[labnetwork] Silane and Dichlorosilane Line Evacuation

[Bill Kiether]

We do not evacuate between uses, but do evacuate if the lab or system is
going to be down (and tagged out)  for an extended time (months).

For example, we were shutting a lab for 6 months for construction reasons,
all of the toxic and flammables were evacuated and backfilled with UHP
nitrogen ( or Argon).  The backfilling is important as you don't want to
leave silane lines at vacuum.  Also, once in grad school, we did the same
thing for a tool on which the only user was studying for 2 months for his
prelims. That process saved lives as a new post doc decided to "borrow" a
quarter turn valve off of the system without discussing it.

Bill Kiether



On Thu, Feb 14, 2019 at 7:47 AM Bruce Tolleson <betemc at rit.edu> wrote:

> Dear users of Silane and Dichlorosilane,
>
> When your systems that use silane and dichlorosilane are not in use do you
> evacuate the lines going to the tool? We are looking for the best practices
> for gas line safety in a student environment microelectronic clean room.
>
> The gas lines are wall mount or overhead coaxial stainless steel all
> welded lines with excess flow sensors.
>
> What are you doing with you silane and dichlorosilane lines?
>
> Thank you,
>
>
>
> Bruce E. Tolleson
>
> Rochester Institute of Technology
>
> 82  Lomb Memorial Drive, Bldg 17-2627
>
> Rochester, NY 14623-5604
>
> (585) 478-3836
>
> [image: http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]
>
>
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