[labnetwork] Backing Vacuum Pump - Dry pumps vs Oil Pumps

[Pradeep Nyaupane]

Dear All,

 We have been using Dry pumps for turbo pump backing for Sputters, E-beam
evaporators. And are planning to swap to oil pump with an anti-suck back
valve, whenever required (in case dry pumps go bad).

We would like to know whether any of you are using oil pumps are being used
as backing pump for Turbo / Cryo / DP.

Any advice / suggestions would be greatly appreciated.

Thank You in advance.

Thanks & Regards,
Pradeep Nyaupane

Technical Superintendent,
Equipment Maintenance Team In-charge,
IITBNF, Electrical Engg Dept
IIT Bombay, India
Tel No. 02225764471(O)
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