[labnetwork] Ion Milling

[Paolini, Steven]

We got one! Has Ar and O2 milling capability. Have him contact me.

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Ferraguto, Thomas S
Sent: Wednesday, May 22, 2019 11:47 AM
To: 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu>
Cc: Dennis Work <dennis.slafer at microcontinuum.com>
Subject: [labnetwork] Ion Milling

Colleagues,

I have a customer that needs dry etch 18nm. We can't use our ICP for the process. Does anyone have an Ion Mill Tool that could provide him the service.

Regards

Tom Ferraguto
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