[labnetwork] Any concerns with sputtered MoS2 in a vacuum furnace?

[Simon Doe]

Hello all
Looking for some guidance on this one.

We have a researcher wishing to develop a sensor fabrication process which includes a thermal treatment at 600-700°C of a silicon wafer with a sputtered layer of MoS2 or In2O3 in vacuum.

My concern is how the MoS2 would behave under vacuum at temperature. Could it vaporise and contaminate the furnace or cause other issues?



Thanks in advance

Regards

Simon
Simon Doe
Facility Manager, Australian National Fabrication Facility-SA Node
Future Industries Institute | University of South Australia | Mawson Lakes  SA  5095
': +61 8 8302 5226<tel:%2B61%208%208302%205226> | 6: +61 8 8302 3755<tel:%2B61%208%208302%203755> | *: simon.doe at unisa.edu.au<mailto:simon.doe at unisa.edu.au>
www.anff-sa.com<http://www.anff-sa.com>

[linkedin]<https://au.linkedin.com/company/anff-south-australia>  [twitter] <https://twitter.com/AnffSa>

CRICOS Provider Number: 00121B
[cid:image003.jpg at 01D1E756.27F8B730]



-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20190820/dfb78c16/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image001.png
Type: image/png
Size: 16418 bytes
Desc: image001.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20190820/dfb78c16/attachment.png>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image002.jpg
Type: image/jpeg
Size: 11601 bytes
Desc: image002.jpg
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20190820/dfb78c16/attachment.jpg>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image003.jpg
Type: image/jpeg
Size: 10666 bytes
Desc: image003.jpg
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20190820/dfb78c16/attachment-0001.jpg>