[labnetwork] Dielectric films using BPSG

[Bill Kiether]

Hello,

We are looking to add a process for depositing ~ 0.5 micron dielectric
layers using a BPSG process for LPCVD with TEOS and organo-metallic
precursors instead of diborane or phosphine.  Does anyone have a similar
process set up?  Even if you use a PECVD process, but with
organo-metallics, we would like to talk to you about your sources for the
OM's.

Alterantively, if anyone has a good process set-up, we may do some
outsourcing as we get our process flow up to speed.

Bill Kiether
NCSU Photonic Lab Manager
wjkiethe at ncsu.edu
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20190808/6eca82a4/attachment.html>