[labnetwork] STS ASE
Bruce Tolleson
betemc at rit.edu
Tue Sep 10 07:50:03 EDT 2019
Dear Labnetwork,
Does anyone have an STS ASE with an electrostatic chuck run with a DR4 and a PM7 VAT Controller? Our VAC3Y module has lost its program and I need a copy of the E-prom program to restore it.
We have several VAC3Y's and all have different configurations of either no electrostatic chuck or no VAT PM7.
If anyone has any un-needed spares, especially VAC3Y modules, we would be interested in them. We have been working with Jeff Hawks but can't find a solution for this issue.
Thank you,
Bruce E. Tolleson
Rochester Institute of Technology
82 Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]
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