From Gustavo.SaenzSaenz at colorado.edu Tue Aug 4 12:01:52 2020 From: Gustavo.SaenzSaenz at colorado.edu (Gustavo Saenz Saenz) Date: Tue, 4 Aug 2020 16:01:52 +0000 Subject: [labnetwork] Contact for technical support for STS ICP D-RIE tool Message-ID: Dear colleagues, Do you have a contact for technical support for the STS ICP D-RIE tool? Thank you in advance and best regards, Gustavo A. Saenz, Ph.D. Research Facilities Manager - Nanofabrication Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) University of Colorado Boulder | College of Engineering & Applied Science Tel: (940) 279-0177 | Office: ECEE222 Email: Gustavo.SaenzSaenz at colorado.edu https://www.colorado.edu/facility/cosinc -------------- next part -------------- An HTML attachment was scrubbed... URL: From Assaf.Hazzan at weizmann.ac.il Wed Aug 5 01:52:14 2020 From: Assaf.Hazzan at weizmann.ac.il (Assaf Hazzan) Date: Wed, 5 Aug 2020 05:52:14 +0000 Subject: [labnetwork] Contact for technical support for STS ICP D-RIE tool In-Reply-To: References: Message-ID: <9c3b478e4cf74850ab2483bddef53922@weizmann.ac.il> I hope this can help you Tech support for the European is Andy Price And if not I am sure he can guide you whom to contact. Details below: Andy Price andy.price at spts.com Andy Price, Customer Support Manager: NEMEA SPTS Technologies Ltd T. +44 1633 414155 | M. +44 7866 375917 spts.com Assaf Hazzan Nanofabrication Center Manager Department of Chemical Research Support Weizmann Institute of Science. Email: assaf.hazzan at weizmann.ac.il Site: Weizmann Nano Fabrication Phone: +972-8-9345175 Cell: +972-52-8679129 Fax: +972-8-9346069 Office: Perlman Chemical Sciences Building, Room 20 (-1 floor) From: labnetwork-bounces at mtl.mit.edu On Behalf Of Gustavo Saenz Saenz Sent: Tuesday, August 4, 2020 7:02 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Contact for technical support for STS ICP D-RIE tool Dear colleagues, Do you have a contact for technical support for the STS ICP D-RIE tool? Thank you in advance and best regards, Gustavo A. Saenz, Ph.D. Research Facilities Manager - Nanofabrication Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) University of Colorado Boulder | College of Engineering & Applied Science Tel: (940) 279-0177 | Office: ECEE222 Email: Gustavo.SaenzSaenz at colorado.edu https://www.colorado.edu/facility/cosinc -------------- next part -------------- An HTML attachment was scrubbed... URL: From spritchett at eng.utah.edu Wed Aug 5 18:40:56 2020 From: spritchett at eng.utah.edu (spritchett) Date: Wed, 05 Aug 2020 16:40:56 -0600 Subject: [labnetwork] Contact for technical support for STS ICP D-RIE tool In-Reply-To: References: Message-ID: <14093ce36d5be907c30e861f86c49fc1@eng.utah.edu> Hi Gustavo, Have you tried Jeff Hawks? Hawks Technical Services LLC. 2715 Swamp Creek Rd. Green Lane, PA. 18054 C 215-872-0944 He's provided some email and phone support that got me running again, more than once. Have not had on-site service. Good luck, Steve On 2020-08-04 10:01, Gustavo Saenz Saenz wrote: > Dear colleagues, > > Do you have a contact for technical support for the STS ICP D-RIE > tool? > > Thank you in advance and best regards, > > GUSTAVO A. SAENZ, PH.D. > > Research Facilities Manager - Nanofabrication > Colorado Shared Instrumentation in Nanofabrication and > Characterization (COSINC) > > University of Colorado Boulder | College of Engineering & Applied > Science > > Tel: (940) 279-0177 | Office: ECEE222 > Email: Gustavo.SaenzSaenz at colorado.edu > > https://www.colorado.edu/facility/cosinc [1] > > > > Links: > ------ > [1] https://www.colorado.edu/facility/cosinc > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork From proma016 at fiu.edu Thu Aug 6 09:20:33 2020 From: proma016 at fiu.edu (Patrick Roman) Date: Thu, 6 Aug 2020 06:20:33 -0700 Subject: [labnetwork] Contact for technical support for STS ICP D-RIE tool In-Reply-To: <14093ce36d5be907c30e861f86c49fc1@eng.utah.edu> References: <14093ce36d5be907c30e861f86c49fc1@eng.utah.edu> Message-ID: I worked with Brian Biggs from Class 1 Equipment to do a full install of our used Sts ase icp Drie from Germany last year. Big project, system runs great, Brian knows everything about those systems, even has the old test dongles. Contact below: Conrad McCulley *Sales Engineer, Parts & Services* *ClassOne Equipment* 5302 Snapfinger Woods Dr. Atlanta, GA 30035 United States T: +1 (770) 808-8708* x3222* M: +1 (774) 578-9021 <%2B1%20%28770%29%20808-8308> F: +1 (770) 808-8308 Email: cmcculley at classoneequipment.com W: www.ClassOne.com W: www.ClassOneEquipment.com Patrick Roman, FIU AMERI On Aug 5, 2020, at 6:40 PM, spritchett wrote: ?Hi Gustavo, Have you tried Jeff Hawks? Hawks Technical Services LLC. 2715 Swamp Creek Rd. Green Lane, PA. 18054 C 215-872-0944 He's provided some email and phone support that got me running again, more than once. Have not had on-site service. Good luck, Steve On 2020-08-04 10:01, Gustavo Saenz Saenz wrote: Dear colleagues, Do you have a contact for technical support for the STS ICP D-RIE tool? Thank you in advance and best regards, GUSTAVO A. SAENZ, PH.D. Research Facilities Manager - Nanofabrication Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) University of Colorado Boulder | College of Engineering & Applied Science Tel: (940) 279-0177 | Office: ECEE222 Email: Gustavo.SaenzSaenz at colorado.edu https://www.colorado.edu/facility/cosinc [1] Links: ------ [1] https://www.colorado.edu/facility/cosinc _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From odc1n08 at soton.ac.uk Mon Aug 10 08:42:59 2020 From: odc1n08 at soton.ac.uk (Clark O.D.) Date: Mon, 10 Aug 2020 12:42:59 +0000 Subject: [labnetwork] SiCl4 Supplier to UK Message-ID: Hi all, our SiCl4 has run out and we are trying to source another cylinder, however our usual contacts via BOC have told us it is no longer available. Does anyone know of a supplier who could arrange delivery of a cylinder to the UK? I think it was a 9kg cylinder, certainly it was on the smaller side. I can get more technical details if they help. Thanks, Owain Facility Manager Southampton Nanofabrication Centre University of Southampton Highfield Southampton Hampshire SO17 1BJ +44 (0) 2380 597389 [Untitled] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 11532 bytes Desc: image001.png URL: From jshepar at purdue.edu Mon Aug 10 09:04:21 2020 From: jshepar at purdue.edu (Shepard, Jeremiah J) Date: Mon, 10 Aug 2020 13:04:21 +0000 Subject: [labnetwork] ALD availability in the midwest Message-ID: All, Good morning! I am an engineer with Purdue's Birck Nanotechnology fab. Our ALD system has went down and will be down for several weeks. I am looking for alternatives for our researchers to use until our system comes back online. We are located in West Lafayette, Indiana and options would need to be within a few hours driving distance of our location, or provide the service through mail. Our system is equipped with AlOx, HfOx, and SiOx. The majority of our users are growing AlOx and HfOx. We have many users interested in low temp growths at 90 to 110 C and we have a limit of 50 nm film thickness. We also have many users growing at more traditional 200 C temps. I would expect work coming from our fab to fall within these parameters. Any leads would be greatly appreciated! Thank you, Jerry Shepard -------------- next part -------------- An HTML attachment was scrubbed... URL: From price.798 at osu.edu Mon Aug 10 12:14:07 2020 From: price.798 at osu.edu (Price, Aimee) Date: Mon, 10 Aug 2020 16:14:07 +0000 Subject: [labnetwork] ALD availability in the midwest In-Reply-To: References: Message-ID: Hi Jerry, At Ohio State Nanotech West Lab, we are not open to new users at this time due to COVID-19 protocols but I have some ability to do remote service work. I have an older PicoSun SunALE150 without plasma. We do NOT have SiOx, but I do have Al2O3 and HfO2. My current HfO2 process is high temperature however. We have numerous low temperature Al2O3 processes, so that's no issue. I'd be happy to discuss further if you like. I do have some other contacts I can put you in touch with as well if my facility isn't a good fit. Best, Aimee Bross Price Sr. Research Associate The Ohio State University Nanotech West Lab Institute for Materials Research 1381 Kinnear Road Suite 100 Columbus, OH 43212 614-292-2753 From: labnetwork-bounces at mtl.mit.edu On Behalf Of Shepard, Jeremiah J Sent: Monday, August 10, 2020 9:04 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] ALD availability in the midwest All, Good morning! I am an engineer with Purdue's Birck Nanotechnology fab. Our ALD system has went down and will be down for several weeks. I am looking for alternatives for our researchers to use until our system comes back online. We are located in West Lafayette, Indiana and options would need to be within a few hours driving distance of our location, or provide the service through mail. Our system is equipped with AlOx, HfOx, and SiOx. The majority of our users are growing AlOx and HfOx. We have many users interested in low temp growths at 90 to 110 C and we have a limit of 50 nm film thickness. We also have many users growing at more traditional 200 C temps. I would expect work coming from our fab to fall within these parameters. Any leads would be greatly appreciated! Thank you, Jerry Shepard -------------- next part -------------- An HTML attachment was scrubbed... URL: From kchow10 at gmail.com Mon Aug 10 12:18:25 2020 From: kchow10 at gmail.com (Edmond Chow) Date: Mon, 10 Aug 2020 11:18:25 -0500 Subject: [labnetwork] ALD availability in the midwest In-Reply-To: References: Message-ID: Hi, We can help you at University of Illinois.We can do AlOx, HfOx and SiOx. Sending your samples for us to do deposition is probably the easiest and fastest option. You can contact me directly at echow at illinois.edu Edmond On Mon, Aug 10, 2020 at 11:13 AM Shepard, Jeremiah J wrote: > All, > Good morning! I am an engineer with Purdue's Birck Nanotechnology fab. > Our ALD system has went down and will be down for several weeks. I am > looking for alternatives for our researchers to use until our system comes > back online. We are located in West Lafayette, Indiana and options would > need to be within a few hours driving distance of our location, or provide > the service through mail. > > Our system is equipped with AlOx, HfOx, and SiOx. The majority of our > users are growing AlOx and HfOx. We have many users interested in low temp > growths at 90 to 110 C and we have a limit of 50 nm film thickness. We > also have many users growing at more traditional 200 C temps. I would > expect work coming from our fab to fall within these parameters. > > Any leads would be greatly appreciated! > > Thank you, > Jerry Shepard > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Edmond Chow -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.martin at louisville.edu Mon Aug 10 12:20:30 2020 From: michael.martin at louisville.edu (Martin,Michael David) Date: Mon, 10 Aug 2020 16:20:30 +0000 Subject: [labnetwork] ALD availability in the midwest In-Reply-To: References: Message-ID: Hi Jerry, Our Beneq system is up and running at U of Louisville. Currently our precursors are ZnO, Al2O3, and TiO2. If your users need a lot of depositions with another material, we would be happy to consider stocking it. https://louisville.edu/micronano Welcome to MNTC ? Micro/Nano Technology Center The MNTC is OPEN. A new entry protocol has been implemented for both the cleanroom and the Huson Lab. Contact us before entering either lab, so we may train you on the new protocol. louisville.edu Regards, Michael ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Shepard, Jeremiah J Sent: Monday, August 10, 2020 9:04 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] ALD availability in the midwest CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. All, Good morning! I am an engineer with Purdue's Birck Nanotechnology fab. Our ALD system has went down and will be down for several weeks. I am looking for alternatives for our researchers to use until our system comes back online. We are located in West Lafayette, Indiana and options would need to be within a few hours driving distance of our location, or provide the service through mail. Our system is equipped with AlOx, HfOx, and SiOx. The majority of our users are growing AlOx and HfOx. We have many users interested in low temp growths at 90 to 110 C and we have a limit of 50 nm film thickness. We also have many users growing at more traditional 200 C temps. I would expect work coming from our fab to fall within these parameters. Any leads would be greatly appreciated! Thank you, Jerry Shepard -------------- next part -------------- An HTML attachment was scrubbed... URL: From Thomas_Ferraguto at uml.edu Mon Aug 10 12:26:13 2020 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas S) Date: Mon, 10 Aug 2020 16:26:13 +0000 Subject: [labnetwork] ALD availability in the midwest In-Reply-To: References: Message-ID: We have a Cambridge Nano (Veeco) Fiji (with low temp plasma capability) and an 8" platen. All of the required materials. Unfortunately we're in Lowell MA. But we would be happy to provide service. Best Regards Thomas S. Ferraguto Saab ETIC Nanofabrication Laboratory Director Saab ETIC Building Director 1 University Avenue Lowell MA 01854 Mobile 617-755-0910 Land 978-934-1809 Fax 978-934-1014 From: labnetwork-bounces at mtl.mit.edu On Behalf Of Shepard, Jeremiah J Sent: Monday, August 10, 2020 9:04 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] ALD availability in the midwest This e-mail originated from outside the UMass Lowell network. ________________________________ All, Good morning! I am an engineer with Purdue's Birck Nanotechnology fab. Our ALD system has went down and will be down for several weeks. I am looking for alternatives for our researchers to use until our system comes back online. We are located in West Lafayette, Indiana and options would need to be within a few hours driving distance of our location, or provide the service through mail. Our system is equipped with AlOx, HfOx, and SiOx. The majority of our users are growing AlOx and HfOx. We have many users interested in low temp growths at 90 to 110 C and we have a limit of 50 nm film thickness. We also have many users growing at more traditional 200 C temps. I would expect work coming from our fab to fall within these parameters. Any leads would be greatly appreciated! Thank you, Jerry Shepard -------------- next part -------------- An HTML attachment was scrubbed... URL: From hathaway at cns.fas.harvard.edu Mon Aug 10 12:53:40 2020 From: hathaway at cns.fas.harvard.edu (Hathaway, Malcolm R) Date: Mon, 10 Aug 2020 16:53:40 +0000 Subject: [labnetwork] ALD availability in the midwest In-Reply-To: References: Message-ID: Hello Jerry, Here at Harvard CNS I'd be happy to process samples if users can get them delivered. We have alumina, hafnia, silica, titania, and zirconia, as well as ZnO and Pt. Only caveat is that user would need to become a CNS User, with all the attendant paperwork. Mac Hathaway Senior Process and Systems Engineer Harvard CNS 617-259-0859 ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Shepard, Jeremiah J Sent: Monday, August 10, 2020 9:04 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] ALD availability in the midwest All, Good morning! I am an engineer with Purdue's Birck Nanotechnology fab. Our ALD system has went down and will be down for several weeks. I am looking for alternatives for our researchers to use until our system comes back online. We are located in West Lafayette, Indiana and options would need to be within a few hours driving distance of our location, or provide the service through mail. Our system is equipped with AlOx, HfOx, and SiOx. The majority of our users are growing AlOx and HfOx. We have many users interested in low temp growths at 90 to 110 C and we have a limit of 50 nm film thickness. We also have many users growing at more traditional 200 C temps. I would expect work coming from our fab to fall within these parameters. Any leads would be greatly appreciated! Thank you, Jerry Shepard -------------- next part -------------- An HTML attachment was scrubbed... URL: From yaofootball at gmail.com Mon Aug 10 14:46:36 2020 From: yaofootball at gmail.com (Football) Date: Mon, 10 Aug 2020 13:46:36 -0500 Subject: [labnetwork] ALD availability in the midwest In-Reply-To: References: Message-ID: Hi Jerry, UIUC Material Research Laboratory has ALDs that can deposit what you need. Please refer to the website for more details. UIUC is at Champaign Urbana which is not far away from you. https://mrl.illinois.edu/facilities/equipment/savannah-s100-atomic-layer-deposition-cambridge-nanotech Regards, Fubo Rao, Ph.D. Materials Research Laboratory The Grainger College of Engineering University of Illinois at Urbana-Champaign 104 S. Goodwin Ave. Urbana, IL 61801 Office: 217-244-6202 Email: frao at illinois.edu On Mon, Aug 10, 2020 at 11:05 AM Shepard, Jeremiah J wrote: > All, > Good morning! I am an engineer with Purdue's Birck Nanotechnology fab. > Our ALD system has went down and will be down for several weeks. I am > looking for alternatives for our researchers to use until our system comes > back online. We are located in West Lafayette, Indiana and options would > need to be within a few hours driving distance of our location, or provide > the service through mail. > > Our system is equipped with AlOx, HfOx, and SiOx. The majority of our > users are growing AlOx and HfOx. We have many users interested in low temp > growths at 90 to 110 C and we have a limit of 50 nm film thickness. We > also have many users growing at more traditional 200 C temps. I would > expect work coming from our fab to fall within these parameters. > > Any leads would be greatly appreciated! > > Thank you, > Jerry Shepard > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tony.olsen at utah.edu Mon Aug 10 15:49:57 2020 From: tony.olsen at utah.edu (Tony L Olsen) Date: Mon, 10 Aug 2020 19:49:57 +0000 Subject: [labnetwork] ALD availability in the midwest In-Reply-To: References: Message-ID: <8d7a358b486a4bc89e4884d7ed0432ad@utah.edu> Jerry I'm a little further away, but I have a Cambridge Fiji200 with each of these films as standard processes. I'm certainly willing to help. tonyO Tony Olsen Nanofab Cleanroom Supervisor/Process Engineer University of Utah 36 S Wasatch Drive, Suite 2500 Salt Lake City, UT 84112 801-587-0651 www.nanofab.utah.edu From: Shepard, Jeremiah J Sent: Monday, August 10, 2020 07:04 To: labnetwork at mtl.mit.edu Subject: [labnetwork] ALD availability in the midwest All, Good morning! I am an engineer with Purdue's Birck Nanotechnology fab. Our ALD system has went down and will be down for several weeks. I am looking for alternatives for our researchers to use until our system comes back online. We are located in West Lafayette, Indiana and options would need to be within a few hours driving distance of our location, or provide the service through mail. Our system is equipped with AlOx, HfOx, and SiOx. The majority of our users are growing AlOx and HfOx. We have many users interested in low temp growths at 90 to 110 C and we have a limit of 50 nm film thickness. We also have many users growing at more traditional 200 C temps. I would expect work coming from our fab to fall within these parameters. Any leads would be greatly appreciated! Thank you, Jerry Shepard -------------- next part -------------- An HTML attachment was scrubbed... URL: From f.karouta at gmail.com Mon Aug 10 20:42:44 2020 From: f.karouta at gmail.com (Fouad Karouta) Date: Tue, 11 Aug 2020 10:42:44 +1000 Subject: [labnetwork] SiCl4 Supplier to UK In-Reply-To: References: Message-ID: Hi Owain, Last time about 2-3 years ago, we source it from Mattheson, US. Fouad On Tue, 11 Aug 2020 at 2:03 am, Clark O.D. wrote: > Hi all, our SiCl4 has run out and we are trying to source another > cylinder, however our usual contacts via BOC have told us it is no longer > available. Does anyone know of a supplier who could arrange delivery of a > cylinder to the UK? I think it was a 9kg cylinder, certainly it was on the > smaller side. I can get more technical details if they help. > > > > Thanks, Owain > > > > Facility Manager > > Southampton Nanofabrication Centre > University of Southampton > Highfield > Southampton > Hampshire SO17 1BJ > > > > +44 (0) 2380 597389 > > > > [image: Untitled] > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 11532 bytes Desc: not available URL: From hbtusainc at yahoo.com Tue Aug 11 07:41:45 2020 From: hbtusainc at yahoo.com (Mario Portillo) Date: Tue, 11 Aug 2020 11:41:45 +0000 (UTC) Subject: [labnetwork] ALD availability in the midwest In-Reply-To: References: Message-ID: <1430735840.132380.1597146105208@mail.yahoo.com> Purdue and UIUC are only a two hour drive away, your best bet.... Sent from Yahoo Mail for iPhone Mario Portillo, hbtusainc at yahoo.com On Tuesday, August 11, 2020, 3:56 AM, Football wrote: Hi Jerry, UIUC Material Research Laboratory has ALDs that can deposit what you need. Please refer to the website for more details. UIUC is at Champaign Urbana which is not far away from you.?https://mrl.illinois.edu/facilities/equipment/savannah-s100-atomic-layer-deposition-cambridge-nanotech Regards,Fubo Rao,Ph.D.? Materials Research Laboratory TheGrainger College of Engineering University of Illinois at Urbana-Champaign 104 S. Goodwin Ave. Urbana, IL 61801 Office: 217-244-6202 Email: frao at illinois.edu ?? On Mon, Aug 10, 2020 at 11:05 AM Shepard, Jeremiah J wrote: All,Good morning!? I am an engineer with Purdue's Birck Nanotechnology fab.? Our ALD system has went down and will be down for several weeks.? I am looking for alternatives for our researchers to use until our system comes back online.? We are located in West Lafayette, Indiana and options would need to be within a few hours driving distance of our location, or provide the service through mail. ? Our system is equipped with AlOx, HfOx,? and SiOx.? The majority of our users are growing AlOx and HfOx.? We have many users interested in low temp growths at 90 to 110 C and we have a limit of 50 nm film thickness.? We also have many users growing at more traditional 200 C temps.? I would expect work coming from our fab to fall within these parameters. Any leads would be greatly appreciated! Thank you,Jerry Shepard _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From jshepar at purdue.edu Mon Aug 10 16:48:43 2020 From: jshepar at purdue.edu (Shepard, Jeremiah J) Date: Mon, 10 Aug 2020 20:48:43 +0000 Subject: [labnetwork] ALD availability in the midwest In-Reply-To: <8d7a358b486a4bc89e4884d7ed0432ad@utah.edu> References: , <8d7a358b486a4bc89e4884d7ed0432ad@utah.edu> Message-ID: All, Thank you very much for your fast replies and support! To those who have offered to help, I will make your contact information available to our researchers internally and recommend they reach out to you individually with their specific needs. Thank you again! Jerry Shepard ________________________________ From: Tony L Olsen Sent: Monday, August 10, 2020 3:49 PM To: Shepard, Jeremiah J ; labnetwork at mtl.mit.edu Subject: RE: ALD availability in the midwest Jerry I?m a little further away, but I have a Cambridge Fiji200 with each of these films as standard processes. I?m certainly willing to help. tonyO Tony Olsen Nanofab Cleanroom Supervisor/Process Engineer University of Utah 36 S Wasatch Drive, Suite 2500 Salt Lake City, UT 84112 801-587-0651 www.nanofab.utah.edu From: Shepard, Jeremiah J Sent: Monday, August 10, 2020 07:04 To: labnetwork at mtl.mit.edu Subject: [labnetwork] ALD availability in the midwest All, Good morning! I am an engineer with Purdue's Birck Nanotechnology fab. Our ALD system has went down and will be down for several weeks. I am looking for alternatives for our researchers to use until our system comes back online. We are located in West Lafayette, Indiana and options would need to be within a few hours driving distance of our location, or provide the service through mail. Our system is equipped with AlOx, HfOx, and SiOx. The majority of our users are growing AlOx and HfOx. We have many users interested in low temp growths at 90 to 110 C and we have a limit of 50 nm film thickness. We also have many users growing at more traditional 200 C temps. I would expect work coming from our fab to fall within these parameters. Any leads would be greatly appreciated! Thank you, Jerry Shepard -------------- next part -------------- An HTML attachment was scrubbed... URL: From kmcpeak at lsu.edu Tue Aug 18 11:40:04 2020 From: kmcpeak at lsu.edu (Kevin M McPeak) Date: Tue, 18 Aug 2020 15:40:04 +0000 Subject: [labnetwork] Zygo Interferometer for trade Message-ID: Dear Colleagues, Here at the LSU nanofabrication facility, we have an older Zygo interferometer (https://photos.app.goo.gl/sehvExjcDmok1hRu5) which is not being used. If you are interested in this item please let me know. I can't give it away but we are allowed to trade for comparable value. Regards, Kevin -- Kevin M. McPeak Assistant Professor | LSU Dept. of Chemical Engineering 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication From dradamlegacy at gmail.com Tue Aug 18 17:11:25 2020 From: dradamlegacy at gmail.com (Adam Legacy) Date: Tue, 18 Aug 2020 14:11:25 -0700 Subject: [labnetwork] Conformal electron beam resist coating over 3D structures Message-ID: Hi, We need to coat 3D pyramidal structures (similar to the picture) with 300 nm EBL resist ZEP520A. The height of the pyramid is around 5 microns. The target resists thickness is around 300 nm. The pyramids are on a 100mm diameter wafer and made out of SiO2. Anyone can provide such a service? Do anyone has experience coating similar micro-hills? I spin-coated some shallow 1-micron cavities before with the same resist and it was successful conformal coating. I may need to spray coat or resist evaporation service for this application. What will be suitable for this? Please advise. Best regards, Adam. [image: getImage.jpg] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: getImage.jpg Type: image/jpeg Size: 45154 bytes Desc: not available URL: From J_Hagopian at comcast.net Tue Aug 18 20:52:30 2020 From: J_Hagopian at comcast.net (John Hagopian) Date: Tue, 18 Aug 2020 20:52:30 -0400 Subject: [labnetwork] Conformal electron beam resist coating over 3D structures In-Reply-To: References: Message-ID: <740DD42E-DECC-4B43-8CA7-92812B0693AC@comcast.net> Hi Adam How did you make these, we are interested in your process? Will ask my process guys if they have any ideas on how to coat. John > On Aug 18, 2020, at 5:11 PM, Adam Legacy wrote: > > Hi, > We need to coat 3D pyramidal structures (similar to the picture) with 300 nm EBL resist ZEP520A. The height of the pyramid is around 5 microns. The target resists thickness is around 300 nm. The pyramids are on a 100mm diameter wafer and made out of SiO2. > Anyone can provide such a service? Do anyone has experience coating similar micro-hills? I spin-coated some shallow 1-micron cavities before with the same resist and it was successful conformal coating. I may need to spray coat or resist evaporation service for this application. What will be suitable for this? > Please advise. > Best regards, > Adam. > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork From hathaway at cns.fas.harvard.edu Wed Aug 19 08:53:07 2020 From: hathaway at cns.fas.harvard.edu (Hathaway, Malcolm R) Date: Wed, 19 Aug 2020 12:53:07 +0000 Subject: [labnetwork] Conformal electron beam resist coating over 3D structures In-Reply-To: References: Message-ID: Hi Adam, Do you mean conformal, or planarizing? I would expect most resists/liquids to cover the surface in a level film (i.e. planarizing), with the tips extending out of the resist layer, perhaps getting some coating. Or do you want a truly conformal coating, like you would expect from ALD deposition? What is your ultimate goal, and your next step in the process? Mac ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Adam Legacy Sent: Tuesday, August 18, 2020 5:11 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Conformal electron beam resist coating over 3D structures Hi, We need to coat 3D pyramidal structures (similar to the picture) with 300 nm EBL resist ZEP520A. The height of the pyramid is around 5 microns. The target resists thickness is around 300 nm. The pyramids are on a 100mm diameter wafer and made out of SiO2. Anyone can provide such a service? Do anyone has experience coating similar micro-hills? I spin-coated some shallow 1-micron cavities before with the same resist and it was successful conformal coating. I may need to spray coat or resist evaporation service for this application. What will be suitable for this? Please advise. Best regards, Adam. [getImage.jpg] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: getImage.jpg Type: image/jpeg Size: 45154 bytes Desc: getImage.jpg URL: From orad at reshef.ca Wed Aug 19 12:12:29 2020 From: orad at reshef.ca (Orad Reshef) Date: Wed, 19 Aug 2020 12:12:29 -0400 Subject: [labnetwork] Conformal electron beam resist coating over 3D structures In-Reply-To: References: Message-ID: Dear Adam, I don't have a direct answer to your question, but I have a lead. You should try contacting the authors of this paper: https://science.sciencemag.org/content/349/6254/1310.abstract They do a lot of great fab, but in this paper in particular they are able to nanopattern gold nanostructures on a very "hilly" substrate. Probably they needed to have a conformal resist on their structure before getting started. I remember meeting one of them at a conference and they said it was extremely extremely challenging, so likely they have 1 or 2 experiences that might benefit your process. Orad Orad Reshef, PhD D?partement de physique | Department of Physics Universit? d?Ottawa | University of Ottawa boydnlo.ca | reshef.ca On Wed, Aug 19, 2020 at 11:47 AM Hathaway, Malcolm R < hathaway at cns.fas.harvard.edu> wrote: > Hi Adam, > > Do you mean conformal, or planarizing? I would expect most > resists/liquids to cover the surface in a level film (i.e. planarizing), > with the tips extending out of the resist layer, perhaps getting *some *coating. > Or do you want a truly conformal coating, like you would expect from ALD > deposition? > > What is your ultimate goal, and your next step in the process? > > > Mac > ------------------------------ > *From:* labnetwork-bounces at mtl.mit.edu > on behalf of Adam Legacy > *Sent:* Tuesday, August 18, 2020 5:11 PM > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Conformal electron beam resist coating over 3D > structures > > Hi, > We need to coat 3D pyramidal structures (similar to the picture) with 300 > nm EBL resist ZEP520A. The height of the pyramid is around 5 microns. The > target resists thickness is around 300 nm. The pyramids are on a 100mm > diameter wafer and made out of SiO2. > Anyone can provide such a service? Do anyone has experience > coating similar micro-hills? I spin-coated some shallow 1-micron cavities > before with the same resist and it was successful conformal coating. I may > need to spray coat or resist evaporation service for this application. What > will be suitable for this? > Please advise. > Best regards, > Adam. > > [image: getImage.jpg] > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: getImage.jpg Type: image/jpeg Size: 45154 bytes Desc: not available URL: From kamal.yadav at gmail.com Wed Aug 19 16:39:13 2020 From: kamal.yadav at gmail.com (Kamal Yadav) Date: Wed, 19 Aug 2020 13:39:13 -0700 Subject: [labnetwork] Conformal electron beam resist coating over 3D structures In-Reply-To: References: Message-ID: Hi Adam, Spray coating does make sense. For something like AZ 9260, 520 Cps, diluted with acetone 90%, you need atleast few tens of micron trench depth to have conformal coating. Less trench depth than that spray works as if spin coated with this resist and dilution. Now your case is different. The resist is thinner or with lower viscosity and you have a hill instead of trench, both of which may work in your favor. I would check with SUSS Microtec or similar vendor for this application. Also dry resist film application may damage your features and may not work as well, but worth looking into, I think. Do you need conformal coating or just protect the features, that will also be critical to understand. Thanks, Kamal On Tue, Aug 18, 2020 at 5:15 PM Adam Legacy wrote: > Hi, > We need to coat 3D pyramidal structures (similar to the picture) with 300 > nm EBL resist ZEP520A. The height of the pyramid is around 5 microns. The > target resists thickness is around 300 nm. The pyramids are on a 100mm > diameter wafer and made out of SiO2. > Anyone can provide such a service? Do anyone has experience > coating similar micro-hills? I spin-coated some shallow 1-micron cavities > before with the same resist and it was successful conformal coating. I may > need to spray coat or resist evaporation service for this application. What > will be suitable for this? > Please advise. > Best regards, > Adam. > > [image: getImage.jpg] > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Thanks, Kamal -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: getImage.jpg Type: image/jpeg Size: 45154 bytes Desc: not available URL: From scholvin at mit.edu Wed Aug 19 23:48:54 2020 From: scholvin at mit.edu (Jorg Scholvin) Date: Thu, 20 Aug 2020 03:48:54 +0000 Subject: [labnetwork] Laser micromachining needs Message-ID: <46910e981aad46aa976da0062d2f2803@oc11expo12.exchange.mit.edu> Hi Labnetwork: We have recently gotten a couple of requests from users at MIT.nano for laser micromachining -- ablating holes through pyrex, Si, or AlN substrates. We currently don't have suitable capabilities. If you offer remote/staff-run services, or if you know of a company that offers capabilities, we'd love to know and refer our researchers that way. Thanks! -Jorg -------------- next part -------------- An HTML attachment was scrubbed... URL: From jhub at dtu.dk Thu Aug 20 08:32:43 2020 From: jhub at dtu.dk (=?iso-8859-1?Q?J=F6rg_H=FCbner?=) Date: Thu, 20 Aug 2020 12:32:43 +0000 Subject: [labnetwork] Laser micromachining needs In-Reply-To: <46910e981aad46aa976da0062d2f2803@oc11expo12.exchange.mit.edu> References: <46910e981aad46aa976da0062d2f2803@oc11expo12.exchange.mit.edu> Message-ID: Hi Jorg Hope that all is running well for you. We have these capabilities but I do not know how easy it is to ship the stuff forth and back across the big pond. If this is an option for you we can provide you with our detailed capabilities; we drilling holes in Si, SiO2 and Pyrex on a regular bases. Best J?rg J?rg H?bner, Ph.D. Director DTU Nanolab National Center for Nanofabrication and Characterization Technical University of Denmark [http://www.dtu.dk/images/DTU_email_logo_01.gif] DTU Nanolab ?rstedsPlads Building 347 2800 Kgs Lyngby Direct +45 4525 5762 Mobile +45 22785157 jhub at .dtu.dk www.nanolab.dtu.dk From: labnetwork-bounces at mtl.mit.edu On Behalf Of Jorg Scholvin Sent: 20. august 2020 05:49 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Laser micromachining needs Hi Labnetwork: We have recently gotten a couple of requests from users at MIT.nano for laser micromachining -- ablating holes through pyrex, Si, or AlN substrates. We currently don't have suitable capabilities. If you offer remote/staff-run services, or if you know of a company that offers capabilities, we'd love to know and refer our researchers that way. Thanks! -Jorg -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 1918 bytes Desc: image001.png URL: From michael.martin at louisville.edu Thu Aug 20 10:38:24 2020 From: michael.martin at louisville.edu (Martin,Michael David) Date: Thu, 20 Aug 2020 14:38:24 +0000 Subject: [labnetwork] Laser micromachining needs In-Reply-To: <46910e981aad46aa976da0062d2f2803@oc11expo12.exchange.mit.edu> References: <46910e981aad46aa976da0062d2f2803@oc11expo12.exchange.mit.edu> Message-ID: Hi Jorg, You might talk to these folks https://www.ipgphotonics.com/en I believe they can do micro-machining at a number of wavelengths. Fiber Laser Sources & Solutions | IPG Photonics IPG Photonics is the leading developer and manufacturer of high-performance fiber lasers and amplifiers for diverse applications in numerous markets. IPG Photonics' diverse lines of low, medium and high-power lasers and amplifiers are used in materials processing, communications, entertainment, medical, biotechnology, scientific and advanced applications. www.ipgphotonics.com Regards, Michael ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Jorg Scholvin Sent: Wednesday, August 19, 2020 11:48 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Laser micromachining needs CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Hi Labnetwork: We have recently gotten a couple of requests from users at MIT.nano for laser micromachining -- ablating holes through pyrex, Si, or AlN substrates. We currently don?t have suitable capabilities. If you offer remote/staff-run services, or if you know of a company that offers capabilities, we?d love to know and refer our researchers that way. Thanks! -Jorg -------------- next part -------------- An HTML attachment was scrubbed... URL: From caleb.a.berry at maine.edu Thu Aug 20 12:19:48 2020 From: caleb.a.berry at maine.edu (Caleb Berry) Date: Thu, 20 Aug 2020 12:19:48 -0400 Subject: [labnetwork] Laser micromachining needs In-Reply-To: <46910e981aad46aa976da0062d2f2803@oc11expo12.exchange.mit.edu> References: <46910e981aad46aa976da0062d2f2803@oc11expo12.exchange.mit.edu> Message-ID: Hi Jorg, We have gotten laser hole drilling in Pyrex from AdValue Tech. They also machine many other substrates. Their website is: https://www.advaluetech.com/laser/ Regards, Caleb On Thu, Aug 20, 2020 at 8:15 AM Jorg Scholvin wrote: > Hi Labnetwork: > > > > We have recently gotten a couple of requests from users at MIT.nano for > laser micromachining -- ablating holes through pyrex, Si, or AlN substrates. > > > > We currently don?t have suitable capabilities. If you offer > remote/staff-run services, or if you know of a company that offers > capabilities, we?d love to know and refer our researchers that way. > > > > Thanks! > > > > -Jorg > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From telemann0 at yahoo.com Thu Aug 20 12:22:00 2020 From: telemann0 at yahoo.com (Joonhyeong Park) Date: Thu, 20 Aug 2020 16:22:00 +0000 (UTC) Subject: [labnetwork] Laser micromachining needs In-Reply-To: <46910e981aad46aa976da0062d2f2803@oc11expo12.exchange.mit.edu> References: <46910e981aad46aa976da0062d2f2803@oc11expo12.exchange.mit.edu> Message-ID: <2024356429.3790662.1597940520837@mail.yahoo.com> Hello Jorg, You may contact Translume (https://www.translume.com/index.php/products). They made a 1-3 um holes through fused silica wafers for me. Regards, Joon ParkBirck Nanotechnology CenterPurude University On Thursday, August 20, 2020, 8:16:06 AM EDT, Jorg Scholvin wrote: Hi Labnetwork: ? We have recently gotten a couple of requests from users at MIT.nano for laser micromachining -- ablating holes through pyrex, Si, or AlN substrates. ? We currently don?t have suitable capabilities. If you offer remote/staff-run services, or if you know of a company that offers capabilities, we?d love to know and refer our researchers that way. ? Thanks! ? -Jorg _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Thu Aug 20 13:39:37 2020 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Thu, 20 Aug 2020 17:39:37 +0000 Subject: [labnetwork] Laser micromachining needs In-Reply-To: <46910e981aad46aa976da0062d2f2803@oc11expo12.exchange.mit.edu> References: <46910e981aad46aa976da0062d2f2803@oc11expo12.exchange.mit.edu> Message-ID: Here is another contact that one of our clients use. Travis Wade, Ph.D. Evolve Diamonds Ph. (978) 434-2283 www.EvolveDiamonds.com Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jorg Scholvin Sent: Wednesday, August 19, 2020 11:49 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Laser micromachining needs CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Hi Labnetwork: We have recently gotten a couple of requests from users at MIT.nano for laser micromachining -- ablating holes through pyrex, Si, or AlN substrates. We currently don't have suitable capabilities. If you offer remote/staff-run services, or if you know of a company that offers capabilities, we'd love to know and refer our researchers that way. Thanks! -Jorg -------------- next part -------------- An HTML attachment was scrubbed... URL: From scholvin at mit.edu Thu Aug 20 23:05:19 2020 From: scholvin at mit.edu (Jorg Scholvin) Date: Fri, 21 Aug 2020 03:05:19 +0000 Subject: [labnetwork] Laser micromachining needs In-Reply-To: <46910e981aad46aa976da0062d2f2803@oc11expo12.exchange.mit.edu> References: <46910e981aad46aa976da0062d2f2803@oc11expo12.exchange.mit.edu> Message-ID: Hi Labnetwork: I want to thank everyone for all the suggestions you shared, I must say I was overwhelmed by the speed and quantity of all the responses and recommendations, most of which were also shared here. Thank you so much! We've been getting questions about laser capabilities for a while, and it's terrific to now have a strong list of vendors and lab services that we can point our researchers towards. Best, -Jorg From: labnetwork-bounces at mtl.mit.edu On Behalf Of Jorg Scholvin Sent: Wednesday, August 19, 2020 11:49 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Laser micromachining needs Hi Labnetwork: We have recently gotten a couple of requests from users at MIT.nano for laser micromachining -- ablating holes through pyrex, Si, or AlN substrates. We currently don't have suitable capabilities. If you offer remote/staff-run services, or if you know of a company that offers capabilities, we'd love to know and refer our researchers that way. Thanks! -Jorg -------------- next part -------------- An HTML attachment was scrubbed... URL: From price.798 at osu.edu Fri Aug 21 10:21:52 2020 From: price.798 at osu.edu (Price, Aimee) Date: Fri, 21 Aug 2020 14:21:52 +0000 Subject: [labnetwork] MAEBL 2020 meeting 2 (virtual) Message-ID: Good morning Lab Network Community, MAEBL 2020 (Meeting for Advanced Ebeam Lithography) is virtual for 2020, as a series of 6 monthly meetings. This meeting is meant to be an information sharing, networking, and community building event for electron beam lithography tool owners and users. If you have any questions about the meeting or MAEBL in general, please reach out to me. We had over 50 active participants from 6 countries in meeting #1. The second virtual meeting takes place on Thursday, August 27, 2020, from 3 PM to 5 PM EDT. Meeting #2 is focused on advanced negative resist options for EBL. The first presentation will be on a new option for HSQ supply chain and the second on new metal-organic resists. We hope that you and/or your team can join the MAEBL community, registration is still open. Register and see the entire program at www.maebl.org. We're happy to answer any questions you might have. Best, Aimee, Kevin and Gerald -- Aimee Price Co-Founder and President Kevin Lister, Ph.D. Co-Founder and Vice President Gerald G. Lopez, Ph.D. Co-Founder and Board Chair Register at www.maebl.org Sr. Research Associate The Ohio State University Nanotech West Lab Institute for Materials Research 1381 Kinnear Road Suite 100 Columbus, OH 43212 614-292-2753 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Mon Aug 24 11:34:12 2020 From: rmorrison at draper.com (Morrison, Richard H., Jr) Date: Mon, 24 Aug 2020 15:34:12 +0000 Subject: [labnetwork] mask cleaner Message-ID: <10aa6a71be614236805d632053a8bb0c@draper.com> HI everyone, Draper is looking for a new mask cleaner, we have a Hamatech (now Suss) mask cleaner we also have Ultra-T mask and a substrate cleaner. Anybody use either Suss mask cleaner or Ultra-T mask cleaner looking for pro and con, you can call my cell listed below or send me an email direct at rmorrison at draper.com Thanks in advance Rick Richard H. Morrison Principal Member of the Technical Staff Draper 555 Technology Square Cambridge, MA 02139-3573 Work 617-258-3420 Cell 508-930-3461 www.draper.com ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From gewatson at seas.upenn.edu Wed Aug 26 08:11:48 2020 From: gewatson at seas.upenn.edu (Pat Watson) Date: Wed, 26 Aug 2020 08:11:48 -0400 Subject: [labnetwork] Director Position at the U Penn Quattrone Nanofabrication Facility Message-ID: <2EAD97CC-51D6-40E4-8E7E-1076319C6454@seas.upenn.edu> Hello All, We are looking for a new Director of the Quattrone Nanofabrication Facility, our research cleanroom at U Penn. If you want to know more, please follow this link . Thanks, George Patrick Watson (Pat), Ph.D. Director of User Programs Singh Center for Nanotechnology University of Pennsylvania MANTH, an NSF National Nanotechnology Coordinated Infrastructure Site 3205 Walnut Street Philadelphia, PA 19104 gewatson at seas.upenn.edu 215 573 2251 -------------- next part -------------- An HTML attachment was scrubbed... URL: From na2661 at columbia.edu Fri Aug 28 11:03:53 2020 From: na2661 at columbia.edu (Nava Ariel-Sternberg) Date: Fri, 28 Aug 2020 11:03:53 -0400 Subject: [labnetwork] Adding TEOS to LPCVD furnace Message-ID: <00bc01d67d4c$721da420$5658ec60$@columbia.edu> Happy Friday everyone, I hope you and your families are doing well in these weird times. We were asked to look into adding a TEOS capability to our LPCVD furnace. Has any of you done it? Could you advise on the main steps and things to look out for? Thanks and stay healthy (and happy as much as possible), Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs Columbia University CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Fri Aug 28 15:03:12 2020 From: rmorrison at draper.com (Morrison, Richard H., Jr) Date: Fri, 28 Aug 2020 19:03:12 +0000 Subject: [labnetwork] Adding TEOS to LPCVD furnace In-Reply-To: <00bc01d67d4c$721da420$5658ec60$@columbia.edu> References: <00bc01d67d4c$721da420$5658ec60$@columbia.edu> Message-ID: <8452bf94ca2a412d9e6cc37cd8229c6c@draper.com> When I was at Kopin we used LPCVD TEOS, it is a maintenance hog. Make sure you have a trap on the pump line before you hit the pumps, needs to be cleaned often and it is a sickly sweet smell, like ethanol. Make sure you use a tube liner to protect the tube. Lots of flakes on the vacuum side and pay attention to the tube output it likes to clog there. We used a roots blower and every year it needed to be rebuilt due to TEOS deposition. One the updide TEOS is a great material, we used to densify it with a long anneal at say 1000c. Hopes this helps Rick Richard H. Morrison Principal Member of the Technical Staff Draper 555 Technology Square Cambridge, MA 02139-3573 Work 617-258-3420 Cell 508-930-3461 www.draper.com From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg Sent: Friday, August 28, 2020 11:04 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Adding TEOS to LPCVD furnace Happy Friday everyone, I hope you and your families are doing well in these weird times. We were asked to look into adding a TEOS capability to our LPCVD furnace. Has any of you done it? Could you advise on the main steps and things to look out for? Thanks and stay healthy (and happy as much as possible), Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs Columbia University CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From carsen at stanford.edu Fri Aug 28 15:57:55 2020 From: carsen at stanford.edu (Carsen Kline) Date: Fri, 28 Aug 2020 19:57:55 +0000 Subject: [labnetwork] Adding TEOS to LPCVD furnace In-Reply-To: <8452bf94ca2a412d9e6cc37cd8229c6c@draper.com> References: <00bc01d67d4c$721da420$5658ec60$@columbia.edu> <8452bf94ca2a412d9e6cc37cd8229c6c@draper.com> Message-ID: Hi Nava: I'll echo Rick's maintenance experience for ours at Stanford. We did a conversion a number of years back and on top of what Rick mentions, our MFC has had trouble stabilizing and suffers clogs every so often. The whole line plus MFC need to be heated. We have a plasma trap at the tube outlet to try and react out some of the TEOS before it gets to the pump. It's effective, but that in itself needs to be cleaned out periodically, and it's messy. We haven't gotten smart enough to buy our own TEOS ampoules, so we're paying a hefty rental fee for the one in service plus one spare. If you buy your own, you'll need to arrange fills with your friendly supplier and make sure that the heater was made for it. Happy Friday, Carsen Carsen Kline Lab Operations Manager Stanford Nanofabrication Facility (650)724-8214 http://snf.stanford.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr Sent: Friday, August 28, 2020 12:03 PM To: Nava Ariel-Sternberg ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Adding TEOS to LPCVD furnace When I was at Kopin we used LPCVD TEOS, it is a maintenance hog. Make sure you have a trap on the pump line before you hit the pumps, needs to be cleaned often and it is a sickly sweet smell, like ethanol. Make sure you use a tube liner to protect the tube. Lots of flakes on the vacuum side and pay attention to the tube output it likes to clog there. We used a roots blower and every year it needed to be rebuilt due to TEOS deposition. One the updide TEOS is a great material, we used to densify it with a long anneal at say 1000c. Hopes this helps Rick Richard H. Morrison Principal Member of the Technical Staff Draper 555 Technology Square Cambridge, MA 02139-3573 Work 617-258-3420 Cell 508-930-3461 www.draper.com From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg Sent: Friday, August 28, 2020 11:04 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Adding TEOS to LPCVD furnace Happy Friday everyone, I hope you and your families are doing well in these weird times. We were asked to look into adding a TEOS capability to our LPCVD furnace. Has any of you done it? Could you advise on the main steps and things to look out for? Thanks and stay healthy (and happy as much as possible), Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs Columbia University CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From devito.richard at gmail.com Fri Aug 28 16:03:44 2020 From: devito.richard at gmail.com (RIchard DeVito) Date: Fri, 28 Aug 2020 16:03:44 -0400 Subject: [labnetwork] Adding TEOS to LPCVD furnace In-Reply-To: <8452bf94ca2a412d9e6cc37cd8229c6c@draper.com> References: <00bc01d67d4c$721da420$5658ec60$@columbia.edu> <8452bf94ca2a412d9e6cc37cd8229c6c@draper.com> Message-ID: Nava Iwould add to Rich's comment that there are several companies, MKS being one of them, that make traps specifically for TEOS effluent... Rich DeViito On Fri, Aug 28, 2020 at 3:37 PM Morrison, Richard H., Jr < rmorrison at draper.com> wrote: > When I was at Kopin we used LPCVD TEOS, it is a maintenance hog. Make sure > you have a trap on the pump line before you hit the pumps, needs to be > cleaned often and it is a sickly sweet smell, like ethanol. Make sure you > use a tube liner to protect the tube. Lots of flakes on the vacuum side and > pay attention to the tube output it likes to clog there. We used a roots > blower and every year it needed to be rebuilt due to TEOS deposition. > > > > One the updide TEOS is a great material, we used to densify it with a long > anneal at say 1000c. > > > > Hopes this helps > > > > Rick > > > > > > Richard H. Morrison > > Principal Member of the Technical Staff > > Draper > > 555 Technology Square > > Cambridge, MA > > 02139-3573 > > > > Work 617-258-3420 > > Cell 508-930-3461 > > www.draper.com > > > > > > > > > > *From:* labnetwork-bounces at mtl.mit.edu [mailto: > labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Nava Ariel-Sternberg > *Sent:* Friday, August 28, 2020 11:04 AM > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Adding TEOS to LPCVD furnace > > > > Happy Friday everyone, > > I hope you and your families are doing well in these weird times. > > We were asked to look into adding a TEOS capability to our LPCVD furnace. > > Has any of you done it? Could you advise on the main steps and things to > look out for? > > Thanks and stay healthy (and happy as much as possible), > > Nava > > > > > > Nava Ariel-Sternberg, Ph.D. > > Director of CNI Shared Labs > > Columbia University > > CEPSR/MC 8903 > > 530 west 120th st. NY > > NY 10027 > > Office: 212-8549927 > > Cell: 201-5627600 > > > > > ------------------------------ > Notice: This email and any attachments may contain proprietary (Draper > non-public) and/or export-controlled information of Draper. If you are not > the intended recipient of this email, please immediately notify the sender > by replying to this email and immediately destroy all copies of this email. > ------------------------------ > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From j_hagopian at comcast.net Mon Aug 31 18:19:38 2020 From: j_hagopian at comcast.net (JOHN HAGOPIAN) Date: Mon, 31 Aug 2020 18:19:38 -0400 (EDT) Subject: [labnetwork] Job opportunity - Experience with CNT growth and functionalization Message-ID: <1952303641.12288.1598912379191@connect.xfinity.com> Full or part time position in Maryland Developing carbon nanotube based chemical and biological sensors. Must have experience in this field. Appreciate relevant referrals. Materials Science, Bio-engineering reply to LambdaConsulting at comcast.net -------------- next part -------------- An HTML attachment was scrubbed... URL: