[labnetwork] Alternative to HMDS Based Spin-on Primer

[Kamal Yadav]

Dear Shu,

You can buy pure HMDS. You can do vapor prime works better than spin.

Have a HMDS compatible container Stainless steel or Teflon or similar with
a lid or use Al foil as lid. Pour few ml in the container anywhere so that
its just visible you just need little to create vapors.
Load your wafer in a wafer cassette and load the cassette into the
container for few mins with lid closed. HMDS should not be inhaled so need
a fume hood space for this. You should have your monolayer of HMDS.

There is Surpass 3000 as well, where wafer needs to immersed and rinsed in
DI water later.

I think vapor HMDS should work fine. You can buy SS containers big enough
online that can take your wafer cassette.

Thanks,
Kamal

On Fri, Mar 29, 2019, 7:51 AM Shu Xiang <shux at ucsd.edu wrote:

> Dear Colleagues,
>
> I'm wondering if you have any suggestions for spin-on primer / adhesion
> promoter as a substitute for HMDS vapor prime process.
>
> We used to work with Microchem's MCC Primer 80/20, which is a dilute
> solution of HMDS in PGMEA, but the company recently discontinued it. We
> tried several alternatives including making our own version of the
> solution, but none worked as well. The majority of resists we work with
> that require priming are Microchem's AZ1500 and AZ12XT-20PL series.
>
> If you have experience with or know of any similar alternatives that are
> easily accessible from an U.S. distributor, please let me know.
>
> Thank you,
> --
> Shu Xiang
>
> Process Development Engineer / Area Safety Coordinator
> Nano3 Cleanroom Facility <http://nano3.calit2.net/>
> University of California, San Diego
> shux at ucsd.edu  |  (858) 534-6678  |  Mailing Address
> <https://docs.google.com/document/d/e/2PACX-1vSUYE8E-dA0analDfZFtiFa2GbxYP18Jp660wfysyXljcpAIzREdvu-427SXzjRsqfxkfm90_C3_HHM/pub>
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