[labnetwork] gas installation

[Christian Pfluegl]

Hi all,

We are installing a RIE system with the following gases: CF4, O2, Ar.
I was hoping to get some advice on the gas panels for those gases. We are planning on only buying single-stage regulators for all the gas lines.
Are single stage regulators sufficient for this or do you recommend to add purge circuits or other features to avoid contamination of the gas lines during maintenance (e.g. cylinder exchange).

Thanks,

Christian

Dr. Christian Pfluegl
Pendar Technologies LLC
tel.: (857) 413-9339
www.pendartechnologies.com<http://www.pendartechnologies.com/>

[cid:30e4bce8-ff64-4988-b73c-dcd37ceee0b7]

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