[labnetwork] humidity control question

[Morrison, Richard H., Jr]

HI Everyone,

Has any heard about using ultrasonic humidification for a cleanroom RH control. We have a steam to steam RH system here and we are looking for an upgrade. I saw an article in Solid State Technology that stated 300mm fabs are going to ultrasonic generation for steam.

Thanks

Rick


Richard H. Morrison
Principal Member of the Technical Staff
Draper
555 Technology Square
Cambridge, MA
02139-3573

Work  617-258-3420
Cell  508-930-3461
www.draper.com<http://www.draper.com>

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