[labnetwork] MA6 lamp life

[Shimon Eliav]

Hi Youry,

1.      We turn-off the mask aligner every day

2.      We exchange the lamp following power density measurement @365nm

3.      Lamp life time: around six months. See table below:
Date
Lamp Hours
Period (h)
ON Time (%)
21/05/2017
773
4464
17.14%
23/11/2017
765
26/04/2018
722
3696
19.53%
18/11/2018
953
4944
19.28%
30/06/2019
948
5376
17.63%

This procedure works just fine from 2006, when the equipment was installed. Since then we experienced no lamp fail or explosion. In this way we save a good money on lamps and replacement service.

Regards,

Shimon
The Unit for Nano Fabrication
The Hebrew University of Jerusalem
ISRAEL

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Youry Borisenkov
Sent: Friday, 5 July 2019 18:59
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] MA6 lamp life

HI Everyone,

I have 3 quick questions about your policy for changing the UV-lamp on the MA6 (Karl Suss) mask aligners.
1. do you turn off the UV - power supply during nights and weekends? or just leave it on?
2. do you change the UV lamp on a regular basis (after 1 month or so)? or you monitor it's power and have a lower limit before you decide to change it? or you just wait for it to fail and then change it?
3. how often do you change the lamp?

Thanks and Happy July 4th
Youry

P.S.
You can use this template to reply):

1-      Off/On

2-      Change every ___ /  wait for the power to decrease by ___ % / wait for it to fail

3-      Every ___ month




Youry Borisenkov, Ph.D.
Process Engineer at CNI Shared Labs
CEPSR/MC 8903
530 west 120th st. NY
NY 10027
Work  212-851-5688
Cell  646-592-1514
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