[labnetwork] Gold Deposition over Chrome

Jim Carroll jim at photomaskportal.com
Fri May 31 12:07:29 EDT 2019


Thanks Bernard for the suggestion.  We'll definitely consider this.  Our
chrome lines are 10um and the minimum glass dimensions are 15um so it
should work.
[image: Screenshot 2019-05-31 08.31.57.png]
Thanks,
Jim Carroll
*PhotomaskPORTAL*
*We help you make masks*
(415) 448-6275

   -
   <http://www.photomaskportal.com>



On Thu, May 30, 2019 at 8:35 PM Andrei Alamariu <aandreib at gmail.com> wrote:

> Hello,
> I think of “Reverse side exposure Lift-Off”, as:
>
> 1. Coat thick Negative photoresist on FrontSide of the mask.
> 2. Expose it from the BackSide of the mask and develop it.
> 3. Deposit the thin Gold on the FrontSide.
> 4. Lift-Off.
>
> It might work depending on the layout: Cr features/spaces as the
> UV light diffraction from the BackSide of the mask might affect it.
> Success!
> Bernard
>
> Sent from my iPad
>
> On May 30, 2019, at 4:23 PM, Jim Carroll <jim at photomaskportal.com> wrote:
>
> Dear LabNetwork colleagues,
>
> We are trying to add a thin film of gold over patterned chrome on a
> standard photomask using e-beam evaporation.  We want the gold to
> preferentially adhere to the chrome while lifting off the glass.
>
> After a few tests, it appears that the gold sticks equally well to both
> the glass and chrome.  Ultrasonic agitation and swabbing do not selectively
> remove the gold from the glass while leaving it on the chrome.  Eventually,
> after enough pressure is applied with a swab, the gold releases from both
> the glass and chrome.
>
> Does anyone have a suggested approach?
>
> Thanks,
> Jim Carroll
> *PhotomaskPORTAL*
> *We help you make masks*
> (415) 448-6275
>
>    -
>    <http://www.photomaskportal.com>
>
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