[labnetwork] Temescal BJD 1800 E-beam evaporator

Paolini, Steven spaolini at cns.fas.harvard.edu
Fri Oct 4 11:17:08 EDT 2019


Greshma,
  I owned one of these 30 or more years ago. The problems you are having sound typical of a system that has been "mothballed" for a long period of time. My approach would be to reseat all circuit boards and cable connections and test again. You would need a lot of luck finding a manual since these have been out of production for some time. I doubt that the manual would be of any help aside from the schematics. You can e-mail me directly at spaolini at cns.fas.harvard.edu  if you have more details or some success.
  Best regards,
  Steve 

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Greshma Nair
Sent: Thursday, October 03, 2019 11:24 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Temescal BJD 1800 E-beam evaporator

Hello all,

We at LSU have a Temescal BJD 1800 E-beam evaporator that has been unused for many years. The evaporator uses a VersaVac controller, an Autopump controller, and Temescal IC6000 Deposition controller (pictures attached). Recently we tried evacuating the system but haven't had any luck so far. The only progress we have had is to get the mechanical pump turned on and the rough valve to open. Everything after that has been erratic- VersaVac controller gauges not turning on and the rough valve not shutting down when it reaches a pressure < 5x10-2 Torr.

We tried getting in touch with Temescal but they do not seem to have a manual for this version of the tool. If anyone has experience working with the Temescal BJD 1800 we would be interested to reach out to you and learn more about the tool. Or if you have an operation manual that you can share with us, it will be highly appreciated.

Greshma
----

Greshma Nair, Ph.D.
Cleanroom Manager,
Nanofabrication Facility (NFF)
Center for Advanced Microstructures and Devices (CAMD)
6980 Jefferson Highway
Baton Rouge, LA 70806
Phone: (225) 578-9378
lsu.edu/nanofabrication




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