[labnetwork] Parylene Coater Concerns

[Albert William (Bill) Flounders]

 Matt,
Building a whole separate enclosure for just this tool seems overkill.
Our parylene tool is in a Class100 cleanroom.
We installed a hepa vac next to the tool and instruct staff and researchers
to use it as needed
Scraping the cold finger or other messy jobs are done in a hood or in the
chase area.
I think the tool deserves to be in the cleanroom and recommend
controls/protocols to address the debris issue.
Good luck keeping all parties satisfied.
Bill

Bill Flounders
UC Berkeley

On Fri, Dec 13, 2019 at 4:34 PM Matthew Moneck <mmoneck at andrew.cmu.edu>
wrote:

> Dear Colleagues,
>
>
>
> Happy Holidays!  I would like to poll this community for some feedback.
> We have an SCS Labcoter 2 parylene system in our old cleanroom facility.
> That facility will soon shut down, and we are planning to relocate the
> tool.  Due to the particulate and debris this tool generates, especially
> during maintenance cycles, we prefer not to move it into our new class 10,
> class 100 cleanroom facility.  At the same time, we have faculty using the
> tool for applications where particulate contamination during sample loading
> is a concern.  They would like to have it in the cleanroom.
>
>
>
> It is my understanding that many labs have either moved their parylene
> systems out of their cleanroom or they have installed the system in a lower
> class environment (class 10,000 for example).  Our plan to satisfy all
> parties is move the system to a lab not currently operated as a cleanroom
> (i.e we are less worried about debris generated from the tool) and to build
> a relatively inexpensive softwall cleanroom around the tool to mitigate the
> particulate concerns during sample handling/loading.  We have used these
> mini environments before for other equipment we could not put in our
> cleanroom, and they have served us well.  However, there are still concerns
> from the researchers using the tool.
>
>
>
> My questions to this community are as follows:
>
>
>
> 1.       Where to do you have your parylene system installed (e.g. class
> 100, 1000, or 10,000 cleanroom or in a standard lab environment)?
>
> 2.       Do you have any comments or feedback on the benefits or pitfalls
> of using a softwall cleanroom for similar applications?
>
> 3.       Do you have any other feedback or options we should consider?
>
>
>
> As always, we appreciate the input from this group.
>
>
>
> Best Regards,
>
>
> Matt
>
>
>
> --
>
> *Matthew T. Moneck, Ph.D*
>
> Executive Manager, Claire & John Bertucci Nanotechnology Laboratory
>
> Electrical & Computer Engineering | Carnegie Mellon University
>
> 5000 Forbes Avenue, Pittsburgh, PA 15213-3890
>
> Phone:  412-268-5430
>
> ece.cmu.edu <http://www.ece.cmu.edu>
>
> nanofab.ece.cmu.edu <http://www.nanofab.ece.cmu.edu>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20191213/016eafb9/attachment.html>