[labnetwork] Gorilla glass Etching

[Christophe Clément]

Hello Labnetwork community, 
I've been ask by a company to etch Gorilla Glass in our DRIE-ICP etcher (Oxford Plasmalab 100), where we already etch Si (regular Bosch process) and SiO2 etching (Fused silica only). As the supplier of the Gorilla glass does not share the composition of this kind of glass, I'm a little bit afraid of cross contamination (Potassium and other material that can be present in the glass) that can be found during Si etching for example. 
Is there anyone who has experienced etching this material? If yes, what is your cleaning procedure after etching Gorilla glass? 

Thank you in advance for your answer 
Best 
Christophe 



Christophe Clément 

Technicien laboratoire 

Laboratoire de microfabrication (LMF) 

Groupe des Couches Minces (GCM) [ http://www.gcmlab.ca/ | www.gcmlab.ca ] 

Ecole Polytechnique de Montréal [ http://www.polymtl.ca/ | www.polymtl.ca ] 

Département de génie physique 

* 2900 Boulevard Edouard Monpetit 

Pavillon JAB 
Campus de l'Université de Montréal 
Montréal (Québec) H3T 1J4 


8 [ mailto:christophe.clement at polymtl.ca | christophe.clement at polymtl.ca ] 

( 514 340 4711 

Fax : 514 340 4711 # 2417 
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