[labnetwork] Argon in a BCl3 cylinder

[Scott Blondell]

Is this a case where a check valve at the BCl3 source failed, or was non-existent?
Would a valve cracking pressure of 0.5 psi have prevented this unwanted backflow.

Scott P. Blondell
Facilities Manager
Rochester Institute of Technology
Semiconductor & Microsystems Fabrication Laboratory<http://www.smfl.rit.edu/>
82 Lomb Memorial Dr.
Bldg. 17-2519
Rochester, NY 14623

585 738-4073 c
585 475-2171 o
585 475-5041 f
spb1699 at rit.edu<mailto:spb1699 at rit.edu>
www.smfl.rit.edu<http://www.smfl.rit.edu>

[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Feargal Nolan
Sent: Thursday, June 20, 2019 8:17 AM
To: Rinehart, Sean <sean.rinehart at yale.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Argon in a BCl3 cylinder

Hi Sean,

We had a similar problem with SiCl4 but in our case it was charged with nitrogen.  On our system we were able to use the venturi on the gas panel to evacuate the N2 from the cylinder.  We ran several tests afterwards and we did not see any adverse effects in our process.

Regards


Feargal Nolan
Maintenance Manager
Tyndall National Institute
Lee Maltings, Dyke Parade
Cork,  T12 R5CP
Ireland
t   +353 21 234 6656
m +353 87 635 7673




From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Rinehart, Sean
Sent: 19 June 2019 18:15
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Argon in a BCl3 cylinder

Hello all,

Recently our facility's BCl3 cylinder had been charged with argon, increasing the delivery pressure to 25 psi. The cause has been corrected, but now I'm evaluating whether or not the cylinder needs to be replaced, and would appreciate some advice.

Since the root issue was fixed, the pressure has slowly dropped from 25 psi to 15 psi with use. Based on this, it seems like with more use the argon should completely deplete from the cylinder, but maybe someone can tell me if that's actually true, and if there's a way to evaluate gas concentrations. Additionally, the plasma glow is whitish instead of pink, so there's definitely BCl3 content in the delivered gas.

Thank you,

Sean Rinehart
Assistant Director, Cleanroom Operations
Yale University
203 432 4303

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