[labnetwork] Ruthenium evaporation

[Morrison, Richard H., Jr]

Hi,,
Here at Draper we have used an E-Beam evaporator to deposit Ru. We clean our source chamber weekly by peeling large flakes and use an  HEPA vacuum to remove small particles and other flakes.

We did not have a big problem with dust. Our chamber is lined with foil and changed out on a regular basis. When we remove the foil we are very careful about removing it to not start a fire, we evaporate a lot of Ti and we have had a fire before cleaning out a sputter tool. Just be careful.

Rick


Richard H. Morrison
Principal Member of the Technical Staff
Draper
555 Technology Square
Cambridge, MA
02139-3573

Work  617-258-3420
Cell  508-930-3461
www.draper.com<http://www.draper.com>



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Hang
Sent: Tuesday, April 14, 2020 4:44 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Ruthenium evaporation

Hi, Everyone

I hope you are safe at home.

A user needs to evaporator Ruthenium in our cleanroom, the SDS states that the dust is combustible. Does anyone has experience with the process? What would be the best way to run it safely.

Thanks

Hang

--
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen at ien.gatech.edu<mailto:hang.chen at ien.gatech.edu>
https://sums.gatech.edu

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