Munechika)
Date: Tue, 6 Aug 2019 17:54:41 +0000
Subject: [labnetwork] Job Opportunity Nanophotonics Engineer San Francisco
	Bay Area
Message-ID: <MWHPR1801MB19186EC7DFBD697E03005097B4D50@MWHPR1801MB1918.namprd18.prod.outlook.com>

Dear all,

I am reaching out to you today to see if you can help spread the word for a job opening at our company. I appreciate your help and your valuable time in advance.

HighRI Optics, Inc. is developing a novel technology for fabricating printable photonic devices. We have an immediate opening for a Nanophotonics Engineer. We are looking for someone with a strong background in both Optics and in Nanofabrication.
The Nanophotonics Engineer will be in charge of design, fabrication, and optical characterization of novel printable photonic devices.

Required:

  *   Ph.D. in a field of Science or Engineering
  *   Experience in optical design and simulation
  *   Expertise in the optical characterization of photonic structures, including building set ups
  *   Nanofabrication experience (etch, litho, and typical metrology in the cleanroom)
  *   Strong communication skills

HighRI Optics, Inc is a new spin-off company from aBeam Technologies, Inc. and looking to expand our nanofabrication activity. The main job activity will be at Molecular Foundry, Berkeley.

If you know anyone who may be a good fit, please pass on my information km at highrioptics.com<mailto:km at highrioptics.com>.

Sincerely,

Keiko

Keiko Munechika, Ph.D.
Chief Executive Officer
HighRI Optics, Inc.
https://highrioptics.com/
[logo_transparent_background]


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From brunson at uw.edu  Tue Aug  6 16:31:08 2019
From: brunson at uw.edu (Mark Brunson)
Date: Tue, 6 Aug 2019 13:31:08 -0700
Subject: [labnetwork] Wyko NT1100 parts
In-Reply-To: <CAMjbU8fqDWoJ-3Rbrm+QHts2NCMVDuvrAR=vPk-qA+hQR=c-9Q@mail.gmail.com>
References: <CAMjbU8fqDWoJ-3Rbrm+QHts2NCMVDuvrAR=vPk-qA+hQR=c-9Q@mail.gmail.com>
Message-ID: <F5459D7D-DBE4-4724-9974-0286FFC80A91@uw.edu>

We have been able to get service and parts for our NT3300 from Anthony Dao. I believe that he was an engineer for Wyko or Veeco before Bruker bought the product line. 

Email address: a.dao at directadvop-us.com <mailto:a.dao at directadvop-us.com>
Website: http://www.directadvop-us.com/index.html <http://www.directadvop-us.com/index.html>



Mark Brunson
Research Engineer
Washington Nanofabrication Facility
University of Washington
Fluke Hall 115, Box 352143
(206)543-6267

> On Aug 6, 2019, at 8:52 AM, Travis Gabel <travisgabel at boisestate.edu> wrote:
> 
> Hi 
> 
> Does any one have a lead on parts for a Wyko NT1100 optical profiler? Our monitor on the instrument seems to be going out. It's saturating with very little light intensity. The screen goes blank and gives a no input message. We are having to use the intensity screen on the machine pc to find our fringes.
> 
> The monitor itself is obsolete and Bruker doesn't have any. 
> 
> Thanks in advance.
> -Travis
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From christophe.clement at polymtl.ca  Wed Aug  7 15:09:05 2019
From: christophe.clement at polymtl.ca (=?utf-8?Q?Christophe_Cl=C3=A9ment?=)
Date: Wed, 7 Aug 2019 15:09:05 -0400 (EDT)
Subject: [labnetwork] Arsenic contamination
Message-ID: <0b6801d54d53$9543a3c0$bfcaeb40$@polymtl.ca>

Hello Labnetwork community , 

We have a Microscope (LEEM) that has been contaminated with Arsenic
(evaporation). We would like to get rid of this product but we do not know
the proper way to proceed. Do you have any suggestion regarding the cleaning
we should do? Or Maybe a company in Canada / US capable of doing such
cleaning?

We also would like to find someone which will certify that the tool is
exempt of any Arsenic trace after the cleaning.

 

Thank you for your help,

Best

Christophe

 

 

Christophe Cl?ment

Technicien laboratoire

Laboratoire de microfabrication (LMF)

Groupe des Couches Minces (GCM)  <http://www.gcmlab.ca/> www.gcmlab.ca

Ecole Polytechnique de Montr?al  <http://www.polymtl.ca/> www.polymtl.ca

D?partement de g?nie physique 

* 2900 Boulevard Edouard Monpetit

Pavillon JAB
Campus de l'Universit? de Montr?al
Montr?al (Qu?bec) H3T 1J4


8  <mailto:christophe.clement at polymtl.ca> christophe.clement at polymtl.ca

( 514 340 4711 #2417

Fax : 514 340 4711

 

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From wjkiethe at ncsu.edu  Thu Aug  8 17:07:49 2019
From: wjkiethe at ncsu.edu (Bill Kiether)
Date: Thu, 8 Aug 2019 17:07:49 -0400
Subject: [labnetwork] Dielectric films using BPSG
Message-ID: <CAN1vinvADS8gj+QBa1UKeo2oSdQ6C41m43VqSeN=-TQK3AAJaw@mail.gmail.com>

Hello,

We are looking to add a process for depositing ~ 0.5 micron dielectric
layers using a BPSG process for LPCVD with TEOS and organo-metallic
precursors instead of diborane or phosphine.  Does anyone have a similar
process set up?  Even if you use a PECVD process, but with
organo-metallics, we would like to talk to you about your sources for the
OM's.

Alterantively, if anyone has a good process set-up, we may do some
outsourcing as we get our process flow up to speed.

Bill Kiether
NCSU Photonic Lab Manager
wjkiethe at ncsu.edu
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From mheiden at engr.ucr.edu  Mon Aug 12 12:48:56 2019
From: mheiden at engr.ucr.edu (Mark Heiden)
Date: Mon, 12 Aug 2019 16:48:56 +0000
Subject: [labnetwork] Orbital Welding Services So. Cal.
Message-ID: <c47eeab6276b4508915844a24ea1d772@engr.ucr.edu>

Greetings,

Does anyone have a recommendation for an orbital welding contractor capable of doing coaxial toxic gas lines in Southern California?

Thanks in advance..


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551
http://cnsebcoe.ucr.acsitefactory.com/


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From julia.aebersold at louisville.edu  Mon Aug 12 16:30:49 2019
From: julia.aebersold at louisville.edu (Aebersold,Julia W.)
Date: Mon, 12 Aug 2019 20:30:49 +0000
Subject: [labnetwork] Orbital Welding Services So. Cal.
In-Reply-To: <c47eeab6276b4508915844a24ea1d772@engr.ucr.edu>
References: <c47eeab6276b4508915844a24ea1d772@engr.ucr.edu>
Message-ID: <DM5PR03MB2794612B445504662F1070CC86D30@DM5PR03MB2794.namprd03.prod.outlook.com>

Applied Energy Systems or AES.

https://www.appliedenergysystems.com/

Cheers!

Julia Aebersold
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Heiden
Sent: Monday, August 12, 2019 12:49 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Orbital Welding Services So. Cal.

Greetings,

Does anyone have a recommendation for an orbital welding contractor capable of doing coaxial toxic gas lines in Southern California?

Thanks in advance..


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551
http://cnsebcoe.ucr.acsitefactory.com/<https://urldefense.proofpoint.com/v2/url?u=http-3A__cnsebcoe.ucr.acsitefactory.com_&d=DwMFAg&c=OAG1LQNACBDguGvBeNj18Swhr9TMTjS-x4O_KuapPgY&r=l9C3cuOkWyGd6C0ye_FDTBHMFl4lPXPJztVHQPL_Bao&m=xvKHXJwl16GLY2JoHusmlCJXGbCo909h1VQCwTCAKSM&s=lAa3nhsK6GTcG80IlNXVs0XzHz2WA3q4Uw-RPGRWe6w&e=>


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From jpalmer at Princeton.EDU  Mon Aug 12 16:32:05 2019
From: jpalmer at Princeton.EDU (Joseph E. Palmer)
Date: Mon, 12 Aug 2019 16:32:05 -0400
Subject: [labnetwork] Orbital Welding Services So. Cal.
In-Reply-To: <c47eeab6276b4508915844a24ea1d772@engr.ucr.edu>
References: <c47eeab6276b4508915844a24ea1d772@engr.ucr.edu>
Message-ID: <55a56ec4-da04-1712-b70d-1dcf75733e4b@exchange.princeton.edu>

Hands down, I recommend Steve Buerkel and Applied Energy Systems.

Regards,

Joe Palmer

On 8/12/2019 12:48 PM, Mark Heiden wrote:
>
> Greetings,
>
> Does anyone have a recommendation for an orbital welding contractor 
> capable of doing coaxial toxic gas lines in Southern California?
>
> Thanks in advance..
>
> Mark Heiden
>
> NanoFab Cleanroom Manager
>
> Center for Nanoscale Science and Engineering
>
> University of California, Riverside
>
> 951-827-2551
>
> http://cnsebcoe.ucr.acsitefactory.com/
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From cekendri at mtu.edu  Mon Aug 12 20:30:23 2019
From: cekendri at mtu.edu (Chito Kendrick)
Date: Mon, 12 Aug 2019 20:30:23 -0400
Subject: [labnetwork] Orbital Welding Services So. Cal.
In-Reply-To: <c47eeab6276b4508915844a24ea1d772@engr.ucr.edu>
References: <c47eeab6276b4508915844a24ea1d772@engr.ucr.edu>
Message-ID: <cb234e01-2c7d-dd66-7d12-a83e69cb9c7d@mtu.edu>

Another alternative is Dennis Schweiger (Innovative Systems Integration, 
Inc) he is at the Lurie Nanofabrication Facility in Michigan.

Chito Kendrick

On 8/12/2019 12:48 PM, Mark Heiden wrote:
>
> Greetings,
>
> Does anyone have a recommendation for an orbital welding contractor 
> capable of doing coaxial toxic gas lines in Southern California?
>
> Thanks in advance..
>
> Mark Heiden
>
> NanoFab Cleanroom Manager
>
> Center for Nanoscale Science and Engineering
>
> University of California, Riverside
>
> 951-827-2551
>
> http://cnsebcoe.ucr.acsitefactory.com/
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
-- 
Chito Kendrick Ph.D.

Chito Kendrick Website <https://sites.google.com/site/chitokendrickphd/>
MTU Microfabrication Website <http://www.mtu.edu/microfabrication/>

Managing Director of the Microfabrication Facility
Research Assistant Professor
Electrical and Computer Engineering
Michigan Technological University
Room 436 M&M Building
1400 Townsend Dr.
Houghton, Michigan 49931-1295

814-308-4255
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From grallion at ncsu.edu  Tue Aug 13 07:44:31 2019
From: grallion at ncsu.edu (Greg Allion)
Date: Tue, 13 Aug 2019 07:44:31 -0400
Subject: [labnetwork] Orbital Welding Services So. Cal.
In-Reply-To: <cb234e01-2c7d-dd66-7d12-a83e69cb9c7d@mtu.edu>
References: <c47eeab6276b4508915844a24ea1d772@engr.ucr.edu>
 <cb234e01-2c7d-dd66-7d12-a83e69cb9c7d@mtu.edu>
Message-ID: <CAAFf2sCV31xNwBng1ZroGpG60rD4j8UpLkHvgrQFZNh7+uH2Eg@mail.gmail.com>

Definitely contact Dennis at ISI also.  He does very impressive work.
Great guy too and will likely bid very well.
-Greg

Greg Allion
NC State University Nanofabrication facility (NNF)
Lithography engineer

On Mon, Aug 12, 2019 at 9:16 PM Chito Kendrick <cekendri at mtu.edu> wrote:

> Another alternative is Dennis Schweiger (Innovative Systems Integration,
> Inc) he is at the Lurie Nanofabrication Facility in Michigan.
>
> Chito Kendrick
> On 8/12/2019 12:48 PM, Mark Heiden wrote:
>
> Greetings,
>
>
>
> Does anyone have a recommendation for an orbital welding contractor
> capable of doing coaxial toxic gas lines in Southern California?
>
>
>
> Thanks in advance..
>
>
>
>
>
> Mark Heiden
>
> NanoFab Cleanroom Manager
>
> Center for Nanoscale Science and Engineering
>
> University of California, Riverside
>
> 951-827-2551
>
> http://cnsebcoe.ucr.acsitefactory.com/
>
>
>
>
>
> _______________________________________________
> labnetwork mailing listlabnetwork at mtl.mit.eduhttps://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
> --
> Chito Kendrick Ph.D.
>
> Chito Kendrick Website <https://sites.google.com/site/chitokendrickphd/>
> MTU Microfabrication Website <http://www.mtu.edu/microfabrication/>
>
> Managing Director of the Microfabrication Facility
> Research Assistant Professor
> Electrical and Computer Engineering
> Michigan Technological University
> Room 436 M&M Building
> 1400 Townsend Dr.
> Houghton, Michigan 49931-1295
>
> 814-308-4255
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
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From michael.call at maine.edu  Thu Aug 15 11:23:38 2019
From: michael.call at maine.edu (Michael Call)
Date: Thu, 15 Aug 2019 11:23:38 -0400
Subject: [labnetwork] K&S 775 dicing saw manual
Message-ID: <CADjUyUwE3AJoiT9JQEfELsCeaY-2jb2nhmt13CcD7bPvayb6bw@mail.gmail.com>

Hello,

We have a model 775 dicing saw that was manufactured by Kulikce & Soffa.
Does anyone know where I can find a service manual.  I specifically need a
procedure how to level the chuck and adjust the blade height so that the y
axis is parallel to the chuck.  The system was retrofitted with new
operating software in 1999 by Diamond Touch Technologies.

Thank you.

-- 
Mike Call
Research Engineer
University of Maine
Frontier Institute for Research in Sensor Technologies (FIRST)
Coordinated Research entities Cleanroom
ESRB Barrows Hall room 294
207-581-3382
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From mheiden at engr.ucr.edu  Thu Aug 15 18:14:48 2019
From: mheiden at engr.ucr.edu (Mark Heiden)
Date: Thu, 15 Aug 2019 22:14:48 +0000
Subject: [labnetwork] Orbital Welding Services So. Cal.
In-Reply-To: <CAAFf2sCV31xNwBng1ZroGpG60rD4j8UpLkHvgrQFZNh7+uH2Eg@mail.gmail.com>
References: <c47eeab6276b4508915844a24ea1d772@engr.ucr.edu>
 <cb234e01-2c7d-dd66-7d12-a83e69cb9c7d@mtu.edu>
 <CAAFf2sCV31xNwBng1ZroGpG60rD4j8UpLkHvgrQFZNh7+uH2Eg@mail.gmail.com>
Message-ID: <2a3edfcbedf140edb9c7792f4079d08f@engr.ucr.edu>

Thank you all for the suggestions. We found a company (Murray Company) that coincidentally has a big project just down the street and they seem to have all the requisite skills and experience for this job.  Their main shop is in So. Cal. also which is an advantage.

Best!


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551
http://cnsebcoe.ucr.acsitefactory.com/



From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Greg Allion
Sent: Tuesday, August 13, 2019 4:45 AM
To: Chito Kendrick <cekendri at mtu.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Orbital Welding Services So. Cal.

Definitely contact Dennis at ISI also.  He does very impressive work.  Great guy too and will likely bid very well.
-Greg

Greg Allion
NC State University Nanofabrication facility (NNF)
Lithography engineer

On Mon, Aug 12, 2019 at 9:16 PM Chito Kendrick <cekendri at mtu.edu<mailto:cekendri at mtu.edu>> wrote:

Another alternative is Dennis Schweiger (Innovative Systems Integration, Inc) he is at the Lurie Nanofabrication Facility in Michigan.

Chito Kendrick
On 8/12/2019 12:48 PM, Mark Heiden wrote:
Greetings,

Does anyone have a recommendation for an orbital welding contractor capable of doing coaxial toxic gas lines in Southern California?

Thanks in advance..


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551
http://cnsebcoe.ucr.acsitefactory.com/




_______________________________________________

labnetwork mailing list

labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>

https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
--
Chito Kendrick Ph.D.

Chito Kendrick Website<https://sites.google.com/site/chitokendrickphd/>
MTU Microfabrication Website<http://www.mtu.edu/microfabrication/>

Managing Director of the Microfabrication Facility
Research Assistant Professor
Electrical and Computer Engineering
Michigan Technological University
Room 436 M&M Building
1400 Townsend Dr.
Houghton, Michigan 49931-1295

814-308-4255
_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From fouad.karouta at anu.edu.au  Mon Aug 19 00:47:07 2019
From: fouad.karouta at anu.edu.au (Fouad Karouta)
Date: Mon, 19 Aug 2019 04:47:07 +0000
Subject: [labnetwork] CCD Princeton
Message-ID: <SYBPR01MB5307177E17A1764E94056F7CC0A80@SYBPR01MB5307.ausprd01.prod.outlook.com>

Dear network,

We have a CCD camera from Princeton Instruments  used with our Gatan Cathodoluminescence. The CCD camera seems not reacting anymore and we tried to get into contact with Princeton Instruments through their website but unfortunately no reply yet.

Can anyone help us with contact details of someone at Princeton Instruments?

Best regards,
Fouad Karouta

*************************************
Manager ANFF ACT Node
Australian National Fabrication Facility
Research School of Physics and Engineering
L. Huxley Building (#56), Mills Road, Room 4.02
Australian National University
ACT 2601, Canberra, Australia
Tel: + 61 2 6125 7174
Mob: + 61 451 046 412
Email: fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>
http://anff-act.anu.edu.au/

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From Simon.Doe at unisa.edu.au  Tue Aug 20 02:20:14 2019
From: Simon.Doe at unisa.edu.au (Simon Doe)
Date: Tue, 20 Aug 2019 06:20:14 +0000
Subject: [labnetwork] Any concerns with sputtered MoS2 in a vacuum furnace?
Message-ID: <6835700a31cd438cb20b18bab0424807@ITUPW-EXMBOX3C.UniNet.unisa.edu.au>

Hello all
Looking for some guidance on this one.

We have a researcher wishing to develop a sensor fabrication process which includes a thermal treatment at 600-700?C of a silicon wafer with a sputtered layer of MoS2 or In2O3 in vacuum.

My concern is how the MoS2 would behave under vacuum at temperature. Could it vaporise and contaminate the furnace or cause other issues?



Thanks in advance

Regards

Simon
Simon Doe
Facility Manager, Australian National Fabrication Facility-SA Node
Future Industries Institute | University of South Australia | Mawson Lakes  SA  5095
': +61 8 8302 5226<tel:%2B61%208%208302%205226> | 6: +61 8 8302 3755<tel:%2B61%208%208302%203755> | *: simon.doe at unisa.edu.au<mailto:simon.doe at unisa.edu.au>
www.anff-sa.com<http://www.anff-sa.com>

[linkedin]<https://au.linkedin.com/company/anff-south-australia>  [twitter] <https://twitter.com/AnffSa>

CRICOS Provider Number: 00121B
[cid:image003.jpg at 01D1E756.27F8B730]



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From gilheart at rice.edu  Wed Aug 21 14:49:31 2019
From: gilheart at rice.edu (Tim Gilheart)
Date: Wed, 21 Aug 2019 13:49:31 -0500
Subject: [labnetwork] ALD process for ZnO?
Message-ID: <C60FD5EC-5BDB-4282-8D22-33BC1BF937A1@rice.edu>

Greetings all,

We?re working with some of our users who may need to explore ZnO deposition, ideally at lower temperatures (100 C or less). 

We?re not equipped to do this on any of our PVD systems without inviting other problems, but we understand that several teams on this list have reported accomplishing this via ALD.

If anyone has suggestions, process notes, and/or cautionary tales, we?d appreciate hearing your perspective.

Thanks,

-- 
Tim Gilheart, Ph.D.
Research Scientist - Nanofabrication Cleanroom Manager,
Shared Equipment Authority (SEA), Rice University
Office: 713-348-3159 | gilheart at rice.edu



From dp82 at nyu.edu  Thu Aug 22 08:49:13 2019
From: dp82 at nyu.edu (David J Pine)
Date: Thu, 22 Aug 2019 08:49:13 -0400
Subject: [labnetwork] Posting an ad
Message-ID: <4DB4C0DD-CE59-49C6-9A1C-E312CC2302FC@nyu.edu>

I would like to post the following job ad for a cleanroom manager at the NYU Tandon School of engineering.  Please let me know if you have any questions.

https://uscareers-nyu.icims.com/jobs/6483/manager%2c-clean-room-facilities-%26-shared-instrumentation-facility/job?mobile=false&width=960&height=500&bga=true&needsRedirect=false&jan1offset=-300&jun1offset=-240 <https://uscareers-nyu.icims.com/jobs/6483/manager,-clean-room-facilities-&-shared-instrumentation-facility/job?mobile=false&width=960&height=500&bga=true&needsRedirect=false&jan1offset=-300&jun1offset=-240>

__________________________________________________________________________________

David Pine
New York University
Silver Professor 
Chair, Department of Chemical & Biomolecular Engineering
    NYU Tandon School of Engineering
Professor of Physics
    NYU College of Arts & Science
Office (Brooklyn): 702F Rogers Hall [6 MetroTech Center, Brooklyn, New York 11201]
Office (Manhattan): Room 883 [726 Broadway, New York, NY 10003]
Tel:  646-997-3004 (Brooklyn)
Tel:  212-998-7744 (Manhattan)
Web: http://www.physics.nyu.edu/pine/Home.html <http://www.physics.nyu.edu/pine/Home.html>
E-mail:  pine at nyu.edu <mailto:pine at nyu.edu>
__________________________________________________________________________________

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From price.798 at osu.edu  Thu Aug 22 09:24:42 2019
From: price.798 at osu.edu (Price, Aimee)
Date: Thu, 22 Aug 2019 13:24:42 +0000
Subject: [labnetwork] ALD process for ZnO?
In-Reply-To: <C60FD5EC-5BDB-4282-8D22-33BC1BF937A1@rice.edu>
References: <C60FD5EC-5BDB-4282-8D22-33BC1BF937A1@rice.edu>
Message-ID: <BL0PR01MB4403B05F9A4D337269B767BCBCA50@BL0PR01MB4403.prod.exchangelabs.com>

Hi Tim,
We have both 110C and 150C processes for ZnO using DeZn and water on our Picosun Sunale ALD tool.  The 150C is our standard and we had to increase the pulse times for the lower temp process, but we did not do a lot of optimization to get a relatively high quality film (at least from an index of refraction perspective).

Feel free to reach out to me personally for the process details.  Our 110C process was kind of a shot in the dark for a customer as part of an Al doped ZnO process, so we have limited data but I do have index of refraction, growth rate, etc.

Generally speaking the tool vendors have great applications people and ZnO is a fairly standard film for them.  If you haven't already, I'd reach out to your tool vendor and ask them their thoughts.  

Best,
Aimee Price

Sr. Research Associate 
The Ohio State University
Nanotech West Lab
Institute for Materials Research
1381 Kinnear Road
Suite 100
Columbus, OH 43212
614-292-2753



-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Tim Gilheart
Sent: Wednesday, August 21, 2019 2:50 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] ALD process for ZnO?

Greetings all,

We?re working with some of our users who may need to explore ZnO deposition, ideally at lower temperatures (100 C or less). 

We?re not equipped to do this on any of our PVD systems without inviting other problems, but we understand that several teams on this list have reported accomplishing this via ALD.

If anyone has suggestions, process notes, and/or cautionary tales, we?d appreciate hearing your perspective.

Thanks,

--
Tim Gilheart, Ph.D.
Research Scientist - Nanofabrication Cleanroom Manager, Shared Equipment Authority (SEA), Rice University
Office: 713-348-3159 | gilheart at rice.edu


_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork

From bgila at ufl.edu  Thu Aug 22 09:46:57 2019
From: bgila at ufl.edu (Brent Gila)
Date: Thu, 22 Aug 2019 09:46:57 -0400
Subject: [labnetwork] ALD process for ZnO?
In-Reply-To: <C60FD5EC-5BDB-4282-8D22-33BC1BF937A1@rice.edu>
References: <C60FD5EC-5BDB-4282-8D22-33BC1BF937A1@rice.edu>
Message-ID: <5e8cfe5e-e412-2f4e-41e2-f66ec38cf7e0@ufl.edu>

Hello Tim,

Just be aware that methyl byproducts from TMA precursors will decompose 
ZnO on the chamber walls and create dimethylzinc, which will recirculate 
and end up in your films.? After a ZnO ALD run, you should deposit a 
thick layer of something like HfO2 (not Al2O3 from TMA) to seal in the ZnO.

We have had to turn away researchers who wanted to run ZnO in the ALD 
for fear of creating this situation.? We did not want to poison the ALD 
with Zn and effect all the other researchers in the facility.

Best Regards,
Brent

-- 
Brent P. Gila, PhD.
Director, Nanoscale Research Facility
1041 Center Drive
University of Florida
Gainesville, Florida 32611
Tel:352-273-2245
Fax:352-846-2877
email:bgila at ufl.edu



On 8/21/2019 2:49 PM, Tim Gilheart wrote:
> Greetings all,
>
> We?re working with some of our users who may need to explore ZnO deposition, ideally at lower temperatures (100 C or less).
>
> We?re not equipped to do this on any of our PVD systems without inviting other problems, but we understand that several teams on this list have reported accomplishing this via ALD.
>
> If anyone has suggestions, process notes, and/or cautionary tales, we?d appreciate hearing your perspective.
>
> Thanks,
>



From hollingshead.19 at osu.edu  Thu Aug 22 10:09:02 2019
From: hollingshead.19 at osu.edu (Hollingshead, David)
Date: Thu, 22 Aug 2019 14:09:02 +0000
Subject: [labnetwork] ALD process for ZnO?
In-Reply-To: <C60FD5EC-5BDB-4282-8D22-33BC1BF937A1@rice.edu>
References: <C60FD5EC-5BDB-4282-8D22-33BC1BF937A1@rice.edu>
Message-ID: <DM5PR0102MB3368CFE3791652E5EF562D5BF3A50@DM5PR0102MB3368.prod.exchangelabs.com>

Hi Tim,

We regularly run ZnO films on our Picosun SunALE 150-R. We have two "standard" processes, one at 150? and one at 110?, both of which run well. I expect you could drop the temp down further if needed. These both use DEZn and H2O as sources. In addition to the standard ZnO film, we have done some limited work on Al-doped ZnO.

Lower temperature depositions will almost certainly require longer pulse and purge times. For example, our 150? process runs at 0.1 sec pulse / 4 sec purge, while the 110? process is 0.5 sec / 8 sec. We also saw a slight reduction in growth rate from 1.7 ?/cycle @ 150? to 1.58 ?/cycle @ 110?.

If you have any questions, don't hesitate to reach out.

-Dave

Dave Hollingshead?
Senior Research Associate ? Nanotech West Lab
The Ohio State University
Suite 100, 1381 Kinnear Road, Columbus, OH 43212
614.292.1355 Office
hollingshead.19 at osu.edu?osu.edu

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Tim Gilheart
Sent: Wednesday, August 21, 2019 14:50
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] ALD process for ZnO?

Greetings all,

We?re working with some of our users who may need to explore ZnO deposition, ideally at lower temperatures (100 C or less). 

We?re not equipped to do this on any of our PVD systems without inviting other problems, but we understand that several teams on this list have reported accomplishing this via ALD.

If anyone has suggestions, process notes, and/or cautionary tales, we?d appreciate hearing your perspective.

Thanks,

--
Tim Gilheart, Ph.D.
Research Scientist - Nanofabrication Cleanroom Manager, Shared Equipment Authority (SEA), Rice University
Office: 713-348-3159 | gilheart at rice.edu


_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork

From sean.rinehart at yale.edu  Thu Aug 22 10:22:45 2019
From: sean.rinehart at yale.edu (Rinehart, Sean)
Date: Thu, 22 Aug 2019 14:22:45 +0000
Subject: [labnetwork] ALD process for ZnO?
In-Reply-To: <C60FD5EC-5BDB-4282-8D22-33BC1BF937A1@rice.edu>
References: <C60FD5EC-5BDB-4282-8D22-33BC1BF937A1@rice.edu>
Message-ID: <BN6PR08MB24660F387834ECD01CCAEAF399A50@BN6PR08MB2466.namprd08.prod.outlook.com>

Hi Tim,

We haven't grown ZnO in our systems, but it's come up before. Something to keep in mind with DEZ (Diethylzinc) based ZnO deposition is its incompatibility with TMA (Trimethyl Aluminum) based Al2O3. TMA can react with ZnO films to form DEZ, and DEZ can react with Al2O3 to form triethyl aluminum. Both of these byproducts are going to affect your intended results. If you run both processes in the same system you'll want to insulate the two films with a few 10s of nms of something that doesn't react with alkyl ligand precursors, e.g., HfO2.

Hope this helps!

Sean Rinehart
Assistant Director, Cleanroom Operations
Yale University
203 432 4303

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Tim Gilheart
Sent: Wednesday, August 21, 2019 2:50 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] ALD process for ZnO?

Greetings all,

We?re working with some of our users who may need to explore ZnO deposition, ideally at lower temperatures (100 C or less). 

We?re not equipped to do this on any of our PVD systems without inviting other problems, but we understand that several teams on this list have reported accomplishing this via ALD.

If anyone has suggestions, process notes, and/or cautionary tales, we?d appreciate hearing your perspective.

Thanks,

--
Tim Gilheart, Ph.D.
Research Scientist - Nanofabrication Cleanroom Manager, Shared Equipment Authority (SEA), Rice University
Office: 713-348-3159 | gilheart at rice.edu


_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://nam05.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&amp;data=02%7C01%7Csean.rinehart%40yale.edu%7C62798ae7f63d439a6ed308d726854bdc%7Cdd8cbebb21394df8b4114e3e87abeb5c%7C0%7C1%7C637020226269632496&amp;sdata=mfve0OsqZhVPr%2F1n%2Fa6CSWOBNpVUFOmyPUOudT7AdRQ%3D&amp;reserved=0

From gilheart at rice.edu  Thu Aug 22 17:31:23 2019
From: gilheart at rice.edu (Tim Gilheart)
Date: Thu, 22 Aug 2019 16:31:23 -0500
Subject: [labnetwork] ALD process for ZnO?
In-Reply-To: <BN6PR08MB24660F387834ECD01CCAEAF399A50@BN6PR08MB2466.namprd08.prod.outlook.com>
References: <C60FD5EC-5BDB-4282-8D22-33BC1BF937A1@rice.edu>
 <BN6PR08MB24660F387834ECD01CCAEAF399A50@BN6PR08MB2466.namprd08.prod.outlook.com>
Message-ID: <504CA981-0FA8-4994-9A5E-09DB0257DB31@rice.edu>

Many thanks to everyone for both the responses here on the list and the direct messages we received on this topic. 

We?ve got a lot of good information to digest, and we?ll use that to inform our decision about this material after we receive a response from the tool vendor.

Thanks again,

-- 
Tim Gilheart, Ph.D.
Research Scientist - Nanofabrication Cleanroom Manager,
Shared Equipment Authority (SEA), Rice University
Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu


> On Aug 22, 2019, at 9:22 AM, Rinehart, Sean <sean.rinehart at yale.edu> wrote:
> 
> Hi Tim,
> 
> We haven't grown ZnO in our systems, but it's come up before. Something to keep in mind with DEZ (Diethylzinc) based ZnO deposition is its incompatibility with TMA (Trimethyl Aluminum) based Al2O3. TMA can react with ZnO films to form DEZ, and DEZ can react with Al2O3 to form triethyl aluminum. Both of these byproducts are going to affect your intended results. If you run both processes in the same system you'll want to insulate the two films with a few 10s of nms of something that doesn't react with alkyl ligand precursors, e.g., HfO2.
> 
> Hope this helps!
> 
> Sean Rinehart
> Assistant Director, Cleanroom Operations
> Yale University
> 203 432 4303
> 
> -----Original Message-----
> From: labnetwork-bounces at mtl.mit.edu <mailto:labnetwork-bounces at mtl.mit.edu> <labnetwork-bounces at mtl.mit.edu <mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Tim Gilheart
> Sent: Wednesday, August 21, 2019 2:50 PM
> To: labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu>
> Subject: [labnetwork] ALD process for ZnO?
> 
> Greetings all,
> 
> We?re working with some of our users who may need to explore ZnO deposition, ideally at lower temperatures (100 C or less). 
> 
> We?re not equipped to do this on any of our PVD systems without inviting other problems, but we understand that several teams on this list have reported accomplishing this via ALD.
> 
> If anyone has suggestions, process notes, and/or cautionary tales, we?d appreciate hearing your perspective.
> 
> Thanks,
> 
> --
> Tim Gilheart, Ph.D.
> Research Scientist - Nanofabrication Cleanroom Manager, Shared Equipment Authority (SEA), Rice University
> Office: 713-348-3159 | gilheart at rice.edu
> 
> 
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://nam05.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&amp;data=02%7C01%7Csean.rinehart%40yale.edu%7C62798ae7f63d439a6ed308d726854bdc%7Cdd8cbebb21394df8b4114e3e87abeb5c%7C0%7C1%7C637020226269632496&amp;sdata=mfve0OsqZhVPr%2F1n%2Fa6CSWOBNpVUFOmyPUOudT7AdRQ%3D&amp;reserved=0 <https://nam05.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&amp;data=02%7C01%7Csean.rinehart%40yale.edu%7C62798ae7f63d439a6ed308d726854bdc%7Cdd8cbebb21394df8b4114e3e87abeb5c%7C0%7C1%7C637020226269632496&amp;sdata=mfve0OsqZhVPr%2F1n%2Fa6CSWOBNpVUFOmyPUOudT7AdRQ%3D&amp;reserved=0>
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From bgila at ufl.edu  Thu Aug 22 18:06:30 2019
From: bgila at ufl.edu (Brent Gila)
Date: Thu, 22 Aug 2019 18:06:30 -0400
Subject: [labnetwork] staff position at the University of Florida
Message-ID: <30885fff-fe21-7eb8-c2b0-56fd417feacd@ufl.edu>

Hello,

There is an open posting for a staff (Engineer II) position in the 
Research Service Centers (https://rsc.aux.eng.ufl.edu/) at UF.? The 
website is below.? This position is for a surface characterization staff 
member, but it can extend into other characterization and fabrication.? 
Please forward this to anyone you think may be interested.

http://explore.jobs.ufl.edu/cw/en-us/job/511962/engineer-ii

Best Regards,
Brent

-- 
Brent P. Gila, PhD.
Director, Nanoscale Research Facility
1041 Center Drive
University of Florida
Gainesville, Florida 32611
Tel:352-273-2245
Fax:352-846-2877
email:bgila at ufl.edu


From ea2223 at nyu.edu  Thu Aug 22 23:29:42 2019
From: ea2223 at nyu.edu (Eray Aydil)
Date: Thu, 22 Aug 2019 23:29:42 -0400
Subject: [labnetwork] Open Clean Room Manager Position at NYU
Message-ID: <CADu518s2CFWkqEWgnX_+Lha_EMYKN6w80f=cRSx1u30DQDqpSQ@mail.gmail.com>

NYU Tandon School of Engineering has an opening for a Clean Room Manager.
You can find the advertisement and instructions for application here.

https://uscareers-nyu.icims.com/jobs/6483/manager%2c-clean-room-facilities-%26-shared-instrumentation-facility/job



Eray Aydil
Alstadt Lord Mark Professor
Editor-in-Chief Journal of Vacuum Science & Technology
New York University, Tandon School of Engineering
Chemical and Biomolecular Engineering Department
6 Metrotech Center
Brooklyn, NY 11201
office: (646)-997-3705
mobile: (952)-240-8114
email: aydil at nyu.edu
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From wjkiethe at ncsu.edu  Sun Aug 25 13:26:15 2019
From: wjkiethe at ncsu.edu (Bill Kiether)
Date: Sun, 25 Aug 2019 13:26:15 -0400
Subject: [labnetwork] NO use for SiC oxidation and post-oxidation anneal
Message-ID: <CAN1vinsYVFBwTrwd0U-ocLdwo2S4YLYq6zaJuD3rEV8oxNvrLw@mail.gmail.com>

Hello,

We are looking to add capability to our oxidation furnaces, and have been
advised to use NO (nitric oxide) for SiC oxidation and post-oxidation
anneal steps. Doe anyone use NO in their labs for this process?  What are
the typical concentrations you have been using (usually with N2 as the
carrier gas)?  What type of new safety protocols/equipment did you add for
the use with NO?

Bill Kiether
NCSU Nanofabrication Facility
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From gnair at lsu.edu  Wed Aug 28 11:46:37 2019
From: gnair at lsu.edu (Greshma Nair)
Date: Wed, 28 Aug 2019 15:46:37 +0000
Subject: [labnetwork] Hot embosser "Drive system disconnected" error
Message-ID: <DM5PR06MB319496EE0B25DC9F421D4A8AB9A30@DM5PR06MB3194.namprd06.prod.outlook.com>

Hello all,

We have been having some issues with the Jenoptik HEX 02 hot embosser tool. Here are the details:

  1.  After turning on the Emboss software, it prompts to Turn ON the Force control Unit. Pressing the ON button on the panel does not do anything
  2.  A message pops us that reads "Emergency-off-button was pressed or the emergency-loop is open. Please remedy the cause and/or unbolt the Emergency-off button". The EMO button was not pressed
  3.  The message on the Emboss Expert is "Drive system disconnected"

We did get in touch with the tech support in Germany but they haven't been able to troubleshoot the cause yet. From preliminary checks it looks like the EMO loop and the door locks are OK.
Any ideas or suggestions pertaining to this issue will be highly appreciated.

Greshma
--------
Greshma Nair, Ph.D.
Cleanroom Manager
Nanofabrication Facility (NFF)
Center for Advanced Microstructures and Devices (CAMD)
6980 Jefferson Highway
Baton Rouge, LA  70806
Phone: (225) 578-9378
lsu.edu/nanofabrication<http://lsu.edu/nanofabrication>

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