[labnetwork] RIE Process Gases

[Morrison, Richard H., Jr]

Hi,

Here at Draper we only change the gases when they are “empty”, by that I mean we set a bottom limit for liquids by keeping them on a scale. For true gases we send the bottle back empty if we can. Some time there is just not enough gas left in the bottle to finish a day so we would change it early.

We keep a log of all weights and pressures so we can monitor and try to estimate when it would need to be changed so that we have a spare on hand.

Rick


Richard H. Morrison
Principal Member of the Technical Staff
Draper
555 Technology Square
Cambridge, MA
02139-3573

Work  617-258-3420
Cell  508-930-3461
www.draper.com<http://www.draper.com>





From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Cenk Yanik (Alumni)
Sent: Wednesday, October 09, 2019 2:59 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] RIE Process Gases

Dear All,
We are wondering how often do you change the RIE process gases even the gases are not run out. We have been told that they should be changed in max 3 years even if they are almost full but we have been using some of them (SF6, C4F8, CHF3)  for 5 years and we didn't realize any process-related critical problems during the dry etching process.
Have you ever faced with any problems for Fluorine and Chlorine based gases in your institutes?
We would appreciate if you could share your experiences and regulations considering the shell life of the process gases at your facilities
Best Regards,

--

Cenk YANIK, PhD
Nanofabrication Team Leader
Sabanci University
Nanotechnology Research and Application Center ( SUNUM )
Orta Mahalle, Üniversite Caddesi No: 27 34956 Tuzla - İstanbul
Office:+90 216 483 9994
web: sunum.sabanciuniv.edu<http://sunum.sabanciuniv.edu>
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