[labnetwork] gas installation

Thu May 2 10:46:51 EDT 2019

We also have gas panels from AES for our non-cabineted gases that allow for purging during cylinder changes.  We also have their cabinets for the nasty ones, too.  Great people to work with and very nice.

Cheers!

Julia Aebersold
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nathanael Sieb
Sent: Wednesday, May 1, 2019 4:31 PM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] gas installation

Hi Christian,

We use gas panels from Applied Energy Systems for our process gases (incl. CF4, O2, Ar).  We have manual panels with N2 purge circuits to avoid contamination during cylinder exchanges.  It has worked well for us so far!

Thanks,
Nathanael
On 2019-05-01 7:27 a.m., Christian Pfluegl wrote:
Hi all,

We are installing a RIE system with the following gases: CF4, O2, Ar.
I was hoping to get some advice on the gas panels for those gases. We are planning on only buying single-stage regulators for all the gas lines.
Are single stage regulators sufficient for this or do you recommend to add purge circuits or other features to avoid contamination of the gas lines during maintenance (e.g. cylinder exchange).

Thanks,

Christian

Dr. Christian Pfluegl
Pendar Technologies LLC
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